摘要:
In a reliable semiconductor device and a method of fabricating the semiconductor device, a difference in height between upper surfaces of a cell region and a peripheral region (also referred to as a level difference) is minimized by optimizing dummy gate parts. The semiconductor device includes a semiconductor substrate including a cell region and a peripheral region surrounding the cell region, a plurality of dummy active regions surrounded by a device isolating region and formed apart from each other, and a plurality of dummy gate parts formed on the dummy active regions and on the device isolating regions located between the dummy active regions, wherein each of the dummy gate parts covers two or more of the dummy active regions.
摘要:
Provided are a semiconductor memory device whereby generation of dishing during planarization of a peripheral circuit region is suppressed, and a method of fabricating the semiconductor memory device. The semiconductor memory device includes a semiconductor substrate comprising a first active area in a memory cell region and a second active area in a peripheral circuit region; a plurality of first isolation films and a plurality of second isolation films protruding from a surface of the semiconductor substrate and defining the first active area and the second active area, respectively; and at least one polish stopper film formed within the second active area and protruding from the surface of the semiconductor substrate.
摘要:
In a NAND flash memory device, a dummy NAND string is arranged between a plurality of normal NAND strings. A dummy bit line connected to the dummy NAND string is formed and/or controlled such that when program voltages are applied to the normal NAND strings, memory cells within the dummy NAND string are not programmed.
摘要:
Disclosed are a porous catalyst support for maximizing an increase in catalytic reaction activity and a method of preparing a nano-metal-supported catalyst using the same. The method includes splitting cellulose fibers, thus preparing a catalyst support, growing carbon nanotubes on the prepared catalyst support, and supporting a nano-metal catalyst on the catalyst support having the carbon nanotubes grown thereon. A nano-metal-supported catalyst including the cellulose catalyst support and the use of cellulose fibers as the catalyst support for supporting the nano-metal catalyst are also provided. When porous cellulose fibers having a plurality of micropores are used as material for the catalyst support for supporting a nano-metal catalyst, the preparation cost of the catalyst is reduced and the increase in catalytic reaction activity is maximized even with the use of a small amount thereof in various catalytic reactions. A technique for directly growing carbon nanotubes is applied, thereby controlling the electrical conductivity of the catalyst and increasing the surface area, and further, an expensive nano-metal catalyst component can be easily collected after the reaction, resulting in eco-friendly properties.
摘要:
Methods of fabricating a semiconductor device having multi-gate insulation layers and semiconductor devices fabricated thereby are provided. The method includes forming a pad insulation layer and an initial high voltage gate insulation layer on a first region and a second region of a semiconductor substrate respectively. The initial high voltage gate insulation layer is formed to be thicker than the pad insulation layer. A first isolation layer that penetrates the pad insulation layer and is buried in the semiconductor substrate is formed to define a first active region in the first region, and a second isolation layer that penetrates the initial high voltage gate insulation layer and is buried in the semiconductor substrate is formed to define a second active region in the second region. The pad insulation layer is then removed to expose the first active region. A low voltage gate insulation layer is formed on the exposed first active region. Accordingly, it can minimize a depth of recessed regions (dent regions) to be formed at edge regions of the first isolation layer during removal of the pad insulation layer, and it can prevent dent regions from being formed at edge regions of the second isolation layer.
摘要:
An integrated circuit device is formed by forming a resistor pattern on a substrate. An interlayer dielectric layer is formed on the resistor pattern. The interlayer dielectric layer is patterned to form at least one opening that exposes the resistor pattern. A plug pattern is formed that fills the at least one opening and the plug pattern and resistor pattern are formed using a same material.
摘要:
A vertical memory device includes a substrate with a cell array region, a word line contact region, and a peripheral circuit region, gate electrodes parallel to the substrate in the cell array and word line contact regions, the gate electrodes being stacked and spaced apart in a direction perpendicular to the substrate, a channel structure through the gate electrodes in the cell array region, the channel structure being electrically connected to the substrate, a dummy channel structure through the gate electrodes in the word line contact region, the dummy channel structure being spaced apart from the substrate, and a conductive line parallel to the substrate and electrically connected to a first gate electrode, the conductive line crossing at least a portion of an extension of the dummy channel structure in the perpendicular direction.
摘要:
Disclosed is a novel cellulose electrode having high performance, which is capable of substituting for carbon paper used as a conventional fuel cell electrode. A method of manufacturing the cellulose electrode includes cutting cellulose fibers to a predetermined length and binding the fibers, or directly weaving the fibers, thus producing a cellulose sheet, directly growing carbon nanotubes on the cellulose sheet, and supporting a platinum nano-catalyst on the surface of the carbon nanotubes using chemical vapor deposition. An electrode including the cellulose fibers and use of cellulose fibers as fuel cell electrodes are also provided. As a novel functional material for fuel cell electrodes, porous cellulose fibers having micropores are used, thereby reducing electrode manufacturing costs and improving electrode performance.
摘要:
The present invention is directed to a porous catalyst support for maximizing an increase in catalytic reaction activity and a method of preparing a nano-metal-supported catalyst using the same. The method includes splitting cellulose fibers, thus preparing a catalyst support, growing carbon nanotubes on the prepared catalyst support, and supporting a nano-metal catalyst on the catalyst support having the carbon nanotubes grown thereon.
摘要:
Provided are a semiconductor memory device whereby generation of dishing during planarization of a peripheral circuit region is suppressed, and a method of fabricating the semiconductor memory device. The semiconductor memory device includes a semiconductor substrate comprising a first active area in a memory cell region and a second active area in a peripheral circuit region; a plurality of first isolation films and a plurality of second isolation films protruding from a surface of the semiconductor substrate and defining the first active area and the second active area, respectively; and at least one polish stopper film formed within the second active area and protruding from the surface of the semiconductor substrate.