公开(公告)号：US20230175911A1

公开(公告)日：2023-06-08

申请号：US18104672

申请日：2023-02-01

Applicant: Samsung Display Co., Ltd. ,  RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY

Inventor： Jae Ik LIM ,  Won Sang PARK ,  Hye Yong CHU ,  Do-Il KIM ,  Nae-Eung LEE ,  Han-Byeol LEE

IPC: G01L19/14 ,  G01L1/14 ,  G01L1/16

CPC classification number: G01L19/148 ,  G01L1/148 ,  G01L1/16

Abstract: A pressure sensor includes: a base substrate including an embossed pattern; a first conductive layer disposed on the base substrate; a pressure sensitive material layer disposed on the first conductive layer such that its electrical characteristic is varied corresponding to a strain applied thereto, the pressure sensitive material layer including a dielectric and nanoparticles dispersed in the dielectric; and a second conductive layer disposed on the pressure sensitive material layer, wherein the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other.

公开(公告)号：US20190234821A1

公开(公告)日：2019-08-01

申请号：US16337554

申请日：2017-10-02

Applicant: ams International AG

Inventor： Willem Frederik Adrianus BESLING ,  Casper VAN DER AVOORT ,  Coenraad Cornelis TAK ,  Remco Henricus Wilhelmus PIJNENBURG ,  Olaf WUNNICKE ,  Martijn GOOSSENS

IPC: G01L9/00 ,  G01L1/14 ,  B81B3/00

CPC classification number: G01L9/0072 ,  B81B3/0021 ,  B81B7/0061 ,  B81B2201/0264 ,  B81B2203/0127 ,  G01L1/148

Abstract: A semiconductor device comprises a substrate body, an environmental sensor, a cap body and a volume of gas. The environmental sensor and the volume of gas are arranged between the substrate body and the cap body in a vertical direction which is perpendicular to the main plane of extension of the substrate body, and at least one channel between the substrate body and the cap body connects the volume of gas with the environment of the semiconductor device such that the channel is permeable for gases.

公开(公告)号：US20190131969A1

公开(公告)日：2019-05-02

申请号：US16095463

申请日：2017-04-21

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventor： HOLGER BOESE ,  DENIZ OCAK ,  CHRISTOPHER KAPPENBERGER ,  JOHANNES EHRLICH

IPC: H03K17/975 ,  H03K17/96 ,  G01L1/14 ,  H03K17/945

CPC classification number: H03K17/975 ,  G01L1/142 ,  G01L1/146 ,  G01L1/148 ,  H03K17/945 ,  H03K17/962

Abstract: A control and operating element has at least one dielectric elastomer sensor in which at least two electrode layers, between which a capacitance can be measured, are separated from one another by an at least partially elastomeric dielectric. The sensor has a preset position and can, due to a deformation of elastomeric components, adopt one or more working positions in which the capacitance is changed with respect to the preset position and which is/are reached due to application of an external force. The control and operating element further has a triggering mechanism which can trigger an event that is associated with a reached working position.

公开(公告)号：US20180104941A1

公开(公告)日：2018-04-19

申请号：US15567244

申请日：2016-04-12

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Michael Benton FREE ,  Margot A. BRANIGAN ,  Robert F. KAMRATH ,  Stephen A. JOHNSON ,  John D. LE ,  Kanta KUMAR

IPC: B32B27/28 ,  B32B3/28 ,  B32B5/18 ,  B32B7/12

CPC classification number: B32B27/283 ,  B32B3/263 ,  B32B3/28 ,  B32B3/30 ,  B32B5/18 ,  B32B7/12 ,  B32B25/20 ,  B32B27/28 ,  B32B2255/10 ,  B32B2255/102 ,  B32B2255/26 ,  B32B2266/0207 ,  B32B2266/0292 ,  B32B2307/748 ,  B32B2457/208 ,  G01L1/146 ,  G01L1/148 ,  G06F3/044 ,  G06F2203/04103 ,  G06F2203/04105

Abstract: The present disclosure relates to compressible, multilayer articles useful in force sensing capacitors. The compressible, multilayer articles include a cured, silicone elastomer layer having a first major surface and a second major surface and at least one of a first and second tie-layer, each having a first major surface and a second major surface, comprising a silicone polyoxamide, wherein the first major surface of the first tie-layer is in contact with and adhered to the first major surface of the cured, silicone elastomer layer and/or the first major surface of the second tie-layer is in contact with and adhered to the second major surface of the cured, silicone elastomer layer. The multilayer articles may include at least one of a first electrode and first primer layer and a second electrode and second primer layer. Methods of making the compressible, multilayer articles are also disclosed.

公开(公告)号：US20180038747A1

公开(公告)日：2018-02-08

申请号：US15785189

申请日：2017-10-16

Applicant: TEXAS INSTRUMENTS DEUTSCHLAND GMBH

Inventor： Kai Gossner

IPC: G01L1/14 ,  G01C19/5719 ,  H01G5/38 ,  G01P15/125

CPC classification number: G01L1/148 ,  G01C19/5719 ,  G01P15/125 ,  H01G5/38

Abstract: The present disclosure relates to an apparatus comprising at least one sensing capacitor and a controller, wherein the controller is configured to receive a signal from the at least one sensing capacitor indicative of a change of charge of the sensing capacitor, and wherein the controller is configured to determine an amount of force applied to the sensing capacitor, an acceleration of the sensing capacitor, a torsion of the sensing capacitor, a vibration of the sensing capacitor or a pulling force applied to the sensing capacitor based on the change of charge of the at least one sensing capacitor.

