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    Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
    52.
    发明授权
    Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices 失效
    用于制造半导体器件的方法和系统以及用于检查半导体器件的方法和系统

    公开(公告)号：US5801965A

    公开(公告)日：1998-09-01

    申请号：US362763

    申请日：1994-12-22

    申请人： Yuji Takagi ,  Hideaki Doi ,  Makoto Ono

    发明人： Yuji Takagi ,  Hideaki Doi ,  Makoto Ono

    IPC分类号： G01B11/24 ,  G01N21/94 ,  G01R31/26 ,  H01L21/66 ,  G06F19/00

    CPC分类号： G01N21/94

    摘要： The present invention relates to a method and system of inspecting a product, including extracting defects from the product, classifying the defects on the basis of information about the extracted defects representing the analogy of the defects, extracting the feature data of the defects on the basis of the result of defect classification, and feeding back the feature data of the extracted defects for inspection. The method and system is characterized in that the extracted feature data of the defects is fed back for inspecting the product. The present invention also relates to a method of manufacturing a semiconductor electric or electronic device, including extracting defects from the semiconductor electric or electronic device, classifying the defects on the basis of information about the extracted defects representing the analogy of the defects, extracting the feature data of the defects on the basis of the result of defect classification, and feeding back the feature data of the extracted defects to an apparatus for manufacturing the semiconductor electric or electronic device.

    摘要翻译： 本发明涉及一种检查产品的方法和系统，包括从产品中提取缺陷，基于代表缺陷类比的提取缺陷的信息对缺陷进行分类，基于缺陷提取缺陷的特征数据 的缺陷分类结果，并将提取的缺陷的特征数据反馈进行检查。 该方法和系统的特征在于反馈所提取的缺陷特征数据以检查产品。 本发明还涉及一种制造半导体电气或电子设备的方法，包括从半导体电子或电子设备中提取缺陷，基于关于表示类似于缺陷的提取缺陷的信息来分类缺陷，提取特征 基于缺陷分类的结果的缺陷的数据，并将提取的缺陷的特征数据反馈到用于制造半导体电子或电子设备的装置。

    User specification of pull down menu alignment
    53.
    发明授权
    User specification of pull down menu alignment 失效
    下拉菜单对齐的用户规格

    公开(公告)号：US5559944A

    公开(公告)日：1996-09-24

    申请号：US6271

    申请日：1993-01-11

    申请人： Makoto Ono

    发明人： Makoto Ono

    IPC分类号： G06F3/041 ,  G06F3/033 ,  G06F3/14

    CPC分类号： G06F3/0488 ,  G06F3/0418 ,  G06F3/0482

    摘要： A vertically extending menu bar is displayed at the right or left end of a screen, and a pull-down menu is further displayed which downwardly extends in an arc from a selected item of the menu bar to the center. The invention facilitates the use of a computer I/O device in which a liquid crystal display device and a touch sensor are integrated. The character string display of each menu bar item is inclined and space is omitted. The locus along which the pull-down menu extends can be calibrated to the user.

    摘要翻译： 在屏幕的右侧或左侧显示一个垂直延伸的菜单栏，并进一步显示一个下拉菜单，其向下延伸，从菜单栏的选定项目向中心延伸。 本发明有利于使用其中集成了液晶显示装置和触摸传感器的计算机I / O装置。 每个菜单栏项的字符串显示是倾斜的并且省略空格。 可以向用户校准下拉菜单所延伸的轨迹。

    Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor
    54.
    发明授权
    Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor 失效
    检查薄膜晶体管液晶基板的方法及其装置

    公开(公告)号：US5309108A

    公开(公告)日：1994-05-03

    申请号：US921583

    申请日：1992-07-30

    申请人： Shunji Maeda ,  Hitoshi Kubota ,  Makoto Ono

    发明人： Shunji Maeda ,  Hitoshi Kubota ,  Makoto Ono

    IPC分类号： G06T7/00 ,  G09G3/00 ,  G01R31/02 ,  G06K9/00

    CPC分类号： G09G3/006 ,  G06T7/001 ,  G06T2207/10048 ,  G06T2207/30121

    摘要： The invention relates to a method of inspecting and correcting a thin film transistor liquid crystal substrate and an apparatus therefor, where a plurality of scan lines and signal lines are connected electrically in common at each one terminal side respectively, and an infrared image outside the pixel domain is detected after lapse of a prescribed time from the time point of applying voltage between the scan lines and the signal lines, and an infrared image outside the pixel domain is detected after lapse of a prescribed time from the time point of stopping the voltage application, and the scan lines and the signal lines relating to variation of the heating state are detected from difference or quotient between an infrared image at the voltage applying state and an infrared image at the stopping state of voltage application, thereby a pixel address with a shortcircuit defect occurring is specified. If an image part being equal to the set threshold value or more does not exist in the difference infrared image in the pixel address, a wiring pattern position in the pixel address is detected from a visible image of the pixel address, and this wiring pattern and one from a neighboring pixel address are compared to detect a short circuit defect which can be removed by laser.

