公开(公告)号：US20100231888A1

公开(公告)日：2010-09-16

申请号：US12782831

申请日：2010-05-19

申请人： Ralf Mueller ,  Toralf Gruner

发明人： Ralf Mueller ,  Toralf Gruner

IPC分类号： G03B27/72 ,  G02B27/28 ,  G03F7/20

CPC分类号： G02B5/3083 ,  G02B1/08 ,  G03F7/70141 ,  G03F7/70191 ,  G03F7/70258 ,  G03F7/70308 ,  G03F7/70566 ,  G03F7/70966

摘要： The disclosure provides an optical system having an optical axis, where the optical system includes a polarization manipulator which includes first and second subelements. The first subelement has a non-planar, optically effective surface. For light passing through the first subelement, the first subelement causes a change in the polarization state. A maximum effective retardation introduced by the first subelement along the optical axis is less than a quarter of the working wavelength of the optical system. The first subelement and the second subelement have mutually facing surfaces which are mutually complementary. The optical system also includes a position manipulator to manipulate the relative position of the first and second subelements.

摘要翻译： 本公开提供了一种具有光轴的光学系统，其中光学系统包括包括第一和第二子元件的偏振操纵器。 第一个子元件具有非平面的光学有效表面。 对于通过第一子元件的光，第一子元件导致极化状态的变化。 由第一子元件沿着光轴引入的最大有效延迟小于光学系统的工作波长的四分之一。 第一子元件和第二子元件具有相互互补的相互面对的表面。 光学系统还包括位置操纵器来操纵第一和第二子元件的相对位置。

公开(公告)号：US07733501B2

公开(公告)日：2010-06-08

申请号：US12195920

申请日：2008-08-21

申请人： Joerge Tschischgale ,  Toralf Gruner

发明人： Joerge Tschischgale ,  Toralf Gruner

IPC分类号： G01B11/02

CPC分类号： G03F7/70591 ,  G03B13/00 ,  G03F7/70266

摘要： In a method for improving imaging properties of an illumination system or a projection objective of a microlithographic projection exposure apparatus, which comprises an optical element having a surface, the shape of the surface is measured directly at various points. To this end, a measuring beam is directed on the points, and the reflected or refracted beam is measured, e.g. using an interferometer. Based on deviations of the measured shape from a target shape, corrective measures are derived so that the imaging errors of the optical system are improved. The corrective measures may comprise a change in the position or the shape of the optical element being analyzed, or another optical element of the optical system. The target shape of the surface may, for example, be determined so that the optical element at least partially corrects imaging errors caused by other optical elements.

摘要翻译： 在用于改善包括具有表面的光学元件的微光刻投影曝光装置的照明系统或投影物镜的成像特性的方法中，直接在各个点测量表面的形状。 为此，测量光束被引导到这些点上，并且测量反射或折射的光束。 使用干涉仪。 基于测量形状与目标形状的偏差，导出校正措施，使得光学系统的成像误差得到改善。 校正措施可以包括被分析的光学元件的位置或形状的改变，或光学系统的另一个光学元件的变化。 例如，可以确定表面的目标形状，使得光学元件至少部分地校正由其它光学元件引起的成像误差。

公开(公告)号：US20080291419A1

公开(公告)日：2008-11-27

申请号：US12187116

申请日：2008-08-06

申请人： Karl-Stefan Weissenrieder ,  Alexander Hirnet ,  Alexandra Pazidis ,  Karl-Heinz Schuster ,  Christoph Zaczek ,  Michael Lill ,  Patrick Scheible ,  Guenter Scheible ,  Harald Schink ,  Markus Brotsack ,  Ulrich Loering ,  Toralf Gruner ,  Sigrid Scheible

发明人： Karl-Stefan Weissenrieder ,  Alexander Hirnet ,  Alexandra Pazidis ,  Karl-Heinz Schuster ,  Christoph Zaczek ,  Michael Lill ,  Patrick Scheible ,  Guenter Scheible ,  Harald Schink ,  Markus Brotsack ,  Ulrich Loering ,  Toralf Gruner ,  Sigrid Scheible

IPC分类号： G03B27/54 ,  G03B27/32

CPC分类号： G03F7/70983 ,  G03F7/70341

摘要： In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

公开(公告)号：US07423765B2

公开(公告)日：2008-09-09

申请号：US11190555

申请日：2005-07-27

申请人： Joerg Tschischgale ,  Toralf Gruner

发明人： Joerg Tschischgale ,  Toralf Gruner

IPC分类号： G01B11/02 ,  G03B27/42

CPC分类号： G03F7/70591 ,  G03B13/00 ,  G03F7/70266

摘要： In a method for improving imaging properties of an illumination system or a projection objective of a microlithographic projection exposure apparatus, which comprises an optical element having a surface, the shape of the surface is measured directly at various points. To this end, a measuring beam is directed on the points, and the reflected or refracted beam is measured, e.g. using an interferometer. Based on deviations of the measured shape from a target shape, corrective measures are derived so that the imaging errors of the optical system are improved. The corrective measures may comprise a change in the position or the shape of the optical element being analyzed, or another optical element of the optical system. The target shape of the surface may, for example, be determined so that the optical element at least partially corrects imaging errors caused by other optical elements.

