公开(公告)号：US09581245B2

公开(公告)日：2017-02-28

申请号：US13437107

申请日：2012-04-02

申请人： Qingpo Xi ,  Tao Li ,  Feng Cao ,  Fumin He ,  Zhongwei Chen

发明人： Qingpo Xi ,  Tao Li ,  Feng Cao ,  Fumin He ,  Zhongwei Chen

IPC分类号： F16L23/20 ,  F16J15/08

CPC分类号： F16J15/0881 ,  F16L23/20

摘要： A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.

摘要翻译： 提出了一种用于真空系统的金属密封法兰组件。 其金属垫片的横截面形状是不规则六边形，分别在最长侧和第二和第三最长边之间具有两个锐角。 不规则六边形的最长边是金属垫片的垂直内壁。 这种设计可以减少密封金属密封凸缘组件所需的法向力，并减少所需的螺栓数量，从而在有限的工作空间中使用。

公开(公告)号：US20150349325A1

公开(公告)日：2015-12-03

申请号：US14654256

申请日：2013-12-20

申请人： Zhongwei CHEN ,  Dong Un LEE ,  Woong Hey PARK ,  Kun FENG

发明人： Zhongwei Chen ,  Dong Un Lee ,  Hey Woong Park ,  Kun Feng

IPC分类号： H01M4/04 ,  H01M4/86 ,  H01M12/08 ,  H01M4/88

CPC分类号： H01M4/0497 ,  C30B7/14 ,  C30B29/16 ,  C30B29/60 ,  H01M4/0471 ,  H01M4/8615 ,  H01M4/88 ,  H01M4/8803 ,  H01M4/8825 ,  H01M4/9016 ,  H01M12/08

摘要： A method of producing a bi-functional electrode for a metal-air battery or fuel cell comprises growing metal oxide nanowires directly on a metal support using a chemical deposition process. Preferably, the chemical process comprises an ammonium evaporation process. The metal support is preferably a porous metal structure, such as a metal mesh or foam. The metal oxide nanowires are formed of any transition metal or mixed transition metal. Preferably, the nanowires comprise cobalt oxide nanowires.

摘要翻译： 制造金属 - 空气电池或燃料电池用双功能电极的方法包括使用化学沉积工艺在金属载体上直接生长金属氧化物纳米线。 优选地，化学方法包括铵蒸发方法。 金属载体优选为多孔金属结构，例如金属网或泡沫。 金属氧化物纳米线由任何过渡金属或混合过渡金属形成。 优选地，纳米线包括氧化钴纳米线。

公开(公告)号：US09000394B2

公开(公告)日：2015-04-07

申请号：US13464261

申请日：2012-05-04

申请人： Weiming Ren ,  Zhongwei Chen

发明人： Weiming Ren ,  Zhongwei Chen

IPC分类号： H01J37/14

CPC分类号： H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

摘要： The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

摘要翻译： 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

公开(公告)号：US08274046B1

公开(公告)日：2012-09-25

申请号：US13111851

申请日：2011-05-19

申请人： Weiming Ren ,  Zhongwei Chen

发明人： Weiming Ren ,  Zhongwei Chen

IPC分类号： G21K1/08 ,  H01J37/21 ,  H01J37/20

CPC分类号： H01J37/28 ,  G21K1/093 ,  H01J37/05 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/153

摘要： This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

摘要翻译： 本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉， 无色分离和单色仪内部。 因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。 对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。 本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

公开(公告)号：US20100159305A1

公开(公告)日：2010-06-24

申请号：US11376768

申请日：2006-03-15

申请人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

发明人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

IPC分类号： H01M4/92 ,  H01M4/88

CPC分类号： H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

摘要翻译： 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

公开(公告)号：US11257659B1

公开(公告)日：2022-02-22

申请号：US17302820

申请日：2021-05-12

申请人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

发明人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC分类号： H01J37/28 ,  H01J37/153 ,  H01J37/147 ,  H01J37/14

摘要： The present invention provides an electrode assembly comprising two or more electrodes arranged around a primary axis forming a non-cylindrical channel space. General electronic apparatus/device, particularly apparatus of charged-particle beam such as electron microscope, may use the electrode assembly to create an optimized pattern of electrical field within non-cylindrical channel space. When the electrode assembly is used as a beam deflector in a magnetic objective lens, the electrical field within the central channel space can be co-optimized with the magnetic field for reducing aberration(s) such as distortion, field curvature, astigmatism, and chromatic aberration, after the beam passes through the central channel space.

