公开(公告)号：US20070077861A1

公开(公告)日：2007-04-05

申请号：US11241254

申请日：2005-09-30

申请人： Hung Chen

发明人： Hung Chen

IPC分类号： B24B51/00 ,  B24B7/30 ,  B24B29/00 ,  B24B1/00

CPC分类号： B24B41/005 ,  B24B37/345

摘要： A method and apparatus for chemical mechanical polishing includes a platen supports a polishing article, a robot located proximate the platen, a carrier head having a retaining ring, and a carrier heads support mechanism. The robot is configured to position a substrate on the polishing article, and the carrier heads support mechanism is configured to move the carrier head into a position that the retaining ring surrounds the substrate.

摘要翻译： 用于化学机械抛光的方法和装置包括压板支撑抛光制品，位于压板附近的机器人，具有保持环的承载头和承载头支撑机构。 机器人构造成将基板定位在抛光制品上，并且载体头支撑机构构造成将承载头移动到保持环围绕基板的位置。

公开(公告)号：US20070070262A1

公开(公告)日：2007-03-29

申请号：US11526496

申请日：2006-09-25

申请人： Chao Hung ,  Tsau Hsieh ,  Hung Chen

发明人： Chao Hung ,  Tsau Hsieh ,  Hung Chen

IPC分类号： G02F1/136

CPC分类号： G02F1/136286 ,  G02F2201/52

摘要： A liquid crystal display (100) includes a liquid crystal panel having a plurality of gate lines (GL1˜GLn) that are parallel to each other and that each extend along a first direction, and a plurality of data lines (DL1˜DLm+1) that are parallel to each other and that each extend along a second direction substantially orthogonal to the first direction, a plurality of pixel regions (130) defined by points of intersection of the gate lines and the data lines, and a gate driver (140) for driving the gate lines, and a data driver (160) for driving the data lines. Each of the data lines includes curving portions, such that each of the pixel regions defined by two corresponding data lines has two curved side boundaries.

摘要翻译： 液晶显示器（100）包括具有彼此平行并且沿着第一方向延伸的多条栅极线（GL 1〜GLn）和多条数据线（DL 1〜DLm）的液晶面板 +1），其彼此平行并且沿着基本上与第一方向正交的第二方向延伸，由栅极线和数据线的交点相互限定的多个像素区域（130）以及栅极驱动器 （140），以及用于驱动数据线的数据驱动器（160）。 每个数据线包括弯曲部分，使得由两个对应的数据线限定的每个像素区域具有两个弯曲的边界。

公开(公告)号：US20060139277A1

公开(公告)日：2006-06-29

申请号：US11316725

申请日：2005-12-23

申请人： Sz Chen ,  Long Chen ,  Hung Chen ,  Tsau Hsieh

发明人： Sz Chen ,  Long Chen ,  Hung Chen ,  Tsau Hsieh

IPC分类号： G09G3/36 ,  H04N5/66 ,  H04N3/14 ,  H04N9/12

CPC分类号： G09G3/3648 ,  G09G2310/061 ,  G09G2320/0252 ,  G09G2320/0261

摘要： An active matrix LCD (200) includes: a plurality of scanning lines (23) that are parallel to each other and that each extend along a first direction; a plurality of signal lines (24) that are parallel to each other and that each extend along a second direction orthogonal to the first direction; a plurality of thin film transistors (TFTs) each provided in the vicinity of a respective point of intersection of the scanning lines and the signal lines; a plurality of scanning line driving circuits (21) for providing a plurality of scanning signal groups to the scanning lines, each scanning signal group including an image scanning signal and a black-inserting scanning signal; a plurality of signal line driving circuits (22) for providing gradation voltage data to the signal lines; and a plurality of black-inserting circuits (28) for providing a high voltage corresponding to black image data to the signal lines.

