公开(公告)号：US20160293375A1

公开(公告)日：2016-10-06

申请号：US15037971

申请日：2014-09-16

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Oliver HEID

IPC: H01J3/02 ,  H01J35/14 ,  H01J3/18 ,  H01J35/06

CPC classification number: H01J3/027 ,  H01J3/02 ,  H01J3/18 ,  H01J35/06 ,  H01J35/14

Abstract: The invention relates to an electron gun for generating a flat electron beam, comprising a cathode with an emission surface which is curved about a central axis and which is designed to emit electrons. The electron gun further comprises an accelerating device for accelerating the electrons in a radial direction towards a target region on the central axis. Furthermore, the emission surface has a width in the azimuth direction and a height oriented perpendicularly to the width, said width being at least ten times greater than the height.

Abstract translation: 本发明涉及一种用于产生平面电子束的电子枪，包括具有围绕中心轴线弯曲且被设计为发射电子的发射表面的阴极。 电子枪还包括加速装置，用于沿着径向加速电子朝向中心轴上的目标区域。 此外，发射表面具有方位方向上的宽度和垂直于宽度的高度，所述宽度比高度高至少十倍。

公开(公告)号：US20150117617A1

公开(公告)日：2015-04-30

申请号：US14582782

申请日：2014-12-24

Applicant: Kabushiki Kaisha Toshiba ,  Toshiba Electron Tubes & Devices Co., Ltd.

Inventor： Tomonari ISHIHARA ,  Naoki Akahori ,  Hidero Anno

IPC: H01J35/14 ,  H05G1/10 ,  H01J35/10

CPC classification number: H01J35/06 ,  A61B6/44 ,  H01J1/16 ,  H01J1/18 ,  H01J1/88 ,  H01J3/06 ,  H01J3/18 ,  H01J19/10 ,  H01J19/42 ,  H01J23/04 ,  H01J23/083 ,  H01J29/04 ,  H01J29/50 ,  H01J29/62 ,  H01J35/14 ,  H01J37/065 ,  H01J2229/481 ,  H01J2229/4827 ,  H01J2229/4831 ,  H01J2229/50 ,  H01J2229/582 ,  H01J2229/5835 ,  H01J2235/06 ,  H01J2237/032 ,  H01J2237/049 ,  H01J2237/06375 ,  H01J2893/0005 ,  H01J2893/005 ,  H01J2893/0088 ,  H01J2893/0089 ,  H01J2893/0094

Abstract: According to one embodiment, an X-ray tube includes an anode target, a cathode including a filament and a convergence electrode which includes a groove portion, and an envelope. The groove portion includes a pair of first bottom surfaces which are located in the same plane as the filament and between which the filament is interposed in a width direction of the groove portion, and a pair of second bottom surfaces between which the filament and the pair of first bottom surfaces are interposed in a length direction of the groove portion and which are located closer to an opening of the groove portion than the pair of first bottom surfaces.

Abstract translation: 根据一个实施例，X射线管包括阳极靶，包括细丝的阴极和包括沟槽部分的会聚电极和外壳。 槽部包括一对第一底面，该第一底面位于与灯丝相同的平面上，并且灯丝沿沟槽部的宽度方向插入其间，一对第二底面之间形成有灯丝和一对 的第一底表面沿着槽部的长度方向设置，并且位于比一对第一底面更靠近槽部的开口部。

公开(公告)号：US20140212815A1

公开(公告)日：2014-07-31

申请号：US13756178

申请日：2013-01-31

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Jimmy Hsiao ,  Ming-Zhang Kuo ,  Ping-Lin Yang ,  Cheng-Chung Lin ,  Osamu Takahashi ,  Sang Hoo Dhong

IPC: H01J29/60 ,  H01J29/62

CPC classification number: H01J29/62 ,  H01J3/12 ,  H01J3/16 ,  H01J3/18 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/31789

Abstract: A system includes an integrated circuit (IC) design data base having a feature, a source configured to generate a radiation beam, a pattern generator (PG) including a mirror array plate and an electrode plate disposed over the mirror array plate, wherein the electrode plate includes a lens let having a first dimension and a second dimension perpendicular to the first dimension with the first dimension larger than the second dimension so that the lens let modifies the radiation beam to form the long shaped radiation beam, and a stage configured secured the substrate. The system further includes an electric field generator connecting the minor array plate. The mirror array plate includes a mirror. The mirror absorbs or reflects the radiation beam. The radiation beam includes electron beam or ion beam. The second dimension is equal to a minimum dimension of the feature.

