公开(公告)号：US5141312A

公开(公告)日：1992-08-25

申请号：US531721

申请日：1990-06-01

Applicant: Richard B. Thompson ,  Michael Levine

Inventor： Richard B. Thompson ,  Michael Levine

IPC: G01J1/04 ,  G01J1/42 ,  G01N21/64

CPC classification number: G01J1/04 ,  G01J1/0407 ,  G01J1/0411 ,  G01J1/0425 ,  G01J1/044 ,  G01J1/0455 ,  G01N21/64 ,  G01J1/0488 ,  G01J2001/4242 ,  G01N2021/6463 ,  G01N2021/6478 ,  G01N2021/6484

Abstract: A photoluminescence sensor for detecting a photoluminescent light from a toluminescent material is disclosed. In a preferred embodiment the photoluminescence sensor comprises: a source of light; a concave mirror having at least one perforation for passing the source light through the at least one perforation; an optical waveguide having proximal and distal ends with the photoluminescent material being disposed at the distal end; an objective for directing the source light into the proximal end of the waveguide; an objective for receiving photoluminescent light and for focusing the photoluminescent light onto the perforated concave mirror; a liquid filter for passing the photoluminescent light reflected from the perforated concave mirror to a detector to detect the photoluminescent light. The sensor can also include a chopper disposed at the output end of the objective for modulating the light source at a select frequency and a lock-in amplifier tuned to measure the output from the detector at the select frequency.

Abstract translation: 公开了一种用于检测来自光致发光材料的光致发光的光致发光传感器。 在优选实施例中，光致发光传感器包括：光源; 具有至少一个用于使源光穿过所述至少一个穿孔的穿孔的凹面镜; 具有光致发光材料的近端和远端的光波导被设置在远端; 将源光引导到波导的近端的目的; 用于接收光致发光光并将光致发光光聚焦到穿孔凹面镜上的目的; 液体过滤器，用于将从穿孔凹面镜反射的光致发光传递到检测器以检测光致发光光。 传感器还可以包括设置在物镜的输出端的斩波器，用于以选择频率调制光源，并且调节锁定放大器以在选择频率下测量来自检测器的输出。

公开(公告)号：US4597665A

公开(公告)日：1986-07-01

申请号：US610101

申请日：1984-05-14

Applicant: Lee K. Galbraith ,  Karel Urbanek

Inventor： Lee K. Galbraith ,  Karel Urbanek

IPC: G01N21/88 ,  G01J1/02 ,  G01N21/84 ,  G01N21/894 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC classification number: G01J1/04 ,  G01J1/0422 ,  G01J1/0455 ,  G01N21/894 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/474 ,  G01N2201/064 ,  G01N2201/112

Abstract: A flaw detector for optically transmissive surfaces having a first light collector above the surface and a second light collector below the surface. A scanning light beam is directed into the first light collector through a beam entrance aperture and only light scattered from the surface is collected. Light specularly reflected from the surface exits the collector through the beam entrance aperture. Similarly, light passing through the surface enters the second collector, but the axial beam component is dumped through an opening in the second collector, while only diffracted light is collected. Preferably, two-stage light collectors are used with the first stage admitting the beam and generating a scattered or diffracted beam component, with the second stage admitting the scattered or diffracted beam component and integrating the component over a collection surface and sampling the integrated portion at a photoelectric detector. An electrical output signal from the detector may be displayed.

Abstract translation: 一种用于光学透射表面的探伤仪，其具有在表面上方的第一光收集器和在该表面下方的第二光收集器。 扫描光束通过光束入射孔被引导到第一光收集器中，并且仅收集从表面散射的光。 从表面镜面反射的光通过光束入射孔离开收集器。 类似地，穿过表面的光进入第二集电器，但是轴向光束分量通过第二收集器中的开口倾倒，而仅收集衍射光。 优选地，使用两级集光器，其中第一阶段允许光束并产生散射或衍射光束分量，其中第二阶段允许散射或衍射的光束分量并将分量集成在集合表面上，并将集成部分采样 光电探测器。 可以显示来自检测器的电输出信号。

公开(公告)号：US4279507A

公开(公告)日：1981-07-21

申请号：US69779

申请日：1979-08-27

Applicant: Thomas H. Bulpitt

Inventor： Thomas H. Bulpitt

IPC: G01J1/04 ,  G02B26/10 ,  G02B27/17

CPC classification number: G01J1/04 ,  G01J1/0403 ,  G01J1/0455 ,  G01J1/0466 ,  G02B26/108 ,  G01J1/0271

Abstract: A scanning device adapted to be associated with a radiant energy measuring meter such as a luminance photometer to provide precision linear or angular scanning across an area of an object or a subject being measured without relative movement of the meter or subject. A scanning device which includes an optical assembly having an objective lens and a prism movable as a unit along or about the optical axis portion of light beams reflected or folded by and between the prisms whereby light received by the photometer is on the optical axis of the photometer regardless of the position of the movable optical assembly on the folded optical axis portion. Means are provided for moving the movable optical assembly linearly with respect to the optical axis portion for linear transverse scanning of a subject area or rotatively about said optical axis portion for angular scanning of a subject area. A scanning device for a luminance photometer which provides scanning microphotometric capability as, for example, to determine luminous cross-section of a cathode ray tube display.

