PEELING METHOD AND MANUFACTURING METHOD OF FLEXIBLE DEVICE

    公开(公告)号:US20220216243A1

    公开(公告)日:2022-07-07

    申请号:US17701961

    申请日:2022-03-23

    摘要: A peeling method at low cost with high mass productivity is provided. A resin layer having a thickness greater than or equal to 0.1 μm and less than or equal to 3 μm is formed over a formation substrate using a photosensitive and thermosetting material, a transistor including an oxide semiconductor in a channel formation region is formed over the resin layer, the resin layer is irradiated with light using a linear laser device, and the transistor and the formation substrate are separated from each other. A first region and a second region which is thinner than the first region or an opening can be formed in the resin layer. In the case of forming a conductive layer functioning as an external connection terminal or the like to overlap with the second region or the opening of the resin layer, the conductive layer is exposed.

    Separation Apparatus
    8.
    发明申请
    Separation Apparatus 有权
    分离装置

    公开(公告)号:US20160347047A1

    公开(公告)日:2016-12-01

    申请号:US15165099

    申请日:2016-05-26

    IPC分类号: B32B43/00 H01L21/683

    摘要: A yield in a separation process is improved. A separation apparatus which enables easy separation in a large-area substrate is provided. The separation apparatus has a function of dividing a process member into a first member and a second member and includes a support body supply unit, a support body hold unit, a transfer mechanism, a direction changing mechanism, and a structure body. The structure body bonds a support body to a surface of the first member. When at least part of the process member is located between the direction changing mechanism and the structure body or the pressure applying mechanism, the shortest distance between the direction changing mechanism and a first plane including the surface of the first member is longer than the shortest distance between the first plane and the structure body or the pressure applying mechanism.

    摘要翻译: 提高分离过程中的产率。 提供了一种能够在大面积基板中容易分离的分离装置。 分离装置具有将处理构件分割成第一构件和第二构件的功能,并且包括支撑体供给单元,支撑体保持单元,转移机构,方向改变机构和结构体。 结构体将支撑体结合到第一构件的表面。 当处理构件的至少一部分位于方向改变机构和结构体或压力施加机构之间时,方向改变机构与包括第一构件的表面的第一平面之间的最短距离比最短距离 在第一平面和结构体或压力施加机构之间。

    DISPLAY UNIT, DISPLAY MODULE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING THE DISPLAY UNIT

    公开(公告)号:US20220406981A1

    公开(公告)日:2022-12-22

    申请号:US17772195

    申请日:2020-11-09

    摘要: A display unit with a high definition is provided. The display unit includes a transistor, a light-emitting diode, a first conductive layer, a second conductive layer, a first insulating layer, and a second insulating layer. The transistor is electrically connected to the first conductive layer, and the first conductive layer and the first insulating layer are positioned over the transistor. The second conductive layer is positioned over the first conductive layer. The second insulating layer is positioned over the first insulating layer. The light-emitting diode includes a first electrode over the second insulating layer, a light-emitting layer over the first electrode, and a second electrode over the light-emitting layer. The second electrode is electrically connected to the second conductive layer. The height of a surface of the first conductive layer on the second conductive layer side is substantially the same as the height of a surface of the first insulating layer on the second insulating layer side. The first insulating layer and the second insulating layer are directly bonded to each other. The second conductive layer is positioned in an opening in the second insulating layer and is electrically connected to the first conductive layer.