公开(公告)号：US07497633B2

公开(公告)日：2009-03-03

申请号：US11273440

申请日：2005-11-10

申请人： Koji Kaneyama ,  Shuji Shibata ,  Tsuyoshi Okumura ,  Shuichi Yasuda ,  Masashi Kanaoka ,  Tadashi Miyagi ,  Kazuhito Shigemori

发明人： Koji Kaneyama ,  Shuji Shibata ,  Tsuyoshi Okumura ,  Shuichi Yasuda ,  Masashi Kanaoka ,  Tadashi Miyagi ,  Kazuhito Shigemori

IPC分类号： G03D5/00 ,  G03B27/52 ,  C23C14/00 ,  B05C11/00

CPC分类号： H01L21/67051 ,  G03F7/70341 ,  G03F7/70991 ,  H01L21/67028 ,  H01L21/67034 ,  Y10S414/135

摘要： A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a drying/development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. The drying/development processing block comprises a drying processing group. The interface block comprises an interface transport mechanism. A substrate is subjected to exposure processing by the exposure device, and subsequently transported to the drying processing group by the interface transport mechanism. The substrate is cleaned and dried by the drying processing group.

摘要翻译： 基板处理装置包括分度器块，防反射膜处理块，抗蚀剂膜处理块，干燥/显影处理块和界面块。 曝光装置设置在接口块附近。 干燥/显影处理块包括干燥处理组。 接口块包括接口传送机制。 基板经曝光装置进行曝光处理，随后通过界面输送机构输送到干燥处理组。 通过干燥处理组对基材进行清洗干燥。

公开(公告)号：US20080240641A1

公开(公告)日：2008-10-02

申请号：US12076636

申请日：2008-03-20

申请人： Yoshitaka Waseda ,  Tsuyoshi Okumura

发明人： Yoshitaka Waseda ,  Tsuyoshi Okumura

IPC分类号： F16C33/46

CPC分类号： F16C9/02 ,  F01L1/047 ,  F01L2001/0476 ,  F01L2001/054 ,  F01L2101/00 ,  F16C17/02 ,  F16C19/466 ,  F16C21/00 ,  F16C33/46 ,  F16C33/4694 ,  F16C33/60 ,  F16C2360/18

摘要： The clearance between the outer peripheral surface of an annular portion of a cage and the inner peripheral surface of each of rib portions of outer-ring split pieces is set to be smaller than the clearance between the radial end surface of a projection portion of the cage and the inner peripheral surface of each of body portions of the outer-ring split pieces. When a centrifugal force due to engine rotation acts upon the cage, the inner peripheral surface of each of the rib portions of the outer-ring split pieces touches the outer peripheral surface of the annular portion of the cage before the inner peripheral surface of each of the body portions of the outer-ring split pieces touches the radial end surface of the projection portion of the cage. Thus, the radial displacement of the cage can be prevented in good time.

摘要翻译： 保持架的环状部的外周面与外圈分割片的每个肋部的内周面之间的间隙被设定为小于保持架的突出部的径向端面之间的间隙 以及外圈分割片的每个主体部分的内周面。 当由于发动机旋转而产生的离心力作用在保持架上时，外圈分割片的每个肋部的内周面在保持器的环形部分的外周面在每个的内周面之前接触 外环分割片的主体部分与保持架的突起部的径向端面相接触。 因此，能够及时地防止保持架的径向位移。

公开(公告)号：US20060147202A1

公开(公告)日：2006-07-06

申请号：US11295240

申请日：2005-12-06

申请人： Shuichi Yasuda ,  Masashi Kanaoka ,  Koji Kaneyama ,  Tadashi Miyagi ,  Kazuhito Shigemori ,  Toru Asano ,  Yukio Toriyama ,  Takashi Taguchi ,  Tsuyoshi Mitsuhashi ,  Tsuyoshi Okumura

发明人： Shuichi Yasuda ,  Masashi Kanaoka ,  Koji Kaneyama ,  Tadashi Miyagi ,  Kazuhito Shigemori ,  Toru Asano ,  Yukio Toriyama ,  Takashi Taguchi ,  Tsuyoshi Mitsuhashi ,  Tsuyoshi Okumura

IPC分类号： G03D5/00

CPC分类号： G03F7/70991 ,  G03F7/70341

摘要： A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a washing/development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. A resist film is formed on a substrate by the resist film processing block. The substrate is washed and dried by the washing processing unit in the washing/development processing block before the substrate is subjected to the exposure processing by the exposure device.

