公开(公告)号：US09208993B2

公开(公告)日：2015-12-08

申请号：US14558334

申请日：2014-12-02

Applicant: FEI Company

Inventor： Albertus Aemillius Seyno Sluijterman ,  Eric Gerardus Theodoor Bosch

IPC: H01J37/26 ,  H01J37/244

CPC classification number: H01J37/244 ,  G01N23/225 ,  G01N2223/418 ,  H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/221 ,  H01J2237/2441 ,  H01J2237/24495 ,  H01J2237/2804 ,  H01J2237/2813

Abstract: A method of investigating a flux of output electrons emanating from a sample in a charged-particle microscope, which flux is produced in response to irradiation of the sample by a beam of input charged particles, the method comprising the following steps: Using a detector to intercept at least a portion of the flux so as to produce a set {Ij} of pixeled images Ij of at least part of the sample, whereby the cardinality of the set {Ij} is M>1. For each pixel p, in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: An average signal strength S per pixel position i; A variance σ2S in S per pixel position i. Using these values S and σ2S to at least one map of said part of the sample, selected from the group comprising: A first map, representing variation in energy of detected electrons as a function of position. A second map, representing variation in number of detected electrons as a function of position. The set {Ij} may be produced in different ways, such as: By iteratively repeating a procedure whereby an entire nth image In is captured before proceeding to capture an entire (n+1)th image In+1, or By iteratively repeating a procedure whereby, at an nth pixel position, a plurality M of different detector samples is collected before proceeding to an (n+1)th pixel position.

Abstract translation: 一种调查在带电粒子显微镜中从样品发出的输出电子的通量的方法，该电流响应于通过输入带电粒子束的样品的照射而产生，该方法包括以下步骤：使用检测器 截取通量的至少一部分，以便产生至少部分样本的像素图像Ij的集合{Ij}，由此集合{Ij}的基数为M> 1。 对于每个像素p，在每个图像Ij中，确定累加的信号强度Sij，从而产生一组相关的信号强度{Sij}。 使用集合{Sij}计算以下值：每个像素位置i的平均信号强度S; 每个像素位置S的方差和s s 2S。 将这些值S和＆sgr; 2S用于从包括以下的组中选择的所述样本部分的至少一个图：第一映射，其表示作为位置的函数的检测到的电子的能量变化。 第二个映射，表示作为位置的函数的检测到的电子数量的变化。 集合{Ij}可以以不同的方式产生，例如：通过迭代地重复一个过程，由此在进行捕获整个第（n + 1）个图像In + 1之前捕获整个第n个图像In，或者通过迭代地重复 在第n个像素位置处，在进行第（n + 1）个像素位置之前收集多个不同检测器样本的过程。

公开(公告)号：US20150155131A1

公开(公告)日：2015-06-04

申请号：US14558334

申请日：2014-12-02

Applicant: FEI Company

Inventor： Albertus Aemillius Seyno Sluijterman ,  Eric Gerardus Theodoor Bosch

IPC: H01J37/244 ,  H01J37/26

CPC classification number: H01J37/244 ,  G01N23/225 ,  G01N2223/418 ,  H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/221 ,  H01J2237/2441 ,  H01J2237/24495 ,  H01J2237/2804 ,  H01J2237/2813

Abstract: A method of investigating a flux of output electrons emanating from a sample in a charged-particle microscope, which flux is produced in response to irradiation of the sample by a beam of input charged particles, the method comprising the following steps: Using a detector to intercept at least a portion of the flux so as to produce a set {Ij} of pixeled images Ij of at least part of the sample, whereby the cardinality of the set {Ij} is M>1. For each pixel p, in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: An average signal strength S per pixel position i; A variance σ2S in S per pixel position i. Using these values S and σ2S to at least one map of said part of the sample, selected from the group comprising: A first map, representing variation in energy of detected electrons as a function of position. A second map, representing variation in number of detected electrons as a function of position. The set {Ij} may be produced in different ways, such as: By iteratively repeating a procedure whereby an entire nth image In is captured before proceeding to capture an entire (n+1)th image In+1, or By iteratively repeating a procedure whereby, at an nth pixel position, a plurality M of different detector samples is collected before proceeding to an (n+1)th pixel position.

