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133 条记录 (耗时 0.042 秒)

    SCHEDULING METHOD FOR PROCESSING EQUIPMENT
    52.
    发明申请
    SCHEDULING METHOD FOR PROCESSING EQUIPMENT 有权
    处理设备的调度方法

    公开(公告)号：US20080014058A1

    公开(公告)日：2008-01-17

    申请号：US11775355

    申请日：2007-07-10

    申请人： STEVE HONGKHAM ,  Eric Englhardt ,  Michael Rice ,  Helen Armer ,  Chongyang Wang

    发明人： STEVE HONGKHAM ,  Eric Englhardt ,  Michael Rice ,  Helen Armer ,  Chongyang Wang

    IPC分类号： B65H1/00

    CPC分类号： H01L21/67745 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67276

    摘要： Methods and apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput and repeatable wafer processing history are provided. In one embodiment a first substrate is transferred from a first position to a second position and then the first substrate is transferred from the second position to a third position using a first robot. A second substrate is transferred from a first position to a second position and then the second substrate is transferred from the second position to a third position using a second robot. The movement of the first and second robots is synchronized so that the movement from the first position to the second position by the first and second robot is performed within a first time interval.

    摘要翻译： 提供了使用具有增加的系统吞吐量和可重复的晶片处理历史的多室处理系统（例如，集群工具）处理衬底的方法和装置。 在一个实施例中，第一衬底从第一位置转移到第二位置，然后使用第一机器人将第一衬底从第二位置转移到第三位置。 第二基底从第一位置转移到第二位置，然后使用第二机器人将第二基底从第二位置转移到第三位置。 第一机器人和第二机器人的移动被同步，使得在第一时间间隔内执行由第一和第二机器人从第一位置到第二位置的移动。

    Method and system for managing physiological system
    53.
    发明申请
    Method and system for managing physiological system 有权
    管理生理系统的方法和系统

    公开(公告)号：US20070265508A1

    公开(公告)日：2007-11-15

    申请号：US11724642

    申请日：2007-03-15

    申请人： Hamid Sheikhzadeh-Nadjar ,  Robert Brennan ,  Michael Rice

    发明人： Hamid Sheikhzadeh-Nadjar ,  Robert Brennan ,  Michael Rice

    IPC分类号： A61B5/00

    CPC分类号： G10L21/0208 ,  A61B7/04 ,  G10L25/00 ,  H03H21/0012 ,  H03H2021/0041

    摘要： A method and system for managing physiological systems is provided. The physiological system management (PSM) system includes one or more signal acquisition blocks to collect physiological information. The PSM system includes oversampled filterbanks for transferring one or more input signal related to the physiological information into subband signals, and a subband processing scheme for processing the outputs from the oversampled filterbanks for event detection in one or more physiological systems. The PSM system includes an adaptive controller which decides on the proper control measure and delivers the measure to the one or more physiological systems.

    摘要翻译： 提供了一种用于管理生理系统的方法和系统。 生理系统管理（PSM）系统包括一个或多个收集生理信息的信号采集块。 PSM系统包括用于将与生理信息相关的一个或多个输入信号转换为子带信号的过采样滤波器组，以及用于处理来自过采样滤波器组的输出的子带处理方案，用于在一个或多个生理系统中进行事件检测。 PSM系统包括一个自适应控制器，该控制器决定适当的控制措施并将测量结果传递给一个或多个生理系统。

    Substrate gripper for a substrate handling robot
    54.
    发明申请
    Substrate gripper for a substrate handling robot 有权
    用于基板处理机器人的基板夹具

    公开(公告)号：US20070147979A1

    公开(公告)日：2007-06-28

    申请号：US11315873

    申请日：2005-12-22

    申请人： Michael Rice ,  Jeffrey Hudgens ,  Charles Carlson ,  William Weaver ,  Robert Lowrance ,  Eric Englhardt ,  Dean Hruzek ,  Mario Silvetti ,  Michael Kuchar ,  Kirk Katwyk ,  Van Hoskins ,  Vinay Shah

    发明人： Michael Rice ,  Jeffrey Hudgens ,  Charles Carlson ,  William Weaver ,  Robert Lowrance ,  Eric Englhardt ,  Dean Hruzek ,  Mario Silvetti ,  Michael Kuchar ,  Kirk Katwyk ,  Van Hoskins ,  Vinay Shah

    IPC分类号： B66C23/00

    CPC分类号： H01L21/67178 ,  H01L21/67173 ,  H01L21/67276 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/68707

    摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.

    摘要翻译： 一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的 脚印。 群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。 在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。 通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。 此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。 灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

    VISION SYSTEM
    56.
    发明申请
    VISION SYSTEM 有权
    视觉系统

    公开(公告)号：US20070112465A1

    公开(公告)日：2007-05-17

    申请号：US11617035

    申请日：2006-12-28

    申请人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

    发明人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67259 ,  B25J9/1692 ,  B25J9/1697 ,  G05B2219/45031 ,  H01L21/681

    摘要： A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.

    摘要翻译： 提供了一种用于校准设置在处理系统中的机器人的运动的视觉系统和方法。 在一个实施例中，用于处理系统的视觉系统包括位于处理系统中的相机和校准晶片。 相机位于机器人上，并且适于获得设置在处理系统内的预定位置的校准晶片的图像数据。 图像数据用于校准机器人运动。

    SYSTEMS AND METHODS FOR TRANSFERRING SMALL LOT SIZE SUBSTRATE CARRIERS BETWEEN PROCESSING TOOLS
    57.
    发明申请
    SYSTEMS AND METHODS FOR TRANSFERRING SMALL LOT SIZE SUBSTRATE CARRIERS BETWEEN PROCESSING TOOLS 有权
    用于传送加工工具之间的小尺寸基板载体的系统和方法

    公开(公告)号：US20070059861A1

    公开(公告)日：2007-03-15

    申请号：US11555252

    申请日：2006-10-31

    申请人： Michael Rice ,  Eric Englhardt ,  Vinay Shah ,  Martin Elliott ,  Robert Lowrance ,  Jeffrey Hudgens

    发明人： Michael Rice ,  Eric Englhardt ,  Vinay Shah ,  Martin Elliott ,  Robert Lowrance ,  Jeffrey Hudgens

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67727 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67778 ,  Y02P80/40 ,  Y02P90/86

    摘要： In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供了一种在小批量半导体器件制造设施内管理正在进行的工作的方法。 第一种方法包括提供具有（1）多个处理工具的小批量半导体器件制造设备; 和（2）适于在处理工具之间运输小批量衬底载体的高速运输系统。 该方法还包括：（1）增加小批量半导体器件制造设备内的低优先级衬底的平均周期时间，使小批量半导体器件制造设备内的预定工作保持在进行中; 和（2）减小小批量半导体器件制造设备内的高优先级衬底的平均周期时间，以便在小批量半导体器件制造设备内大致维持预定工作进行中的水平。 提供了许多其他方面。

    Vision system
    60.
    发明授权
    Vision system 有权

    公开(公告)号：US07085622B2

    公开(公告)日：2006-08-01

    申请号：US10126493

    申请日：2002-04-19

    申请人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

    发明人： Iraj Sadighi ,  Jeff Hudgens ,  Michael Rice ,  Gary Wyka

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67259 ,  B25J9/1697 ,  H01L21/681

    摘要： Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.