摘要翻译： 基板处理装置包括分度器块，防反射膜处理块，抗蚀剂膜处理块，洗涤/显影处理块和界面块。 曝光装置设置在接口块附近。 通过抗蚀剂膜处理块在基板上形成抗蚀剂膜。 在通过曝光装置对基板进行曝光处理之前，通过洗涤处理单元在洗涤/显影处理块中洗涤和干燥基板。

公开(公告)号：US20060108068A1

公开(公告)日：2006-05-25

申请号：US11273440

申请日：2005-11-10

申请人： Koji Kaneyama ,  Shuji Shibata ,  Tsuyoshi Okumura ,  Shuichi Yasuda ,  Masashi Kanaoka ,  Tadashi Miyagi ,  Kazuhito Shigemori

发明人： Koji Kaneyama ,  Shuji Shibata ,  Tsuyoshi Okumura ,  Shuichi Yasuda ,  Masashi Kanaoka ,  Tadashi Miyagi ,  Kazuhito Shigemori

IPC分类号： C23F1/00 ,  B08B7/00 ,  C23C16/00 ,  H01L21/677

CPC分类号： H01L21/67051 ,  G03F7/70341 ,  G03F7/70991 ,  H01L21/67028 ,  H01L21/67034 ,  Y10S414/135

摘要： A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a drying/development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. The drying/development processing block comprises a drying processing group. The interface block comprises an interface transport mechanism. A substrate is subjected to exposure processing by the exposure device, and subsequently transported to the drying processing group by the interface transport mechanism. The substrate is cleaned and dried by the drying processing group.

公开(公告)号：US5172054A

公开(公告)日：1992-12-15

申请号：US673756

申请日：1991-03-25

申请人： Makoto Nohara ,  Tsuyoshi Okumura

发明人： Makoto Nohara ,  Tsuyoshi Okumura

IPC分类号： G01P1/02 ,  G01P3/44

CPC分类号： G01P1/026 ,  G01P3/443 ,  F16C19/186 ,  F16C41/007

摘要： A bearing apparatus is capable of detecting rotational speed of a driven shaft of an automobile. The bearing apparatus has a rotational speed detector and a detected member. The detected member is fixed to an inside member rotating with the driven shaft. The detected member has a hollow cylindrical portion which extends in an axial direction and is provided with a plurality of projections at even intervals in a circumferential direction on its inner peripheral surface. The rotational speed detector is fixed to a cover for covering the rotational speed detector and the detected member. A detector portion of the rotational speed detector is positioned within the hollow cylindrical portion so as to oppose the projections.This is a divisional application of application Ser. No. 07/626,311, filed on Dec. 13, 1990, now abandoned which is a continuation application of now abandoned application Ser. No. 07/469,183, filed on Jan. 24, 1990.

摘要翻译： 轴承装置能够检测汽车的从动轴的转速。 轴承装置具有转速检测器和检测部件。 所检测的构件被固定到与从动轴一起旋转的内部构件。 所检测的构件具有沿轴向延伸的中空圆柱形部分，并且在其内周表面上沿圆周方向以均匀间隔设置有多个突起。 旋转速度检测器固定在覆盖旋转速度检测器和被检测部件的盖上。 旋转速度检测器的检测器部分位于中空圆柱形部分内以与突起相对。 这是应用程序Ser的分案申请。 1990年12月13日提交的第07 / 626,311号现在已经被放弃，这是现在已经被遗弃的申请Ser的继续申请。 1990年1月24日提交的第07 / 469,183号。

公开(公告)号：US4864231A

公开(公告)日：1989-09-05

申请号：US198838

申请日：1988-05-26

申请人： Tsuyoshi Okumura ,  Makoto Nohara

发明人： Tsuyoshi Okumura ,  Makoto Nohara

IPC分类号： B60B35/18 ,  B60B27/00 ,  F16C19/18 ,  G01P3/44 ,  G01P3/488

CPC分类号： F16C41/007 ,  B60B27/0005 ,  G01P3/443 ,  B60G2204/11 ,  B60G2204/115 ,  B60G2400/208 ,  F16C19/186 ,  F16C2326/02 ,  F16C33/583

摘要： A bearing assembly for an axle shaft of a vehicle. An inner ring includes a cylindrical body and an outer flange for mounting a wheel. On a portion of the cylindrical body adjacent the flange is mounted a revolution detection ring which has a seal contact portion and a gear-shaped detected portion having a plurality of projections circumferentially spaced on the outer peripheral surface thereof. The bearing assembly also has an outer ring which is coupled with the inner ring through rolling elements and mounted to the chassis of the vehicle. A sensor is mounted on the outer ring such that it confronts the gear-shaped portion of the revolution detection ring and detects the projections passing by the sensor so as to determine the annular speed of the wheel. The assembly also has a bearing seal which is mounted on the outer ring and kept in contact with the seal contact portion of the revolution detection ring so as to prevent contamination by sand, mud, or the like.

摘要翻译： 一种用于车辆车轴的轴承组件。 内环包括圆柱体和用于安装车轮的外凸缘。 在与凸缘相邻的圆筒体的一部分上安装有旋转检测环，该环具有密封接触部分和齿轮形检测部分，其具有在其外周表面上周向间隔开的多个突起。 轴承组件还具有外圈，其通过滚动元件与内圈联接并安装到车辆的底盘。 传感器安装在外圈上，使其面对旋转检测环的齿轮形部分，并且检测通过传感器的突起，以便确定车轮的环形速度。 组件还具有安装在外圈上并与转动检测环的密封接触部分保持接触的轴承密封件，以防止沙子，泥浆等的污染。