公开(公告)号：US776564A

公开(公告)日：1904-12-06

申请号：US1903155925

申请日：1903-05-06

Applicant: COOPER HEWITT ELECTRIC CO

Inventor： THOMAS PERCY H

CPC classification number: H01J41/04

公开(公告)号：US12101870B2

公开(公告)日：2024-09-24

申请号：US18094724

申请日：2023-01-09

Applicant: SHINE Technologies, LLC

Inventor： Arne Kobernik ,  Carl Sherven ,  Casey Lamers ,  Chris Seyfert ,  Evan Sengbusch ,  Gabriel Becerra ,  Jin Lee ,  Logan Campbell ,  Mark Thomas ,  Michael Taylor ,  Preston Barrows ,  Ross Radel ,  Tye Gribb

IPC: H05B7/22 ,  H01J37/32 ,  H01J41/14 ,  H05B31/26 ,  H05H1/46 ,  H05H1/54 ,  H05H3/06 ,  H05H5/04 ,  H05H6/00 ,  H05H7/22 ,  H05H9/02 ,  H01J37/08 ,  H01J41/04 ,  H01T23/00

CPC classification number: H05H7/22 ,  H01J37/32082 ,  H01J41/14 ,  H05B31/26 ,  H05H1/46 ,  H05H1/54 ,  H05H3/06 ,  H05H5/04 ,  H05H6/00 ,  H05H9/02 ,  H01J37/08 ,  H01J41/04 ,  H01T23/00 ,  H05H1/4622

Abstract: Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current/high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

公开(公告)号：US09952113B2

公开(公告)日：2018-04-24

申请号：US15421805

申请日：2017-02-01

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  G01L19/06 ,  H01J1/52 ,  H01J41/02

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

公开(公告)号：US20140368210A1

公开(公告)日：2014-12-18

申请号：US14260545

申请日：2014-04-24

Applicant: CANON ANELVA CORPORATION

Inventor： ITARU ENOMOTO ,  HIDEO MANO

IPC: G01L21/34 ,  H01J1/88 ,  H01J1/30

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  H01J41/06

Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.

Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。

公开(公告)号：US07741852B2

公开(公告)日：2010-06-22

申请号：US11920085

申请日：2006-05-08

Applicant: Fumio Watanabe ,  Reiki Watanabe

Inventor： Fumio Watanabe ,  Reiki Watanabe

IPC: G01L21/32

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.

Abstract translation: 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡器 在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量 根据获得的电流强度在真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

公开(公告)号：US07656165B2

公开(公告)日：2010-02-02

申请号：US12229271

申请日：2008-08-21

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01N27/62 ,  G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。

公开(公告)号：US20090146665A1

公开(公告)日：2009-06-11

申请号：US12313778

申请日：2008-11-24

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: H01R13/648 ,  G01L21/30 ,  H01R43/00

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅射的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US20090096460A1

公开(公告)日：2009-04-16

申请号：US11920085

申请日：2006-05-08

Applicant: Fumio Watanabe ,  Reiki Watanabe

Inventor： Fumio Watanabe ,  Reiki Watanabe

IPC: G01L21/32

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.

Abstract translation: 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡从 在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量 根据获得的电流强度，真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

公开(公告)号：US20080100301A1

公开(公告)日：2008-05-01

申请号：US11588109

申请日：2006-10-26

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例性实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅出的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US07352187B2

公开(公告)日：2008-04-01

申请号：US11389007

申请日：2006-03-27

Applicant: Wolfram Knapp ,  Martin Wuest

Inventor： Wolfram Knapp ,  Martin Wuest

IPC: G01L21/30 ,  G01N27/62

CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

Abstract: An electron-emitting cathode consists of an electrically conducting emitter layer attached to a side wall which consists of stainless steel and a gate which is fixed at a mall distance inside a concave emitter surface of the emitter layer. The cathode surrounds a reaction area containing a cylindrical grid-like anode and a central ion collector which consists of a straight axial filament. An ion collector current reflecting the density of the gas in the reaction region is measured by a current meter while a gate voltage is kept between the ground voltage of the emitter layer and a higher anode voltage and is regulated in such a way that an anode current is kept constant. The emitter layer may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

Abstract translation: 电子发射阴极由连接到侧壁的导电发射极层组成，该侧壁由不锈钢和在发射极层的凹面发射器表面内的商场距离处固定的栅极组成。 阴极围绕包含圆柱形网状阳极和中心离子收集器的反应区域，其由直轴向丝线组成。 通过电流计测量反映反应区域中气体密度的离子集电极电流，同时将栅极电压保持在发射极层的接地电压和较高的阳极电压之间，并以这样的方式进行调节，使得阳极电流 保持不变。 发射极层可由碳纳米管，类金刚石碳，金属或金属或半导体材料的混合物组成，例如可以用碳化物或钼涂覆的硅。 然而，发射体表面也可以是通过例如化学蚀刻使侧壁的内表面的一部分变粗糙。 栅极可以是栅格，或者它可以由分布在发射极区域上的覆盖间隔的金属膜的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。