公开(公告)号：US20110158281A1

公开(公告)日：2011-06-30

申请号：US12899886

申请日：2010-10-07

Applicant: Shinji NAGAI ,  Fumika YOSHIDA ,  Osamu WAKABAYASHI ,  Kouji KAKIZAKI

Inventor： Shinji NAGAI ,  Fumika YOSHIDA ,  Osamu WAKABAYASHI ,  Kouji KAKIZAKI

IPC: H01S3/034

CPC classification number: H01S3/034 ,  G02B1/02 ,  G02B5/3091 ,  H01S3/0346 ,  H01S3/08054 ,  H01S3/0816 ,  H01S3/225 ,  H01S3/2251

Abstract: A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a axis and a axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their axis.

Abstract translation: 使用减少由于机械应力（窗口保持器和激光气体压力）的破裂的氟化钙晶体，来自光吸收等的热应力的气体放电室增加了输出激光器的线性极化的程度，并抑制了劣化 由于强紫外线（特别是ArF）激光照射。 气体放电室的第一窗口（2）和第二窗口（3）具有与其氟化钙晶体的（111）晶面平行的入射面和发射平面。 关于进入氟化钙晶体的激光通过包括第一窗口（2）和第二窗口（3）中的每一个的<111>轴和<001>轴的平面的布置，从内侧看 室（1），第一窗口（2）和第二窗口（3）被布置在围绕其<111>轴线沿相同方向旋转相同角度的位置。

公开(公告)号：US20110102759A1

公开(公告)日：2011-05-05

申请号：US12987039

申请日：2011-01-07

Applicant: Alexander I. Ershov ,  William N. Partlo ,  Daniel J. W. Brown ,  Igor V. Fomenkov ,  Robert A. Bergstedt ,  Richard L. Sandstrom ,  Ivan Lalovic

Inventor： Alexander I. Ershov ,  William N. Partlo ,  Daniel J. W. Brown ,  Igor V. Fomenkov ,  Robert A. Bergstedt ,  Richard L. Sandstrom ,  Ivan Lalovic

IPC: G03B27/54

CPC classification number: H01S3/225 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/083 ,  H01S3/10092 ,  H01S3/2251 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2383 ,  H01S2301/02

Abstract: A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.

Abstract translation: 一种方法和装置可以包括线变窄的脉冲准分子或分子氟气放电激光系统，其可以包括种子激光振荡器，其产生包括可以包括第一气体放电准分子或分子氟激光室的脉冲的激光输出光束的输出; 第一振荡器腔内的线窄模块; 在第二气体放电准分子或分子氟激光室中包含放大增益介质的激光放大级，其接收种子激光振荡器的输出并放大种子激光振荡器的输出，以形成激光系统输出，其包括激光输出光束 脉冲，其可以包括环形功率放大级。

公开(公告)号：US20110058588A1

公开(公告)日：2011-03-10

申请号：US12927012

申请日：2010-11-03

Applicant: Alexander I. Ershov ,  Igor V. Fomenkov ,  Norbert R. Bowering ,  Jerzy R. Hoffman

Inventor： Alexander I. Ershov ,  Igor V. Fomenkov ,  Norbert R. Bowering ,  Jerzy R. Hoffman

IPC: H01S3/22 ,  H01S3/00

CPC classification number: H01S3/105 ,  G03F7/70033 ,  H01S3/005 ,  H01S3/115 ,  H01S3/2232 ,  H01S3/225 ,  H01S3/2325 ,  H01S2301/02 ,  H05G2/003 ,  H05G2/008

Abstract: A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*L0, where “N” is an integer and “x” is a number between 0.4 and 0.6.

Abstract translation: 本文描述了一种器件，其可以包括具有振荡器腔长度L0并且限定振荡器路径的振荡器; 和与所述振荡器耦合的多通光放大器以建立包括所述振荡器路径的组合光腔，所述组合腔具有长度L组合，其中L组合=（N + x）* L0，其中“N”是整数， “x”是介于0.4和0.6之间的数字。

公开(公告)号：US07881350B2

公开(公告)日：2011-02-01

申请号：US11730973

申请日：2007-04-05

Applicant: Hidekazu Miyairi ,  Akihisa Shimomura ,  Tamae Takano ,  Masaki Koyama

