Evaporation boats for use in vapor deposition
    41.
    发明授权
    Evaporation boats for use in vapor deposition 失效
    用于气相沉积的蒸发船

    公开(公告)号:US4043748A

    公开(公告)日:1977-08-23

    申请号:US715716

    申请日:1976-08-19

    IPC分类号: C23C14/24 C23C14/26 F27B21/04

    CPC分类号: C23C14/243

    摘要: The evaporation boat comprises superposed upper and lower sheets. The upper sheet includes a upwardly convexed central section and a pair of side sections bent back toward the central section and the lower sheet includes a downwardly convexed central section and a pair of side sections bent inwardly toward the upper sheet. The upper and lower sheets are superposed each other such that the central sections of the upper and lower sheets define a substantially closed chamber for accomodating source material to be evaporated, that slit shaped vapor passages are formed between the upper and lower sheets or the opposite sides of the chamber and that any straight line drawn between any point on the surface of the source material and any point in the passages intersects the inner wall of the upper or lower sheets.

    摘要翻译: 蒸发舟包括叠加的上下板。 上片包括向上凸起的中心部分和朝向中心部分向后弯曲的一对侧部,并且下片包括向下凸出的中心部分和朝向上片向内弯曲的一对侧部。 上下板叠合,使得上板和下板的中心部分限定了用于容纳要蒸发的源材料的基本上封闭的室,在上板和下板或相对侧之间形成狭缝形蒸汽通道 并且在源材料表面上的任何点和通道中的任何点之间绘制的任何直线与上部或下部片材的内壁相交。

    CERIA-ZIRCONIA SOLID SOLUTION CRYSTAL FINE PARTICLES AND THEIR PRODUCTION PROCESS
    43.
    发明申请
    CERIA-ZIRCONIA SOLID SOLUTION CRYSTAL FINE PARTICLES AND THEIR PRODUCTION PROCESS 失效
    CERIA-ZIRCONIA固体溶液水晶微粒及其生产工艺

    公开(公告)号:US20100298127A1

    公开(公告)日:2010-11-25

    申请号:US12796492

    申请日:2010-06-08

    IPC分类号: B01J21/02 B01J23/10

    摘要: To provide a process for producing ceria-zirconia solid solution crystal fine particles having high crystallinity, being excellent in uniformity of composition and particle size, having a small particle size and a high specific surface area and being excellent in heat resistance, and such solid solution crystal fine particles.A process comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of (ZrO2+CeO2), from 10 to 60% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 25 to 70% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of heating the amorphous material at a temperature of from 550 to 1000° C. to precipitate a ceria-zirconia solid solution crystal in the amorphous material, and a step of separating components other than the ceria-zirconia solid solution crystal from the obtained precipitates to obtain the ceria-zirconia solid solution crystal fine particles, in this order.

    摘要翻译: 为了提供具有高结晶度的二氧化铈 - 氧化锆固溶体结晶微粒的制造方法,组成和粒度均匀性优异,粒径小,比表面积小,耐热性优异的固溶体 晶体细颗粒。 一种方法包括以下步骤:获得含有以氧化物为基准的摩尔%为5〜50%的(ZrO 2 + CeO 2),10〜60%的RO(其中,R为至少1种选自 由Mg,Ca,Sr和Ba组成的组)和25〜70%的B 2 O 3,使熔融物淬火以获得无定形材料的步骤,在550〜1000℃的温度下加热无定形材料的工序。 在无定型材料中析出二氧化铈 - 氧化锆固溶体晶体,以及从得到的析出物中分离除二氧化铈 - 氧化锆固溶体结晶以外的成分的工序,得到氧化铈 - 氧化锆固溶体结晶微粒。

    FINE PARTICLES OF OXIDE CRYSTAL AND SLURRY FOR POLISHING WHICH CONTAINS THE FINE PARTICLES
    44.
    发明申请
    FINE PARTICLES OF OXIDE CRYSTAL AND SLURRY FOR POLISHING WHICH CONTAINS THE FINE PARTICLES 审中-公开
    氧化物晶体和浆料的精细颗粒,用于含有细颗粒的抛光

