公开(公告)号：US06655834B1

公开(公告)日：2003-12-02

申请号：US09613131

申请日：2000-07-10

Applicant: Wilhelm Frey ,  Karsten Funk

Inventor： Wilhelm Frey ,  Karsten Funk

IPC: G01K702

CPC classification number: H01L35/32 ,  B81B2201/0278 ,  B81B2203/0127 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2203/0735 ,  G01J5/20

Abstract: A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element by way of at least one contact column and is at least largely supported thereby. The contact column moreover makes electrical contact to the sensor element. Also proposed is a method for manufacturing a largely self-supporting membrane, a polymer layer first being deposited on a base element, patterned, and equipped with at least one cutout. The cutout is subsequently filled with a filler material, and a membrane layer is applied onto the polymer layer. Lastly, the polymer layer is removed again. The proposed method for manufacturing a largely self-supporting membrane layer is suitable in particular for constructing a sensor, in particular a thermal sensor or a thermal sensor array.

Abstract translation: 提出了一种具有硅元件和大部分自支撑膜层的传感器，特别是热传感器，其具有至少一个传感器元件。 膜层还通过至少一个接触柱与硅元件隔开，并且至少大部分被支撑。 接触柱还与传感器元件电接触。 还提出了一种用于制造大部分自支撑膜的方法，首先沉积在基底元件上的聚合物层被图案化并且装备有至少一个切口。 切口随后填充有填充材料，并且将膜层施加到聚合物层上。 最后，再次除去聚合物层。 所提出的用于制造大部分自支撑膜层的方法特别适用于构造传感器，特别是热传感器或热传感器阵列。

公开(公告)号：US06489864B2

公开(公告)日：2002-12-03

申请号：US09805830

申请日：2001-03-14

Applicant: Wilhelm Frey ,  Karsten Funk

Inventor： Wilhelm Frey ,  Karsten Funk

IPC: H03H948

CPC classification number: H03H9/02425 ,  H03H9/462 ,  H03H2009/02456 ,  H03H2009/02511

Abstract: A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

Abstract translation: 用于电信号的滤波器具有基板，振动体，其能够相对于基板相对于偏转的至少两个对映体振动，并且具有连接到信号输入端的电极和用于电激励的信号输出和用于检测振动的信号 振动体。 用于检测振动的电极分别连接到信号输出的两个独立的端子上，每个分配给相位相反偏转的对映体。

公开(公告)号：US06369931B1

公开(公告)日：2002-04-09

申请号：US09367760

申请日：1999-08-18

Applicant: Karsten Funk ,  Wilhelm Frey

Inventor： Karsten Funk ,  Wilhelm Frey

IPC: G02B1700

CPC classification number: B81B3/004 ,  B81B2201/0292 ,  B81B2201/042 ,  B81C1/00142 ,  B81C2201/019 ,  G02B26/0841

Abstract: A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the third layers; etching through the first layer up to the second layer to produce an island region, lying on the second layer, which is joined to region of the first layer surrounding the island region by way of one or more connecting webs, and etching through a region of the third layer up to the second layer and removing a region of the second layer below the island region in such a way that the island region can perform movements, preferably torsional vibrations, about the one or more connecting webs, the torsional vibrations having such an amplitude that a part of the island region extends into the etched-through region of the third layer.

Abstract translation: 一种用于制造微机械装置，特别是微机械振镜装置的方法，具有以下步骤：提供具有第一层，第二层和第三层的三层结构，所述第二层位于第一层和第二层之间， 第三层; 蚀刻通过第一层直到第二层，以产生位于第二层上的岛状区域，其通过一个或多个连接幅材连接到围绕岛状区域的第一层的区域，并且蚀刻通过 第三层直到第二层，并且以这样的方式去除岛状区域下面的第二层的区域，使得岛状区域可以围绕一个或多个连接幅材执行运动，优选扭转振动，扭转振动具有这样的 该区域的一部分延伸到第三层的蚀刻穿透区域的振幅。

