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公开(公告)号：US07812703B2
公开(公告)日：2010-10-12
申请号：US11386733
申请日：2006-03-23
IPC分类号： H18H71/18
CPC分类号： H01H1/0036 , C23C28/021 , C23C28/023 , C25D3/562 , C25D5/022 , C25D5/54 , H01H2001/0047 , H01H2061/006
摘要： A material for forming a conductive structure for a MEMS device is described, which is an alloy containing about 0.01% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower than the sheet resistance of the pure metal. In addition, the alloy may have superior creep and higher recrystallization temperature than the pure metal. It is hypothesized that these advantageous material properties are a result of the larger grain structure existing in the NiMn alloy film compared to the pure nickel metal film. These properties may make the alloy appropriate for applications such as MEMS thermal electrical switches for telecommunications applications.
摘要翻译： 描述了一种用于形成用于MEMS器件的导电结构的材料，其是含有约0.01％锰及其余镍的合金。 数据显示，该合金具有有利的机械和电学性能。 特别地，合金的薄层电阻实际上低于纯金属的薄层电阻。 此外，与纯金属相比，合金具有优异的蠕变和更高的再结晶温度。 假设这些有利的材料性质是与纯镍金属膜相比NiMn合金膜中存在较大的晶粒结构的结果。 这些性能可以使合金适用于诸如用于电信应用的MEMS热电开关的应用。
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公开(公告)号：US20100182120A1
公开(公告)日：2010-07-22
申请号：US12732752
申请日：2010-03-26
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US07724121B2
公开(公告)日：2010-05-25
申请号：US11516489
申请日：2006-09-07
申请人： Paul J. Rubel
发明人： Paul J. Rubel
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/031 , F03G7/06 , H01H2061/006 , H01H2061/008
摘要： An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.
摘要翻译： 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。
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64.发明授权公开(公告)号：US07626311B2
公开(公告)日：2009-12-01
申请号：US11705738
申请日：2007-02-14
申请人： Paul J. Rubel
发明人： Paul J. Rubel
IPC分类号： H01L41/08
CPC分类号： H02N10/00 , F03G7/06 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , Y10T29/42 , Y10T29/49155 , Y10T29/49204
摘要： A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
摘要翻译： MEMS迟滞热装置可以具有由耦合到衬底的表面的载流环驱动的两个无源束段。 第一光束段被配置为沿着具有垂直于衬底表面的分量的方向移动，而第二光束段被配置成沿具有平行于衬底表面的分量的方向移动。 通过提供这种二维运动，单个MEMS迟滞热装置可以用于封闭具有固定到基板表面的至少一个固定触点的开关。
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65.发明授权Thermoelastic device with preselected resistivity, inertness and deposition characteristics 失效具有预选电阻率，惰性和沉积特性的热弹性装置公开(公告)号：US07607826B2
公开(公告)日：2009-10-27
申请号：US11768875
申请日：2007-06-26
IPC分类号： B32B9/00
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： A thermoelastic device comprising an expansive element is disclosed. The expansive element is formed from a material, which is preselected on the basis that it has one or more of the following properties: a resistivity between 0.1 μΩm and 10.0 μΩm; chemically inert in air; chemically inert in the chosen ink; and depositable by CVD, sputtering or other thin film deposition technique.
摘要翻译： 公开了一种包括膨胀元件的热弹性装置。 膨胀元件由材料形成，该材料基于其具有一个或多个以下性质来预先选择：电阻率在0.1Mmegam和10.0μmOgamam之间; 在空气中化学惰性; 在所选择的油墨中化学惰性; 并通过CVD，溅射或其它薄膜沉积技术沉积。
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公开(公告)号：US07545251B2
公开(公告)日：2009-06-09
申请号：US11442180
申请日：2006-05-30
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator includes a pair of elongate layers capable of being heated with an electrical current to thermally expand and to perform work. A pair of spacers separates the elongate layers from each other. The spacers are arranged at respective opposite ends of the elongate layers and are fast with the layers so that the actuator is deflected when one of the layers is heated.
摘要翻译： 微机电致动器包括能够用电流加热以热膨胀并进行加工的一对细长层。 一对间隔件将细长层彼此分开。 间隔件被布置在细长层的相应的相对端并且与层紧贴，使得致动器在其中一个层被加热时被偏转。
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公开(公告)号：US07522029B1
公开(公告)日：2009-04-21
申请号：US12179302
申请日：2008-07-24
申请人： Mark Alfred Lantz
发明人： Mark Alfred Lantz
CPC分类号： H01H61/01 , B81B3/0072 , B81B2201/07 , B81B2203/0118 , B81C2201/0167 , H01H2061/006
摘要： An actuator is provided. The actuator comprises a base portion, a cantilever beam connected to the base portion, and an actuator cell adjacent to the cantilever beam. The actuator cell comprises a first metal electrode positioned on the cantilevered beam, a second metal electrode positioned near the first metal electrode, and phase change material between the first and second metal electrodes, wherein the phase change material connects the first metal electrode to the second metal electrode, wherein applying a burst of energy to the phase change material causes the phase change material to change between an amorphous state and a crystalline state, causing the cantilevered beam to move between a first position and a target position, wherein the cantilevered beam remains at the target position upon removal of the energy.
摘要翻译： 提供一个致动器。 致动器包括基部，连接到基部的悬臂梁和与悬臂梁相邻的致动器单元。 所述致动器单元包括位于所述悬臂梁上的第一金属电极，位于所述第一金属电极附近的第二金属电极以及所述第一和第二金属电极之间的相变材料，其中所述相变材料将所述第一金属电极连接到所述第二金属电极 金属电极，其中向所述相变材料施加能量爆发导致所述相变材料在非晶状态和结晶态之间变化，导致所述悬臂梁在第一位置和目标位置之间移动，其中所述悬臂梁保持 在去除能量时在目标位置。
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公开(公告)号：US20090002118A1
公开(公告)日：2009-01-01
申请号：US11772039
申请日：2007-06-29
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US20080191303A1
公开(公告)日：2008-08-14
申请号：US11705739
申请日：2007-02-14
IPC分类号： H01L31/058 , H01L21/00
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
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公开(公告)号：US20080061913A1
公开(公告)日：2008-03-13
申请号：US11516489
申请日：2006-09-07
申请人： Paul J. Rubel
发明人： Paul J. Rubel
IPC分类号： H01F7/08
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/031 , F03G7/06 , H01H2061/006 , H01H2061/008
摘要： An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.
摘要翻译： 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。
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