OHMIC ELECTRODE AND METHOD OF FORMING THE SAME
    54.
    发明申请
    OHMIC ELECTRODE AND METHOD OF FORMING THE SAME 有权
    OHMIC电极及其形成方法

    公开(公告)号:US20120132927A1

    公开(公告)日:2012-05-31

    申请号:US13384850

    申请日:2010-08-04

    IPC分类号: H01L29/161 H01L21/28

    摘要: An ohmic electrode for a p-type SiC semiconductor, and a method of forming the ohmic electrode. The ohmic electrode has an ohmic electrode layer, which has an amorphous structure and which is made of a Ti(1−x−y)Si(s)C(y) ternary film of which a composition ratio is within a composition range that is surrounded by two lines and two curves expressed by an expression x=0 (0.35≦y≦0.5), an expression y=−1.120x+0.5200 (0.1667≦x≦0.375), an expression y=1.778(x−0.375)2+0.1 (0≦x≦0.375) and an expression y=−2.504x2−0.5828x+0.5 (0≦x≦0.1667) and that excludes the line expressed by the expression x=0. The ohmic layer is directly laminated on a surface of a p-type SiC semiconductor.

    摘要翻译: 用于p型SiC半导体的欧姆电极,以及形成欧姆电极的方法。 欧姆电极具有欧姆电极层,其具有非晶结构,其由组成比在组成范围内的Ti(1-x-y)Si(s)C(y)三元膜制成 由表达式x = 0(0.35≦̸ y≦̸ 0.5)表示的两条线和两条曲线包围,表达式y = -1.120x + 0.5200(0.1667≦̸ x& nlE; 0.375),表达式y = 1.778(x-0.375 )2 + 0.1(0≦̸ x≦̸ 0.375),并且表达式y = -2.504x2-0.5828x + 0.5(0≦̸ x≦̸ 0.1667),并且排除由表达式x = 0表示的行。 欧姆层直接层压在p型SiC半导体的表面上。

    OHMIC ELECTRODE AND METHOD OF FORMING THE SAME
    55.
    发明申请
    OHMIC ELECTRODE AND METHOD OF FORMING THE SAME 审中-公开
    OHMIC电极及其形成方法

    公开(公告)号:US20110287626A1

    公开(公告)日:2011-11-24

    申请号:US13146208

    申请日:2010-01-29

    IPC分类号: H01L21/283

    摘要: The invention provides an ohmic electrode of a p-type SiC semiconductor element, which includes an ohmic electrode layer that is made of Ti3SiC2, and that is formed directly on a surface of a p-type SiC semiconductor. The invention also provides a method of forming an ohmic electrode of a p-type SiC semiconductor element. The ohmic electrode includes an ohmic electrode layer that is made of Ti3SiC2, and that is formed directly on a surface of a p-type SiC semiconductor. The method includes forming a ternary mixed film that includes Ti, Si, and C in a manner such that an atomic composition ratio, Ti:Si:C is 3:1:2, on a surface of a p-type SiC semiconductor to produce a laminated film; and annealing the produced laminated film under vacuum or under an inert gas atmosphere.

    摘要翻译: 本发明提供了一种p型SiC半导体元件的欧姆电极,其包括由Ti 3 SiC 2制成的欧姆电极层,其直接形成在p型SiC半导体的表面上。 本发明还提供了形成p型SiC半导体元件的欧姆电极的方法。 欧姆电极包括由Ti 3 SiC 2制成并且直接形成在p型SiC半导体的表面上的欧姆电极层。 该方法包括以使得在p型SiC半导体的表面上的原子组成比Ti:Si:C为3:1:2的方式形成包括Ti,Si和C的三元混合膜,以产生 层压膜; 并在真空或惰性气体气氛下退火生产的层压膜。

    SEMICONDUCTOR DEVICES AND MANUFACTURING METHOD THEREOF
    57.
    发明申请
    SEMICONDUCTOR DEVICES AND MANUFACTURING METHOD THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20090233435A1

    公开(公告)日:2009-09-17

    申请号:US12440939

    申请日:2007-09-21

    IPC分类号: H01L21/285

    摘要: A method is set forth of forming an ohmic electrode having good characteristics on a SiC semiconductor layer. In the method, a Ti-layer and an Al-layer are formed on a surface of the SiC substrate. The SiC substrate having the Ti-layer and the Al-layer is maintained at a temperature that is higher than or equal to a first temperature and lower than a second temperature until all Ti in the Ti-layer has reacted with Al. The first temperature is the minimum temperature of a temperature zone at which the Ti reacts with the Al to form Al3Ti, and the second temperature is the minimum temperature of a temperature zone at which the Al3Ti reacts with SiC to form Ti3SiC2. As a result of this maintaining of temperature step, an Al3Ti-layer is formed on the surface of the SiC substrate. The method also comprises further heating the SiC substrate having the Al3Ti-layer to a temperature that is higher than the second temperature. As a result of this step of further heating the SiC substrate reacts with Al3Ti of the Al3Ti-layer to form a Ti3SiC2-layer on the surface of the SiC substrate.