    公开(公告)号:US20090113809A1

    公开(公告)日:2009-05-07

    申请号:US12258106

    申请日:2008-10-24

    IPC分类号: C09K3/14 B32B1/00 C01F17/00

    摘要: To provide a slurry for polishing which is excellent in polishing properties, can suppress scratches and is appropriate for accurate polishing in semiconductor production steps, and fine particles of oxide crystal for it.Fine particles of oxide crystal, characterized in that the ratio of the crystallite size measured by X-ray diffraction method and calculated by Scherrer method to the average primary particle size equivalent to sphere from the specific surface area measured by BET is the crystallite size: the average primary particle size=1:0.8 to 1:2.5. A slurry for polishing, characterized in that the fine particles of oxide crystal are dispersed in a liquid medium, and from 0.1 to 40 mass % of the fine particles of oxide crystal are contained, per the total mass of the slurry for polishing.

    摘要翻译: 为了提供抛光性能优异的抛光用浆料,可以抑制划痕,适用于半导体制造工序中的精确研磨以及氧化物结晶用微粒。 氧化物晶体的细颗粒,其特征在于,通过X射线衍射法测量并通过Scherrer方法计算的微晶尺寸与通过BET测量的比表面积相当于球体的平均一次粒径的比率为微晶尺寸: 平均一次粒径= 1:0.8至1:2.5。 一种用于抛光的浆料,其特征在于,将氧化物晶体的细颗粒分散在液体介质中,并且相对于用于抛光的浆料的总质量,含有0.1〜40质量%的氧化物结晶微粒。

    CONDUCTIVE TONER AND PROCESS FOR PRODUCING GLASS PLATE WITH CONDUCTIVE PRINTED WIRING
    46.
    发明申请
    CONDUCTIVE TONER AND PROCESS FOR PRODUCING GLASS PLATE WITH CONDUCTIVE PRINTED WIRING 审中-公开
    导电墨粉和生产具有导电印刷布线的玻璃板的方法

    公开(公告)号:US20070104887A1

    公开(公告)日:2007-05-10

    申请号:US11564922

    申请日:2006-11-30

    IPC分类号: B05D1/32 C03C25/24

    摘要: A process for producing a glass plate with conductive printed wiring which does not require a new screen for each model and which can easily be adjusted for desired electric heating performance or antenna performance, and a conductive toner for such a process. A conductive toner comprising at least one member selected from the group consisting of a thermoplastic resin (A) having carboxyl groups introduced and having T100 of from 300 to 450° C., a polypropylene (B) having carboxyl groups introduced, and a thermoplastic resin (C) having T100 of from 300 to 450° C., conductive fine particles, and glass frit-containing particles. T100 is a temperature at the time when a weight change of the resin has become no longer observed during a temperature rise from room temperature at a rate of 10° C./min by means of a thermogravimetric analyzer (TG).

    摘要翻译: 一种用于制造具有导电印刷布线的玻璃板的方法,其不需要用于每个型号的新屏幕,并且可以容易地调节所需的电加热性能或天线性能,以及用于这种处理的导电调色剂。 一种导电调色剂,其包含选自由引入羧基的热塑性树脂(A)和300-450℃的T 100的至少一种,聚丙烯(B)具有 导入的羧基和300〜450℃的T 100的热塑性树脂(C),导电性微粒和含玻璃料的粒子。 T 100是在室温下以10℃/分钟的速度升温后,通过热重分析仪在树脂的重量变化不再发生变化时的温度 (TG)。

    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
    47.
    发明申请
    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film 失效
    用于形成铁电薄膜的液体组合物和用于制备铁电薄膜的方法

    公开(公告)号:US20060046320A1

    公开(公告)日:2006-03-02

    申请号:US11260209

    申请日:2005-10-28

    IPC分类号: H01L21/00

    摘要: It is an object to provide a liquid composition for forming a thin film, with which a ferroelectric thin film having excellent characteristics can be prepared even by baking at a low temperature, and a process for producing a ferroelectric thin film using it. The above object is achieved by use of a liquid composition for forming a ferroelectric thin film, characterized in that in a liquid medium, ferroelectric oxide particles being plate or needle crystals, which are represented by the formula ABO3 (wherein A is at least one member selected from the group consisting of Ba2+, Sr2+, Ca2+, Pb2+, La2+, K+ and Na+, and B is at least one member selected from the group consisting of Ti4+, Zr4+, Nb5+, Ta5+ and Fe3+) and have a Perovskite structure and which have an average primary particle size of at most 100 nm and an aspect ratio of at least 2, are dispersed, and a soluble metal compound which forms a ferroelectric oxide by heating, is dissolved.