摘要翻译： 有源矩阵LCD（200）包括：多条扫描线（23），它们彼此平行并且分别沿第一方向延伸; 多个信号线（24），其彼此平行并且各自沿着与所述第一方向正交的第二方向延伸; 多个薄膜晶体管（TFT），其分别设置在扫描线和信号线的相应交点附近; 多个扫描线驱动电路（21），用于向扫描线提供多个扫描信号组，每个扫描信号组包括图像扫描信号和黑插入扫描信号; 多个用于向信号线提供灰度电压数据的信号线驱动电路（22）; 以及用于向信号线提供对应于黑色图像数据的高电压的多个黑插入电路（28）。

公开(公告)号：US20060114400A1

公开(公告)日：2006-06-01

申请号：US11288747

申请日：2005-11-28

申请人： Chao Yi Hung ,  Hung Chen

发明人： Chao Yi Hung ,  Hung Chen

IPC分类号： G02F1/1343

CPC分类号： G02F1/136213 ,  G02F1/134363

摘要： An LCD includes an insulating substrate (30) with gate lines (32) and data lines (31) disposed thereon. The gate lines are parallel to each other and extend along a first direction, and the data lines are parallel to each other and extend along a second direction. The data lines cross the gate lines thereby defining a multiplicity of pixel regions (3). Each of the pixel regions includes a TFT (35), a pixel electrode (33) connected to the TFT, a common electrode (36) connected to a corresponding one of the data lines, and a dielectric layer (37) disposed between the common and pixel electrodes. The common electrode includes a plurality of protrusions (34). The protrusions, the dielectric layer, and the pixel electrode cooperatively define a storage capacitor (50) for holding the pixel region at a set voltage level until the next refresh cycle when the TFT is turned off.

摘要翻译： LCD包括具有设置在其上的栅极线（32）和数据线（31）的绝缘基板（30）。 栅极线彼此平行并且沿着第一方向延伸，并且数据线彼此平行并且沿着第二方向延伸。 数据线与栅极线交叉，从而限定多个像素区域（3）。 每个像素区域包括TFT（35），连接到TFT的像素电极（33），连接到对应的一条数据线的公共电极（36）和设置在公共端 和像素电极。 公共电极包括多个突起（34）。 突起，电介质层和像素电极协同地限定用于将像素区域保持在设定电压电平的存储电容器（50），直到TFT关闭时的下一个刷新周期。

公开(公告)号：US20060006556A1

公开(公告)日：2006-01-12

申请号：US11168080

申请日：2005-06-27

申请人： Hung Chen

发明人： Hung Chen

IPC分类号： B01D47/06

CPC分类号： F02M31/18 ,  Y02T10/126

摘要： A gas supply device by gasifying burnable liquid comprises a container having a space for filling burnable gas; at least one layer of flow guide plate being arranged in the space; each flow guide plate being arranged with a filter element; a gas generating unit arranged on a container for generating gas and then inputting the container; an input unit arranged on the container for inputting gas from the gas generating unit to the container; a gas divider connected to a tube of the input unit; the gas divider having output holes for generating bubbles; at least one output unit arranged on the container for outputting gas in the container; a pressure sensing unit arranged on the container for sensing pressure within the container; and a constant temperature control unit arranged on the container for sensing temperature within the container for heating at a predetermined timing.

摘要翻译： 通过气化可燃液体的气体供给装置包括具有用于填充可燃气体的空间的容器; 至少一层导流板布置在该空间中; 每个流动引导板布置有过滤元件; 气体发生单元，布置在用于产生气体的容器上，然后输入容器; 输入单元，布置在容器上，用于将气体从气体发生单元输入到容器; 连接到输入单元的管的气体分配器; 所述气体分配器具有用于产生气泡的输出孔; 至少一个输出单元，布置在容器上用于在容器中输出气体; 压力检测单元，布置在容器上用于感测容器内的压力; 以及设置在容器上的恒温控制单元，用于感测容器内的温度，以便在预定的时间加热。

公开(公告)号：US20050176349A1

公开(公告)日：2005-08-11

申请号：US10988647

申请日：2004-11-15

申请人： Alpay Yilmaz ,  Simon Yavelberg ,  Toshikazu Tomita ,  Hui Chen ,  Noel Manto ,  David Lischka ,  Hung Chen

发明人： Alpay Yilmaz ,  Simon Yavelberg ,  Toshikazu Tomita ,  Hui Chen ,  Noel Manto ,  David Lischka ,  Hung Chen

IPC分类号： B24B37/04 ,  B24B49/00

CPC分类号： B24B37/345

摘要： Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.

