-
公开(公告)号:US20200006567A1
公开(公告)日:2020-01-02
申请号:US16484148
申请日:2018-02-07
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor: Yuta ENDO , Hiromi SAWAI , Hajime KIMURA , Shunpei YAMAZAKI
IPC: H01L29/786 , H01L29/66 , H01L21/02
Abstract: A high-performance and highly reliable semiconductor device can be provided.The semiconductor device includes a first oxide; a second oxide over the first oxide; a source electrode and a drain electrode over the second oxide; a third oxide over the second oxide, the source electrode, and the drain electrode; a fourth oxide over the third oxide; a gate insulating film over the fourth oxide; and a gate electrode over the gate insulating film. The band gap of the first oxide is substantially the same as the band gap of the fourth oxide, the band gap of the second oxide is substantially the same as the band gap of the third oxide, the band gap of the first oxide is larger than the band gap of the second oxide, and the fourth oxide is less likely to transmit oxygen than the third oxide.
-
公开(公告)号:US20200006402A1
公开(公告)日:2020-01-02
申请号:US16565546
申请日:2019-09-10
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Yuta ENDO
IPC: H01L27/12 , G02F1/1368
Abstract: A semiconductor device with high aperture ratio is provided. The semiconductor device includes a transistor and a capacitor having a pair of electrodes. An oxide semiconductor layer formed over the same insulating surface is used for a channel formation region of the transistor and one of the electrodes of the capacitor. The other electrode of the capacitor is a transparent conductive film. One electrode of the capacitor is electrically connected to a wiring formed over the insulating surface over which a source electrode or a drain electrode of the transistor is provided, and the other electrode of the capacitor is electrically connected to one of the source electrode and the drain electrode of the transistor.
-
公开(公告)号:US20190189622A1
公开(公告)日:2019-06-20
申请号:US16275380
申请日:2019-02-14
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Tomoaki ATSUMI , Shuhei NAGATSUKA , Tamae MORIWAKA , Yuta ENDO
IPC: H01L27/115 , H01L29/24 , G11C11/24 , H01L27/06 , H01L27/1156 , H01L29/786 , G11C11/408 , G11C11/403 , G11C8/14 , G11C7/16 , H01L27/11551
Abstract: [Problem] To provide a semiconductor device suitable for miniaturization. To provide a highly reliable semiconductor device. To provide a semiconductor device with improved operating speed.[Solving Means] A semiconductor device including a memory cell including first to cth (c is a natural number of 2 or more) sub memory cells, wherein: the jth sub memory cell includes a first transistor, a second transistor, and a capacitor; a first semiconductor layer included in the first transistor and a second semiconductor layer included in the second transistor include an oxide semiconductor; one of terminals of the capacitor is electrically connected to a gate electrode included in the second transistor; the gate electrode included in the second transistor is electrically connected to one of a source electrode and a drain electrode which are included in the first transistor; and when j≥2, the jth sub memory cell is arranged over the j-1th sub memory cell.[Selected Drawing] FIG. 8
-
公开(公告)号:US20180269327A1
公开(公告)日:2018-09-20
申请号:US15983145
申请日:2018-05-18
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Yuta ENDO
IPC: H01L29/786 , H01L21/8234 , H01L27/088 , H01L29/10
CPC classification number: H01L29/7869 , H01L21/823412 , H01L27/088 , H01L27/1225 , H01L29/1033 , H01L29/78648 , H01L29/78696
Abstract: A high-performance semiconductor device with high reliability is provided. The semiconductor device includes a first transistor, a second transistor, a first metal oxide covering at least part of the first transistor, an insulating film over the first transistor and the second transistor, and a second metal oxide over the insulating film. The first transistor includes a first gate electrode, a first gate insulating film, a first oxide, a first source electrode, a first drain electrode, a second gate insulating film, and a second gate electrode. The second transistor includes a third gate electrode, a third gate insulating film, a second oxide, a second source electrode, a second drain electrode, a fourth gate insulating film, and a fourth gate electrode. The first gate insulating film and the second gate insulating film are in contact with the first metal oxide.
-
公开(公告)号:US20180254291A1
公开(公告)日:2018-09-06
申请号:US15966231
申请日:2018-04-30
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei YAMAZAKI , Yuta ENDO , Kiyoshi KATO , Satoru OKAMOTO
IPC: H01L27/12 , H01L21/02 , H01L29/66 , H01L29/786 , H01L21/768 , H01L23/528 , H01L23/532 , H01L27/105 , H01L29/24
CPC classification number: H01L27/1207 , H01L21/0206 , H01L21/0214 , H01L21/02178 , H01L21/02183 , H01L21/02266 , H01L21/02271 , H01L21/0228 , H01L21/02323 , H01L21/0234 , H01L21/3105 , H01L21/31155 , H01L21/76813 , H01L21/76825 , H01L21/76826 , H01L21/76828 , H01L21/76832 , H01L21/76834 , H01L21/8258 , H01L23/528 , H01L23/53295 , H01L27/0629 , H01L27/0688 , H01L27/088 , H01L27/092 , H01L27/1052 , H01L27/1225 , H01L29/24 , H01L29/66969 , H01L29/78648 , H01L29/7869
Abstract: A highly reliable semiconductor device suitable for miniaturization and high integration is provided. The semiconductor device includes a first insulator; a transistor over the first insulator; a second insulator over the transistor; a first conductor embedded in an opening in the second insulator; a barrier layer over the first conductor; a third insulator over the second insulator and over the barrier layer; and a second conductor over the third insulator. The first insulator, the third insulator, and the barrier layer have a barrier property against oxygen and hydrogen. The second insulator includes an excess-oxygen region. The transistor includes an oxide semiconductor. The barrier layer, the third insulator, and the second conductor function as a capacitor.
