METHOD FOR FORMING AN ULTRASONIC TRANSDUCER, AND ASSOCIATED APPARATUS
    51.
    发明申请
    METHOD FOR FORMING AN ULTRASONIC TRANSDUCER, AND ASSOCIATED APPARATUS 有权
    形成超声波传感器的方法及相关设备

    公开(公告)号:US20130270967A1

    公开(公告)日:2013-10-17

    申请号:US13907046

    申请日:2013-05-31

    Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

    Abstract translation: 提供一种用于形成压电超声换能器装置的方法,该装置具有沉积在设置在初级基底上的电介质层上的第一电极。 压电材料沉积在第一电极和第二电极之间,以形成换能器装置。 至少压电材料被图案化,使得第一电极的一部分从其横向向外延伸。 蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔,并且沉积第一导电材料以基本上填充第一通孔并与横向向外部分形成导电接合 的第一电极。 蚀刻初级衬底以限定延伸穿过其中的第二通孔,其中第二通孔与第一通路横向间隔开。 还提供了相关联的方法和装置。

    Plasma furnace disposal of hazardous wastes
    55.
    发明申请
    Plasma furnace disposal of hazardous wastes 失效
    等离子体炉处理危险废物

    公开(公告)号:US20020040889A1

    公开(公告)日:2002-04-11

    申请号:US09739748

    申请日:2000-12-20

    CPC classification number: H05H1/46 Y10S588/90

    Abstract: A method and apparatus for plasma waste disposal of hazardous waste material, where the hazardous material is volatilized under vacuum inside a containment chamber to produce a pre-processed gas as input to a plasma furnace including a plasma-forming region in which a plasma-forming magnetic field is produced. The pre-processed gas is passed at low pressure and without circumvention through the plasma-forming region and is directly energized to an inductively coupled plasma state such that hazardous waste reactants included in the pre-processed gas are completely dissociated in transit through the plasma-forming region. Preferably, the plasma-forming region is shaped as a vacuum annulus and is dimensioned such that there is no bypass by which hazardous waste reactants in the pre-processed gas can circumvent the plasma-forming region. The plasma furnace is powered by a high frequency power supply outputting power at a fundamental frequency. The power supply contains parasitic power dissipation mechanisms to prevent non-fundamental, parasitic frequencies from destabilizing the fundamental frequency output power. These power loss mechanisms use either distributed resistance or frequency-selective power-loss devices to prevent parasitic oscillations from instantaneously turning on the high frequency power oscillator at non-fundamental frequencies.

    Abstract translation: 一种用于危险废物等离子体废物处理的方法和装置,其中危险材料在密封室内在真空下挥发,以产生预处理气体作为等离子体炉的输入,其包括等离子体形成区域,其中等离子体形成区域 产生磁场。 预处理气体在低压下通过等离子体形成区域而不规避,并被直接通电到感应耦合的等离子体状态,使得包含在预处理气体中的危险废物反应物在运输过程中完全离解通过等离子体 - 形成区域。 优选地,等离子体形成区域成形为真空环形区域,其尺寸使得不存在预处理气体中的危险废物反应物可绕过等离子体形成区域的旁路。 等离子炉由基频输出功率的高频电源供电。 电源包含寄生功率耗散机制,以防止非基波寄生频率不稳定基频输出功率。 这些功率损耗机制使用分布式电阻或频率选择性功率损耗器件来防止寄生振荡在非基频处瞬时接通高频功率振荡器。

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