公开(公告)号：US11094499B1

公开(公告)日：2021-08-17

申请号：US17178249

申请日：2021-02-18

申请人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

发明人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC分类号： H01J37/20 ,  H01J37/26

摘要： The present invention provides an apparatus of charged-particle beam such as an electron microscope including a specimen table that can slide on a planar surface around the lower pole piece of the objective lens. The specimen table is confined in a specimen stage having one elastic protrusion and one or more elastic force receiving parts (e.g three permanent protrusions) that contact and press the table. When the specimen is under microscopic examination, disturbing vibration cannot generate a force sufficient to overcome the limiting friction between the specimen table and the planar surface of the objective lens. The invention exhibits numerous technical merits such as minimal or zero vibration noise, and improved image quality, among others.

公开(公告)号：US10749171B2

公开(公告)日：2020-08-18

申请号：US15548549

申请日：2016-02-05

申请人： Zhongwei Chen ,  Aiping Yu ,  Fathy Mohamed Hassan

发明人： Zhongwei Chen ,  Aiping Yu ,  Fathy Mohamed Hassan

IPC分类号： H01M4/36 ,  H01M4/04 ,  H01M4/133 ,  H01M4/1395 ,  H01M4/1393 ,  H01M4/62 ,  H01M4/134 ,  H01M10/052 ,  H01M4/136 ,  H01M4/1397 ,  H01M4/583 ,  H01M4/66 ,  H01M10/0525 ,  H01M4/02

摘要： A method for preparing an electrode for use in lithium batteries and the resulting electrodes are described The method comprises coating a slurry of silicon, sulfur doped graphene and polyacrylonitrile on a current collector followed by sluggish heat treatment.

公开(公告)号：US10205194B2

公开(公告)日：2019-02-12

申请号：US14600585

申请日：2015-01-20

申请人： Zhongwei Chen ,  Michael Fowler ,  Hadis Zarrin

发明人： Zhongwei Chen ,  Michael Fowler ,  Hadis Zarrin

IPC分类号： H01M10/26 ,  H01M8/10 ,  H01M8/106 ,  H01M8/1062 ,  H01M8/1069 ,  H01M8/08 ,  H01M8/083 ,  H01M12/04 ,  C08J9/28 ,  C08J9/40 ,  C08J5/22 ,  C25B13/08 ,  C08J9/00

摘要： A porous electrolytic composite membrane for electrochemical energy systems, such as alkaline fuel cells, metal-air batteries and alkaline electrolyzers, comprises a porous polymeric material and nanomaterials. The polymeric material is preferably polybenzimidazole (PBI). The nanomaterials are preferably functionalized or non-functionalized. The nanomaterials are preferably titania nanotubes and/or graphene oxide nanosheets. The membrane further comprises an electrolyte solution, such as KOH. A method of preparing the membrane is also provided.

公开(公告)号：US09464967B2

公开(公告)日：2016-10-11

申请号：US14284328

申请日：2014-05-21

申请人： Zhongwei Chen

发明人： Zhongwei Chen

IPC分类号： G01N1/06 ,  G01N1/28 ,  B26D7/18

CPC分类号： G01N1/06 ,  B26D7/1845 ,  G01N1/286 ,  G01N2001/061 ,  G01N2001/063 ,  G01N2001/066 ,  G01N2001/2873 ,  Y10T83/0448 ,  Y10T83/0453 ,  Y10T83/2066 ,  Y10T83/2096

摘要： Provided is a microtomic system and process for the preparation of sections for microscope examination. A cutting edge in the system can cut through a sample block and produce a section one end of which remains attached to the cutting edge. A voltage generator can generate a voltage and apply the voltage between the cutting edge and a section receiver such as a semiconductor chip grid. Through electrostatic force caused by the voltage, another end of the section can anchor to the section receiver. The section is then spread on the receiver. The system is automatable, highly efficient, and does not need liquid to float sample sections, and can therefore maintain the integration of the sample sections.

摘要翻译： 提供了用于制备用于显微镜检查的切片的显微镜系统和方法。 系统中的切割边缘可以切割出样品块，并产生其一端保持连接到切割边缘的部分。 电压发生器可以产生电压并且在切割边缘和诸如半导体芯片格栅之类的部分接收器之间施加电压。 通过由电压引起的静电力，该部分的另一端可以锚定到部分接收器。 然后将该部分扩展到接收器。 该系统是可自动化的，高效率的，并且不需要液体漂浮样品部分，因此可以保持样品部分的整合。