公开(公告)号：US08319193B2

公开(公告)日：2012-11-27

申请号：US12999075

申请日：2009-06-10

Applicant: Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

Inventor： Keigo Kasuya ,  Takashi Ohshima ,  Souichi Katagiri ,  Shigeru Kokubo ,  Hideo Todokoro

IPC: H01J27/26

CPC classification number: H01J1/304 ,  H01J37/073 ,  H01J37/265 ,  H01J2237/022 ,  H01J2237/06325 ,  H01J2237/0653 ,  H01J2237/0656

Abstract: Provided is a charged particle beam apparatus, which can emit a stable electron beam, having high brightness and a narrow energy width. The charged particle beam apparatus comprises a field emission electron source, electrodes for applying an electric field to the field emission electron source, and a vacuum exhaust unit for keeping the pressure around the field emission electron source at 1 10−8 Pa or less. The apparatus is so constituted as to use such one of the electron beams emitted as has an electron-beam-center radiation angle of 1×10−2sr or less, and to use the electric current thereof, the second order differentiation of which is negative or zero with respect to the time, and which reduces at a rate of 10% or less per hour. The charged particle beam apparatus further comprises a heating unit for the field emission electron source, and a detection unit for the electric current of the electron beam. The field emission electron source is repeatedly heated to keep the electric current of the electron beam to be emitted, at a predetermined value or higher.

Abstract translation: 提供一种带电粒子束装置，其能够发射具有高亮度和窄能量宽度的稳定电子束。 带电粒子束装置包括场发射电子源，用于向场发射电子源施加电场的电极和用于将场致发射电子源周围的压力保持在10×10 8 Pa以下的真空排气单元。 该装置构成为使用发射的电子束中心辐射角为1×10-2sr以下的电子束，并使用其电流，其二阶微分为负 或相对于时间为零，并以每小时10％或更少的速率减少。 带电粒子束装置还包括用于场发射电子源的加热单元和用于电子束电流的检测单元。 重复加热场致发射电子源以使电子束的电流保持在规定值以上。

公开(公告)号：US20120119086A1

公开(公告)日：2012-05-17

申请号：US13355104

申请日：2012-01-20

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Takashi Ohshima ,  Satoshi Tomimatsu ,  Tomihiro Hashizume ,  Tohru Ishitani

IPC: H01J37/26

CPC classification number: H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

Abstract: A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

Abstract translation: 一种气体离子源，其可以在粗吸真空中同时增加电导，并且从离子电流的增加的角度降低提取电极的孔直径。 气体离子源具有改变真空气体分子离子化室中的电导的机理。 也就是说，根据是否从气体分子离子化室抽出离子束，改变对气体分子离子化室进行抽真空的电导。 通过将盖子形成为构成用双金属合金改变电导的机构的部件的部分，可以根据气体分子离子化室的温度来改变电导率，例如，电导率变为相对较小的电导率 相对较低的温度和相对高的温度下的相对较大的电导率。

公开(公告)号：US20110098479A1

公开(公告)日：2011-04-28

申请号：US12980502

申请日：2010-12-29

Applicant: KAZUSHI MASHIMA ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

Inventor： KAZUSHI MASHIMA ,  Takashi Ohshima ,  Takanori Iwasaki ,  Hironori Maeda ,  Kenya Ishida

IPC: C07F7/10 ,  C07D263/12 ,  C07D263/10 ,  C07D263/14 ,  C07D263/52

CPC classification number: C07D263/12 ,  B01J31/2226 ,  B01J2531/26 ,  C07C53/18 ,  C07C231/02 ,  C07C253/30 ,  C07D263/10 ,  C07D263/14 ,  C07D263/52 ,  C07D413/06 ,  C07F3/003 ,  C07F7/1892 ,  C07F9/5022 ,  C07K1/088 ,  C07K1/10

Abstract: The invention relates to a method for producing an azoline compound represented by the general formula (3): wherein R1 represents an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; R3, R4, R5 and R6 may be the same or different and each represents a hydrogen atom, an optionally substituted hydrocarbon group, an optionally substituted alkoxy group, an optionally substituted alkoxycarbonyl group, a halogen atom, a substituted amino group, a substituted carbamoyl group or an optionally substituted heterocyclic group; two arbitrary groups selected from R3, R4, R5 and R6 may bond to each other to form a ring; and Z1 represents an oxygen atom, a sulfur atom or a selenium atom;comprising reacting a carboxylic acid or a carboxylic acid derivative represented by the general formula (1): R1CO2R2   (1) wherein R1 is as defined above; R2 represents a hydrogen atom, an optionally substituted alkyl group or an optionally substituted aryl group; and R1 and R2 may bond to each other to form a ring;with an aminochalcogenide represented by the general formula (2): wherein R3, R4, R5, R6 and Z1 are as defined above; in the presence of a compound containing a group 12 metal element in the periodic table.

