公开(公告)号：US20120295202A1

公开(公告)日：2012-11-22

申请号：US13471309

申请日：2012-05-14

Applicant: Kentaro Sano

Inventor： Kentaro Sano

IPC: H01J3/18 ,  G03F7/20 ,  H01J3/26

CPC classification number: H01J37/3007 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/04924 ,  H01J2237/1501

Abstract: A drawing apparatus includes a first aperture array configured to split a diverging charged particle beam, a converging lens array configured to form a plurality of first crossovers of a plurality of charged particle beams from the first aperture array, a collimator lens having a principal plane where the plurality of first crossovers are to be formed, a correcting system configured to correct angles of a plurality of charged particle beams from the collimator lens and to form a plurality of second crossovers, and an element having a plurality of apertures respectively corresponding to the plurality of second crossovers. The first aperture array and the converging lens array have apertures such that an arrangement of the plurality of first crossovers is different from an arrangement of the plurality of apertures, and that the plurality of second crossovers are aligned with the plurality of apertures on the element.

Abstract translation: 一种绘图装置，包括：构造成分开发散带电粒子束的第一孔径阵列;会聚透镜阵列，被配置为从第一孔径阵列形成多个带电粒子束的多个第一交叉;准直透镜，具有主平面， 要形成多个第一交叉点，校正系统被配置为校正来自准直透镜的多个带电粒子束的角度并形成多个第二交叉，以及具有分别对应于多个的多个孔的元件 的第二个交叉。 第一孔径阵列和会聚透镜阵列具有孔，使得多个第一分频器的布置不同于多个孔的布置，并且多个第二交叉与元件上的多个孔对准。

公开(公告)号：US08148679B2

公开(公告)日：2012-04-03

申请号：US12513944

申请日：2007-11-07

Applicant: Alexander Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

Inventor： Alexander Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

IPC: H01J37/301 ,  H01J49/04 ,  H01J49/24 ,  H01J3/18

CPC classification number: H01J49/062 ,  H01J3/14

Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.

Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括离子传递管道60.导管60具有朝向较高压力室40的入口开口和朝向较低压力室开口的出口70。 导管60还具有围绕离子传递通道115的至少一个侧壁。侧壁包括在侧壁的纵向方向上形成的多个孔140，以允许来自离子传递通道115内的气体流 到导管60的侧壁外侧的较低压力区域。

公开(公告)号：US20110174985A1

公开(公告)日：2011-07-21

申请号：US13010658

申请日：2011-01-20

Applicant: Jerry Peijster

Inventor： Jerry Peijster

IPC: H01J3/14 ,  H01J3/22 ,  H01J3/18

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/023 ,  H01J37/10 ,  H01J2237/1502

Abstract: The invention relates to a charged particle based lithography system for projecting an image on a target using a plurality of charged particle beamlets for transferring said image to said target, said system comprising a charged particle column comprising:an electron optical subassembly comprising a charged particle source, a collimator lens, an aperture array, a blanking means and a beamstop for generating a plurality of charged particle beamlets; anda projector for projecting said plurality of charged particle beamlets on said target;said projector being moveably included in the system by means of at least one projector actuator for moving said projector relative to said electron optical subassembly;said projector actuator being included for mechanically actuating said projector and providing said projector with at least one degree of freedom of movement;wherein said degree of freedom relates to a movement around an optical axis of the system.

Abstract translation: 本发明涉及一种基于带电粒子的光刻系统，用于使用多个带电粒子子束将图像投影到目标上，用于将所述图像转印到所述靶上，所述系统包括带电粒子柱，包括：包含带电粒子源的电子光学子组件 准直透镜，孔径阵列，消隐装置和用于产生多个带电粒子子束的波束抑制器; 以及投影仪，用于将所述多个带电粒子子束投影在所述目标上; 所述投影仪通过至少一个用于相对于所述电子光学子组件移动所述投影仪的投影仪致动器可移动地包括在所述系统中; 所述投影机致动器被包括用于机械地致动所述投影仪并且为所述投影仪提供至少一个移动自由度; 其中所述自由度涉及围绕所述系统的光轴的运动。

公开(公告)号：US20050218789A1

公开(公告)日：2005-10-06

申请号：US11097097

申请日：2005-03-31

Applicant: Hyeong Seon

Inventor： Hyeong Seon

IPC: H01J29/04 ,  H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J9/02 ,  H01J29/46 ,  H01J29/62 ,  H01J31/12

CPC classification number: H01J3/021 ,  H01J2329/00

Abstract: An electron emission device includes: a plate; first and second electrodes insulated from each other and arranged having a predetermined shape; an electron emitter connected to one of the first and second electrodes; and a third electrode formed with a hole through which electrons emitted from the electron emitter pass. The ratio of the a hole width of the third electrode to a width of the electron emitter is equal to or more than about 0.5 and equal to or less than about 1.0. With this configuration, there is no twisting or sagging, thereby satisfying predetermined standards for brightness and color purity.

