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    Germanium oxide pre-clean module and process
    62.
    发明授权
    Germanium oxide pre-clean module and process 有权
    氧化锗预清洁模块和工艺

    公开(公告)号：US09474163B2

    公开(公告)日：2016-10-18

    申请号：US14586438

    申请日：2014-12-30

    Applicant: ASM IP HOLDING B.V.

    Inventor： John Tolle ,  Matthew G. Goodman

    IPC: B05D3/02 ,  B05D3/04 ,  H05K3/00 ,  H01L21/02 ,  H01L21/306 ,  B05D3/00

    CPC classification number: H01L21/0206 ,  B05D3/002 ,  B05D3/02 ,  B05D3/04 ,  B05D3/0433 ,  H01L21/02041 ,  H01L21/02046 ,  H01L21/306

    Abstract: In some embodiments, a method for integrated circuit fabrication includes removing oxide material from a surface of a substrate, where the surface includes silicon and germanium. Removing the oxide material includes depositing a halogen-containing pre-clean material on a silicon oxide-containing surface and sublimating a portion of the halogen-containing pre-clean material to expose the silicon on the surface. A passivation film is deposited on the exposed silicon. The passivation film may include chlorine. The passivation film may prevent contamination of the silicon surface by chemical species from the later sublimation, which may be at a higher temperature than the earlier sublimation. Subsequently, a remaining portion of the halogen-containing pre-clean material and the passivation film are sublimated. A target material, such as a conductive material, may subsequently be deposited on the substrate surface.

    Abstract translation: 在一些实施例中，用于集成电路制造的方法包括从衬底的表面去除氧化物材料，其中表面包括硅和锗。 除去氧化物材料包括将含卤素的预清洁材料沉积在含氧化硅的表面上并升华部分含卤素的预清洁材料以暴露表面上的硅。 钝化膜沉积在暴露的硅上。 钝化膜可以包括氯。 钝化膜可以防止来自稍后升华的化学物质对硅表面的污染，其可能处于比先前的升华更高的温度。 随后，将含卤素预清洁材料和钝化膜的剩余部分升华。 可以随后将诸如导电材料的靶材料沉积在衬底表面上。

    DRYING DEVICE, DRYING METHOD, AND BATTERY MANUFACTURING METHOD
    64.
    发明申请
    DRYING DEVICE, DRYING METHOD, AND BATTERY MANUFACTURING METHOD 审中-公开
    干燥装置，干燥方法和电池制造方法

    公开(公告)号：US20160156015A1

    公开(公告)日：2016-06-02

    申请号：US14903816

    申请日：2014-05-26

    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA

    Inventor： Yuzo MIURA ,  Kei SATO

    IPC: H01M4/04

    CPC classification number: H01M4/04 ,  B05D3/0254 ,  B05D3/04 ,  B05D3/0466 ,  F26B21/00 ,  H01M4/0404 ,  H01M4/139 ,  H01M2004/021

    Abstract: An object of the invention is to provide a drying method, a drying device, and a battery manufacturing method which are capable of rapid drying. A drying method according to an embodiment of the invention dries an electrode layer (12) including a binder and a solvent. The drying method according to the embodiment includes a first step of blowing a gas onto a first area (22) of the electrode layer (12) to volatilize the solvent, the electrode layer (12) being coated on a current collector foil (11); and a second step of blowing a gas onto a second area (22) of the electrode layer (12) to volatilize the solvent, the second area (22) being located around the first area (21).

    Abstract translation: 本发明的目的是提供能够快速干燥的干燥方法，干燥装置和电池制造方法。 根据本发明的实施方案的干燥方法干燥包括粘合剂和溶剂的电极层（12）。 根据实施例的干燥方法包括：将气体吹送到电极层（12）的第一区域（22）上以使溶剂挥发，将电极层（12）涂覆在集电箔（11）上的第一步骤， ; 以及将气体吹送到电极层（12）的第二区域（22）以挥发溶剂的第二步骤，第二区域（22）位于第一区域（21）周围。