Abstract translation: 本发明涉及一种制备由通式（3）表示的唑啉化合物的方法：其中R1表示任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基， 取代的氨基甲酰基或任选取代的杂环基; R3，R4，R5和R6可以相同或不同，各自表示氢原子，任选取代的烃基，任选取代的烷氧基，任选取代的烷氧基羰基，卤素原子，取代的氨基，取代的氨基甲酰基 基团或任选取代的杂环基团; 选自R3，R4，R5和R6中的两个任意基团可以彼此键合形成环; Z1表示氧原子，硫原子或硒原子; 包括使由通式（1）表示的羧酸或羧酸衍生物：R1CO2R2（1）其中R1如上定义; R2表示氢原子，任选取代的烷基或任选取代的芳基; 并且R 1和R 2可以彼此键合形成环; 与通式（2）表示的氨基硫族化物：其中R3，R4，R5，R6和Z1如上定义; 在含有元素周期表中第12族金属元素的化合物存在下进行。

公开(公告)号：US07755046B2

公开(公告)日：2010-07-13

申请号：US12010702

申请日：2008-01-29

Applicant: Teruo Kohashi ,  Takashi Ohshima ,  Takao Matsumoto ,  Hirokazu Nishida

Inventor： Teruo Kohashi ,  Takashi Ohshima ,  Takao Matsumoto ,  Hirokazu Nishida

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/266 ,  H01J37/265 ,  H01J2237/06383 ,  H01J2237/1514 ,  H01J2237/24557 ,  H01J2237/2588 ,  H01J2237/2614

Abstract: Chirality distribution in the molecular structure of protein or the like and magnetic domain structure are analyzed with high resolution less than 10 nm. A transmission electron microscope equipped with a spin-polarized electron source is used for holography observation. The phase of transmission spin-polarized electrons changes due to the existence of chirality structure or magnetization in a sample, which is observed as an interference pattern phase shift in holography measurement.

Abstract translation: 蛋白质等分子结构中的手性分布和磁畴结构以高分辨率小于10nm进行分析。 配备有自旋极化电子源的透射电子显微镜用于全息观察。 透射自旋极化电子的相位由于样品中手性结构或磁化的存在而改变，在全息测量中被观察为干涉图案相移。

公开(公告)号：US20090294697A1

公开(公告)日：2009-12-03

申请号：US12453986

申请日：2009-05-28

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Sho Takami ,  Makoto Ezumi ,  Takashi Doi ,  Yuji Kasai

IPC: A61N5/00 ,  G21F5/02

CPC classification number: H01J37/18 ,  H01J2237/06341 ,  H01J2237/182 ,  H01J2237/188

Abstract: The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.

Abstract translation: 本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下， 可蒸发吸气泵，不受脱落异物的影响。 本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使 不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。 或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置 在非蒸发性吸气泵的下部捕获脱落的异物。

公开(公告)号：US07615765B2

公开(公告)日：2009-11-10

申请号：US11589821

申请日：2006-10-31

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato

IPC: A61N5/00 ,  G21G5/00

CPC classification number: H01J37/18 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/31749

Abstract: There is provided a compact charged particle beam apparatus with a non-evaporable getter pump which maintains high vacuum even during emission of an electron beam without generating foreign particles. The apparatus comprises: a charged particle source; a charged particle optics which focuses a charged particle beam emitted from the charged particle source on a sample and performs scanning; and means of vacuum pumping which evacuates the charged particle optics. The means of vacuum pumping has a differential pumping structure with two or more vacuum chambers connected through an opening in series. A pump made of non-evaporable getter alloy is placed in an upstream vacuum chamber with a high degree of vacuum, and a gas absorbing surface of the non-evaporable getter alloy is fixed without contact with another part.