公开(公告)号：US05996409A

公开(公告)日：1999-12-07

申请号：US64495

申请日：1998-04-22

Applicant: Karsten Funk ,  Franz Laermer ,  Bernhard Elsner ,  Wilhelm Frey

Inventor： Karsten Funk ,  Franz Laermer ,  Bernhard Elsner ,  Wilhelm Frey

IPC: B60R21/00 ,  B60R21/01 ,  B60R21/013 ,  B60R21/0132 ,  G01C19/56 ,  G01C19/5712 ,  G01P15/125 ,  G01P15/18 ,  G01C19/00 ,  G01P15/08

CPC classification number: B60R21/0132 ,  B60R21/013 ,  G01C19/5712 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18 ,  B60G2800/9124 ,  B60R2021/0018 ,  B60R2021/01006 ,  B60R2021/01306 ,  G01P2015/0814

Abstract: An acceleration sensing device includes a rotational speed sensor which is mounted on a substrate and detects rotational speed, at least one oscillating structure with a deflectable seismic mass, and an acceleration sensor that detects linear acceleration and has at least one additional seismic mass which is suspended on flexible elements so that it can be deflected. The seismic masses of the two sensors are deflected independently of one another.

Abstract translation: 加速度感测装置包括安装在基板上并检测转速的转速传感器，具有可偏转地震质量的至少一个振荡结构和检测线性加速度的至少一个额外的地震块悬挂的加速度传感器 在柔性元件上，使其可以偏转。 两个传感器的地震质量彼此独立地偏转。

公开(公告)号：US08202093B2

公开(公告)日：2012-06-19

申请号：US11999839

申请日：2007-12-06

Applicant: Madhuri Raya ,  Karsten Funk ,  Sharmila Ravula ,  Yao Meng

Inventor： Madhuri Raya ,  Karsten Funk ,  Sharmila Ravula ,  Yao Meng

IPC: G09B19/00

CPC classification number: G09B5/06 ,  G09B19/04

Abstract: A method of teaching pronunciation is provided which includes communicating by a voice portal server to a user a model word and detecting a response by the user to the voice portal server. The method also includes comparing the response word to the model word and determining a confidence level based on the comparison of the response word to the model word. The method further includes comparing an acceptance limit to the confidence level and confirming a correct pronunciation of the model word if the confidence level one of equals and exceeds the acceptance limit.

Abstract translation: 提供了一种教学语音的方法，其包括由语音门户服务器向用户传达模型词并且检测用户对语音门户服务器的响应。 该方法还包括将响应词与模型词进行比较，并且基于响应词与模型词的比较来确定置信水平。 该方法还包括将可接受极限与置信水平进行比较，并且如果置信水平等于并超过接受极限，则确认模型词的正确发音。

公开(公告)号：US07859093B2

公开(公告)日：2010-12-28

申请号：US11903490

申请日：2007-09-21

Applicant: Karsten Funk

Inventor： Karsten Funk

IPC: H01L23/02

CPC classification number: B81C1/00333 ,  B81B2207/095 ,  B81C2203/0136 ,  G01P1/023 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  H01L2224/05554 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/49171 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, in which the micro-mechanical sensor structure is fabricated with a protective membrane, the micro-mechanical sensor chip is arranged so that a surface of the protective membrane faces toward a second chip, and the micro-mechanical sensor chip is secured to the second chip.

Abstract translation: 一种保护嵌入在微机械传感器芯片中的微机械传感器结构的方法，其中微机械传感器结构用保护膜制造，微机械传感器芯片被布置成使得保护膜的表面 朝向第二芯片，并且微机械传感器芯片固定到第二芯片。

公开(公告)号：US07817994B2

公开(公告)日：2010-10-19

申请号：US10946405

申请日：2004-09-20

Applicant: Karsten Funk ,  Sharmila Ravula ,  Jochen Schaefer

Inventor： Karsten Funk ,  Sharmila Ravula ,  Jochen Schaefer

IPC: H04M3/00

CPC classification number: H04L41/0879 ,  G01D21/00 ,  G08C2201/42 ,  H04L41/082 ,  H04L63/0428 ,  H04L63/083 ,  H04L67/125 ,  H04W12/02 ,  H04W76/10 ,  H04W84/18

