BiCMOS Performance Enhancement by Mechanical Uniaxial Strain and Methods of Manufacture
    61.
    发明申请
    BiCMOS Performance Enhancement by Mechanical Uniaxial Strain and Methods of Manufacture 有权
    机械单轴应变的BiCMOS性能提升及制造方法

    公开(公告)号:US20090117695A1

    公开(公告)日:2009-05-07

    申请号:US12260674

    申请日:2008-10-29

    CPC classification number: H01L21/8249 H01L21/823807 H01L27/0623 H01L29/7843

    Abstract: A BiCMOS device with enhanced performance by mechanical uniaxial strain is provided. A first embodiment of the present invention includes an NMOS transistor, a PMOS transistor, and a bipolar transistor formed on different areas of the substrate. A first contact etch stop layer with tensile stress is formed over the NMOS transistor, and a second contact etch stop layer with compressive stress is formed over the PMOS transistor and the bipolar transistor, allowing for an enhancement of each device. Another embodiment has, in addition to the stressed contact etch stop layers, strained channel regions in the PMOS transistor and the NMOS transistor, and a strained base in the BJT.

    Abstract translation: 提供了通过机械单轴应变增强性能的BiCMOS器件。 本发明的第一实施例包括形成在衬底的不同区域上的NMOS晶体管,PMOS晶体管和双极晶体管。 具有拉伸应力的第一接触蚀刻停止层形成在NMOS晶体管上,并且在PMOS晶体管和双极晶体管上形成具有压应力的第二接触蚀刻停止层,从而允许每个器件的增强。 除了应力接触蚀刻停止层之外,另一实施例还包括PMOS晶体管和NMOS晶体管中的应变通道区域以及BJT中的应变基极。

    Metal Stress Memorization Technology
    62.
    发明申请
    Metal Stress Memorization Technology 有权
    金属应力记忆技术

    公开(公告)号:US20090075442A1

    公开(公告)日:2009-03-19

    申请号:US11855701

    申请日:2007-09-14

    CPC classification number: H01L21/823807 H01L29/665 H01L29/7847

    Abstract: A semiconductor device and method for manufacturing a tensile strained NMOS and a compressive strained PMOS transistor pair, wherein a stressor material is sacrificial is disclosed. The method provides for a substrate, which includes a source/drain for an NMOS transistor, and a PMOS transistor. A first barrier layer is formed on the substrate and a first stressor material is formed on the first barrier layer. The first barrier layer is selectively removed from the PMOS transistor. The substrate is flash annealed and the remaining first stressor material and barrier layer is removed from the substrate.

    Abstract translation: 公开了用于制造拉伸应变NMOS和压缩应变PMOS晶体管对的半导体器件和方法,其中应力源材料是牺牲的。 该方法提供了一种衬底,其包括用于NMOS晶体管的源极/漏极和PMOS晶体管。 在基板上形成第一阻挡层,在第一阻挡层上形成第一应力源材料。 从PMOS晶体管选择性地去除第一势垒层。 衬底被闪光退火,剩余的第一应力材料和阻挡层从衬底上去除。

    METHOD FOR PASSIVATING GATE DIELECTRIC FILMS
    63.
    发明申请
    METHOD FOR PASSIVATING GATE DIELECTRIC FILMS 有权
    封闭栅介质膜的方法

    公开(公告)号:US20080242071A1

    公开(公告)日:2008-10-02

    申请号:US11745862

    申请日:2007-05-08

    CPC classification number: H01L21/28185 H01L21/2822 H01L29/51

    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes providing a semiconductor substrate, forming a dielectric layer over the semiconductor substrate, treating the dielectric layer with a carbon containing group, forming a conductive layer over the treated dielectric layer, and patterning and etching the dielectric layer and conductive layer to form a gate structure. The carbon containing group includes an OCH3 or CN species.

    Abstract translation: 本公开提供了制造半导体器件的方法。 该方法包括提供半导体衬底,在半导体衬底上形成电介质层,用含碳基团处理电介质层,在经处理的电介质层上形成导电层,以及图案化和蚀刻电介质层和导电层以形成 门结构。 含碳基团包括OCH 3或CN物质。

    Magnetic oscillation metric controller
    65.
    发明授权
    Magnetic oscillation metric controller 失效
    磁振幅度控制器

    公开(公告)号:US07369118B2

    公开(公告)日:2008-05-06

    申请号:US10996459

    申请日:2004-11-26

    CPC classification number: G06F3/0362 G06F3/0383

    Abstract: A magnetic oscillation metric controller applied to computer peripheral or electronic communication system essentially operating on a scrolling wheel for lateral metric control to provide precise, consistent, reliable and programmable adjustment oscillation sensitivity by driving a permanent magnet to generate signals of changed magnetic fields resulted from displacement; and retrieving the data of changed signals for achieving metric control purpose.

