Vertical cavity surface emitting laser and method of manufacturing it
    52.
    发明申请
    Vertical cavity surface emitting laser and method of manufacturing it 失效
    垂直腔表面发射激光器及其制造方法

    公开(公告)号:US20080240194A1

    公开(公告)日:2008-10-02

    申请号:US12076791

    申请日:2008-03-24

    IPC分类号: H01S5/183 H01L33/00

    摘要: A VSCEL capable of being easily and inexpensively manufactured and of stabilizing the polarization direction of laser light in one direction is provided. The Vertical Cavity Surface Emitting Laser includes a semiconductor lamination structure including a first multilayer film reflector, an active layer having a light emitting region, and a second multilayer film reflector in this order over a substrate from the substrate side. The semiconductor lamination structure has a pair of grooves provided with a region opposed to the light emitting region in between, and one or a plurality of first oxidation layers including a first non-oxidation region provided at least in a region opposed to the light emitting region and a first oxidation region provided on each side face of the pair of grooves.

    摘要翻译: 提供了能够容易且廉价地制造并且在一个方向上稳定激光的偏振方向的VSCEL。 垂直空腔表面发射激光器包括从基板侧在基板上依次包括第一多层膜反射器,具有发光区域的有源层和第二多层膜反射器的半导体层叠结构。 半导体层叠结构具有设置有与其间的发光区域相对的区域的一对沟槽,以及包括至少设置在与发光区域相对的区域中的第一非氧化区域的一个或多个第一氧化层 以及设置在所述一对槽的每个侧面上的第一氧化区域。

    Vertical cavity surface emitting laser and method for manufacturing the same
    53.
    发明授权
    Vertical cavity surface emitting laser and method for manufacturing the same 失效
    垂直腔表面发射激光器及其制造方法

    公开(公告)号:US07675956B2

    公开(公告)日:2010-03-09

    申请号:US12076791

    申请日:2008-03-24

    IPC分类号: H01S5/00

    摘要: A Vertical Cavity Surface Emitting Laser capable of being easily and inexpensively manufactured and stabilizing the polarization direction of laser light in one direction is provided. The VCSEL includes a semiconductor lamination structure including a first multilayer film reflector, an active layer having a light emitting region, and a second multilayer film reflectors, in this order over a substrate from the substrate side. The semiconductor lamination structure has a pair of grooves provided with a region opposed to the light emitting region in between, and one or a plurality of first oxidation layers including a first non-oxidation region provided at least in a region opposed to the light emitting region and a first oxidation region provided on each side face of the pair of grooves.

    摘要翻译: 提供了能够容易且廉价地制造并稳定激光在一个方向的偏振方向的垂直腔面发射激光器。 VCSEL包括从衬底侧在衬底上依次包括第一多层膜反射器,具有发光区域的有源层和第二多层膜反射器的半导体层叠结构。 半导体层叠结构具有设置有与其间的发光区域相对的区域的一对沟槽,以及包括至少设置在与发光区域相对的区域中的第一非氧化区域的一个或多个第一氧化层 以及设置在所述一对槽的每个侧面上的第一氧化区域。

    Laser diode
    54.
    发明申请
    Laser diode 审中-公开
    激光二极管

    公开(公告)号:US20110249696A1

    公开(公告)日:2011-10-13

    申请号:US13064524

    申请日:2011-03-30

    IPC分类号: H01S5/00

    摘要: There is provided a laser diode capable of setting a mesa diameter small without use of a method which loses reliability of a device, and is not easily controlled. The laser diode includes: a columnar mesa including a first multilayer film reflecting mirror, an active layer, and a second multilayer film reflecting mirror in this order, including an oxide confined layer having an unoxidized region in middle of a plane, and having a cross-sectional shape in a plane direction different from a cross-sectional shape of the unoxidized region in a plane direction; and a plurality of metal electrodes formed in regions on a top face of the mesa not facing the unoxidized region.

    摘要翻译: 本发明提供一种激光二极管,能够将台面直径设定得较小,而不使用失去设备可靠性的方法,不容易控制。 激光二极管包括:包括第一多层膜反射镜,有源层和第二多层膜反射镜的柱状台面,其包括在平面中间具有未氧化区域的氧化物限制层,并且具有十字形 在与平面方向上的非氧化区域的横截面形状不同的平面方向上的截面形状; 以及形成在不面向未氧化区域的台面的顶面的区域中的多个金属电极。

    Laser diode and method of manufacturing the same
    56.
    发明授权
    Laser diode and method of manufacturing the same 有权
    激光二极管及其制造方法

    公开(公告)号:US08098703B2

    公开(公告)日:2012-01-17

    申请号:US12656427

    申请日:2010-01-29

    IPC分类号: H01S5/00

    摘要: A laser diode allowed to stabilize the polarization direction of laser light in one direction is provided. The laser diode includes a laminate configuration including a lower multilayer reflecting mirror, an active layer and an upper multilayer reflecting mirror in order from a substrate side, in which the laminate configuration includes a columnar mesa section including an upper part of the lower multilayer reflecting mirror, the active layer and the upper multilayer reflecting mirror, and the lower multilayer reflecting mirror includes a plurality of pairs of a low refractive index layer and a high refractive index layer, and a plurality of oxidation layers nonuniformly distributed in a direction rotating around a central axis of the mesa section in a region except for a central region of one or more of the low refractive index layers.