摘要翻译： 提供了用于转移衬底的负载杯的实施例。 负载杯包括具有基板支撑件和去夹紧喷嘴的基座组件。 在将基板从抛光头转移到基板支撑件的过程中，去夹紧喷嘴定位成使流体在基板的抛光头和背面之间流动。

公开(公告)号：US20050074919A1

公开(公告)日：2005-04-07

申请号：US10167361

申请日：2002-06-11

申请人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

发明人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/60 ,  H01L23/02 ,  H01L23/22 ,  H01L23/24 ,  H01L21/44

CPC分类号： B81B7/0077 ,  B81B2201/042 ,  B81C1/00269 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  G02B26/0841 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气材料和固体或液体润滑剂之后，两个基底可以在晶片级结合。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

公开(公告)号：US06386955B2

公开(公告)日：2002-05-14

申请号：US09730944

申请日：2000-12-05

申请人： Steven M. Zuniga ,  Manoocher Birang ,  Hung Chen ,  Sen-Hou Ko

发明人： Steven M. Zuniga ,  Manoocher Birang ,  Hung Chen ,  Sen-Hou Ko

IPC分类号： B24B100

CPC分类号： B24B37/30 ,  B24B37/32

摘要： A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. The substrate backing assembly includes a support structure positioned below the base, a substantially horizontal, annular flexure connecting the support structure to the base, and a flexible membrane connected to the support structure. The flexible membrane has a mounting surface for a substrate, and extends beneath the base to define a chamber.

摘要翻译： 用于化学机械抛光装置的载体头。 承载头包括壳体，基座，装载机构，万向节机构和基底背衬组件。 衬底背衬组件包括位于底座下方的支撑结构，将支撑结构连接到基座的基本水平的环形弯曲部，以及连接到支撑结构的柔性膜。 柔性膜具有用于基底的安装表面，并且在基底之下延伸以限定腔室。

公开(公告)号：US5993302A

公开(公告)日：1999-11-30

申请号：US2213

申请日：1997-12-31

申请人： Hung Chen ,  Steven M. Zuniga

发明人： Hung Chen ,  Steven M. Zuniga

IPC分类号： B24B37/30 ,  B24B37/32 ,  H01L21/304 ,  B24B29/00

CPC分类号： B24B37/30 ,  B24B37/32

摘要： A carrier head for a chemical mechanical polishing apparatus includes a detachable retaining ring which may be used for centering the substrate during substrate loading.

摘要翻译： 用于化学机械抛光装置的承载头包括可拆卸的保持环，其可以用于在衬底加载期间使衬底居中。

公开(公告)号：US09119461B2

公开(公告)日：2015-09-01

申请号：US13456796

申请日：2012-04-26

申请人： Hui Chen ,  Hung Chen ,  Jim Atkinson ,  David D. Huo

发明人： Hui Chen ,  Hung Chen ,  Jim Atkinson ,  David D. Huo

IPC分类号： B08B1/04 ,  A46B3/00 ,  A46B13/00 ,  H01L21/02

CPC分类号： A46B3/005 ,  A46B13/001 ,  H01L21/02096

摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a body of open-cell foam including an interior surface, a sleeve received in contact with the scrubber brush, the sleeve including peripherally-spaced, longitudinal walls and reinforcing segments interconnecting adjacent ones of the longitudinal walls and forming elongated pockets along the length, the sleeve having raised ribs extending along the length, and a mandrel having recesses formed on an outer surface, the mandrel being coupled to the sleeve by receiving the raised ribs within the recesses. Scrubber brush subassemblies, high stiffness mandrels, and methods of assembly are provided, as are numerous other aspects.

摘要翻译： 在一个方面，提供了洗涤器刷组件。 洗涤器刷组件包括洗涤器刷，其具有包括内表面的开孔泡沫体，与洗涤器刷接触的套筒，套筒包括周向间隔开的纵向壁和将邻近的纵向壁相互连接的加强段 以及沿所述长度形成细长的袋，所述套筒具有沿所述长度延伸的凸肋，以及具有形成在外表面上的凹部的心轴，所述心轴通过容纳所述凹部内的所述凸肋而联接到所述套筒。 提供了洗涤刷组件，高刚度心轴和组装方法，以及许多其它方面。