    摘要翻译： 本发明涉及一种薄膜晶体管液晶基板的检查和校正方法及其装置，其中多个扫描线和信号线分别在每个一个端子侧共同电连接，并且在该像素之外的红外图像 在从施加扫描线和信号线之间的电压的时间点经过规定时间之后检测域，并且在从停止施加电压的时间点经过规定时间之后检测像素域外的红外图像 ，并且在电压施加状态下的红外图像与在施加电压的停止状态的红外图像之间的差或商检测与加热状态的变化相关的扫描线和信号线，从而具有短路的像素地址 指定缺陷发生。 如果像素地址中的差异红外图像中不存在等于设定阈值的图像部分，则从像素地址的可视图像检测像素地址中的布线图案位置，并且该布线图案和 比较来自相邻像素地址的一个，以检测可以通过激光去除的短路缺陷。

    Modified polytetrafluoroethylene fine powder and process for preparing the same
    55.
    发明授权
    Modified polytetrafluoroethylene fine powder and process for preparing the same 失效
    改性聚四氟乙烯细粉及其制备方法

    公开(公告)号：US5284708A

    公开(公告)日：1994-02-08

    申请号：US957895

    申请日：1992-10-08

    申请人： Tetsuo Shimizu ,  Kazutaka Hosokawa ,  Masuo Kokumai ,  Makoto Ono

    发明人： Tetsuo Shimizu ,  Kazutaka Hosokawa ,  Masuo Kokumai ,  Makoto Ono

    IPC分类号： C08F214/26 ,  B32B5/16 ,  C08F116/12

    CPC分类号： C08F214/262 ,  Y10T428/2982

    摘要： Modified PTFE fine powder which comprises colloidal particles of a copolymer comprising repeating units derived from tetrafluoroethylene and 0.02 to 0.3 % by weight, preferably 0.03 to 0.2% by weight of repeating units derived from at least one fluoroalkyl vinyl ether selected from compounds of the formula:X(CF.sub.2).sub.n OCF.dbd.CF.sub.2 (I)wherein X is a hydrogen, fluorine or chlorine atom and n is an integer of 1 to 6, andC.sub.3 F.sub.7 (OCF.sub.2 CF.sub.2 CF.sub.2).sub.m [OCF(CF.sub.3)CF.sub.2 ].sub.1 OCF.dbd.CF.sub.2 (II)wherein m and 1 are each an integer of 0 to 4 provided that at least one of them is not zero, which has a number average particle size of 0.05 to 0.6 .mu.m, wherein the copolymer has a specific melt viscosity of from 6.times.10.sup.10 to 30.times.10.sup.10 poise, preferably from 8.0.times.10.sup.10 to 25.times.10.sup.10 poise at 380.degree. C. and a standard specific gravity (SSG, hereinafter defined) of from 2.135 to 2.175, preferably from 2.140 to 2.160 and a paste extruded article of the polymer has a green elongation of at least 400% is provided.

    摘要翻译： 改性PTFE细粉末，其包含含有衍生自四氟乙烯的重复单元和0.02至0.3重量％，优选0.03至0.2重量％的衍生自至少一种氟代烷基乙烯基醚的重复单元的共聚物的胶体颗粒，所述氟代烷基乙烯基醚选自下式化合物： X（CF 2）n OCF = CF 2（I）其中X为氢，氟或氯原子，n为1至6的整数，C 3 F 7（OCF 2 CF 2 CF 2）m（OCF（CF 3）CF 2） m和1各自为0〜4的整数，条件是它们中的至少一个不为零，其数均粒径为0.05〜0.6（my）m，其中，共聚物的比熔融粘度为6 * 在380℃下优选为1010至30 * 1010泊，优选为8.0 * 1010至25 * 1010泊，标准比重（SSG，以下定义）为2.135至2.175，优选为2.140至2.160， 提供聚合物具有至少400％的绿色伸长率。

    Defect inspection method and device therefor
    57.
    发明授权
    Defect inspection method and device therefor 有权
    缺陷检查方法及其设备

    公开(公告)号：US09148631B2

    公开(公告)日：2015-09-29

    申请号：US13881378

    申请日：2011-10-26

    申请人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

    发明人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

    IPC分类号： H04N7/18 ,  H01J37/28 ,  G01N23/225

    CPC分类号： H04N7/18 ,  G01N23/2251 ,  G01N2223/3301 ,  G01N2223/418 ,  G01N2223/611 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/2811 ,  H01J2237/2815 ,  H01J2237/2817

    摘要： In imaging a sample using an electron microscope, in order to reduce a time for focusing, a scanning range of a Z coordinate is reduced to complete focusing by obtaining SEM images such that: for a first predetermined number of portions, focal positions of an electron beam in obtaining each SEM image are moved in a predetermined range; then, a curved surface shape of the surface of the sample is estimated by using information relating to the focal positions of the electron beam in the first predetermined number of portions; after the images are taken, the range in which the focal positions of the electron beam are moved for scanning the electron beam on the surface of the sample is made to be narrower than the predetermined range by using the curved surface information estimated, thereby performing scanning to take the images of the sample.

    摘要翻译： 在使用电子显微镜对样品进行成像时，为了减少聚焦时间，通过获得SEM图像来减小Z坐标的扫描范围以完成聚焦，使得：对于第一预定数量的部分，电子的焦点位置 获得每个SEM图像的光束在预定范围内移动; 然后，通过使用与第一预定数量的电子束的焦点位置有关的信息来估计样品表面的曲面形状; 在拍摄图像之后，通过使用估计的曲面信息使电子束的焦点位置移动以扫描样品表面上的电子束的范围比预定范围窄，从而执行扫描 拍摄样品的图像。

    Device for classifying defects and method for adjusting classification
    58.
    发明授权
    Device for classifying defects and method for adjusting classification 有权
    分类缺陷的设备和分类调整方法

    公开(公告)号：US08892494B2

    公开(公告)日：2014-11-18

    申请号：US13376390

    申请日：2010-07-08

    申请人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

    发明人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

    IPC分类号： G06F15/18 ,  G06T7/00

    CPC分类号： G06T7/001 ,  G06T2207/10056 ,  G06T2207/20076 ,  G06T2207/30148

    摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).

    摘要翻译： 公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。 用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据 分类为第一类组的缺陷的特征量。 并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。