Abstract translation: 一种调查在带电粒子显微镜中从样品发出的输出电子的通量的方法，该电流响应于通过输入带电粒子束的样品的照射而产生，该方法包括以下步骤：使用检测器 截取通量的至少一部分，以便产生至少部分样本的像素图像Ij的集合{Ij}，由此集合{Ij}的基数为M> 1。 对于每个像素p，在每个图像Ij中，确定累加的信号强度Sij，从而产生一组相关的信号强度{Sij}。 使用集合{Sij}计算以下值：每个像素位置i的平均信号强度S; 每个像素位置S的方差和s s 2S。 将这些值S和＆sgr; 2S用于从包括以下的组中选择的所述样本部分的至少一个图：第一映射，其表示作为位置的函数的检测到的电子的能量变化。 第二个映射，表示作为位置的函数的检测到的电子数量的变化。 集合{Ij}可以以不同的方式产生，例如：通过迭代地重复一个过程，由此在进行捕获整个第（n + 1）个图像In + 1之前捕获整个第n个图像In，或者通过迭代地重复 在第n个像素位置处，在进行第（n + 1）个像素位置之前收集多个不同检测器样本的过程。

公开(公告)号：US08766185B2

公开(公告)日：2014-07-01

申请号：US12688095

申请日：2010-01-15

Applicant: Tomokazu Shimakura ,  Masaki Hasegawa

Inventor： Tomokazu Shimakura ,  Masaki Hasegawa

IPC: G01N23/225 ,  H01J37/02 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/04 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/153 ,  H01J2237/1536 ,  H01J2237/2008

Abstract: The charged particle beam device has an unlimitedly rotatable sample stage and an electric field control electrode for correcting electric field distortion at a sample peripheral part. A voltage is applied to a sample on the unlimitedly rotatable sample stage through a retarding electrode that is in contact with a holder receiver at a rotation center of a rotary stage. An equipotential plane on the electric field control electrode is varied by applying a voltage to the electric field control electrode, and following this the equipotential plane at a sample edge is corrected, which enables the sample to be observed as far as its edge.

Abstract translation: 带电粒子束装置具有无限旋转的样品台和用于校正样品周边部分的电场失真的电场控制电极。 通过在旋转台的旋转中心处与保持器接收器接触的延迟电极将电压施加到无限可旋转的样品台上的样品。 通过向电场控制电极施加电压来改变电场控制电极上的等电位面，并且在此之后校正样品边缘处的等电位面，使得可以将样品观察到其边缘。

公开(公告)号：US08274046B1

公开(公告)日：2012-09-25

申请号：US13111851

申请日：2011-05-19

Applicant: Weiming Ren ,  Zhongwei Chen

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

CPC classification number: H01J37/28 ,  G21K1/093 ,  H01J37/05 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/153

Abstract: This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

Abstract translation: 本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉， 无色分离和单色仪内部。 因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。 对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。 本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

公开(公告)号：US20110220795A1

公开(公告)日：2011-09-15

申请号：US13045068

申请日：2011-03-10

Applicant: Jürgen FROSIEN

Inventor： Jürgen FROSIEN

IPC: H01J37/29

CPC classification number: H01J37/147 ,  H01J37/1471 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/1514 ,  H01J2237/153 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

Abstract: A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.

Abstract translation: 描述带电粒子束装置的柱。 该柱包括用于发射初级带电粒子束作为初级带电粒子束的一个源的带电粒子发射器; 适于作用于初级带电粒子束的双棱镜，从而产生两个虚拟源; 以及带电粒子束光学器件，其适于将带电粒子束同时聚焦在对应于两个虚拟源的图像的样本的两个位置上。

公开(公告)号：US20110095182A1

公开(公告)日：2011-04-28

申请号：US12985708

申请日：2011-01-06

Applicant: Shohei Terada ,  Yoshihumi Taniguchi ,  Kazutoshi Kaji

Inventor： Shohei Terada ,  Yoshihumi Taniguchi ,  Kazutoshi Kaji

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/05 ,  H01J37/224 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/10 ,  H01J2237/153 ,  H01J2237/24485 ,  H01J2237/2485 ,  H01J2237/30433

Abstract: A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.

Abstract translation: 通过使用激励电流的参数设计方法，通过模拟来确定多透镜的最佳条件，调整透镜电子显微镜的电子光谱仪的多个多极透镜的透镜调整方法和透镜调整系统 的多极镜头作为参数。

公开(公告)号：US20100237231A1

公开(公告)日：2010-09-23

申请号：US12661480

申请日：2010-03-18

Applicant: Jiong Chen

Inventor： Jiong Chen

IPC: H01J37/317 ,  H01J49/26 ,  H01J37/147

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/1475 ,  H01J2237/153 ,  H01J2237/166 ,  H01J2237/24528 ,  H01J2237/24542 ,  H01J2237/30433 ,  H01J2237/30483

Abstract: An ion implantation apparatus with multiple operating modes is disclosed. The ion implantation apparatus has an ion source and an ion extraction means for forming a converging beam on AMU-non-dispersive plane therefrom. The ion implantation apparatus includes magnetic scanner prior to a magnetic analyzer for scanning the beam on the non-dispersive plane, the magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. A rectangular quadruple magnet is provided to collimate the scanned ion beam and fine corrections of the beam incident angles onto a target. A deceleration or acceleration system incorporating energy filtering is at downstream of the beam collimator. A two-dimensional mechanical scanning system for scanning the target is disclosed, in which a beam diagnostic means is build in.

