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63 条记录 (耗时 0.025 秒)

    Gas inlets for wafer processing chamber
    41.
    发明授权
    Gas inlets for wafer processing chamber 失效
    晶圆处理室气体入口

    公开(公告)号：US5916369A

    公开(公告)日：1999-06-29

    申请号：US485058

    申请日：1995-06-07

    申请人： Roger N. Anderson ,  Peter W. Hey ,  David K. Carlson ,  Mahalingam Venkatesan ,  Norma Riley

    发明人： Roger N. Anderson ,  Peter W. Hey ,  David K. Carlson ,  Mahalingam Venkatesan ,  Norma Riley

    IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/48 ,  C30B25/14 ,  C23C16/00

    CPC分类号： C23C16/45504 ,  C23C16/455 ,  C23C16/45514 ,  C23C16/45561 ,  C23C16/481 ,  C30B25/14

    摘要： A system of supplying processing fluid to a substrate processing apparatus having walls, the inner surfaces of which define a processing chamber in which a substrate supporting susceptor is located. The system consists of a number of fluid storages, each which stores a separate processing fluid, at least two fluid conduits along which processing fluid flows from the fluid storages to the processing apparatus and a fluid inlet which connects the fluid conduits to the processing chamber. The inlet has a separate fluid passage, corresponding to each of the fluid conduits, formed along it. Each fluid passage opens at or near an inner surface of a wall to together define a fluid mixing zone, so that fluid moving along one fluid passage is prevented from mixing with fluid moving along any other passage until reaching the mixing zone.

    摘要翻译： 向具有壁的基板处理装置供给处理流体的系统，其内表面限定了处理室，基板支撑基座位于该处理室中。 该系统由许多流体储存器组成，每个流体存储器存储单独的处理流体，至少两个流体管道，处理流体从该流体流体流过流体储存器至处理装置;以及流体入口，其将流体导管连接到处理室。 入口具有与沿其形成的每个流体管道相对应的单独的流体通道。 每个流体通道在壁的内表面处或附近开口以一起限定流体混合区域，从而防止沿着一个流体通道移动的流体与沿着任何其它通道移动的流体混合直到到达混合区域。

    Method and apparatus for controlling the temperature of reaction chamber walls
    42.
    发明授权
    Method and apparatus for controlling the temperature of reaction chamber walls 失效
    用于控制反应室壁温度的方法和装置

    公开(公告)号：US5855677A

    公开(公告)日：1999-01-05

    申请号：US831797

    申请日：1997-04-08

    申请人： David K. Carlson ,  Norma Riley ,  Roger N. Anderson

    发明人： David K. Carlson ,  Norma Riley ,  Roger N. Anderson

    IPC分类号： C23C16/44 ,  C23C16/48 ,  C23C16/52 ,  H01L21/00

    CPC分类号： C23C16/4405 ,  C23C16/481 ,  C23C16/52 ,  H01L21/67248 ,  Y10S438/905

    摘要： An apparatus and a concomitant method for controlling coolant (air) flow proximate a reaction chamber within a workpiece processing system such that the temperature of a wall of the reaction chamber is maintained at a predefined target temperature. The target temperature is typically a temperature that optimizes a process concurrently being accomplished within the chamber, e.g., utilizing one temperature during deposition processes and a different temperature during cleaning processes. The apparatus contains a temperature measuring device to measure the temperature of the chamber wall. The measured temperature is compared to the predefined target temperature. A closed loop system controls the air flow proximate the chamber walls such that the measured temperature becomes substantially equal to the target temperature. Air flow control is provided by an air flow control device located within an inlet conduit that supplies air to a shroud for channeling the air past the reaction chamber. The shroud forms a portion of a housing which supports and encloses the reaction chamber.

    摘要翻译： 一种用于控制工件处理系统内的反应室附近的冷却剂（空气）流的装置和并发方法，使得反应室的壁的温度保持在预定的目标温度。 目标温度通常是优化室内同时进行的过程的温度，例如在沉积过程期间利用一个温度和在清洁过程期间不同的温度。 该装置包含用于测量室壁温度的温度测量装置。 将测量的温度与预定的目标温度进行比较。 闭环系统控制靠近室壁的空气流，使得测量的温度基本上等于目标温度。 空气流量控制由位于入口管道内的空气流量控制装置提供，该进气管道将空气供给到护罩，以将空气引导通过反应室。 护罩形成支撑并包围反应室的壳体的一部分。

    Apparatus for the turbulent mixing of gases
    44.
    发明授权
    Apparatus for the turbulent mixing of gases 失效
    用于气体湍流混合的装置

    公开(公告)号：US5523063A

    公开(公告)日：1996-06-04

    申请号：US984403

    申请日：1992-12-02

    申请人： Roger N. Anderson

    发明人： Roger N. Anderson

    IPC分类号： B01F3/02 ,  B01F5/00 ,  B01F5/02 ,  H01L21/22 ,  B01F15/02

    CPC分类号： B01F5/0256 ,  B01F5/0057

    摘要： The present invention discloses an apparatus and method for the turbulent mixing of gases. The invention has particular application when it is desired to produce a gas mixture including a very small quantity (ppm or less) of at least one component gas and/or wherein there is a substantial density difference between the component gases to be used to make up the gas mixture. The apparatus comprises: a tubular housing; at least two orifices or jets located near one end of the housing, through which gases to be mixed can enter the interior of the housing, the orifices or jets being oriented so that a first portion of gas flowing from a first orifice or jet will directly impact a second portion of gas flowing from a second orifice or jet, whereby frictional mixing of the gas components is achieved, further, the centerline of the first orifice or jet is offset from the centerline of the second, opposing orifice or jet, so as to produce a swirling action within the tubular interior of the gas mixer; and an exit opening at the opposite end of the tubular housing.

