System for peeling semiconductor chips from tape
    65.
    发明授权
    System for peeling semiconductor chips from tape 有权
    从胶带剥离半导体芯片的系统

    公开(公告)号:US07238258B2

    公开(公告)日:2007-07-03

    申请号:US10907991

    申请日:2005-04-22

    IPC分类号: B32B38/10 H01L21/687

    摘要: A system for peeling semiconductor chips from tape is provided with a nose on a housing. The nose has transverse dimensions smaller than the transverse dimensions of a target chip. Apertures are provided through the nose from the housing. Vacuum ports are provided in the housing adjacent the nose. A vacuum source controllably connects to the apertures and the vacuum ports. The nose is positioned adjacent a tape attached on the opposite side thereof to the target chip. Vacuum is applied to attract the tape against the nose and the adjacent portions of the housing to peel the tape from the peripheral edges of the target chip while supporting the tape in the center of the target chip.

    摘要翻译: 用于从胶带剥离半导体芯片的系统在外壳上设置有鼻子。 鼻子的横向尺寸小于目标芯片的横向尺寸。 通过鼻子从外壳提供孔径。 在靠近鼻子的外壳中设有真空口。 真空源可控制地连接到孔和真空端口。 鼻子位于与其相对侧附接到目标芯片的带附近。 施加真空以将胶带吸引到鼻子和壳体的相邻部分,以将带从支撑在目标芯片的中心的磁带的目标芯片的周边边缘剥离。