摘要:
After formation of a groove in a silicon oxide film, a Pt film is formed inside of the groove by electroplating using a conductive underlying film, which has been formed in advance below the silicon oxide film, as a cathode electrode. The silicon oxide film is then removed by etching, followed by dry etching of the conductive underlying film with the Pt film as a mask, whereby a lower electrode of a capacitor is formed from the Pt film and the conductive underlying film which has remained below the Pt film.
摘要:
In a DRAM having a capacitor-over-bitline structure in which the capacitive insulating film of an information storing capacitive element C is formed of a high dielectric material such as Ta2O5 (tantalum oxide) film 46, the portions of bit lines BL and first-layer interconnect lines 23 to 26 of a peripheral circuit which are in contact with at least an underlying silicon oxide film 28 are formed of a W film, the bit lines BL and the interconnect lines 23 to 26 being arranged below the information storing capacitive element C, whereby the adhesion at the interface between the bit lines BL and the interconnect lines 23 to 26 and the silicon oxide film is improved in terms of high-temperature heat treatment to be performed when the capacitive insulating film is being formed.
摘要翻译:在具有电容器的位线结构的DRAM中,信息存储电容元件C的电容绝缘膜由诸如Ta 2 O 5(氧化钽)膜46的高电介质材料形成,位线BL和第一 - 与W膜形成的与外部电路至少底层的氧化硅膜28接触的层间布线23〜26,位线BL和布线23〜26配置在信息存储电容元件C的下方 从而在形成电容绝缘膜时进行的高温热处理方面提高了位线BL与布线23〜26之间界面处的粘附性和氧化硅膜。
摘要:
Two metal plates 1a, 1b are projection welded together using a truncated conical projection 12 on a first one of the plates having a spherical end surface. The plates are pressed together through the projection, and a welding current pulse is applied which reaches a maximum value in less than 2 milli-seconds. The shape and dimensional limitations of the projection coupled with the high amplitude, short duration current spike result in a thin welding nugget 9 and prevent any thermal distortion of the outer plate surface due to localized overheating.
摘要:
A flexible exhaust coupling comprising first and second passage elements, the first passage element being fluid-connected to the engine for receiving the exhaust gases to be discharged from an automobile engine through the second passage element, and a ring seal member having a spherical sealing surface and carried by one of the first and second passage elements, the other of the first and second passage elements having a mating spherical surface. The first and second passage elements are resiliently urged by springs in a direction close towards each other to permit the spherical sealing surface to gas-tightly and slidingly contact the mating spherical surface thereby constituting a resiliently yieldable joint between the first and second passage elements, and at least one air channel is defined exteriorly of the ring seal member for the passage of cooling air to forcibly cool the ring seal member. The inlet and an outlet of the channel are located and opened at respective regions where a pressure difference can be developed when an automobile vehicle moves in one direction such that wind induced by the movement of the vehicle can flow through the channel from the inlet to the outlet by the effect of the pressure differential therebetween.
摘要:
[Problem to be Solved]To enhance the performance for separation of oil mist from blow-by gas.[Solution]A filter element 13 which is to be attached to an oil separator unit 3 includes a core 31. This core is a double tube having an internal cylindrical member 34 and an external cylindrical member 35, and a space between the internal cylindrical member and the external cylindrical member is used as a separation chamber 36. An injection hole 39 for injecting blow-by gas while increasing its flow velocity is provided in the internal cylindrical member. A surface which is an inner wall surface of the external cylindrical member and which faces the injection hole is a spraying surface onto which the blow-by gas injected from the injection hole is sprayed. Moreover, an opening for oil discharge from which oil OL condensed on the spraying surface is discharged, and an opening for discharge from which the blow-by gas from which oil mist has been separated is discharged are provided in the core.
摘要:
A semiconductor device may include, but is not limited to: a semiconductor substrate; a memory capacitor; and a first compensation capacitor. The semiconductor substrate has at least first and second regions. The memory capacitor is positioned over the first region. The memory capacitor may include, but is not limited to: a first lower electrode; and a first dielectric film covering inner and outer surfaces of the first lower electrode. The first compensation capacitor is positioned over the second region. The first compensation capacitor includes, but is not limited to: a second lower electrode; a second dielectric film covering an inner surface of the second lower electrode; and a first insulating film covering an outer surface of the second lower electrode.
摘要:
An accurate determination of deterioration of a NOx storage reduction catalyst. A supply device supplies a reducing agent to the NOx catalyst to change an air fuel ratio of an exhaust gas passing through the NOx catalyst, an NH3 detection device detects NH3 in the exhaust gas at the downstream side of the NOx catalyst, a control device adjusts an amount of the reducing agent so that the air fuel ratio of the exhaust gas becomes a predetermined rich air fuel ratio, and a determination device makes a determination that the NOx catalyst has deteriorated, when a detected value of the NH3 detection device becomes equal to or greater than a threshold value, at the time of supplying the reducing agent while adjusting the amount of the reducing agent so that the air fuel ratio of the exhaust gas becomes the predetermined rich air fuel ratio.
摘要:
[Problem to be Solved]To enhance the performance for separation of oil mist from blow-by gas.[Solution]A filter element 13 which is to be attached to an oil separator unit 3 includes a core 31. This core is a double tube having an internal cylindrical member 34 and an external cylindrical member 35, and a space between the internal cylindrical member and the external cylindrical member is used as a separation chamber 36. An injection hole 39 for injecting blow-by gas while increasing its flow velocity is provided in the internal cylindrical member. A surface which is an inner wall surface of the external cylindrical member and which faces the injection hole is a spraying surface onto which the blow-by gas injected from the injection hole is sprayed. Moreover, an opening for oil discharge from which oil OL condensed on the spraying surface is discharged, and an opening for discharge from which the blow-by gas from which oil mist has been separated is discharged are provided in the core.
摘要:
An internal combustion engine, in which an NOX selective reducing catalyst (15) is arranged inside an engine exhaust passage, and aqueous urea stored in an aqueous urea tank (20) is fed to the NOX selective reducing catalyst (15) to selectively reduce the NOX. The aqueous urea tank (20) comprises a main tank (20a) and a sub tank (20b) arranged inside the main tank (20a). The aqueous urea in the sub tank (20b) is sent to an aqueous urea feed valve (17). When the aqueous urea tank (20) should be refilled with aqueous urea, the sub tank (20b) is refilled with aqueous urea. It is detected by a level sensor (40) if the aqueous urea in the aqueous urea tank (20) is refilled. When it is judged that the NOX purification rate falls below an allowable level at the time of engine operation right after the aqueous urea in the aqueous urea tank (20) has been refilled, it is judged that the refilled aqueous urea is abnormal.
摘要:
A determination is made more simply as to a malfunction of a low pressure EGR device that supplies an EGR gas from a low pressure EGR passage connecting between an exhaust passage at a location downstream of a turbine and an intake passage. Provision is made for a high pressure EGR device that connects between the exhaust passage at a location upstream of the turbine and the intake passage, the low pressure EGR device that connects between the exhaust passage at a location downstream of the turbine and the intake passage, and a detection unit that detects a malfunction of the low pressure EGR device from the degree of opening of a high pressure EGR valve at the time when the EGR gas is supplied from both the high pressure EGR device and the low pressure EGR device, and at the time when the high pressure EGR valve of the high pressure EGR device is controlled in a feedback manner so as to direct an amount of EGR gas in a cylinder toward a target range of the amount of EGR gas, while carrying out open loop control of a low pressure EGR valve of the low pressure EGR device.