    摘要翻译: 阐述了在SiC半导体层上形成具有良好特性的欧姆电极的方法。 在该方法中,在SiC衬底的表面上形成Ti层和Al层。 具有Ti层和Al层的SiC衬底保持在高于或等于第一温度并低于第二温度的温度,直到Ti层中的所有Ti都与Al反应。 第一个温度是Ti与Al反应形成Al3Ti的温度区的最低温度,第二个温度是Al3Ti与SiC反应形成Ti3SiC2的温度区的最低温度。 由于这种维持温度步骤的结果,在SiC衬底的表面上形成Al 3 Ti层。 该方法还包括将具有Al 3 Ti层的SiC衬底进一步加热到高于第二温度的温度。 作为进一步加热的步骤的结果,SiC衬底与Al 3 Ti层的Al 3 Ti反应以在SiC衬底的表面上形成Ti 3 SiC 2层。

    Printing system
    58.
    发明申请
    Printing system 审中-公开
    印刷系统

    公开(公告)号:US20090190155A1

    公开(公告)日:2009-07-30

    申请号:US12321641

    申请日:2009-01-23

    申请人: Masahiro Sugimoto

    发明人: Masahiro Sugimoto

    IPC分类号: G06K15/00 G06F3/12

    摘要: A personal computer identifies a target of a printing error in a printer. At this time, the personal computer identifies the target of the printing error in the printer as a print file, based on an identification code obtained together with status information which represents error information. The personal computer waits for the printer to restore the error. The personal computer determines whether or not the printer has restored the error based on the status information obtained from the printer on a regular basis or when driven by some event. Next, the personal computer retransmits the print file thus identified to the printer. Alternatively, the printer re-receives the print file.

    摘要翻译: 个人计算机识别打印机中打印错误的目标。 此时,个人计算机基于与表示错误信息的状态信息一起获得的识别码,将打印机中的打印错误的目标识别为打印文件。 个人电脑等待打印机恢复错误。 个人计算机基于从打印机定期获得的状态信息或当某些事件驱动时,确定打印机是否已经恢复了错误。 接下来,个人计算机将如此识别的打印文件重新发送到打印机。 或者,打印机重新接收打印文件。

    Sensing device and sensor apparatus
    59.
    发明授权
    Sensing device and sensor apparatus 失效
    感应装置和传感器装置

    公开(公告)号:US06568267B2

    公开(公告)日:2003-05-27

    申请号:US09838287

    申请日:2001-04-20

    IPC分类号: G01C1900

    CPC分类号: G01C19/5719 G01P2015/0814

    摘要: A sensing device, such as an angular speed detecting device, includes a vibrator for improving detection precision. The vibrator is displaceably supported on a substrate and is vibrated in the direction of an X-axis by driving electrodes. Detecting electrodes detect vibrations of the vibrator in the direction of a Y-axis caused by a Coriolis' force resulting from the angular speed occurring about a Z-axis. Each of the driving and detecting electrodes includes a movable electrode that is connected to the vibrator and that is displaced together therewith on the substrate and a fixed electrode fixed onto the substrate in such a manner as to face the movable electrode. By equalizing conductors connected to fixed electrodes of the driving electrodes and conductors connected to fixed electrodes of the detecting electrodes in length, width, and thickness, respectively, one electrical characteristic is set for those of the wiring portions which function in the same manner.

    摘要翻译: 诸如角速度检测装置的感测装置包括用于提高检测精度的振动器。 振动器被可移动地支撑在基板上,并且通过驱动电极在X轴的方向上振动。 检测电极通过由围绕Z轴的角速度产生的科里奥利力产生的Y轴方向检测振动器的振动。 每个驱动和检测电极都包括一个可动电极,它连接到振子上并与基板一起位移在一起,固定电极以面对可动电极的方式固定在基板上。 通过使连接到驱动电极的固定电极的导体和连接到检测电极的固定电极的导体的长度,宽度和厚度分别相等,为相同方式起作用的布线部分设置一个电特性。