摘要翻译： 在用于改善包括具有表面的光学元件的微光刻投影曝光装置的照明系统或投影物镜的成像特性的方法中，直接在各个点测量表面的形状。 为此，测量光束被引导到这些点上，并且测量反射或折射的光束。 使用干涉仪。 基于测量形状与目标形状的偏差，导出校正措施，使得光学系统的成像误差得到改善。 校正措施可以包括被分析的光学元件的位置或形状的改变，或光学系统的另一个光学元件的变化。 例如，可以确定表面的目标形状，使得光学元件至少部分地校正由其它光学元件引起的成像误差。

公开(公告)号：US20080204692A1

公开(公告)日：2008-08-28

申请号：US12054991

申请日：2008-03-25

申请人： Toralf Gruner ,  Bernd Geh

发明人： Toralf Gruner ,  Bernd Geh

IPC分类号： G03B27/72 ,  G03B27/54

CPC分类号： G03F7/70441 ,  G03F7/70083 ,  G03F7/70141 ,  G03F7/70391 ,  G03F7/70566 ,  G03F7/70941

摘要： A method for producing microstructured components in a microlithographic projection exposure apparatus is disclosed. The method includes imaging a pattern of structures into an image plane of a projection objective. The dose distribution of projection light in the image plane can be influenced so that the image of a structure is at least essentially independent of the topography of structures which lie inside a region surrounding the structure.

摘要翻译： 公开了一种在微光刻投影曝光装置中制造微结构元件的方法。 该方法包括将结构图案成像到投影物镜的像平面中。 可以影响投影光在图像平面中的剂量分布，使得结构的图像至少基本上独立于位于围绕结构的区域内的结构的形貌。

公开(公告)号：US07321465B2

公开(公告)日：2008-01-22

申请号：US11071699

申请日：2005-03-02

申请人： Michael Totzeck ,  Vladimir Kamenov ,  Toralf Gruner

发明人： Michael Totzeck ,  Vladimir Kamenov ,  Toralf Gruner

IPC分类号： G02B27/28

CPC分类号： G02B1/08 ,  G02B1/02 ,  G02B5/3083 ,  G02B13/143 ,  G03F7/70241 ,  G03F7/705 ,  G03F7/70966 ,  Y10S359/90

摘要： A numerical optimizing method serves to reduce harmful effects caused by intrinsic birefringence in lenses of a fluoride crystal material of cubic crystal structure in an objective, particularly a projection objective for a microlithography system. Under the optimizing method, an optimizing function which takes at least one birefringence-related image aberration into account is minimized. The birefringence-related image aberration is determined from a calculation for a light ray passing through the fluoride crystal lenses. To the extent that the birefringence-related image aberration is a function of parameters of the light ray, it depends only on geometric parameters of the light ray. The numerical optimizing method is used to produce objectives in which an optical retardation as well as an asymmetry of the optical retardation are corrected. The lenses are arranged in homogeneous groups, where each homogeneous group is corrected for the optical retardation asymmetry.

摘要翻译： 数值优化方法用于减少物镜中的立方晶体结构的氟化物晶体材料的透镜中的固有双折射引起的有害影响，特别是微光刻系统的投影物镜。 在优化方法下，考虑到至少一个双折射相关图像像差的优化函数被最小化。 从通过氟化物晶体透镜的光线的计算确定双折射相关图像像差。 在双折射相关图像像差是光线参数的函数的程度上，其仅取决于光线的几何参数。 使用数值优化方法来产生其中光学延迟以及光学延迟的不对称性被校正的目标。 透镜被排列成均匀的组，其中每个均匀组被校正用于光学延迟不对称。

公开(公告)号：US20080002167A1

公开(公告)日：2008-01-03

申请号：US11427183

申请日：2006-06-28

申请人： Toralf Gruner ,  Olaf Conradi ,  Nils Dieckmann ,  Markus Schwab ,  Olaf Hmann ,  Michael Totzeck ,  Daniel Kraehmer ,  Vladimir Kamenov

发明人： Toralf Gruner ,  Olaf Conradi ,  Nils Dieckmann ,  Markus Schwab ,  Olaf Hmann ,  Michael Totzeck ,  Daniel Kraehmer ,  Vladimir Kamenov