-
公开(公告)号:US20180190826A1
公开(公告)日:2018-07-05
申请号:US15907343
申请日:2018-02-28
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Yuta ENDO
IPC: H01L29/786 , H01L29/66 , H01L29/24
CPC classification number: H01L29/7869 , H01L21/8258 , H01L27/0688 , H01L27/1207 , H01L27/1225 , H01L27/1259 , H01L29/24 , H01L29/66969 , H01L29/785 , H01L29/78618 , H01L29/78648 , H01L29/78696
Abstract: A miniaturized transistor with less variation and highly stable electrical characteristics is provided. Further, high performance and high reliability of a semiconductor device including the transistor are achieved. A semiconductor and a conductor are formed over a substrate, a sacrificial layer is formed over the conductor, and an insulator is formed to cover the sacrificial layer. After that, a top surface of the insulator is removed to expose a top surface of the sacrificial layer. The sacrificial layer and a region of the conductor overlapping with the sacrificial layer are removed, whereby a source region, a drain region, and an opening are formed. Next, a gate insulator and a gate electrode are formed in the opening.
-
公开(公告)号:US20170271519A1
公开(公告)日:2017-09-21
申请号:US15605211
申请日:2017-05-25
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Toshinari SASAKI , Hitomi SATO , Kosei NODA , Yuta ENDO , Mizuho IKARASHI , Keitaro IMAI , Atsuo ISOBE , Yutaka OKAZAKI
IPC: H01L29/786 , H01L29/66
Abstract: It is an object to manufacture a semiconductor device in which a transistor including an oxide semiconductor has normally-off characteristics, small fluctuation in electric characteristics, and high reliability. First, first heat treatment is performed on a substrate, a base insulating layer is formed over the substrate, an oxide semiconductor layer is formed over the base insulating layer, and the step of performing the first heat treatment to the step of forming the oxide semiconductor layer are performed without exposure to the air. Next, after the oxide semiconductor layer is formed, second heat treatment is performed. An insulating layer from which oxygen is released by heating is used as the base insulating layer.
-
公开(公告)号:US20170256547A1
公开(公告)日:2017-09-07
申请号:US15601154
申请日:2017-05-22
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Kosei NODA , Yuta ENDO
IPC: H01L27/108 , H01L21/02 , H01L27/12 , H01L29/423 , H01L29/786
CPC classification number: H01L27/10873 , H01L21/02554 , H01L21/02565 , H01L27/10805 , H01L27/1225 , H01L29/42384 , H01L29/7869 , H01L29/78696
Abstract: A semiconductor memory device includes a transistor and a capacitor. The transistor includes: an insulating film in which a groove portion is provided; a pair of electrodes separated so that the groove portion is sandwiched therebetween; an oxide semiconductor film which is in contact with the pair of electrodes and side surfaces and a bottom surface of the groove portion and has a thickness value smaller than a depth value of the groove portion; a gate insulating film covering the oxide semiconductor film; and a gate electrode provided to overlap with the oxide semiconductor film with the gate insulating film positioned therebetween.
-
公开(公告)号:US20170243874A1
公开(公告)日:2017-08-24
申请号:US15591150
申请日:2017-05-10
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Tomoaki ATSUMI , Shuhei NAGATSUKA , Tamae MORIWAKA , Yuta ENDO
IPC: H01L27/115 , H01L29/24 , G11C11/24 , H01L29/786
CPC classification number: H01L27/115 , G11C7/16 , G11C8/14 , G11C11/24 , G11C11/403 , G11C11/4085 , H01L27/0688 , H01L27/11551 , H01L27/1156 , H01L29/24 , H01L29/7869
Abstract: [Problem] To provide a semiconductor device suitable for miniaturization. To provide a highly reliable semiconductor device. To provide a semiconductor device with improved operating speed.[Solving Means] A semiconductor device including a memory cell including first to cth (c is a natural number of 2 or more) sub memory cells, wherein: the jth sub memory cell includes a first transistor, a second transistor, and a capacitor; a first semiconductor layer included in the first transistor and a second semiconductor layer included in the second transistor include an oxide semiconductor; one of terminals of the capacitor is electrically connected to a gate electrode included in the second transistor; the gate electrode included in the second transistor is electrically connected to one of a source electrode and a drain electrode which are included in the first transistor; and when j≧2, the jth sub memory cell is arranged over the j−1th sub memory cell.
-
公开(公告)号:US20170236842A1
公开(公告)日:2017-08-17
申请号:US15430746
申请日:2017-02-13
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shinpei MATSUDA , Masayuki SAKAKURA , Yuki HATA , Shuhei NAGATSUKA , Yuta ENDO , Shunpei YAMAZAKI
IPC: H01L27/12 , H01L29/786
CPC classification number: H01L27/1222 , H01L27/1225 , H01L27/1237 , H01L29/78648 , H01L29/7869 , H01L29/78696
Abstract: A semiconductor device with high design flexibility is provided. A first transistor and a second transistor having electrical characteristics different from those of the first transistor are provided over the same layer without significantly increasing the number of manufacturing steps. For example, semiconductor materials with different electron affinities are used for a semiconductor layer in which a channel of the first transistor is formed and a semiconductor layer in which a channel of the second transistor is formed. This allows the threshold voltages of the first transistor and the second transistor to differ from each other. Forming a gate electrode using a damascene process enables miniaturization and high density of the transistors. Furthermore, a highly-integrated semiconductor device is provided.
-
-
-
-
-
-
-
-
-