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公开(公告)号:US06473221B2
公开(公告)日:2002-10-29
申请号:US09803014
申请日:2001-03-12
申请人: Satoshi Ueda , Ippei Sawaki , Yoshihiro Mizuno
发明人: Satoshi Ueda , Ippei Sawaki , Yoshihiro Mizuno
IPC分类号: G02B2608
CPC分类号: G02B26/0841 , G11B7/08564 , Y10T156/1052
摘要: A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
摘要翻译: 提供了制作电流镜的方法。 它包括以下步骤。 首先,准备形成有多个镜面板区域的第一材料基板。 镜面板区域与电动反射镜的镜板相对应。 然后,准备形成有多个驱动板区域的第二材料基板。 驱动器板区域布置成与电流镜的驱动器板对应。 然后,将第一和第二材料基板彼此附接,使得每个镜板区域面对相关的一个驱动器板区域。 最后,连接的第一和第二材料基底被分成单独的气体镜。
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公开(公告)号:US20110124143A1
公开(公告)日:2011-05-26
申请号:US13020101
申请日:2011-02-03
申请人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号: H01L21/52
CPC分类号: H01L23/055 , B81B7/0038 , B81B2201/0235 , G01P1/023 , G01P15/0802 , H01L23/564 , H01L24/05 , H01L24/16 , H01L24/48 , H01L24/49 , H01L24/73 , H01L25/0657 , H01L2224/0401 , H01L2224/05553 , H01L2224/05554 , H01L2224/16 , H01L2224/48091 , H01L2224/48227 , H01L2224/48235 , H01L2224/484 , H01L2224/49175 , H01L2224/73257 , H01L2224/8192 , H01L2224/8592 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01033 , H01L2924/01047 , H01L2924/01075 , H01L2924/10161 , H01L2924/1461 , H01L2924/15153 , H01L2924/15165 , H01L2924/16195 , H01L2924/06 , H01L2924/00 , H01L2224/45099 , H01L2224/05599
摘要: A packaged device includes a package having an inner surface defining a closed internal space, a device chip fixed to the package in the internal space, and a parylene film covering at least a part of the inner surface of the package and/or at least a part of a surface of the device chip.
摘要翻译: 封装装置包括具有限定封闭内部空间的内表面的封装,固定在内部空间中的封装的器件芯片和覆盖封装的内表面的至少一部分的聚对二甲苯膜和/或至少一个 器件芯片表面的一部分。
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公开(公告)号:US07880951B2
公开(公告)日:2011-02-01
申请号:US12059859
申请日:2008-03-31
申请人: Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto
发明人: Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto
IPC分类号: G02B26/00
CPC分类号: G02B26/0841 , B81B3/0086 , B81B2201/033 , B81B2201/047
摘要: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.
摘要翻译: 微振荡装置包括框架,包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分,其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端部延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。
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公开(公告)号:US20100245964A1
公开(公告)日:2010-09-30
申请号:US12688919
申请日:2010-01-18
申请人: Yoshihiro Mizuno
发明人: Yoshihiro Mizuno
IPC分类号: G02B26/08
CPC分类号: G02B26/0841 , B81B3/004 , B81B2203/0109
摘要: A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body.
摘要翻译: 通过利用MEMS技术等制造的微结构包括:框架,包括具有第一层的部分和在第一层的下侧具有第二层的部分; 可移动体,包括具有第一层的部分和具有第二层的部分; 以及具有第一层的至少一个摆动支撑部分,并且在框架中连接具有第一层的部分和在可移动体中具有第一层的部分,以支撑可移动体以能够摆动。 摆动支撑部的框架侧端部通过框架中具有第二层的部分从下方支撑,并且摆动支撑部的可动体侧端部从下方被具有第二层的部分支撑在 移动体。
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公开(公告)号:US20100194235A1
公开(公告)日:2010-08-05
申请号:US12761123
申请日:2010-04-15
申请人: Osamu TSUBOI , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
发明人: Osamu TSUBOI , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
IPC分类号: H02N11/00
CPC分类号: B81B3/0086 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/058 , G02B26/0841
摘要: A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).