IPC分类号： G03B27/42 ,  G02B9/00

CPC分类号： G03F7/70958 ,  G02B13/143 ,  G02B17/0856 ,  G02B17/0892 ,  G02B27/0012 ,  G03F7/70091

摘要： The invention concerns a method for operating a projection exposure apparatus to project the image of a structure of an object (5) arranged in an object plane (6) onto a substrate (10) arranged in an image plane (8). The object (5) is illuminated with light of an operating wavelength of the projection exposure apparatus according to one of several adjustable exposure modes. The light produces changes in at least one optical element (9) of the projection exposure apparatus, by which the optical properties of the projection exposure apparatus are influenced. The operation of the projection exposure apparatus makes allowance for the influencing of the optical properties of the projection exposure apparatus or a quantity dependent on the former, being calculated approximately on the basis of the exposure mode used and the structure of the object (5).

摘要翻译： 本发明涉及一种用于操作投影曝光装置以将布置在物平面（6）中的物体（5）的结构的图像投影到布置在图像平面（8）中的基板（10）上的方法。 根据多种可调曝光模式之一，物体（5）被投影曝光装置的工作波长的光照射。 该光在投影曝光装置的至少一个光学元件（9）中产生变化，由此影响投影曝光装置的光学特性。 投影曝光装置的操作允许基于所使用的曝光模式和对象（5）的结构大致计算投影曝光装置的光学特性或取决于前者的光学特性的影响。

公开(公告)号：US07068436B2

公开(公告)日：2006-06-27

申请号：US10878611

申请日：2004-06-29

申请人： Toralf Gruner ,  Hans-Jürgen Mann

发明人： Toralf Gruner ,  Hans-Jürgen Mann

IPC分类号： G02B13/24

CPC分类号： G02B27/286 ,  G02B13/14 ,  G02B17/08 ,  G02B17/0892 ,  G03F7/70191 ,  G03F7/70225 ,  G03F7/70566

摘要： A projection lens (10) for a microlithographic projection exposure apparatus has a first optical element, for example a birefringent lens (L2), that has polarization dependent properties causing intensity fluctuations in an image plane of the projection lens. These fluctuation may be produced by a second optical element (24), for example a polarization selective beam splitting layer (28), that is arranged downstream of the first optical element. A gray filter (32; 132; 232) disposed in the beam path reduces the intensity fluctuations.

摘要翻译： 用于微光刻投影曝光装置的投影透镜（10）具有第一光学元件（例如双折射透镜（L 2）），其具有导致投影透镜的图像平面中的强度波动的偏振相关特性。 这些波动可以由布置在第一光学元件下游的第二光学元件（24）产生，例如偏振选择分束层（28）。 设置在光束路径中的灰色滤光器（32; 132; 232）减小了强度波动。

公开(公告)号：US20060023179A1

公开(公告)日：2006-02-02

申请号：US11190555

申请日：2005-07-27

申请人： Joerg Tschischgale ,  Toralf Gruner

发明人： Joerg Tschischgale ,  Toralf Gruner

IPC分类号： G03B27/42

CPC分类号： G03F7/70591 ,  G03B13/00 ,  G03F7/70266

摘要： In a method for improving imaging properties of an illumination system or a projection objective of a microlithographic projection exposure apparatus, which comprises an optical element having a surface, the shape of the surface is measured directly at various points. To this end, a measuring beam is directed on the points, and the reflected or refracted beam is measured, e.g. using an interferometer. Based on deviations of the measured shape from a target shape, corrective measures are derived so that the imaging errors of the optical system are improved. The corrective measures may comprise a change in the position or the shape of the optical element being analyzed, or another optical element of the optical system. The target shape of the surface may, for example, be determined so that the optical element at least partially corrects imaging errors caused by other optical elements.

摘要翻译： 在用于改善包括具有表面的光学元件的微光刻投影曝光装置的照明系统或投影物镜的成像特性的方法中，直接在各个点测量表面的形状。 为此，测量光束被引导到这些点上，并且测量反射或折射的光束。 使用干涉仪。 基于测量形状与目标形状的偏差，导出校正措施，使得光学系统的成像误差得到改善。 校正措施可以包括被分析的光学元件的位置或形状的改变，或光学系统的另一个光学元件的变化。 例如，可以确定表面的目标形状，使得光学元件至少部分地校正由其它光学元件引起的成像误差。

公开(公告)号：US20050248858A1

公开(公告)日：2005-11-10

申请号：US11109316

申请日：2005-04-19

申请人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

发明人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

IPC分类号： G02B7/00 ,  G02B7/18 ,  G03F7/20 ,  G02B5/30 ,  G02B7/02 ,  G02B27/28

CPC分类号： G03F7/70825 ,  G02B7/008 ,  G02B7/1805 ,  G03F7/70891

摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的壳体中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件