Abstract translation: 电子发射装置包括：板; 第一和第二电极彼此绝缘并且布置成具有预定形状; 连接到第一和第二电极之一的电子发射器; 以及形成有从电子发射体发射的电子通过的孔的第三电极。 第三电极的孔宽与电子发射体的宽度的比例等于或大于约0.5且等于或小于约1.0。 通过这种结构，不会发生扭曲或下垂，从而满足亮度和色纯度的预定标准。

公开(公告)号：US06927534B2

公开(公告)日：2005-08-09

申请号：US10635647

申请日：2003-08-07

Applicant: Jun-hee Choi ,  Seung-nam Cha ,  Hang-woo Lee

Inventor： Jun-hee Choi ,  Seung-nam Cha ,  Hang-woo Lee

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J1/02 ,  H01J1/62

CPC classification number: H01J3/022 ,  H01J1/3042 ,  H01J9/025

Abstract: A field emission device (FED) and a method for fabricating the FED are provided. The FED includes micro-tips with nano-sized surface features, and a focus gate electrode over a gate electrode, wherein one or more gates of the gate electrode is exposed through a single opening of the focus gate electrode. In the FED, occurrence of arcing is suppressed. Although an arcing occurs in the FED, damage of a cathode and a resistor layer is prevented, so that a higher working voltage can be applied to the anode. Also, due to the micro-tips with nano-sized surface features, the emission current density of the FED increases, so that a high-brightness display can be achieved with the FED. The gate turn-on voltage can be lowered due to the micro-tip as a collection of nano-sized tips, thereby reducing power consumption.

Abstract translation: 提供场发射装置（FED）和制造FED的方法。 FED包括具有纳米尺寸表面特征的微型尖端以及栅电极上的聚焦栅电极，其中栅电极的一个或多个栅极通过聚焦栅电极的单个开口露出。 在FED中，电弧的发生被抑制。 虽然在FED中发生电弧，但是可以防止阴极和电阻层的损坏，从而可以向阳极施加较高的工作电压。 此外，由于具有纳米尺寸表面特征的微尖端，FED的发射电流密度增加，从而可以用FED实现高亮度显示。 由于微型尖端作为纳米级尖端的集合，可以降低栅极导通电压，从而降低功耗。

公开(公告)号：US6051838A

公开(公告)日：2000-04-18

申请号：US947226

申请日：1997-10-08

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

IPC: G21K1/087 ,  H01J37/12 ,  H01J3/18

CPC classification number: H01J37/12 ,  H01J2237/1207

Abstract: An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.

Abstract translation: 一种具有用于影响粒子束的静电透镜的光学单元，其中所述透镜在所述粒子束的方向上具有至少一个第一和第二电极，所述至少一个第一和第二电极在所述粒子束的方向上彼此下游，每个所述电极可被充电并且与电接触 具有用于粒子束的通道的高电阻体。 提供了另一个组件来影响静电透镜区域中的粒子束。

公开(公告)号：US5986388A

公开(公告)日：1999-11-16

申请号：US920508

申请日：1997-08-29

Applicant: Hideo Makishima

Inventor： Hideo Makishima

IPC: H01J23/04 ,  H01J1/304 ,  H01J3/02 ,  H01J3/08 ,  H01J3/18 ,  H01J23/06 ,  H01J23/075 ,  H01J29/04 ,  H01J1/02

CPC classification number: H01J23/075 ,  H01J3/022 ,  H01J2225/34

Abstract: A field-emission cathode comprises a substrate having a conductive surface, a gate electrode and a focusing electrode overlying the substrate with insulation layers interposed therebetween, a plurality of cavities formed by penetrating the gate electrode, focusing electrode and insulation layers, and an emitter formed in each of the cavities on the substrate for emission of an electron beam. The emitter has tip located at a level between the gate electrode and the focusing electrode, which receive therebetween a signal for modulating the electron beam at a high frequency.