Abstract translation: 公开了一种具有多种工作模式的离子注入装置。 离子注入装置具有离子源和用于在其AMU非分散平面上形成会聚束的离子提取装置。 离子注入装置包括在用于扫描非分散平面上的束的磁分析仪之前的磁扫描器，用于选择具有特定质荷比的离子的磁分析器通过质量狭缝以投射到基底上。 提供矩形四极磁体以准直扫描的离子束并将光束入射角精细校正到目标上。 结合能量过滤的减速或加速系统位于射束准直仪的下游。 公开了一种用于扫描目标的二维机械扫描系统，其中构建了光束诊断装置。

公开(公告)号：US20100204927A1

公开(公告)日：2010-08-12

申请号：US12296700

申请日：2007-04-12

Applicant: Brian P. Geiser ,  Thomas F. Kelly ,  Jason Schneir ,  Jay P. Roberts ,  David J. Larson ,  Scott A. Wiener

Inventor： Brian P. Geiser ,  Thomas F. Kelly ,  Jason Schneir ,  Jay P. Roberts ,  David J. Larson ,  Scott A. Wiener

IPC: G06F19/00 ,  G06T15/00 ,  G01N31/00

CPC classification number: H01J37/285 ,  H01J37/265 ,  H01J2237/153 ,  H01J2237/223 ,  H01J2237/226 ,  H01J2237/24571 ,  H01J2237/24592

Abstract: The present invention relates to atom probe data processes and associated systems. Aspects of the invention are directed toward a computing system configured to process atom probe data that includes a data set receiving component configured to receive a first three-dimensional data set. The first three-dimensional data set has a first data element structure and is based on data collected from performing an atom probe process on a portion of an atom probe specimen. The system further includes a data set constructing component configured to create a second three-dimensional data set having a second data element structure different than the first data element structure. In selected embodiments, the system can further include a Fourier Transform component configured to perform a Fourier Transform on a portion of the second three-dimensional data set.

Abstract translation: 本发明涉及原子探针数据处理和相关系统。 本发明的方面针对被配置为处理原子探测数据的计算系统，该原子探测数据包括被配置为接收第一三维数据集的数据集接收部件。 第一个三维数据集具有第一数据元素结构，并且基于在原子探针样本的一部分上执行原子探测过程收集的数据。 该系统还包括一个数据集构成部件，被配置为创建具有与第一数据元素结构不同的第二数据元素结构的第二三维数据集。 在所选择的实施例中，系统还可以包括被配置为在第二三维数据集的一部分上执行傅里叶变换的傅立叶变换分量。

公开(公告)号：US20090045340A1

公开(公告)日：2009-02-19

申请号：US12183726

申请日：2008-07-31

Applicant: Shohei TERADA ,  Yoshihumi Taniguchi ,  Kazutoshi Kaji

Inventor： Shohei TERADA ,  Yoshihumi Taniguchi ,  Kazutoshi Kaji

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/05 ,  H01J37/224 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/10 ,  H01J2237/153 ,  H01J2237/24485 ,  H01J2237/2485 ,  H01J2237/30433

Abstract: A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.

Abstract translation: 通过使用激励电流的参数设计方法，通过模拟来确定多透镜的最佳条件，调整透镜电子显微镜的电子光谱仪的多个多极透镜的透镜调整方法和透镜调整系统 的多极镜头作为参数。

公开(公告)号：US20080067398A1

公开(公告)日：2008-03-20

申请号：US11808342

申请日：2007-06-08

Applicant: Shojiro Dohi

Inventor： Shojiro Dohi

IPC: H01J1/50

CPC classification number: H01J49/30 ,  H01J37/1475 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/153 ,  H01J2237/31701

Abstract: In an analyzing electromagnet 40, each of magnetic poles 80 in which the plan-view shape is curved is divided along the traveling direction of an ion beam 2 into three partial magnetic poles 81 to 83. The gaps of the first and third partial magnetic pole pairs 81, 83 as counted from the inlet for the ion beam 2 are widened toward the outside of the curvature, and the gap of the second partial magnetic pole pair 82 is widened toward the inside of the curvature.

Abstract translation: 在分析用电磁铁40中，将平面形状为曲面的磁极80沿着离子束2的行进方向分割成三个部分磁极81〜83。 从离子束2的入口开始计数的第一和第三部分磁极对81,83的间隙朝向曲率的外侧变宽，并且第二部分磁极对82的间隙朝向 曲率。