Abstract translation: 提供了一种具有非蒸发性吸气泵的紧凑型带电粒子束装置，即使在电子束的发射期间也能保持高真空而不产生异物。 该装置包括：带电粒子源; 带电粒子光学器件，其将从带电粒子源发射的带电粒子束聚焦在样品上并执行扫描; 以及抽空带电粒子光学元件的真空泵送装置。 真空泵送装置具有差分泵送结构，其中两个或多个真空室通过串联的开口连接。 将由不可蒸发的吸气剂合金制成的泵放置在具有高真空度的上游真空室中，并且非蒸发性吸气剂合金的气体吸收表面固定而不与另一部分接触。

公开(公告)号：US07339167B2

公开(公告)日：2008-03-04

申请号：US11196399

申请日：2005-08-04

Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

IPC: H01J37/256 ,  H01J37/28 ,  H01J49/24

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0268 ,  H01J2237/04756 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/188 ,  H01J2237/24465 ,  H01J2237/2611 ,  H01J2237/31749

Abstract: A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam is located inside a column between an electron source and a sample, and a detector for secondary electrons is located inside the drift tube. This solves the problem associated with the provision of a secondary electron detector, which heretofore has been a bottleneck in making a subminiature high-resolution SEM column.

Abstract translation: 使用静电透镜作为主聚焦元件以获得超小型高灵敏度高分辨率SEM的带电粒子束装置，用于电子束的漂移管位于电子源和样品之间的列内，并且 用于二次电子的检测器位于漂移管内。 这解决了与提供二次电子检测器相关的问题，这种二次电子检测器迄今已成为制造超小型高分辨率SEM柱的瓶颈。

公开(公告)号：US20070236143A1

公开(公告)日：2007-10-11

申请号：US11806196

申请日：2007-05-30

Applicant: Soichi Katagiri ,  Takashi Ohshima

Inventor： Soichi Katagiri ,  Takashi Ohshima

IPC: H01J17/24

CPC classification number: H01J37/18 ,  H01J7/16 ,  H01J7/18 ,  H01J37/07 ,  H01J2237/022 ,  H01J2237/062 ,  H01J2237/06316 ,  H01J2237/1825 ,  H01J2237/188

Abstract: To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

公开(公告)号：US20070102650A1

公开(公告)日：2007-05-10

申请号：US11589821

申请日：2006-10-31

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato

IPC: A61N5/00 ,  G21G5/00

CPC classification number: H01J37/18 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/31749

Abstract: There is provided a compact charged particle beam apparatus with a non-evaporable getter pump which maintains high vacuum even during emission of an electron beam without generating foreign particles. The apparatus comprises: a charged particle source; a charged particle optics which focuses a charged particle beam emitted from the charged particle source on a sample and performs scanning; and means of vacuum pumping which evacuates the charged particle optics. The means of vacuum pumping has a differential pumping structure with two or more vacuum chambers connected through an opening in series. A pump made of non-evaporable getter alloy is placed in an upstream vacuum chamber with a high degree of vacuum, and a gas absorbing surface of the non-evaporable getter alloy is fixed without contact with another part.

Abstract translation: 提供了一种具有非蒸发性吸气泵的紧凑型带电粒子束装置，即使在电子束的发射期间也能保持高真空而不产生异物。 该装置包括：带电粒子源; 带电粒子光学器件，其将从带电粒子源发射的带电粒子束聚焦在样品上并执行扫描; 以及抽空带电粒子光学元件的真空泵送装置。 真空泵送装置具有差分泵送结构，其中两个或多个真空室通过串联的开口连接。 将由不可蒸发的吸气剂合金制成的泵放置在具有高真空度的上游真空室中，并且非蒸发性吸气剂合金的气体吸收表面固定而不与另一部分接触。

公开(公告)号：US20060231773A1

公开(公告)日：2006-10-19

申请号：US11401878

申请日：2006-04-12

Applicant: Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato ,  Takashi Furukawa

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato ,  Takashi Furukawa

IPC: G21G5/00

CPC classification number: H01J41/14 ,  H01J37/28 ,  H01J41/12 ,  H01J2237/0245 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/1825

Abstract: A small-sized charged particle beam apparatus capable of maintaining high vacuum even during emission of an electron beam is provided. A nonevaporative getter pump is placed upstream of differential pumping of an electron optical system of the charged particle beam apparatus, and a minimum number of ion pumps are placed downstream, so that both the pumps are used in combination. Further, by mounting a detachable coil on an electron gun part, the inside of a column can be maintained under high vacuum with a degree of vacuum in the order of 10−8 Pa.

Abstract translation: 提供即使在电子束的发射期间也能保持高真空的小尺寸带电粒子束装置。 将非蒸发性吸气泵放置在带电粒子束装置的电子光学系统的差分泵浦的上游，并且将最少数量的离子泵放置在下游，使得两个泵组合使用。 此外，通过将可拆卸线圈安装在电子枪部件上，可以将真空度保持在10 -8 Pa以下的真空度的高真空下。