Inventor： Hidekazu Miyairi ,  Akihisa Shimomura ,  Tamae Takano ,  Masaki Koyama

IPC: H01S3/10

CPC classification number: B23K26/08 ,  B23K26/704 ,  H01S3/005 ,  H01S3/225 ,  Y10S117/904

Abstract: It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that can perform uniform a process with a laser beam to an object uniformly. The present invention provides a laser apparatus comprising an optical system for sampling a part of a laser beam emitted from an oscillator, a sensor for generating an electric signal including fluctuation in energy of the laser beam as a data from the part of the laser beam, a means for performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam, and controlling a relative speed of an beam spot of the laser beam to an object in order to change in phase with the fluctuation in energy of the laser beam.

Abstract translation: 本发明的目的是提供一种可以使激光束对物体均匀地进行均匀处理的半导体器件的激光装置，激光照射方法和制造方法。 本发明提供了一种激光装置，其包括用于对从振荡器发射的激光束的一部分进行取样的光学系统，用于产生包括激光束的能量波动的电信号作为来自激光束的一部分的数据的传感器， 用于对电信号执行信号处理以掌握激光束的能量波动的状态的装置，以及将激光束的光点相对于物体的相对速度控制为与第一激光束 激光束的能量。

公开(公告)号：US07856044B2

公开(公告)日：2010-12-21

申请号：US11787463

申请日：2007-04-16

Applicant: Richard L. Sandstrom ,  Tae (Mark) H. Chung ,  Richard C. Ujazdowski

Inventor： Richard L. Sandstrom ,  Tae (Mark) H. Chung ,  Richard C. Ujazdowski

IPC: H01S3/097

CPC classification number: H01S3/038 ,  H01S3/0381 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2366

Abstract: Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.

Abstract translation: 本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法，其中一个或两个电极由于侵蚀而经受尺寸变化。 可以执行电极延伸以增加室的寿命，在室的寿命或两者都增加激光器性能。 可操作地，可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数，例如带宽，脉冲到脉冲能量稳定性，光束尺寸等。

公开(公告)号：US07830942B2

公开(公告)日：2010-11-09

申请号：US11900527

申请日：2007-09-11

Applicant: Wayne J. Dunstan ,  Robert N. Jacques

Inventor： Wayne J. Dunstan ,  Robert N. Jacques

IPC: H01S3/22 ,  H01S3/223

CPC classification number: H01S3/225 ,  H01S3/1305 ,  H01S3/134

Abstract: A method and apparatus is disclosed which may comprise: a gas discharge laser system energy controller which may comprise: a laser system energy controller providing a first laser operating parameter control signal based on an error signal related to a value of the output energy of the laser system compared to a target value for output energy and an energy controller model of the value of the first laser operating parameter necessary to change the value of the laser system output energy to the target value; a first laser system operating parameter control signal modifier providing a modification to the first laser system operating parameter control signal based upon a controller signal modification model of the impact of a second laser system operating parameter on the value of the first laser system operating parameter necessary to change the value of the output energy to the target value.

Abstract translation: 公开了一种方法和装置，其可以包括：气体放电激光系统能量控制器，其可以包括：激光系统能量控制器，其基于与激光器的输出能量的值相关的误差信号提供第一激光器操作参数控制信号 系统与输出能量的目标值相比，以及将激光系统输出能量的值改变为目标值所需的第一激光器操作参数的值的能量控制器模型; 第一激光系统操作参数控制信号修改器，其基于第二激光系统操作参数对第一激光系统操作参数的值的控制器信号修改模型，提供对第一激光系统操作参数控制信号的修改， 将输出能量的值更改为目标值。

公开(公告)号：US07804879B2

公开(公告)日：2010-09-28

申请号：US11804795

申请日：2007-05-21

Applicant: Igor Bragin ,  Vadim Berger

Inventor： Igor Bragin ,  Vadim Berger

IPC: H01S3/097

CPC classification number: H01S3/0385 ,  H01S3/225

Abstract: A gas discharge laser includes elongated discharge electrodes having an active surface width that varies along the length of the resonator. In one example each of the electrodes is formed by a row of pins having a circular active surface. The pins are diametrically aligned with the active surfaces generally coplanar.

