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1.发明授权Low coherence grazing incidence interferometry for profiling and tilt sensing 有权低相干掠入射干涉测量用于剖面和倾斜感测公开(公告)号：US07289224B2
公开(公告)日：2007-10-30
申请号：US10941631
申请日：2004-09-15
IPC分类号： G01B9/02
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.
摘要翻译： 光学系统包括光刻系统，低相干干涉仪和检测器。 光刻系统被配置为用光图案照射物体的一部分并具有参考表面。 低相干干涉仪具有参考光路和测量光路。 沿着基准光路通过的光至少从参考面反射一次，并且沿测量光路通过的光从物体反射至少一次。 检测器被配置为检测包括沿着参考光路已经通过的光和沿着测量光路已经通过的光的低相干干涉信号。 低相干干涉信号指示参考表面和对象之间的空间关系。
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公开(公告)号：US07271918B2
公开(公告)日：2007-09-18
申请号：US10795579
申请日：2004-03-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02011 , G01B9/02044 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/70
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于所述测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 对应于多个模型的信息可以包括关于与测试对象的每个模型相对应的扫描干涉测量信号的变换的至少一个幅度分量的信息。
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公开(公告)号：US07239398B2
公开(公告)日：2007-07-03
申请号：US11520031
申请日：2006-09-12
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
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公开(公告)号：US07102761B2
公开(公告)日：2006-09-05
申请号：US10855788
申请日：2004-05-27
IPC分类号： G01B9/02
CPC分类号： G01B9/02063 , G01B9/02057 , G01B9/0209 , G01B11/0675
摘要： An interferometry method includes: imaging test light reflected from at least a first portion of a test surface to interfere with reference light on a camera and form an interference pattern, wherein the imaging defines a depth of focus for the light reflected from the test surface, and wherein the test light and reference light are derived from a common source; varying an optical path length difference between the test light and reference light over a range larger than the depth of focus, wherein the optical path length difference corresponds to a difference between a first optical path between the common source and the camera for the test light and a second optical path between the common source and the camera for the reference light; and maintaining the first portion of the test surface within the depth of focus as the optical path length difference is varied.
摘要翻译： 干涉测量方法包括：对从测试表面的至少第一部分反射的测试光进行成像，以干涉照相机上的参考光并形成干涉图案，其中所述成像为从所述测试表面反射的光定义焦深， 并且其中所述测试光和参考光源自公共源; 在大于焦深的范围内改变测试光和参考光之间的光程长度差，其中光程长度差对应于测试光的公共源和照相机之间的第一光路之间的差，以及 用于参考光的公共源和照相机之间的第二光路; 以及当所述光路长度差被改变时，将所述测试表面的所述第一部分保持在所述焦深内。
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5.发明申请公开(公告)号：US20100128283A1
公开(公告)日：2010-05-27
申请号：US12509083
申请日：2009-07-24
CPC分类号： G01B9/0209 , G01B9/02007 , G01B9/0201 , G01B9/02027 , G01B9/02039 , G01B9/02057 , G01B9/02068 , G01B9/02077 , G01B11/2441 , G01B2290/45 , G01B2290/70 , Y10T29/49002
摘要： In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.
摘要翻译： 在某些方面，公开了干涉测量方法，其包括为测试对象提供一个或多个干涉测量信号，其中所述干涉测量信号对应于由于噪声而不是彼此均等间隔的光程差（OPD）值序列， 提供关于OPD值序列的不等间距的信息，将每个干涉测量信号分解成来自多个基本函数的贡献，每个基本函数对应于不同的频率，并以不等间隔的OPD值进行采样，并且使用关于来自 每个干涉测量信号的多个基本函数中的每一个确定关于测试对象的信息。
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公开(公告)号：US07324210B2
公开(公告)日：2008-01-29
申请号：US10974466
申请日：2004-10-27
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/0207 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G02F1/13392 , G02F2001/133354
摘要： A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
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7.发明授权Triangulation methods and systems for profiling surfaces through a thin film coating 有权用于通过薄膜涂层对表面进行成形的三角测量方法和系统公开(公告)号：US07292346B2
公开(公告)日：2007-11-06
申请号：US10941622
申请日：2004-09-15
IPC分类号： G01B9/02
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.
摘要翻译： 光学系统包括光刻系统，低相干干涉仪和检测器。 光刻系统被配置为用光图案照射物体的一部分并具有参考表面。 低相干干涉仪具有参考光路和测量光路。 沿着基准光路通过的光至少从参考面反射一次，并且沿测量光路通过的光至少反射一次。 检测器被配置为检测包括沿着参考光路已经通过的光和沿着测量光路已经通过的光的低相干干涉信号。 低相干干涉信号指示参考表面和对象之间的空间关系。
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公开(公告)号：US06714307B2
公开(公告)日：2004-03-30
申请号：US10190353
申请日：2002-07-03
IPC分类号： G01B902
CPC分类号： G01N21/9515 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B9/0209 , G01B11/2441 , G01B11/306 , G01B2290/25
摘要： Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g., spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference wavefronts.
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公开(公告)号：US07106454B2
公开(公告)日：2006-09-12
申请号：US10795808
申请日：2004-03-08
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于所述测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。
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10.发明授权Interferometer having a coupled cavity geometry for use with an extended source 有权干涉仪具有与扩展源一起使用的耦合空腔几何形状公开(公告)号：US07046371B2
公开(公告)日：2006-05-16
申请号：US10464163
申请日：2003-06-17
IPC分类号： G01B9/02
CPC分类号： G01B9/02038 , G01B9/02065 , G01B9/0209 , G01B2290/70
摘要： In certain aspects, the invention features an interferometry system that utilizes coupled cavities (e.g., at least one remote cavity and a main cavity) and an extended light source. The remote cavity and the main cavity can have similar optical properties (e.g., similar numerical apertures (NA's)), allowing them to introduce offsetting, and therefore compensating, non-zero optical path differences (OPD's) between the measurement and reference beams without degrading interference fringe contrast due to source spatial coherence. In other words, for each non-zero OPD in the main cavity there exists a configuration of the remote cavity such that the total OPD between test and reference chief rays, and between test and reference marginal rays is substantially zero.
摘要翻译： 在某些方面，本发明的特征在于使用耦合空腔（例如，至少一个远程腔和主腔）和扩展光源的干涉测量系统。 远程腔体和主腔体可以具有相似的光学特性（例如，类似的数值孔径（NA）），允许它们在测量和参考光束之间引入补偿，从而补偿非零光程差（OPD）而不降解 干涉条纹对比由于源空间相干性。 换句话说，对于主腔中的每个非零OPD，存在远程腔的配置，使得测试和参考主射线之间以及测试和参考边缘射线之间的总OPD基本为零。
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