    摘要翻译： 本发明公开了一种用于气体湍流混合的装置和方法。 当希望产生包含非常少量（ppm或更少）至少一种组分气体的气体混合物和/或其中用于组成的组分气体之间存在实质密度差时，本发明具有特殊应用 气体混合物。 该装置包括：管状壳体; 位于壳体一端附近的至少两个孔或喷嘴，待混合的气体可以通过该孔或喷嘴进入壳体的内部，所述孔或射流被定向成使得从第一孔或射流流动的第一部分气体将直接 撞击从第二孔或射流流出的气体的第二部分，从而实现气体组分的摩擦混合，此外，第一孔或射流的中心线偏离第二相对的孔或射流的中心线，以便 以在气体混合器的管状内部产生旋动作用; 以及在管状壳体的相对端处的出口。

    METRICS MONITORING AND FINANCIAL VALIDATION SYSTEM (M2FVS) FOR TRACKING PERFORMANCE OF CAPITAL, OPERATIONS, AND MAINTENANCE INVESTMENTS TO AN INFRASTRUCTURE
    48.
    发明申请
    METRICS MONITORING AND FINANCIAL VALIDATION SYSTEM (M2FVS) FOR TRACKING PERFORMANCE OF CAPITAL, OPERATIONS, AND MAINTENANCE INVESTMENTS TO AN INFRASTRUCTURE 有权
    用于跟踪资本，运营和维护对基础设施投资绩效的衡量监测和金融确认系统（M2FVS）

    公开(公告)号：US20130073488A1

    公开(公告)日：2013-03-21

    申请号：US13589737

    申请日：2012-08-20

    申请人： Roger N. Anderson ,  Albert Boulanger ,  Leon L. Wu

    发明人： Roger N. Anderson ,  Albert Boulanger ,  Leon L. Wu

    IPC分类号： G06F15/18

    CPC分类号： G06Q10/04

    摘要： Techniques for evaluating the accuracy of a predicted effectiveness of an improvement to an infrastructure include collecting data, representative of at least one pre-defined metric, from the infrastructure during first and second time periods corresponding to before and after a change has been implemented, respectively. A machine learning system can receive compiled data representative of the first time period and generate corresponding machine learning data. A machine learning results evaluator can empirically analyze the generated machine learning data. An implementer can implement the change to the infrastructure based at least in part on the data from a machine learning data outputer. A system performance improvement evaluator can compare the compiled data representative of the first time period to that of the second time period to determine a difference, if any, and compare the difference, if any, to a prediction based on the generated machine learning data.

    摘要翻译： 用于评估对基础设施改进的预测有效性的准确性的技术包括分别在对应于改变之前和之后的第一和第二时间段期间从基础设施收集表示至少一个预定义度量的数据 。 机器学习系统可以接收代表第一时间段的编译数据并产生相应的机器学习数据。 机器学习结果评估器可以经验性地分析生成的机器学习数据。 至少部分地基于来自机器学习数据输出器的数据，实现者可以实现对基础设施的改变。 系统性能改进评估器可以将表示第一时间段的编译数据与第二时间周期的编译数据进行比较，以确定差异（如果有的话），并根据所生成的机器学习数据将差值（如果有的话）与预测进行比较。

    METHODS AND SYSTEMS OF DETERMINING THE EFFECTIVENESS OF CAPITAL IMPROVEMENT PROJECTS
    49.
    发明申请
    METHODS AND SYSTEMS OF DETERMINING THE EFFECTIVENESS OF CAPITAL IMPROVEMENT PROJECTS 审中-公开
    确定资本改进项目效率的方法与制度

    公开(公告)号：US20110231213A1

    公开(公告)日：2011-09-22

    申请号：US12885800

    申请日：2010-09-20

    申请人： Roger N. Anderson ,  Albert Boulanger ,  Samantha Cook ,  John Johnson

    发明人： Roger N. Anderson ,  Albert Boulanger ,  Samantha Cook ,  John Johnson

    IPC分类号： G06Q10/00

    CPC分类号： G06Q40/06 ,  G06Q10/063

    摘要： The present application provides methods and systems for quantitatively predicting an effectiveness of a proposed capital improvement project based on one or more previous capital improvement projects representative of one or more physical assets and including one or more attributes that includes defining a first sample pool from the previous capital improvement project data in which said previous capital improvement project has been performed, defining a second sample in which the previous capital improvement project has not been performed, the second sample pool including one or more attribute values that are the same as, or similar to, the attribute values for the first sample pool, generating a performance metric for each of the first and second sample pools, comparing the performance metric from the first sample pool with the performance metric from the second sample pool to determine a net performance metric, and, generating a prediction of effectiveness of the proposed capital improvement project concerning based on said net performance metric.

    摘要翻译： 本申请提供方法和系统，用于基于一个或多个代表一个或多个物理资产的以前的资本改进项目定量地预测所提出的资本改进项目的有效性，并且包括一个或多个属性，所述一个或多个属性包括从先前的 已经执行了所述先前资本改进项目的资本改进项目数据，定义了尚未执行先前资本改进项目的第二个样本，第二样本池包括一个或多个与之相同或相似的属性值 ，所述第一样本池的属性值，为每个第一和第二样本池生成性能度量，将来自第一样本池的性能度量与来自第二样本池的性能度量进行比较以确定净性能度量，以及 ，产生建议资本的有效性的预测i 基于所述净性能指标的改进项目。