Abstract translation: 一种系统包括具有特征的集成电路（IC）设计数据库，被配置为产生辐射束的源，包括反射镜阵列板的图案发生器（PG）和设置在所述反射镜阵列板上的电极板，其中所述电极 板包括透镜，其具有垂直于第一尺寸的第一尺寸和第二尺寸，其第一尺寸大于第二尺寸，使得透镜使得辐射束修改以形成长形辐射束，并且被配置为将 基质。 该系统还包括连接小阵列板的电场发生器。 镜阵列板包括镜子。 镜子吸收或反射辐射束。 辐射束包括电子束或离子束。 第二个维度等于该特征的最小尺寸。

公开(公告)号：US08664619B2

公开(公告)日：2014-03-04

申请号：US13801713

申请日：2013-03-13

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang

IPC: H01J3/18 ,  H01J37/12 ,  H01J49/06

CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/067 ,  H01J2237/121

Abstract: A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90° with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.

Abstract translation: 使用混合静电透镜来形成和聚焦离子束。 混合静电透镜包括由具有第一和第二端的细长管和设置在第一端的第一电极和设置在第二端的第二电极限定的Einzel透镜。 细长管被配置为当离子束穿过混合静电透镜时，接收电压偏置以在Einzel透镜内产生电场。 混合静电透镜还包括具有第一级和第二级的四极透镜，其中每个级由相对于彼此转动90°的多个电极限定，以通过细长管限定在Z方向上的路径 。 Einzel透镜聚焦离子束，四极透镜成像离子束。

公开(公告)号：US20140034845A1

公开(公告)日：2014-02-06

申请号：US13565011

申请日：2012-08-02

Applicant: N. William Parker

Inventor： N. William Parker

IPC: H01J3/22 ,  H01J37/317 ,  H01J3/18

CPC classification number: H01J3/22 ,  H01J3/18 ,  H01J37/3007 ,  H01J37/317 ,  H01J2237/1534 ,  H01J2237/31776

Abstract: A charged particle shaped beam column includes: an objective lens configured to form a charged particle shaped beam on the surface of a substrate, wherein the disk of least confusion of the objective lens does not coincide with the surface of the substrate; an optical element with 8N poles disposed radially symmetrically about the optic axis of the column, the optical element being positioned between a condenser lens and the objective lens, wherein integer N1; and a power supply applying excitations to the optical element's 8N poles to provide an octupole electromagnetic field. The octupole electromagnetic field induces azimuthally-varying third-order deflections to beam trajectories passing through the 8N-pole optical element. By controlling the excitation of the 8N poles a shaped beam, such as a square beam, can be formed at the surface of the substrate.

Abstract translation: 带电粒子束柱包括：物镜，被配置为在基板的表面上形成带电粒子束，其中物镜的最小混淆盘与基板的表面不一致; 具有8N磁极的光学元件，其围绕所述列的光轴径向对称设置，所述光学元件位于聚光透镜和所述物镜之间，其中整数N1; 以及向光学元件的8N极施加激励以提供八极电磁场的电源。 八极电磁场引起通过8N极光学元件的射束轨迹的方位角变化的三阶偏转。 通过控制8N极的激发，可以在衬底的表面上形成诸如方束的成形光束。

公开(公告)号：US20130256526A1

公开(公告)日：2013-10-03

申请号：US13801713

申请日：2013-03-13

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventor： Shengwu Chang

IPC: H01J3/18 ,  H01J37/12

CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/067 ,  H01J2237/121

Abstract: A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90° with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.

