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41.发明申请CAPACITIVE MICRO-ELECTRO-MECHANICAL FORCE SENSOR AND CORRESPONDING FORCE SENSING METHOD 有权电容式微机电力传感器及相应的力传感方法公开(公告)号：US20150135860A1
公开(公告)日：2015-05-21
申请号：US14539640
申请日：2014-11-12
Applicant: STMicroelectronics S.r.l.
Inventor： Sebastiano Conti , Daniele Prati , Domenico Giusti
IPC: G01L1/14
Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.
Abstract translation: MEMS力传感器具有：基板; 耦合到所述衬底的固定电极; 以及在所述固定电极处悬置在所述基板上方的移动电极，以限定感测电容器，所述移动电极被设计为由于施加要检测的力而发生变形。 在静止状态下，介电材料区域设置在固定电极上并与气动间隙隔开间隔开。 通过施加力的最小可检测值，移动电极承受电介质材料区域，使得当力增加时，移动电极和电介质材料区域之间的接触表面尤其以基本线性的方式增加 。
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公开(公告)号：US12251729B2
公开(公告)日：2025-03-18
申请号：US17497542
申请日：2021-10-08
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Fabio Quaglia , Marco Ferrera
Abstract: A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.
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公开(公告)号：US12251508B2
公开(公告)日：2025-03-18
申请号：US17958723
申请日：2022-10-03
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Oriana Rita Antonia Di Marco , Domenico Giusti
Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.
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44.发明授权公开(公告)号：US12195327B2
公开(公告)日：2025-01-14
申请号：US17497538
申请日：2021-10-08
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Marco Ferrera , Fabio Quaglia
Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.
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公开(公告)号：US12185633B2
公开(公告)日：2024-12-31
申请号：US18329975
申请日：2023-06-06
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini
Abstract: A MEMS device having a body with a first and a second surface, a first portion and a second portion. The MEMS device further has a cavity extending in the body from the second surface; a deformable portion between the first surface and the cavity; and a piezoelectric actuator arranged on the first surface, on the deformable portion. The deformable portion has a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region is adjacent to the first region and to the first portion of the body.
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Patent Agency Ranking
公开(公告)号：US12023919B2
公开(公告)日：2024-07-02
申请号：US18064829
申请日：2022-12-12
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Andrea Nicola Colecchia , Gaetano Santoruvo
IPC: B41J2/03 , H10N30/074 , H10N30/20 , H10N39/00
CPC classification number: B41J2/03 , H10N30/074 , H10N30/2047 , H10N39/00
Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.
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公开(公告)号：US11981558B2
公开(公告)日：2024-05-14
申请号：US17240782
申请日：2021-04-26
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini
CPC classification number: B81B3/007 , B81C1/00658 , F16K31/005 , H04R1/02 , H04R3/00 , H04R7/04 , H04R7/18 , H04R19/02 , B81B2201/0257 , B81B2201/054 , B81B2203/0127 , B81B2203/0315 , B81B2203/0338 , B81B2203/04 , B81B2207/03 , H04R2201/003
Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.
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公开(公告)号：US11884071B2
公开(公告)日：2024-01-30
申请号：US17572374
申请日：2022-01-10
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini , Lorenzo Tentori
CPC classification number: B41J2/14201 , B41J2/1433 , B41J2/1652
Abstract: Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.
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公开(公告)号：US11807519B2
公开(公告)日：2023-11-07
申请号：US17337296
申请日：2021-06-02
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Fabio Quaglia
CPC classification number: B81B7/0016 , B81C1/00825 , F16F15/007 , B81B2203/0118 , B81B2203/0127 , B81B2203/0307 , B81B2207/03 , B81C2203/032 , F16F2226/042
Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.
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公开(公告)号：US11541653B2
公开(公告)日：2023-01-03
申请号：US16882215
申请日：2020-05-22
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Andrea Nicola Colecchia , Gaetano Santoruvo
IPC: B41J2/03 , H01L27/20 , H01L41/09 , H01L41/314
Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.
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