Abstract translation: 扫描装置，其适于与诸如亮度光度计的辐射能量测量仪相关联，以在被测量的物体或被摄体的区域上提供精确的线性或角度扫描，而没有所述仪表或被摄体的相对运动。 一种扫描装置，其包括具有物镜的光学组件和可沿着或围绕由棱镜反射或折射的光束的光轴部分作为单元移动的棱镜，由此光度计接收的光在该光学组件的光轴上 无论移动光学组件在折叠的光轴部分上的位置如何，都是光度计。 提供了用于相对于光轴部分线性地移动可移动光学组件以用于对象区域的线性横向扫描或者围绕所述光轴部分旋转地移动可移动光学组件以用于对象区域的角度扫描的装置。 一种用于提供扫描微光度能力的亮度光度计的扫描装置，例如用于确定阴极射线管显示器的发光横截面。

公开(公告)号：US09525267B2

公开(公告)日：2016-12-20

申请号：US14963276

申请日：2015-12-09

Applicant: O-NET COMMUNICATIONS (SHENZHEN) LIMITED

Inventor： Mohammad Azadeh

IPC: H01S5/068 ,  H01S5/0683 ,  H01S5/183 ,  G01J1/42 ,  H01S5/022 ,  H01S5/42

CPC classification number: H01S5/0683 ,  G01J1/0455 ,  G01J1/4257 ,  H01S5/02292 ,  H01S5/02296 ,  H01S5/183 ,  H01S5/423

Abstract: The present patent application provides a vertical cavity surface emitting laser assembly. The vertical cavity surface emitting laser assembly includes a vertical cavity surface emitting laser, optical element and optical detector. The optical element includes an identation. A portion of the output light of the VCSEL passes through the indentation and to the optical detector to be used for power monitoring.

Abstract translation: 本专利申请提供了一种垂直腔表面发射激光组件。 垂直腔表面发射激光器组件包括垂直腔表面发射激光器，光学元件和光学检测器。 光学元件包括标识。 VCSEL的输出光的一部分通过凹陷并且到光学检测器用于功率监视。

公开(公告)号：US20130242479A1

公开(公告)日：2013-09-19

申请号：US13738588

申请日：2013-01-10

Applicant: Inseok YOO ,  Huiseob Byun ,  Jaewook Lee

Inventor： Inseok YOO ,  Huiseob Byun ,  Jaewook Lee

IPC: H05K5/00

CPC classification number: H05K5/0017 ,  G01J1/0407 ,  G01J1/0455 ,  G01J1/4204 ,  H03K17/941 ,  H03K2217/94108 ,  H04M1/026 ,  H04M1/22 ,  H04M2250/12

Abstract: A mobile terminal may be provided that includes a case having a through window formed in front of the case, an optical sensor arranged in the case toward the through window, a glass formed of an opaque material to cover the through window of the case, and a window layer disposed on a behind face of the glass, with a fine hole formed above the optical sensor.

Abstract translation: 可以提供一种移动终端，其包括具有形成在壳体前面的通孔的壳体，布置在通向窗口的壳体中的光学传感器，由不透明材料形成以覆盖壳体的通过窗口的玻璃，以及 设置在玻璃的后表面上的窗口层，在光学传感器上方形成有细孔。

公开(公告)号：US07687762B2

公开(公告)日：2010-03-30

申请号：US12186808

申请日：2008-08-06

Applicant: Naoto Watanabe ,  Daisuke Ichii

Inventor： Naoto Watanabe ,  Daisuke Ichii

IPC: H01J3/14

CPC classification number: G01J1/32 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0455 ,  G03G15/043 ,  G03G15/0435 ,  G03G2215/0404

Abstract: A monitoring device includes a first aperture plate, a second aperture plate, and a photodiode. The first aperture is disposed in a light path of a light beam emitted by a light source and includes a first aperture arranged such that a portion of the light beam having maximum light intensity passes and a reflecting portion that reflects the light beam as a monitoring light beam. The second aperture plate is disposed in a light path of the monitoring light beam and includes a second aperture that shapes a beam diameter of the monitoring light beam. The photodiode receives the monitoring light beam.