Abstract translation: 场发射阴极包括具有导电表面的衬底，栅电极和聚焦电极，覆盖衬底上的绝缘层，穿过栅电极，聚焦电极和绝缘层形成的多个空腔和形成的发射极 在用于发射电子束的基板上的每个空腔中。 发射极具有位于栅电极和聚焦电极之间的电平上的尖端，其间接收高频调制电子束的信号。

公开(公告)号：US5969467A

公开(公告)日：1999-10-19

申请号：US827255

申请日：1997-03-28

Applicant: Fumihiko Matsuno

Inventor： Fumihiko Matsuno

IPC: H01J9/44 ,  H01J1/304 ,  H01J3/02 ,  H01J3/18 ,  H01J31/12 ,  H01J1/30 ,  H01J19/22

CPC classification number: H01J1/3042 ,  H01J3/022

Abstract: A field emission cathode includes a first electron-emitting structure having a first cathode electrode (3), a first gate electrode (5), a first insulating layer (4) separating the first cathode electrode (3) from the first gate electrode (5), and at least one first emitter tip (9) disposed in a hole formed in the first gate electrode (5) and the first insulating layer (4) to expose a portion of the first cathode electrode (3); and a second electron-emitting structure surrounding and insulated from the first electron-emitting structure wherein the second electron-emitting structure has a second cathode electrode (6), a second gate electrode (8), a second insulating layer (7) separating the second cathode electrode (6) from the second gate electrode (8), and at least one second emitter tip (10) disposed in a hole formed in the second gate electrode (8) and the second insulating layer (7) to expose a portion of the second cathode electrode (6).

Abstract translation: 场发射阴极包括具有第一阴极电极（3），第一栅极电极（5），将第一阴极电极（3）与第一栅极电极（5）分离的第一绝缘层（4）的第一电子发射结构 ）和设置在形成在第一栅电极（5）和第一绝缘层（4）中的孔中的至少一个第一发射极尖（9），以暴露第一阴极电极（3）的一部分; 以及第二电子发射结构，其围绕并与第一电子发射结构绝缘，其中第二电子发射结构具有第二阴极电极（6），第二栅电极（8），第二绝缘层（7） 第二阴极电极（6）和设置在第二栅电极（8）和第二绝缘层（7）中的孔中的至少一个第二发射极尖端（10），以暴露第二阴极电极 的第二阴极电极（6）。

公开(公告)号：US5877594A

公开(公告)日：1999-03-02

申请号：US851033

申请日：1997-05-05

Applicant: Soichiro Miyano ,  Akihiko Okamoto

Inventor： Soichiro Miyano ,  Akihiko Okamoto

IPC: H01J3/18 ,  H01J1/304 ,  H01J3/02 ,  H01J29/04 ,  H01J29/62

CPC classification number: H01J29/04 ,  H01J3/022

Abstract: In a cold cathode electron beam device, groups of electron emission cones emit electrons which are extracted from the cones by respective extraction electrodes. The emitted electrons are focussed into a beam by an electron lens so as to strike a fluorescent screen. In order to minimize the size of the beam spot where the beam strikes the screen, a structure is included which compensates for a spherical aberration property which is inherent to the electron lens. The spherical aberration is compensated for by placing a focus electrode for each group of electron emission cones on a common substrate along with the extraction electrode, such that the focus electrode surrounds the extraction electrode.

Abstract translation: 在冷阴极电子束器件中，电子发射锥体的发射电子通过相应的引出电极从锥体中提取出来。 发射的电子被电子透镜聚焦成光束，以便触发荧光屏。 为了最小化光束撞击屏幕的光束点的尺寸，包括补偿电子透镜固有的球面像差特性的结构。 通过将各组电子发射锥体的聚焦电极与引出电极一起放置在公共衬底上来补偿球面像差，使得聚焦电极围绕提取电极。

公开(公告)号：US5561345A

公开(公告)日：1996-10-01

申请号：US437066

申请日：1995-05-09

Applicant: Huei-Pei Kuo

Inventor： Huei-Pei Kuo

IPC: H01J3/18 ,  H01J1/304 ,  H01J3/02 ,  H01J3/30 ,  H01J29/62 ,  H01J29/74 ,  H01J31/12 ,  H01J1/62

CPC classification number: H01J29/467 ,  H01J3/022 ,  H01J31/125

Abstract: Apparatus and methods of focusing and to steering a group of electrons emitted from an electron source to a shield. In a preferred embodiment, the apparatus includes an electron source controlled by one or more voltages to emit electrons, a first electrode adjacent to one side of the source, and a second electrode, insulated from the first electrode, adjacent to an opposite side of the source. The shield has a shield voltage. The first and the second electrode have a first and a second voltage respectively to focus and steer a substantial portion of the emitted electrons towards the shield. One application of the present invention is in the area of flat panel displays with the shield being a screen.

Abstract translation: 聚焦和将从电子源发射的电子组转向屏蔽的装置和方法。 在优选实施例中，该装置包括由一个或多个电压控制以发射电子的电子源，与源的一侧相邻的第一电极和与第一电极绝缘的第二电极， 资源。 屏蔽有屏蔽电压。 第一和第二电极分别具有第一和第二电压以将发射的电子的大部分聚焦并转向屏蔽。 本发明的一个应用是在屏幕是屏幕的平板显示器的区域中。