Abstract translation: 气体放电激光器包括具有沿谐振器的长度变化的有源表面宽度的细长放电电极。 在一个示例中，每个电极由具有圆形有源表面的一排销形成。 这些销与活动表面沿径向对齐，大致共面。

公开(公告)号：USRE41457E1

公开(公告)日：2010-07-27

申请号：US11091005

申请日：2005-03-25

Applicant: Peter C. Newman ,  John T. Melchior ,  Richard L. Sandstrom

Inventor： Peter C. Newman ,  John T. Melchior ,  Richard L. Sandstrom

IPC: H01S3/13 ,  H01S3/08

CPC classification number: G03F7/70358 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/02 ,  H01S3/03 ,  H01S3/0811 ,  H01S3/0971 ,  H01S3/225

Abstract: An optical configuration to illuminate an etalon in a laser wavemeter with a minimum level of light intensity. The system includes optical components to direct a portion of the laser output beam representing the entire cross section of the beam, through an etalon positioned in an etalon housing and onto a photodetector. A first lens condenses the size of the beam sample, and a second lens re-collimates the beam which then passes into the etalon housing, ensuring that all of the spatial components of the beam are adequately sampled. A diffractive diffusing element is incorporated into the optical path. In a preferred embodiment, the diffractive diffusing element is placed within the etalon housing between said plano-concave lens and the etalon. In another preferred embodiment, the diffusing element is located up stream but outside the housing in the optical path.

Abstract translation: 以最小光强度照射激光波长计中的标准具的光学配置。 该系统包括光学部件，用于通过位于标准室外壳中的标准具和光电检测器来引导代表光束整个横截面的激光输出光束的一部分。 第一透镜会凝缩束样品的尺寸，并且第二透镜将光束重新准直，然后光束进入标准室壳体，确保光束的所有空间分量被充分地采样。 衍射漫射元件被结合到光路中。 在优选实施例中，衍射漫射元件放置在所述平凹透镜和标准具之间的标准室壳体内。 在另一优选实施例中，漫射元件位于光路中的上游之外，而在壳体外部。

公开(公告)号：US07760788B2

公开(公告)日：2010-07-20

申请号：US12170249

申请日：2008-07-09

Applicant: Sergei V. Govorkov ,  Alexander O. W. Wiessner ,  Timur V. Misyuryaev ,  Alexander Jacobson ,  Gongxue Hua ,  Rainer Paetzel ,  Thomas Schroeder ,  Hans-Stephan Albrecht

Inventor： Sergei V. Govorkov ,  Alexander O. W. Wiessner ,  Timur V. Misyuryaev ,  Alexander Jacobson ,  Gongxue Hua ,  Rainer Paetzel ,  Thomas Schroeder ,  Hans-Stephan Albrecht

IPC: H01S3/22

CPC classification number: H01S3/10092 ,  H01S3/08031 ,  H01S3/083 ,  H01S3/097 ,  H01S3/225 ,  H01S2301/02

Abstract: Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.

Abstract translation: 激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。 功率振荡器包括用于限制可放大的辐射带宽的光学装置。 与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。 功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

公开(公告)号：US07751461B2

公开(公告)日：2010-07-06

申请号：US12184712

申请日：2008-08-01

Applicant: John Hoose

Inventor： John Hoose

IPC: H01S3/22

CPC classification number: H01S3/08036 ,  H01S3/08004 ,  H01S3/1055 ,  H01S3/225

Abstract: An excimer laser cavity is disclosed which includes at least one grating-prism (grism) and a wavelength-selective diffraction grating arranged in sequence. The grism grating surface faces the gain medium and produces an expanded beam which is diffracted on the same side of the prism grating surface normal as the incident beam. The expanded diffracted beam is transmitted through a second surface of the grism either to another grating surface of an additional grism or to a wavelength-selective diffraction grating operating in Littrow configuration. The laser produces a laser output beam with a narrow spectral linewidth which is suitable, in particular, for lithography applications.

Abstract translation: 公开了一种准分子激光器腔，其包括依次布置的至少一个光栅 - 棱镜（棱镜）和波长选择性衍射光栅。 棱镜光栅表面面向增益介质并产生扩散光束，其在与入射光束垂直的棱镜光栅表面的相同侧上衍射。 扩展的衍射光束通过棱镜的第二表面传输到附加棱镜的另一个光栅表面或者以Littrow配置工作的波长选择性衍射光栅。 激光产生具有窄光谱线宽的激光输出光束，其特别适用于光刻应用。