公开(公告)号：US08466430B2

公开(公告)日：2013-06-18

申请号：US13633477

申请日：2012-10-02

Applicant: Canon Kabushiki Kaisha

Inventor： Kazuhiro Sando

IPC: H01J3/18 ,  H01J49/22 ,  H01J37/12 ,  H01J29/62 ,  G21K1/08

CPC classification number: H01J3/18 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/03 ,  H01J2237/1205

Abstract: An electrostatic lens includes multiple electrodes each having a through hole, and an insulating spacer that is provided between the electrodes and that fixes an interval between the electrodes. Both surfaces of the spacer are bonded with the electrodes opposing each other so that the spacer is integral with both the electrodes. A protective film is disposed on both surfaces of each of the electrodes. The protective film is present on the interior wall of the through hole and in a region around the through hole on the surface of the electrode. The region extends continuously from the interior wall to an end portion of the electrode. The protective film is not present at an interface between the electrode and the spacer.

Abstract translation: 静电透镜包括各自具有通孔的多个电极和设置在电极之间并且固定电极之间的间隔的绝缘间隔物。 间隔物的两个表面与彼此相对的电极接合，使得间隔物与两个电极成一体。 在每个电极的两个表面上设置保护膜。 保护膜存在于通孔的内壁和电极表面上的通孔周围的区域中。 该区域从内壁连续延伸到电极的端部。 保护膜不存在于电极和间隔物之间​​的界面处。

公开(公告)号：US20130087717A1

公开(公告)日：2013-04-11

申请号：US13633477

申请日：2012-10-02

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazuhiro Sando

IPC: H01J3/18

CPC classification number: H01J3/18 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/03 ,  H01J2237/1205

Abstract: An electrostatic lens includes multiple electrodes each having a through hole, and an insulating spacer that is provided between the electrodes and that fixes an interval between the electrodes. Both surfaces of the spacer are bonded with the electrodes opposing each other so that the spacer is integral with both the electrodes. A protective film is disposed on both surfaces of each of the electrodes. The protective film is present on the interior wall of the through hole and in a region around the through hole on the surface of the electrode. The region extends continuously from the interior wall to an end portion of the electrode. The protective film is not present at an interface between the electrode and the spacer.

Abstract translation: 静电透镜包括各自具有通孔的多个电极和设置在电极之间并且固定电极之间的间隔的绝缘间隔物。 间隔物的两个表面与彼此相对的电极接合，使得间隔物与两个电极成一体。 在每个电极的两个表面上设置保护膜。 保护膜存在于通孔的内壁和电极表面上的通孔周围的区域中。 该区域从内壁连续延伸到电极的端部。 保护膜不存在于电极和间隔物之间​​的界面处。

公开(公告)号：US08084930B2

公开(公告)日：2011-12-27

申请号：US12957576

申请日：2010-12-01

Applicant: Artush A. Abgaryan ,  Eli Levi

Inventor： Artush A. Abgaryan ,  Eli Levi

IPC: H01J29/46

CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

Abstract: System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a housing having a first interior portion and a second interior portion electrically insulated from the first interior portion. The second interior portion has an electric field-free space. An electrode system is disposed in the first interior portion and includes a cathode assembly and at least one anode assembly. The cathode assembly generates an electron beam that passes through each anode assembly and then into the electric field-free space in the second interior portion. The system parameters may be calculated and created due to the CGMR conceptual method.

Abstract translation: 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括具有与第一内部部分电绝缘的第一内部部分和第二内部部分的壳体。 第二内部部分具有无电场的空间。 电极系统设置在第一内部部分中并且包括阴极组件和至少一个阳极组件。 阴极组件产生通过每个阳极组件然后进入第二内部部分中的无电场空间的电子束。 由于CGMR概念方法，系统参数可能会被计算和创建。

公开(公告)号：US08044351B2

公开(公告)日：2011-10-25

申请号：US11915679

申请日：2006-05-29

Applicant: Ho Seob Kim ,  Byeng Jin Kim

Inventor： Ho Seob Kim ,  Byeng Jin Kim

IPC: G21K5/04

CPC classification number: H01J3/18 ,  H01J3/26 ,  H01J37/12 ,  H01J2237/0492 ,  H01J2237/1205

Abstract: The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.

Abstract translation: 本发明涉及包括电子发射源和透镜的电子柱，更具体地说，涉及具有能够促进电子发射源和透镜的对准和组装的结构的电子柱。 具有根据本发明的电子发射源和透镜单元的电子柱的特征在于，透镜单元包括两个或更多个透镜层，并且执行源透镜功能和聚焦功能。 此外，电子柱的特征在于，透镜单元包括一个或多个偏转器型透镜层，并且另外执行偏转器功能。