公开(公告)号：US20140209193A1

公开(公告)日：2014-07-31

申请号：US14166997

申请日：2014-01-29

申请人： JEOL Ltd.

发明人： Mitsuhide Matsushita

IPC分类号： H01J37/18

CPC分类号： H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/204 ,  Y10T137/86002

摘要： A charged particle beam instrument is offered which has a specimen pre-evacuation chamber. An outflow flow rate adjusting valve (70) adjusts the flow rate of gas exhausted from the specimen pre-evacuation chamber (20) under control of controller (82). The controller (82) for making a decision as to whether the difference between a first pressure in the pre-evacuation chamber (20) before the adjusting valve (70) is controlled to the first degree of opening and a second pressure in the pre-evacuation chamber (20) after the adjusting valve (70) has been controlled to the first degree of opening is greater than a first reference value.

摘要翻译： 提供带有样品预抽真空室的带电粒子束仪器。 流出流量调节阀（70）在控制器（82）的控制下调节从样本预抽真空室（20）排出的气体的流量。 所述控制器（82）用于判断所述调节阀（70）之前的所述预抽空室（20）中的第一压力之间的差是否被控制到所述第一开度， 在调节阀（70）已被控制到第一开度之后的排气室（20）大于第一参考值。

公开(公告)号：US08658974B2

公开(公告)日：2014-02-25

申请号：US13328745

申请日：2011-12-16

申请人： Bart Buijsse

发明人： Bart Buijsse

IPC分类号： G01N5/00

CPC分类号： H01J37/023 ,  H01J37/16 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2608 ,  H01J2237/31749

摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.

摘要翻译： 本发明涉及一种用于例如环境的环境细胞。 电子显微镜。 环境细胞显示用于将由电子显微镜产生的光束传递到放置在环境细胞内的样品（6）的孔（15）。 根据本发明的环境电池的特征在于，环境电池（14）的一部分对于二次辐射如背散电子或X射线是透明的。 这使得能够通过放置在环境单元外部的检测器来检测该辐射，从而使得单元的结构更简单。

公开(公告)号：US08586949B2

公开(公告)日：2013-11-19

申请号：US13295249

申请日：2011-11-14

申请人： Laura Dinu-Gürtler ,  Willem Henk Urbanus ,  Marco Jan-Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink

发明人： Laura Dinu-Gürtler ,  Willem Henk Urbanus ,  Marco Jan-Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink

IPC分类号： H01J37/147 ,  H01J37/10 ,  G03B27/26 ,  G21K5/04

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J37/301 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/188

摘要： A charged particle lithography system for transferring a pattern onto the surface of a target, comprising a main vacuum chamber, a source chamber and an intermediate chamber, both located in the main vacuum chamber, a beam generator for generating a charged particle beam, the beam generator located in the source chamber, and a first aperture array element for generating a plurality of charged particle beamlets from the beam, the first aperture array element located in the intermediate chamber. The system is adapted for maintaining a first pressure in the main vacuum chamber, a second pressure in the intermediate chamber, and a third pressure in the source chamber, and wherein the first pressure is lower than an ambient pressure, the second pressure is lower than the first pressure, and the third pressure is lower than the second pressure.

摘要翻译： 一种用于将图案转印到目标表面上的带电粒子光刻系统，包括位于主真空室中的主真空室，源室和中间室，用于产生带电粒子束的束发生器， 位于源室中的发生器，以及用于从所述梁产生多个带电粒子子束的第一孔阵列元件，位于中间室中的第一孔阵列元件。 该系统适于维持主真空室中的第一压力，中间室中的第二压力和源室中的第三压力，并且其中第一压力低于环境压力，第二压力低于 第一压力和第三压力低于第二压力。

公开(公告)号：US08405045B2

公开(公告)日：2013-03-26

申请号：US13306529

申请日：2011-11-29

申请人： Dirk Preikszas ,  Armin Heinz Hayn

发明人： Dirk Preikszas ,  Armin Heinz Hayn

IPC分类号： H01J3/26 ,  H01J3/14

CPC分类号： H01J37/1474 ,  H01J37/28 ,  H01J2237/1534 ,  H01J2237/188 ,  H01J2237/31749

摘要： A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.

摘要翻译： 粒子束装置包括粒子束发生器，物镜，以及用于使粒子束偏转在由物镜限定的物平面中的第一和第二偏转系统。 在第一操作模式中，第一偏转系统产生第一偏转场，而第二偏转系统产生第二偏转场。 在第二操作模式中，第一偏转系统产生第三偏转场，第二偏转系统产生第四偏转场。

公开(公告)号：US20120328988A1

公开(公告)日：2012-12-27

申请号：US13530225

申请日：2012-06-22

申请人： Yoshihiro Hirata

发明人： Yoshihiro Hirata

IPC分类号： G21K5/00 ,  G03F7/20 ,  H03F3/08

CPC分类号： H01J37/16 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/188 ,  H01J2237/31774 ,  H03F3/08

摘要： A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode.

摘要翻译： 利用多个带电粒子束在基板上进行绘图的绘图装置包括：位于真空室中并被构造成对多个带电粒子束中的每一个进行空白的消隐偏转器; 位于外部室中的装置，其中气体压力高于真空室中的气体压力，并且构造成控制消隐偏转器; 以及面向遮光偏转器的第一基板。 第一基板构成在第一基板的面向消隐偏转器的区域中分离真空室和外部室的隔板，并且包括填充在该区域中形成的通孔的电极。 该装置通过电极电连接到消隐偏转器。

公开(公告)号：US20120091338A1

公开(公告)日：2012-04-19

申请号：US13328745

申请日：2011-12-16

申请人： Bart Buijsse

发明人： Bart Buijsse

IPC分类号： H01J37/26 ,  H01J37/20

CPC分类号： H01J37/023 ,  H01J37/16 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2608 ,  H01J2237/31749

摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.

