Abstract:
Disclosed is a method of fabricating a microlens. The method includes forming a self assembly monolayer having a strong hydrophobicity on a substrate; forming a plurality of ink droplets on the self assembly monolayer by jetting a transparent ink using an inkjet apparatus, the transparent ink including a first solvent having a first boiling point, a second solvent having a second boiling point lower than the first boiling point and a silicon oxide (SiOx) solid material dispersed in the first and second solvents; and drying the plurality of ink droplets.
Abstract:
Disclosed herein is a method for producing a cyst-expressed transgenic animal using a PDK2 gene. The production method comprises preparing a PKD2 protein expression vector, inserting the expression vector into the nucleus of a fertilized egg to produce a PKD2 expression vector-containing fertilized egg, and transplanting the produced fertilized egg into the uterus of a surrogate mother. According to the invention disclosed herein, there is provided a method for producing transgenic animals, in which cysts are expressed only by the overexpression of the PKD2 gene. Also, transgenic mice are provided which can be effectively used in the investigation of cyst expression mechanisms and cyst control systems.
Abstract:
A tape feeder for supplying components to a component mounter via a carrier tape on which the components are disposed at predetermined intervals, wherein the carrier tape and components are covered with a cover tape, is described. The tape feeder may comprise a frame including a receptacle. The receptacle may have an inlet port for receiving the cover tape separated from the carrier tape, a space for containing the cover tape received through the inlet port, and a door opening through which the cover tape is discharged. The tape feeder may additionally comprise a door configured to open or close the door opening and an opening/closing member configured to fasten the door closed and thereafter open the door when an inner pressure of at least a predetermined value is applied by the cover tape received in the receptacle.
Abstract:
Disclosed is a semiconductor device and a method of manufacturing a semiconductor device. A semiconductor device may include an insulating layer and a metal interconnection. An insulating layer may include a first layer including fluorine and a second layer including SRO (silicon rich oxide) having a dangling bond. A metal interconnection may be formed over the insulating layer.
Abstract:
A polishing slurry composition including an abrasive, a pH-adjusting agent, a water-soluble thickening agent, and a chelating agent, wherein the chelating agent includes at least one of an acetate chelating agent and a phosphate chelating agent, and a method of using the same.
Abstract:
Provided is a slurry composition for chemical mechanical polishing (CMP) of a metal. The slurry composition comprises a copolymer whose average molecular weight is from about 600,000 to about 1,300,000 and whose monomers are acrylic acid and acrylamide in a molar ratio of about 1:30 to about 30:1. The slurry composition exhibits a non-Prestonian behavior to achieve minimized dishing and attain a high degree of planarization.
Abstract:
A back-up table for a chip mounter. The back-up table for a chip mounter includes a base plate, a back-up plate spaced a predetermined distance from the base plate to support a back-up pin that supports a printed circuit board, and at least one set of link units installed between the base plate and the back-up plate and facing opposite to each other. The back-up table further comprises a first driving part installed between the opposite facing link units and operating the link units to raise and lower the back-up plate, and a second driving part serially connected to the first driving part.
Abstract:
A method for forming a dual interlayer dielectric layer, which is capable of preventing an interlayer delamination phenomenon generated between an etch stop layer and an interlayer dielectric layer is provided. An interlayer dielectric layer of a dual structure is formed such that a first interlayer dielectric layer and a second interlayer dielectric layer are sequentially stacked on the etch stop layer. The etch stop layer is formed on a substrate, the substrate having a source/drain region and a gate formed therein. The dual interlayer dielectric layer is selectively etched, and a conductive material is deposited thereon, thereby forming a contact. The O3-TEOS layer and the PE-TEOS layer used as the first interlayer dielectric layer can relieve a compressive stress and improve adhesion force, respectively, thereby preventing the interlayer delamination phenomenon.
Abstract:
An exemplary manufacturing method of an inter-metal dielectric of a semiconductor device according to an embodiment of the present invention includes forming a first silicon-rich oxide (SRO) layer on a silicon substrate provided with or otherwise having a copper line layer therein, forming a plasma enhanced fluorosilicate glass (PEFSG) layer on the first SRO layer, plasma-treating the PEFSG layer, and forming a second SRO layer on the plasma-treated PEFSG layer. According to the present invention, the thickness of the second SRO layer of the inter-metal dielectric can be reduced. Consequently, process cost can be reduced, and the total thickness of the inter-metal dielectric can be reduced so as to lower the dielectric constant thereof, reduce the aspect ratio of any via holes that are subsequently formed in the inter-metal dielectric, and potentially increase the yield as a result of the reduced via hole aspect ratio.
Abstract:
This invention discloses a planarization method for semiconductor device. The planarization method includes the steps of: providing a semiconductor substrate in which metal patterns are formed with various pattern densities; depositing a porous oxide layer over the semiconductor substrate so as to cover the metal patterns; plasma-treating surface of the porous oxide layer; and polishing the plasma-treated porous oxide layer by chemical mechanical polishing.