    Abstract translation: 应用于计算机外围或电子通信系统的磁振荡度量控制器,其基本上在用于横向度量控制的滚动轮上操作,以通过驱动永久磁体以产生由位移产生的变化的磁场的信号来提供精确,一致,可靠和可编程的调节振荡灵敏度 ; 以及检索改变信号的数据以达到度量控制目的。

    Method for forming stacked via-holes in printed circuit boards
    66.
    发明申请
    Method for forming stacked via-holes in printed circuit boards 有权
    在印刷电路板中形成叠层通孔的方法

    公开(公告)号:US20070269588A1

    公开(公告)日:2007-11-22

    申请号:US11309852

    申请日:2006-10-13

    Abstract: A method for forming stacked via-holes on a printed circuit board includes the steps of: providing a printed circuit board having a conductive trace formed on a side surface thereof; forming a first copper-clad laminate on the side surface having the conductive trace; forming a number of first copper micro-via in a copper layer of the first copper-clad laminate; forming a second copper-clad laminate on the surface of the copper layer having the first copper micro-via of the first copper-clad laminate; forming a number of second copper micro-via in a copper layer of the second copper-clad laminate by a first laser on the basis of the first copper micro-via, each second copper micro-via being located corresponding to its correspondingly first copper micro-via; and removing corresponding resin layer portions of the first and second copper-clad laminates, using a second laser, to yield the respective stacked via-holes.

    Abstract translation: 一种在印刷电路板上形成堆叠的通孔的方法包括以下步骤:提供在其侧表面上形成有导电迹线的印刷电路板; 在具有导电迹线的侧表面上形成第一覆铜层压板; 在第一覆铜层压板的铜层中形成多个第一铜微通孔; 在具有第一覆铜层压板的第一铜微通孔的铜层的表面上形成第二覆铜层压板; 基于第一铜微通孔,通过第一激光在第二覆铜层压板的铜层中形成多个第二铜微通孔,每个第二铜微通孔对应于其相应的第一铜微通孔 -通过; 并使用第二激光器除去第一和第二覆铜层压板的相应树脂层部分,以产生相应的堆叠通孔。

    High performance CMOS with metal-gate and Schottky source/drain
    68.
    发明授权
    High performance CMOS with metal-gate and Schottky source/drain 有权
    具有金属栅极和肖特基源极/漏极的高性能CMOS

    公开(公告)号:US07176537B2

    公开(公告)日:2007-02-13

    申请号:US11134897

    申请日:2005-05-23

    Abstract: A semiconductor device having a metal/metal silicide gate and a Schottky source/drain and a method of forming the same are provided. The semiconductor device includes a gate dielectric overlying a semiconductor substrate, a metal or metal silicide gate electrode having a work function of less than about 4.3 eV or greater than about 4.9 eV overlying the gate dielectric, a spacer having a thickness of less than about 100 Å on a side of the gate electrode, and a Schottky source/drain having a work function of less than about 4.3 eV or greater than about 4.9 eV wherein the Schottky source/drain region overlaps the gate electrode. The Schottky source/drain region preferably has a thickness of less than about 300 Å.

    Abstract translation: 提供了具有金属/金属硅化物栅极和肖特基源极/漏极的半导体器件及其形成方法。 半导体器件包括覆盖半导体衬底的栅极电介质,金属或金属硅化物栅电极,其功函数小于约4.3eV或大于约4.9eV,覆盖在栅极电介质上,具有小于约100的厚度的间隔物 并且肖特基源/漏极具有小于约4.3eV或大于约4.9eV的功函数,其中肖特基源极/漏极区与栅电极重叠。 肖特基源极/漏极区优选具有小于约的厚度。

    Thin channel MOSFET with source/drain stressors

    公开(公告)号:US07112848B2

    公开(公告)日:2006-09-26

    申请号:US10939923

    申请日:2004-09-13

    Applicant: Wen-Chin Lee

    Inventor: Wen-Chin Lee

    Abstract: Methods of manufacturing microelectronic device including, in one embodiment, forming a gate electrode over a substrate having an insulating layer interposing a bulk semiconductor portion and a thin semiconductor layer, and removing at least a portion of the thin semiconductor and insulating layers, thereby defining a pedestal comprising a portion of the thin semiconductor and insulating layers. Source/drain stressors are then formed contacting the source/drain extensions on opposing sides of the pedestal and substantially spanning a height no less than the pedestal.

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