公开(公告)号：US20120091337A1

公开(公告)日：2012-04-19

申请号：US13273458

申请日：2011-10-14

申请人： Stewart John Bean

发明人： Stewart John Bean

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J2237/022 ,  H01J2237/1415 ,  H01J2237/188 ,  H01J2237/2608

摘要： In a charged particle beam device, such as an electron microscope, a beam generating apparatus generates a focussed charged particle beam e—that is incident on a specimen in a specimen chamber which holds the specimen in a gaseous environment. A pressure limiting aperture provides partial gaseous isolation of the specimen chamber from the beam generating means, and is located in a lens of the latter. The device includes a conduit, such as an intermediate chamber in the lens, through which, in use, gas is supplied to set up a flow of gas from the region of the lens towards the specimen, thereby to prevent material released from the specimen from impinging on the pressure limiting aperture, to prevent contamination of the latter. The device can be used in a method of scanning a specimen with a charged particle beam, for example in a method of electron microscopy.

摘要翻译： 在诸如电子显微镜的带电粒子束装置中，光束产生装置产生聚焦的带电粒子束e，其入射在将样品保持在气体环境中的样本室中的样本上。 压力限制孔提供样品室与光束产生装置的部分气体隔离，并且位于后者的透镜中。 该装置包括导管，例如透镜中的中间室，在使用中通过该导管供应气体，以将透镜的区域中的气体流从样品中提取，从而防止材料从样品中释放出来 撞击压力限制孔，以防止后者的污染。 该装置可以用于以带电粒子束扫描样品的方法，例如以电子显微镜的方法。

公开(公告)号：US08093558B2

公开(公告)日：2012-01-10

申请号：US12413463

申请日：2009-03-27

申请人： Bart Buijsse

发明人： Bart Buijsse

IPC分类号： G01N23/00

CPC分类号： H01J37/023 ,  H01J37/16 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2608 ,  H01J2237/31749

摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.

摘要翻译： 本发明涉及一种用于例如环境的环境细胞。 电子显微镜。 环境细胞显示用于将由电子显微镜产生的光束传递到放置在环境细胞内的样品（6）的孔（15）。 根据本发明的环境电池的特征在于，环境电池（14）的一部分对于二次辐射如背散电子或X射线是透明的。 这使得能够通过放置在环境单元外部的检测器来检测该辐射，从而使得单元的结构更简单。

公开(公告)号：US07923686B2

公开(公告)日：2011-04-12

申请号：US12330128

申请日：2008-12-08

申请人： Kurio Fukushima

发明人： Kurio Fukushima

IPC分类号： H01J37/26

CPC分类号： H01J37/18 ,  H01J37/09 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/0451 ,  H01J2237/0455 ,  H01J2237/0458 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/206 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2605 ,  H01J2237/2614

摘要： An apparatus which permits high-angle annular dark-field (HAADF) imaging comprises an electron gun, a specimen chamber in which a specimen is set, a gas cylinder for supplying environmental gas around the surface of the specimen through both a gas flow rate controller and a gas nozzle, a vacuum pump for evacuating the inside of the specimen chamber, an objective lens including upper and lower polepieces, a detector for detecting electrons transmitted through the specimen, a display device for displaying a transmission image of the specimen, orifice plates having minute holes, holders supporting the orifice plates, a drive mechanism for driving the holders, and a motion controller. The orifice plates can be moved in a direction crossing the optical axis of the beam on the upper and lower surfaces of the upper and lower polepieces of the objective lens.

摘要翻译： 允许高角度环形暗场（HAADF）成像的装置包括电子枪，其中设置有样本的样本室，用于通过气体流量控制器通过样品的表面周围提供环境气体的气瓶 以及气体喷嘴，用于抽空试样室内部的真空泵，包括上下杆的物镜，用于检测通过试样的电子的检测器，用于显示试样的透射图像的显示装置，孔板 具有微孔，支撑孔板的支架，用于驱动保持器的驱动机构和运动控制器。 孔板可以在与物镜的上下极的上表面和下表面上的光束的光轴交叉的方向上移动。

公开(公告)号：US20110000323A1

公开(公告)日：2011-01-06

申请号：US12667703

申请日：2008-07-10

申请人： Keisuke Kishita ,  Hisashi Sakai

发明人： Keisuke Kishita ,  Hisashi Sakai

IPC分类号： G01N1/00

CPC分类号： H01J37/265 ,  G01N33/0011 ,  H01J37/18 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/182 ,  H01J2237/186 ,  H01J2237/188 ,  H01J2237/2445 ,  H01J2237/2446

摘要： Gas is supplied from positive pressure (105 Pa or more) to an analysis device of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and the pressure of the gas is reduced by a pressure reducing pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the depressurized gas is introduced to a gas analysis device through a switching operation using a gas switching valve.

摘要翻译： 在保持条件恒定并复制条件的同时，将正压（105Pa以上）的气体精确稳定地供给到高真空（10-2Pa以下）的分​​析装置，并在短时间内切换到期望的气体 时间。 根据气体导入装置和方法，在混合室中合成多种气体，导入合成气体，通过减压泵将气体的压力降低到0.1Pa〜0.1的压力 MPa，通过使用气体切换阀的切换动作将减压气体导入气体分析装置。