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    Apparatus and method for measuring characteristics of surface features
    42.
    发明授权
    Apparatus and method for measuring characteristics of surface features 有权
    用于测量表面特征特征的装置和方法

    公开(公告)号：US07924435B2

    公开(公告)日：2011-04-12

    申请号：US11963693

    申请日：2007-12-21

    Applicant: Xavier Colonna De Lega ,  Peter De Groot

    Inventor： Xavier Colonna De Lega ,  Peter De Groot

    IPC: G01B11/02

    CPC classification number: G01B9/02043 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/9513

    Abstract: An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature.

    Abstract translation: 公开了一种装置，其包括被配置为以第一模式操作以产生对应于测试光的测试对象的不同照明角度的第一组多个干涉测量信号的干涉测量系统，并且在第二模式中产生第二组多个干涉测量信号 对应于测试对象的不同表面位置。 耦合到干涉测量系统的电子处理器被配置为接收第一组干涉测量信号，并被编程以将可从第一组多个干涉测量信号导出的信息与对应于测试对象的多个模型的信息进行比较，以确定与一个或多个特征相关的信息 的测试对象，并输出信息。 在一些实施例中，特征包括欠分辨特征。

    COMPOUND REFERENCE INTERFEROMETER
    43.
    发明申请
    COMPOUND REFERENCE INTERFEROMETER 失效
    化合物参考干扰仪

    公开(公告)号：US20100128276A1

    公开(公告)日：2010-05-27

    申请号：US12541325

    申请日：2009-08-14

    Applicant: Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna de Lega ,  Leslie L. Deck

    Inventor： Peter De Groot ,  Mark Davidson ,  Jan Liesener ,  Xavier Colonna de Lega ,  Leslie L. Deck

    IPC: G01B9/02

    CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

    Abstract: Interferometry system are disclosed that include a detector sub-system including a monitor detector, interferometer optics for combining test light from a test object with primary reference light from a first reference interface and secondary reference light from a second reference interface to form a monitor interference pattern on a monitor detector, wherein the first and second reference interfaces are mechanically fixed with respect to each other and the test light, a scanning stage configured to scan an optical path difference (OPD) between the test light and the primary and secondary reference light to the monitor detector while the detector sub-system records the monitor interference pattern for each of a series of OPD increments, and an electronic processor electronically coupled to the detector sub-system and the scanning stage, the electronic processor being configured to determine information about the OPD increments based on the detected monitor interference pattern.

    Abstract translation: 公开了一种干涉测量系统，其包括检测器子系统，该检测器子系统包括监视器检测器，用于将来自测试对象的测试光与来自第一参考接口的主要参考光组合的来自第二参考接口的第二参考光组合的干涉仪光学元件，以形成监视器干涉图案 在监视器检测器上，其中所述第一参考接口和所述第二参考接口相对于彼此和所述测试光机械地固定;扫描台，被配置为扫描所述测试光和所述主参考光与所述次参考光之间的光程差（OPD） 监视器检测器，同时检测器子系统记录用于一系列OPD增量中的每一个的监视器干涉图案，以及电子处理器，电子耦合到检测器子系统和扫描级，电子处理器被配置为确定关于 OPD根据检测到的监视器干扰模式递增。

    Interferometry method and system including spectral decomposition
    44.
    发明授权
    Interferometry method and system including spectral decomposition 有权
    干涉测量方法和系统包括光谱分解

    公开(公告)号：US07636168B2

    公开(公告)日：2009-12-22

    申请号：US11546119

    申请日：2006-10-11

    Applicant: Xavier Colonna De Lega ,  Peter De Groot

    Inventor： Xavier Colonna De Lega ,  Peter De Groot

    IPC: G01B11/02

    CPC classification number: G01B9/02044 ,  G01B9/02022 ,  G01B9/02037 ,  G01B9/02072 ,  G01B9/0209 ,  G01B2290/70

    Abstract: In general, in one aspect, the disclosure features a method that includes directing measurement light to reflect from a measurement surface and combining the reflected measurement light with reference light, where the measurement light and reference light are derived from a common source, and there is a non-zero optical path length difference between the measurement light and reference light that is greater than a coherence length of the measurement light. The method further includes spectrally dispersing the combined light onto a multi-element detector to detect a spatially-varying intensity pattern, determining spatial information about the measurement surface based on the spatially-varying intensity pattern, and outputting the spatial information.