Abstract: A method and a system for controlling a wireless sensor network from a user interface coupled to the Internet are provided. A user accesses an Internet-based portal from the user interface and establishes a secure broadband Internet connection between a remote control module coupled to the wireless sensor network and the portal. The connection is established by manually triggering a connection between the remote control module and the portal from the remote control module.

Abstract translation: 提供了一种用于从耦合到因特网的用户界面控制无线传感器网络的方法和系统。 用户从用户界面访问基于因特网的门户，并且在耦合到无线传感器网络的远程控制模块与门户之间建立安全的宽带因特网连接。 通过远程控制模块手动触发远程控制模块和门户之间的连接来建立连接。

公开(公告)号：US20080096170A1

公开(公告)日：2008-04-24

申请号：US11999839

申请日：2007-12-06

Applicant: Madhuri Raya ,  Karsten Funk ,  Sharmila Ravula ,  Yao Meng

Inventor： Madhuri Raya ,  Karsten Funk ,  Sharmila Ravula ,  Yao Meng

IPC: G09B19/04 ,  G09B19/00 ,  G09B5/00

CPC classification number: G09B5/06 ,  G09B19/04

Abstract: A method of teaching pronunciation is provided which includes communicating by a voice portal server to a user a model word and detecting a response by the user to the voice portal server. The method also includes comparing the response word to the model word and determining a confidence level based on the comparison of the response word to the model word. The method further includes comparing an acceptance limit to the confidence level and confirming a correct pronunciation of the model word if the confidence level one of equals and exceeds the acceptance limit.

Abstract translation: 提供了一种教学语音的方法，其包括由语音门户服务器向用户传达模型词并且检测用户对语音门户服务器的响应。 该方法还包括将响应词与模型词进行比较，并且基于响应词与模型词的比较来确定置信水平。 该方法还包括将可接受极限与置信水平进行比较，并且如果置信水平等于并超过接受极限，则确认模型词的正确发音。

公开(公告)号：US20060107738A1

公开(公告)日：2006-05-25

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P15/08

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Abstract translation: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

公开(公告)号：US06776041B1

公开(公告)日：2004-08-17

申请号：US10089018

申请日：2002-08-15

Applicant: Joerg Hauer ,  Michael Fehrenbach ,  Karsten Funk

Inventor： Joerg Hauer ,  Michael Fehrenbach ,  Karsten Funk

IPC: G01P904

CPC classification number: G01C19/5712

Abstract: A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchoring device is located essentially in the center of the ring, so that the annular flywheel is able to be displaced, elastically from its rest position, about an axis of rotation situated perpendicular to the substrate surface, and about at least one axis of rotation situated parallel to the substrate surface. The anchoring device has two bases that are situated opposite one another and are connected fixedly with the substrate, connected with one another via a bridge. A V-shaped flexural spring of the flexural spring system is attached to each of the opposite sides of the bridge in such a way that the apex is situated on the bridge and the limbs are spread towards the flywheel with an opening angle.

Abstract translation: 一种微机械偏航率传感器，具有：具有设置在所述基板上的锚定装置的基板; 以及环形飞轮，其经由弯曲弹簧系统与锚固装置连接，使得与锚固装置的连接区域基本上位于环的中心，使得环形飞轮能够 围绕其垂直于衬底表面定位的旋转轴线以及围绕平行于衬底表面定位的至少一个旋转轴旋转地从其静止位置移位。 锚固装置具有两个彼此相对定位并且与基板固定连接的基座，通过桥连接。 弯曲弹簧系统的V形弯曲弹簧以这样的方式附接到桥的每个相对侧，使得顶点位于桥上，并且四肢以飞轮的角度朝飞轮扩展。