    METHOD FOR PRODUCING METALIZED FIBROUS COMPOSITE SHEET WITH OLEFIN COATING
    67.
    发明申请
    METHOD FOR PRODUCING METALIZED FIBROUS COMPOSITE SHEET WITH OLEFIN COATING 有权
    用烯烃涂料生产金属化纤维复合材料片的方法

    公开(公告)号：US20130122316A1

    公开(公告)日：2013-05-16

    申请号：US13293203

    申请日：2011-11-10

    Applicant: Noel Stephen Brabbs ,  Eric Huebsch ,  Yuefei Tao ,  Lech Wilczek

    Inventor： Noel Stephen Brabbs ,  Eric Huebsch ,  Yuefei Tao ,  Lech Wilczek

    IPC: B32B15/085 ,  C23C16/06 ,  B05D3/06 ,  C23C16/00 ,  B05D3/10 ,  B05D3/04

    CPC classification number: B05D3/04 ,  B05D1/60 ,  B05D3/0493 ,  B05D3/06 ,  B05D3/067 ,  B05D3/068 ,  B05D3/10 ,  B05D3/108 ,  B05D3/147 ,  B05D5/067 ,  B05D2252/02 ,  B05D2350/65 ,  B05D2507/00 ,  B32B15/085 ,  C23C16/00 ,  C23C16/06 ,  E04D12/002 ,  Y10T428/31692

    Abstract: A composite sheet is manufactured by depositing a multi-layer coating on the outer surface of a substrate, the coating comprising a metal layer and an outer polymeric layer formed from a precursor comprising a polymerizable composition that includes a olefin group and a moisture curable group, such as an isocyanate or silane group. After the precursor is applied, the composite sheet is exposed to both beam radiation and moisture, which respectively promote polymerization and curing at different sites of the precursor. The function of the cured polymeric layer includes protecting the metal layer from corrosion. The amenability of the isocyanate or silane functionality to moisture-promoted coupling promotes substantially full conversion and curing of the precursor, even of portions of the substrate that are geometrically shadowed from incident beam radiation.

    Abstract translation: 通过在基材的外表面上沉积多层涂层来制造复合片材，所述涂层包含金属层和由包含可聚合组合物的前体形成的外部聚合物层，所述可聚合组合物包括烯烃基团和可湿气固化基团， 例如异氰酸酯或硅烷基。 在施加前体之后，复合片材暴露于束辐射和水分，分别促进前体不同部位的聚合和固化。 固化的聚合物层的功能包括保护金属层免受腐蚀。 异氰酸酯或硅烷官能团对水分促进的偶联的可调性促进了前体的均匀转化和固化，即使是几乎被入射束辐射遮蔽的基底部分。

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    68.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
    基板处理装置和基板处理方法

    公开(公告)号：US20110189400A1

    公开(公告)日：2011-08-04

    申请号：US13014963

    申请日：2011-01-27

    Applicant: Hiroshi Shinya

    Inventor： Hiroshi Shinya

    IPC: B05D3/04

    CPC classification number: B05D3/04

    Abstract: Disclosed is a substrate processing apparatus for forming a coating film on a substrate, which includes; a nozzle having a slit-shaped ejection port for ejecting a coating solution onto the substrate, the ejection port being elongated in a width direction of the substrate; a relative movement mechanism configured to cause relative movement between the nozzle and the substrate to allow the substrate to be relatively scanned by the nozzle; and a first gas flow generating unit configured to generate a gas flow of an inert gas that flows, uniformly along a direction of the relative movement, at least within a zone on one side of the nozzle above an area of the substrate having been scanned by the nozzle.

    Abstract translation: 公开了一种用于在基板上形成涂膜的基板处理装置，包括： 喷嘴，其具有用于将涂布液喷射到所述基板上的狭缝状喷射口，所述喷射口沿所述基板的宽度方向伸长; 相对运动机构，其构造成引起所述喷嘴和所述基板之间的相对移动，以允许所述基板被所述喷嘴相对扫描; 以及第一气体流产生单元，被配置为产生沿所述相对运动的方向均匀地流动的惰性气体的气流，所述惰性气体至少在所述喷嘴的一侧上的区域内，所述区域在已被扫描的所述基板的区域之上 喷嘴。

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