    摘要翻译: 本发明的目的是提供一种用于形成薄膜的液体组合物,即使通过低温烘烤也可制备出具有优异特性的铁电薄膜,以及使用该薄膜制造铁电薄膜的工艺。 上述目的通过使用用于形成铁电薄膜的液体组合物来实现,其特征在于,在液体介质中,由式ABO 3 3表示的板状或针状晶体的铁电氧化物颗粒 (其中A是选自Ba 2+,Sr 2+,Ca 2+,Pb 2+中的至少一种。 > 2 + ,La 2+,K + +和Na + +,B是选自以下的至少一种: 由Ti 4+,Zr 4+,Nb 5+,Ta 5+和Fe 4+组成, 3 +),并且具有钙钛矿结构,其平均初级粒径为至多100nm,纵横比为2以上,通过加热形成铁电氧化物的可溶性金属化合物, 溶解

    Composition for forming dielectric layer, MIM capacitor and process for its production
    48.
    发明申请
    Composition for forming dielectric layer, MIM capacitor and process for its production 失效
    用于形成介电层的组合物,MIM电容器及其制造方法

    公开(公告)号:US20060001069A1

    公开(公告)日:2006-01-05

    申请号:US11150231

    申请日:2005-06-13

    IPC分类号: H01L21/8242 H01L27/108

    摘要: To provide a composition for forming a dielectric layer excellent in dielectric constant and withstand voltage properties, a MIM capacitor and a process for its production. A composition for forming a dielectric layer, which comprises fine particles of perovskite type dielectric crystal, glass frit, and a hydrolysable silicon compound or its oligomer, and a MIM capacitor comprising a substrate, and a bottom electrode layer, a dielectric layer having a structure such that fine particles of perovskite type dielectric crystal are dispersed in a silicon oxide matrix containing glass-forming ions and a top electrode, formed on the substrate in this order.

    摘要翻译: 为了提供用于形成介电常数和耐电压性能优异的介电层的组合物,MIM电容器及其制造方法。 一种用于形成电介质层的组合物,其包含钙钛矿型电介质晶体的微细颗粒,玻璃料和可水解硅化合物或其低聚物,以及包含基底的MIM电容器和底部电极层,具有结构 使得细小颗粒的钙钛矿型电介质晶体分散在含有玻璃形成离子的氧化硅基体和顶部电极中,所述氧化硅基体依次形成在基板上。

    Polishing compound for semiconductor containing peptide
    50.
    发明授权
    Polishing compound for semiconductor containing peptide 失效
    含半胱氨酸肽的抛光剂

    公开(公告)号:US06679761B1

    公开(公告)日:2004-01-20

    申请号:US10111410

    申请日:2002-05-06

    IPC分类号: B24B100

    CPC分类号: C09G1/02 C09K3/1463

    摘要: A polishing compound and a polishing method are provided, whereby in a CMP process in a process for production of a semiconductor device, a metal layer and/or a barrier layer, etc., can be polished while suppressing excessive oxidation of the metal layer, and the polishing rate can be adjusted depending upon the application. A polishing compound comprising polishing abrasive grains and a peptide, a polishing compound slurry having such a polishing compound suspended in an aqueous medium, preferably together with an oxidizing agent and preferably at a pH of at least 7, and a method for polishing a metal layer of e.g. Cu and/or a barrier layer, formed on a semiconductor substrate, by polishing with an abrasive cloth of a CMP apparatus having such a polishing compound slurry supported thereon, are disclosed.

    摘要翻译: 提供了抛光剂和抛光方法,由此在制造半导体器件的工艺中的CMP工艺中,金属层和/或阻挡层等可被抛光,同时抑制金属层的过度氧化, 并且可以根据应用来调整抛光速率。 包括抛光磨粒和肽的抛光化合物,具有悬浮在水性介质中的抛光化合物的抛光化合物浆料,优选与氧化剂一起,优选在至少7的pH下,以及抛光金属层的方法 例如 Cu和/或阻挡层,通过用其上载有研磨化合物浆料的CMP设备的研磨布进行研磨,形成在半导体衬底上。