Abstract translation: 监测装置包括第一孔板，第二孔板和光电二极管。 第一光圈设置在由光源发射的光束的光路中，并且包括布置成使得具有最大光强度的光束的一部分通过的第一孔和反射光束作为监视光的反射部分 光束。 第二光圈板设置在监视光束的光路中，并且包括形成监视光束的光束直径的第二光圈。 光电二极管接收监控光束。

公开(公告)号：US20080151221A1

公开(公告)日：2008-06-26

申请号：US11588643

申请日：2006-10-27

Applicant: Michael Sogard

Inventor： Michael Sogard

IPC: G01J3/00

CPC classification number: G01J1/429 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0455 ,  G03F7/70558 ,  G03F7/7085

Abstract: A monitoring system for an lithographic system is disclosed. In particular, the monitoring system can be utilized in an extreme ultraviolet lithographic system. In a monitoring system according to the present invention, a plurality of detectors are positioned to receive radiation from a pattern of positions on a mirror that is part of the lithographic system. In some embodiments, the plurality of detectors may be positioned on the mirror. In some embodiments, the plurality of detectors may be positioned behind the mirror and receive radiation through holes formed in the mirror. In some embodiments, radiation from the pattern of positions may be reflected by facets into the detectors.

Abstract translation: 公开了一种用于光刻系统的监视系统。 特别地，监测系统可以用于极紫外光刻系统中。 在根据本发明的监视系统中，多个检测器被定位成接收来自作为光刻系统的一部分的反射镜上的位置图案的辐射。 在一些实施例中，多个检测器可以位于反射镜上。 在一些实施例中，多个检测器可以位于反射镜后面并且接收通过形成在反射镜中的孔的辐射。 在一些实施例中，来自位置图案的辐射可以被小平面反射到检测器中。

公开(公告)号：US20060113929A1

公开(公告)日：2006-06-01

申请号：US11261352

申请日：2005-10-28

Applicant: Robert DeLange ,  Timothy Rowan

Inventor： Robert DeLange ,  Timothy Rowan

IPC: H02P1/54

CPC classification number: G02B21/16 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/044 ,  G01J1/0455 ,  G01J1/0462 ,  G01N21/956 ,  G02B17/06 ,  G02B17/061 ,  G02B21/04

Abstract: A method and apparatus for braking an AC motor in the higher portion of its speed range includes substantially reducing flux before applying reverse torque commands to brake the motor. A DC link bus regulator is employed to prevent increases in bus voltage and frequency.

公开(公告)号：US20050237511A1

公开(公告)日：2005-10-27

申请号：US11065103

申请日：2005-02-25

Applicant: Koichi Takahashi ,  Yoshinori Arimoto

Inventor： Koichi Takahashi ,  Yoshinori Arimoto

IPC: G01B11/26 ,  G01J1/00 ,  G01J1/06 ,  G01S3/782 ,  G01S3/784 ,  G02B26/10 ,  G02B27/14

CPC classification number: G02B27/108 ,  G01J1/0266 ,  G01J1/0414 ,  G01J1/0451 ,  G01J1/0455 ,  G01S3/784 ,  G02B26/101 ,  G02B27/126 ,  G02B27/143

Abstract: The present invention relates to an optical beam detection device for detecting deviation in the optical axis of light beams from a reference optical axis, the optical beam detection device provided with a converging member for converging the light beams; a light receiving surface that is disposed near the position where light beams that have an optical axis that coincides with the reference optical axis are converged by the converging member; an optical path deflector for deflecting light beams that have an optical axis that deviates from the reference optical axis, after they have passed through the converging member; and a light detecting element for detecting the light beams that have been deflected by the optical path deflector.

Abstract translation: 光束检测装置技术领域本发明涉及一种光束检测装置，其用于检测来自基准光轴的光束的光轴的偏离，所述光束检测装置设置有用于会聚该光束的会聚部件; 设置在与基准光轴一致的光轴的位置附近的受光面被会聚部件会聚; 用于偏转光束的光路偏转器，其具有偏离参考光轴的光轴，在它们已经通过会聚构件之后; 以及光检测元件，用于检测由光路偏转器偏转的光束。

公开(公告)号：US06534768B1

公开(公告)日：2003-03-18

申请号：US09699702

申请日：2000-10-30

Applicant: Emil W. Ciurczak ,  Kevin C. Bynum

Inventor： Emil W. Ciurczak ,  Kevin C. Bynum

IPC: G01J528

CPC classification number: G01N21/35 ,  G01J1/0455 ,  G01J1/4228 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/2803 ,  G01J2003/123 ,  G01J2003/1243 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01N21/359 ,  G01N21/59

Abstract: A hemispherical detector comprising a plurality of photodetectors arranged in a substantially contiguous array, the array being substantially in the shape of a half-sphere, the half-sphere defining a closed end and an open end, the open end defining a substantially circular face. Also provided is a method for constructing a hemispherical detector comprising the steps of making a press mold of the desired shape of the hemispherical detector, pouring a material into the press mold to form a cast, finishing the cast to remove any defects, coating the cast with a coating material, and attaching a plurality of photodetectors to the cast.

Abstract translation: 一种半球形检测器，包括以基本上邻接的阵列布置的多个光电检测器，所述阵列基本上为半球形，所述半球限定封闭端和开口端，所述开口端限定基本圆形的面。 还提供了一种用于构造半球形检测器的方法，包括以下步骤：制造半球形检测器所需形状的压模，将材料注入压模中以形成铸件，精加工铸件以除去任何缺陷，涂覆铸件 涂覆材料，并将多个光电检测器附接到铸件上。