    摘要翻译: 提供允许在一个方向上稳定激光的偏振方向的激光二极管。 激光二极管包括从基板侧起按顺序包括下层多层反射镜,有源层和上多层反射镜的叠层结构,其中层叠结构包括柱状台面部分,该柱状台面部分包括下多层反射镜的上部 有源层和上层多层反射镜以及下层多层反射镜包括多对低折射率层和高折射率层,以及多个氧化层,其不均匀分布在围绕中心的方向上旋转 在除了一个或多个低折射率层的中心区域之外的区域中的台面部分的轴线。

    Vertical cavity surface emitting laser
    57.
    发明申请
    Vertical cavity surface emitting laser 有权
    垂直腔表面发射激光

    公开(公告)号:US20100040104A1

    公开(公告)日:2010-02-18

    申请号:US12458754

    申请日:2009-07-22

    IPC分类号: H01S5/183

    摘要: The present invention provides a Vertical Cavity Surface Emitting Laser including: a first multilayer film reflector; an active layer having a light emission region; a second multilayer film reflector; and a reflectance adjustment layer in this order on a substrate side. The first multilayer film reflector and the second multilayer film reflector have a laminated structure in which reflectance of oscillation wavelength λx is almost constant without depending on temperature change. The active layer is made of a material with which a maximum gain is obtained at temperature higher than ambient temperature. The reflectance adjustment layer has a laminated structure in which difference ΔR(=Rx−Ry) between reflectance Rx of a region opposed to a central region of the light emission region and reflectance Ry of a region opposed to an outer edge region of the light emission region is increased associated with temperature increase from ambient temperature to high temperature.

    摘要翻译: 本发明提供一种垂直腔表面发射激光器,包括:第一多层膜反射器; 具有发光区域的有源层; 第二多层膜反射器; 和反射率调整层。 第一多层膜反射器和第二多层膜反射器具有振荡波长λx的反射率几乎恒定而不依赖于温度变化的层叠结构。 有源层由在高于环境温度的温度下获得最大增益的材料制成。 反射率调整层具有层叠结构,其中与发光区域的中心区域相对的区域的反射率Rx与与发光区域的外边缘区域相对的区域的反射率Ry之间的差Dgr R(= Rx-Ry) 发光区域随温度从环境温度升高到高温而增加。

    Vertical cavity surface emitting laser
    58.
    发明授权
    Vertical cavity surface emitting laser 有权
    垂直腔表面发射激光

    公开(公告)号:US08218594B2

    公开(公告)日:2012-07-10

    申请号:US12458754

    申请日:2009-07-22

    IPC分类号: H01S5/00

    摘要: The present invention provides a Vertical Cavity Surface Emitting Laser including: a first multilayer film reflector; an active layer having a light emission region; a second multilayer film reflector; and a reflectance adjustment layer in this order on a substrate side. The first multilayer film reflector and the second multilayer film reflector have a laminated structure in which reflectance of oscillation wavelength λx is almost constant without depending on temperature change. The active layer is made of a material with which a maximum gain is obtained at temperature higher than ambient temperature. The reflectance adjustment layer has a laminated structure in which difference ΔR(=Rx−Ry) between reflectance Rx of a region opposed to a central region of the light emission region and reflectance Ry of a region opposed to an outer edge region of the light emission region is increased associated with temperature increase from ambient temperature to high temperature.

    摘要翻译: 本发明提供一种垂直腔表面发射激光器,包括:第一多层膜反射器; 具有发光区域的有源层; 第二多层膜反射器; 和反射率调整层。 第一多层膜反射器和第二多层膜反射器具有振荡波长λx的反射率几乎恒定而不依赖于温度变化的层叠结构。 有源层由在高于环境温度的温度下获得最大增益的材料制成。 反射率调整层具有层叠结构,其中与发光区域的中心区域相对的区域的反射率Rx与与发光区域的外边缘区域相对的区域的反射率Ry之间的差Dgr R(= Rx-Ry) 发光区域随温度从环境温度升高到高温而增加。