Abstract:
Provided are an SOI MOSFET device with a nanoscale channel that has a source/drain region including a shallow extension region and a deep junction region formed by solid-phase diffusion and a method of manufacturing the SOI MOSFET device. In the method of manufacturing the MOSFET device, the shallow extension region and the deep junction region that form the source/drain region are formed at the same time using first and second silicon oxide films doped with different impurities. The effective channel length of the device can be scaled down by adjusting the thickness and etching rate of the second silicon oxide film doped with the second impurity. The source/drain region is formed on the substrate before the formation of a gate electrode, thereby easily controlling impurity distribution in the channel. An impurity activation process of the source/drain region can be omitted, thereby preventing a change in a threshold voltage of the device. A solid-phase impurity is diffused. Therefore, no crystal defect of a substrate is caused, thereby decreasing a junction leakage current.
Abstract:
An ultra small-sized SOI MOSFET having a high integration density, low power consumption, but high performances, and a method of fabricating the same are provided. The method includes preparing a SOI substrate on which a monocrystalline silicon layer is formed, forming a first dielectric material layer doped with impurities of a first conductivity type on the SOI substrate, forming an opening to expose the monocrystalline silicon layer etching at least part of the first dielectric material layer, forming a channel region injecting impurities of a second conductivity type into the monocrystalline silicon layer exposed by the opening, forming a source region and a drain region in the monocrystalline silicon layer diffusing the impurities of the first dielectric material layer using heat treatment, forming a gate dielectric layer in the opening on the channel region, forming a gate electrode on the gate dielectric layer to fit in the opening, forming a second dielectric material layer on the entire surface of the SOI substrate on which the gate electrode is formed, forming contact holes to expose the gate electrode, the source region, and the drain region etching part of the second dielectric material layer, and forming metal interconnections to bury the contact holes.
Abstract:
The present invention relates to an ultra small size vertical MOSFET device having a vertical channel and a source/drain structure and a method for the manufacture thereof by using a silicon on insulator (SOI) substrate. To begin with, a first silicon conductive layer is formed by doping an impurity of a high concentration into a first single crystal silicon layer. Thereafter, a second single crystal silicon layer with the impurity of a low concentration and a second silicon conductive layer with the impurity of the high concentration are formed on the first silicon conductive layer. The second single crystal silicon layer and the second silicon conductive layer are vertically patterned into a predetermined configuration. Subsequently, a gate insulating layer is formed on entire surface. Then, an annealing process is carried out to diffuse the impurities in the first silicon conductive layer and the second silicon conductive layer into the second single crystal layer, thereby forming a source region, a drain region and a vertical channel. Finally, a gate electrode is formed on side walls of the vertical channel.
Abstract:
The present invention discloses a technique for applying diffraction characteristic of electrons to a two-dimensional electronic device to manufacture multi-functional transistor having various ON/OFF states. A quantum diffraction transistor according to the present invention is capable of adjusting the amplitude of drain current and having various ON/OFF states utilizing diffraction characteristic of electrons by interposing a reflection-type diffraction grating in an electron path. The inventive multi-functional quantum diffraction transistor uses a two dimensional electron gas in formed at a different species junction in a semiconductor heterostructure, and has a bent electron path between the source electrode and the drain electrode with a reflection-type diffraction grating. The quantum diffraction effect of the electrons is used for the control of the diffracted drain current.
Abstract:
A transistor in accordance with the invention comprises an ultra-thin Mo--C film functioning as a channel for an electron flow with two ends of the thin metal film functioning as source and drain terminals of the transistor, respectively; a piezoelectric film formed on the Mo--C film, for producing a force in accordance with an applied electric field provided by a gate voltage; and an electrode film formed on the piezoelectric film functioning as a gate of the transistor to which the gate voltage is applied to produce the applied electric field; and wherein a resistance of the Mo--C film between the source and drain terminals changes in accordance with the force produced in response to the applied gate voltage. This transistor can be used as an element of the three dimensional integrated circuit with a laminated structure.
Abstract:
Disclosed is the method of producing a piezo-device utilizing an ultra-thin Mo-C film as a piezoresistive material for a general class of improved piezo-device with the high sensitivity and the weak temperature dependence.
Abstract:
An apparatus for receiving a heterogeneous material includes: a main body coupled and fixed to a main body hole part of the container; a receiving part providing a storage space within the main body; and a foldable part that has a lower portion that is connected to an upper portion of the receiving part, wherein the foldable part has an upper portion that is connected to an upper portion of an opening part and a lower portion of the main body hole part, wherein the foldable part includes a foldable connection part which is disposed on an upper portion of the storage space such that downward displacement of the foldable connection part breaks a receiving part sealing part for sealing a lower end of the receiving part to allow the content within the storage space of the receiving part to drop into the container.
Abstract:
The prevent invention relates to an apparatus for receiving heterogeneous materials which is coupled to a hole part of a container in which a content such as liquid or the like is contained. The apparatus for receiving the heterogeneous materials includes a main body coupled and fixed to a hole part of a container and a receiving part having a storage space within the main body. In the inner storage space of the receiving part, a foldable connection part is disposed in an upper portion of the storage space and an opening part formed below the foldable connection part breaks a receiving part sealing part sealing a lower end of the receiving part to allow a content within the storage space of the receiving part to drop down into the container, thereby mixing the heterogeneous materials. Here, a foldable soft resin may be added to the foldable connection part.
Abstract:
A container for liquid, which discharges contents when the side surfaces thereof are pressed by the fingers. A coupling unit is assembled to the top of the container body so as to discharge the pressed contents. The coupling unit has an outlet comprising a check valve which opens/shuts by means of predetermined pressure. The coupling unit having the outlet is covered with a lid for protecting the outlet. The side surfaces of the container body have pressure adjustment surfaces that protrude inwardly. Predetermined gaps are maintained between the ends of the pressure adjustment surfaces and the side surfaces of the container body, located in front of the ends of the pressure adjustment surfaces.
Abstract:
Disclosed is a connection device to be coupled with a container neck in different standards for use. The connection device is formed with a mouth part at the upper side and a screw thread part at the lower side. The mouth part at the upper portion of the connection device is formed in a screw thread or other shape in the standard corresponding to a bottle lid, and the inside of the screw thread part is formed with a screw thread corresponding to the standard of the container neck. The screw thread is integrally formed or an elastic screw thread is additionally added for the coupling with the necks of a plurality of containers.