LASER PROCESSING APPARATUS
    31.
    发明申请

    公开(公告)号:US20210094128A1

    公开(公告)日:2021-04-01

    申请号:US17024871

    申请日:2020-09-18

    申请人: DISCO CORPORATION

    发明人: Keiji NOMARU

    摘要: A laser beam applying unit of a laser processing apparatus includes a beam splitter disposed on a first optical path connecting a laser oscillator and a condenser, a wide band light source disposed on a second optical path branched by the beam splitter, a spectroscope that is disposed between the wide band light source and the beam splitter and that branches the laser beam from the second optical path to a third optical path, and a Z position detection unit that is disposed on the third optical path branched by the spectroscope and that detects the position in a Z-axis direction of a workpiece according to an intensity of light corresponding to the wavelength of return light that is generated when the light of the wide band light source is condensed by the condenser and is reflected by the workpiece held by a chuck table.

    LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

    公开(公告)号:US20200290156A1

    公开(公告)日:2020-09-17

    申请号:US16889791

    申请日:2020-06-01

    申请人: Gigaphoton Inc.

    摘要: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light includes: A. a positioning step of performing positioning so that a transfer position of a transfer image is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in an optical axis direction; B. an irradiation condition acquisition step; C. a determination step of determining whether a maximum fluence of a pulse laser beam at the surface of the transparent material is within a predetermined range based on irradiation conditions; and D. a control step of allowing irradiation with the pulse laser beam when the maximum fluence is determined to be in the predetermined range.

    Method and device for the controlled machining of a workpiece

    公开(公告)号:US10695863B1

    公开(公告)日:2020-06-30

    申请号:US16548939

    申请日:2019-08-23

    发明人: Christoph Dietz

    摘要: A method for controlled machining of a workpiece includes focusing a laser light beam on a target point of the workpiece to generate a laser focus point. An optical distance measuring device gathers measuring data to determine a distance between the target point and a laser target optics. The workpiece is positioned in relation to the laser focus point based on the distance measuring data gathered. The distance measuring device is a confocal optical distance measuring device having a measuring light source for generating a measuring light and having a variable-focal-length measuring lens system. The focal length of the variable-focal-length measuring lens system is varied over time to gather distance measuring data at different focal length values of the variable-focal-length measuring lens system. A device for controlled machining includes a laser light source, a laser target optics, a distance measuring device, a positioning device, and an evaluation and control unit.