公开(公告)号：US09791331B2

公开(公告)日：2017-10-17

申请号：US15018449

申请日：2016-02-08

Applicant: TEXAS INSTRUMENTS DEUTSCHLAND GMBH

Inventor： Kai Gossner

IPC: G01L1/00 ,  G01L1/14 ,  G01C19/5719 ,  G01P15/125 ,  H01G5/38

CPC classification number: G01L1/148 ,  G01C19/5719 ,  G01P15/125 ,  H01G5/38

Abstract: The present disclosure relates to an apparatus comprising at least one sensing capacitor and a controller, wherein the controller is configured to receive a signal from the at least one sensing capacitor indicative of a change of charge of the sensing capacitor, and wherein the controller is configured to determine an amount of force applied to the sensing capacitor, an acceleration of the sensing capacitor, a torsion of the sensing capacitor, a vibration of the sensing capacitor or a pulling force applied to the sensing capacitor based on the change of charge of the at least one sensing capacitor.

公开(公告)号：US20170074734A1

公开(公告)日：2017-03-16

申请号：US15310421

申请日：2015-04-24

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yasuhiro Soeda ,  Yasuhiro Shimada

IPC: G01L5/22 ,  G01L1/14

CPC classification number: G01L5/228 ,  B06B1/0215 ,  B06B1/0292 ,  G01L1/144 ,  G01L1/146 ,  G01L1/148 ,  G01L9/0072 ,  G01L9/0073 ,  G01L9/0086 ,  G01N29/2406 ,  G05B2219/39107 ,  G05B2219/39508 ,  G05B2219/39527

Abstract: A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.

Abstract translation: 本发明的电容式力传感器101包括多个单元，每个单元包括下电极104，包括上电极107并具有柔性的可移动构件，以及支撑件105b，其布置成可移动地支撑可移动构件并形成间隙 106在上电极和下电极之间。 多个单元被分组成各自包括一个或多个单元的元件，同一元件中的一个或多个单元彼此电连接。

公开(公告)号：US09535086B2

公开(公告)日：2017-01-03

申请号：US14742105

申请日：2015-06-17

Applicant: FEMTOTOOLS AG

Inventor： Felix Beyeler ,  Simon Muntwyler

IPC: G01Q20/00 ,  B81C99/00 ,  G01Q20/04 ,  G01Q60/36 ,  G01N3/42 ,  G01L1/14 ,  G01L5/00 ,  G01Q10/04

CPC classification number: G01Q20/00 ,  B81C99/005 ,  G01L1/148 ,  G01L5/0038 ,  G01N3/42 ,  G01N2203/0286 ,  G01Q10/045 ,  G01Q20/04 ,  G01Q60/366

Abstract: A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip.

Abstract translation: 一种用于微机械和纳米机械测试和纳米压痕的微型制造传感器。 传感器包括用于感测施加到样本的力的力感测电容梳驱动器，用于感测样品位置的感测位置感应电容梳驱动器和微制造致动器以向样品施加负载。 上述所有传感器组件都是单片集成在同一个硅MEMS芯片上。

公开(公告)号：US09518877B2

公开(公告)日：2016-12-13

申请号：US14478117

申请日：2014-09-05

Applicant: Robert Bosch GmbH

Inventor： Heribert Weber

IPC: H01L21/00 ,  G01L1/14 ,  H01L29/66 ,  G01L9/00 ,  B81B3/00

CPC classification number: G01L1/148 ,  B81B3/007 ,  B81B2201/0235 ,  B81B2201/0264 ,  G01L9/0073 ,  H01L29/66007

Abstract: A micromechanical component for a capacitive sensor device includes first and second electrodes. The first electrode is at least partially formed from a first semiconductor layer and/or metal layer, and at least one inner side of the second electrode facing the first electrode is formed from a second semiconductor layer and/or metal layer. A cavity is between the first and second electrodes. Continuous recesses are structured into the inner side of the second electrode and sealed off with a closure layer. At least one reinforcing layer of the second electrode and at least one contact element which is electrically connected to the first electrode, to the layer of the second electrode which forms the inner side, to at least one printed conductor, and/or to a conductive substrate area, are formed from at least one epi-polysilicon layer. Also described is a micromechanical component manufacturing method for a capacitive sensor device.

公开(公告)号：US09205561B2

公开(公告)日：2015-12-08

申请号：US14189122

申请日：2014-02-25

Applicant: Seiko Epson Corporation

Inventor： Tomo Ikebe

IPC: G01L1/22 ,  B25J9/16 ,  G01L5/00 ,  G01L5/22 ,  G01L1/16 ,  G01L1/14 ,  G01L1/20 ,  G01L5/16 ,  G01L1/18

CPC classification number: B25J9/1694 ,  G01L1/148 ,  G01L1/16 ,  G01L1/18 ,  G01L1/20 ,  G01L1/205 ,  G01L1/22 ,  G01L5/009 ,  G01L5/161 ,  G01L5/162 ,  G01L5/167 ,  G01L5/226 ,  G05B2219/39529 ,  Y10S901/09 ,  Y10T74/20305

Abstract: A force detector includes a plate-like first member, a plate-like second member provided with a gap between the first member and itself, an elastic member provided between the first member and the second member, and a plurality of pressure-sensitive devices provided between the elastic member and the second member, wherein an area of a surface of the elastic member at the first member side is larger than an area of a surface of the elastic member at the second member side. Further, the first member and the second member respectively have plate-like shapes. Furthermore, three or more of the elastic members are provided.

Abstract translation: 力检测器包括板状第一构件，在第一构件和其本身之间设置有间隙的板状第二构件，设置在第一构件和第二构件之间的弹性构件，以及设置有多个压力敏感装置 在弹性构件和第二构件之间，弹性构件的第一构件侧的表面的面积大于第二构件侧的弹性构件的表面的面积。 此外，第一构件和第二构件分别具有板状形状。 此外，提供三个或更多个弹性构件。