摘要翻译: 提供一种适用于抑制驱动特性的劣化的微型可移动装置,以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置(X1)包括可动部,包括第一驱动电极,用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极,第一导体部分(22c),电连接到 第一驱动电极,与第二驱动电极电连接的第二导体部分(22b)和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分(21a) (22c)经由绝缘膜(23)经由绝缘膜(23)与第二导体部(22b)接合。
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公开(公告)号:US07755824B2
公开(公告)日:2010-07-13
申请号:US12219010
申请日:2008-07-15
申请人: Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
发明人: Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
IPC分类号: G02B26/08
CPC分类号: G02B26/085 , G02B26/0841 , Y10S359/904
摘要: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
摘要翻译: 提供了一种微镜单元,其包括框架,形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线,镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。
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公开(公告)号:US07751108B2
公开(公告)日:2010-07-06
申请号:US11987899
申请日:2007-12-05
申请人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号: G02B26/0841 , G02B26/085 , H02N1/008
摘要: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译: 微型致动元件(X1)包括可移动单元(111),框架(112)和用于连接它们的联接器(113),其中单元,框架和耦合器一体地形成在具有多个 由导电层(110a-110c)(例如芯导电层(110b))和介于导电层(110a-110c)之间的绝缘层(110d,110e)组成。 可移动单元(111)包括源于芯导电层(110b)的第一结构。 框架(112)包括源于芯导电层(110b)的第二结构。 耦合器(113)包括多个电分离的扭杆(113a,113b),其产生在芯导电层(110b)中并且连续地连接到第一结构和第二结构。
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公开(公告)号:US20080285108A1
公开(公告)日:2008-11-20
申请号:US11987899
申请日:2007-12-05
申请人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号: G02B26/0841 , G02B26/085 , H02N1/008
摘要: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译: 微致动元件(X 1)包括可移动单元(111),框架(112)和用于连接它们的耦合器(113),其中单元,框架和耦合器一体形成在具有 由导电层(110a-110c),例如芯导电层(110b)和介于导电层(110a-110c)之间的绝缘层(110d,110e))组成的多层结构, 。 可移动单元(111)包括源于芯导电层(110b)的第一结构。 框架(112)包括源于芯导电层(110b)的第二结构。 耦合器(113)包括多个电分离的扭力杆(113a,113b),其产生在芯导电层(110b)中并连续地连接到第一结构和第二结构。
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公开(公告)号:US07416120B2
公开(公告)日:2008-08-26
申请号:US11411027
申请日:2006-04-26
申请人: Yohei Kawada , Yoshihiro Mizuno
发明人: Yohei Kawada , Yoshihiro Mizuno
IPC分类号: G06K15/00
CPC分类号: G07G1/0045 , G06Q20/203 , G06Q30/02
摘要: An identifier such as an IC tag attached to a commodity is read by an antenna connected to a display rack or an information terminal. A server receives the read result, analyse the purchase action of the customer from the identifier ID, the antenna position information, etc, and proposes a totalization result. For example, detailed information of purchase actions for each customer such as a read result for each commodity and a commodity simultaneously read is displayed on terminals for the manager of the shop and managers at headquarters. The totalization result is displayed for the customer as a popular or good selling commodity of the shop on an information terminal inside the shop.
摘要翻译: 通过连接到显示架或信息终端的天线读取诸如附接到商品的IC标签的标识符。 服务器接收读取结果,从标识符ID,天线位置信息等分析客户的购买动作,并提出累计结果。 例如,每个商品的购买行为的详细信息,例如每个商品的读取结果和同时读取的商品的显示在总部的商店经理和经理的终端上。 店铺内信息终端店铺的流行或畅销商品,为客户显示累计结果。
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公开(公告)号:US06887396B2
公开(公告)日:2005-05-03
申请号:US09950710
申请日:2001-09-13
申请人: Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人: Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
CPC分类号: B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译: 提供了一种用于制造微镜单元的方法,该微镜单元包括框架,反射镜形成基座和将框架连接到反射镜形成基座的桥。 该方法包括以下步骤。 首先,在基板上形成第一掩模图案,以掩蔽基板的被加工成框架和反射镜形成基座的部分。 然后,在衬底上形成第二掩模图案,用于掩蔽加工成桥的衬底部分。 然后,以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。 然后,选择性地去除第二掩模图案。 然后,以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。 最后,删除第一个掩模图案。
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