    Abstract translation: 通常，在一个方面，本发明的特征在于一种方法，其包括引导测量光从测量表面反射并将反射的测量光与参考光组合，其中测量光和参考光源自公共源，并且存在 测量光和参考光之间的非零光程长度差大于测量光的相干长度。 该方法还包括将组合的光谱分散到多元素检测器上以检测空间变化的强度图案，基于空间变化的强度图案确定关于测量表面的空间信息，并输出空间信息。

    Scanning interferometry for thin film thickness and surface measurements
    45.
    发明授权
    Scanning interferometry for thin film thickness and surface measurements 有权
    用于薄膜厚度和表面测量的扫描干涉测量

    公开(公告)号：US07468799B2

    公开(公告)日：2008-12-23

    申请号：US12020351

    申请日：2008-01-25

    Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

    Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

    IPC: G01B9/02 ,  G01B11/28

    CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

    Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

    Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

    APPARATUS AND METHOD FOR MEASURING CHARACTERISTICS OF SURFACE FEATURES
    47.
    发明申请
    APPARATUS AND METHOD FOR MEASURING CHARACTERISTICS OF SURFACE FEATURES 有权
    测量表面特征特征的装置和方法

    公开(公告)号：US20080174784A1

    公开(公告)日：2008-07-24

    申请号：US11963693

    申请日：2007-12-21

    Applicant: Xavier Colonna De Lega ,  Peter de Groot

    Inventor： Xavier Colonna De Lega ,  Peter de Groot

    IPC: G01B9/02 ,  G01B11/02

    CPC classification number: G01B9/02043 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/9513

    Abstract: An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature.

    Abstract translation: 公开了一种装置，其包括被配置为以第一模式操作以产生对应于测试光的测试对象的不同照明角度的第一组多个干涉测量信号的干涉测量系统，并且在第二模式中产生第二组多个干涉测量信号 对应于测试对象的不同表面位置。 耦合到干涉测量系统的电子处理器被配置为接收第一组干涉测量信号，并被编程以将可从第一组多个干涉测量信号导出的信息与对应于测试对象的多个模型的信息进行比较，以确定与一个或多个特征相关的信息 的测试对象，并输出信息。 在一些实施例中，特征包括欠分辨特征。

    Interferometer having a coupled cavity geometry for use with an extended source
    49.
    发明授权
    Interferometer having a coupled cavity geometry for use with an extended source 有权
    干涉仪具有与扩展源一起使用的耦合空腔几何形状

    公开(公告)号：US07046371B2

    公开(公告)日：2006-05-16

    申请号：US10464163

    申请日：2003-06-17

    Applicant: Xavier Colonna De Lega ,  Peter J. De Groot

    Inventor： Xavier Colonna De Lega ,  Peter J. De Groot

    IPC: G01B9/02

    CPC classification number: G01B9/02038 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

    Abstract: In certain aspects, the invention features an interferometry system that utilizes coupled cavities (e.g., at least one remote cavity and a main cavity) and an extended light source. The remote cavity and the main cavity can have similar optical properties (e.g., similar numerical apertures (NA's)), allowing them to introduce offsetting, and therefore compensating, non-zero optical path differences (OPD's) between the measurement and reference beams without degrading interference fringe contrast due to source spatial coherence. In other words, for each non-zero OPD in the main cavity there exists a configuration of the remote cavity such that the total OPD between test and reference chief rays, and between test and reference marginal rays is substantially zero.

    Abstract translation: 在某些方面，本发明的特征在于使用耦合空腔（例如，至少一个远程腔和主腔）和扩展光源的干涉测量系统。 远程腔体和主腔体可以具有相似的光学特性（例如，类似的数值孔径（NA）），允许它们在测量和参考光束之间引入补偿，从而补偿非零光程差（OPD）而不降解 干涉条纹对比由于源空间相干性。 换句话说，对于主腔中的每个非零OPD，存在远程腔的配置，使得测试和参考主射线之间以及测试和参考边缘射线之间的总OPD基本为零。

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