Method and apparatus for manufacturing magnetoresistive element
    76.
    发明授权
    Method and apparatus for manufacturing magnetoresistive element 有权
    用于制造磁阻元件的方法和装置

    公开(公告)号:US08153188B2

    公开(公告)日:2012-04-10

    申请号:US12248578

    申请日:2008-10-09

    摘要: The present invention relates to a method for manufacturing a magnetoresistive element having a magnetization pinned layer, a magnetization free layer, and a spacer layer including an insulating layer provided between the magnetization pinned layer and the magnetization free layer and current paths penetrating into the insulating layer. A process of forming the spacer layer in the method includes depositing a first metal layer forming the metal paths, depositing a second metal layer on the first metal layer, performing a pretreatment of irradiating the second metal layer with an ion beam or a RF plasma of a rare gas, and converting the second metal layer into the insulating layer by means of supplying an oxidation gas or a nitriding gas.

    摘要翻译: 本发明涉及一种用于制造具有磁化钉扎层,磁化自由层和间隔层的磁阻元件的方法,所述隔离层包括设置在磁化被钉扎层和磁化自由层之间的绝缘层,以及穿透绝缘层的电流路径 。 在该方法中形成间隔层的工艺包括沉积形成金属路径的第一金属层,在第一金属层上沉积第二金属层,执行用离子束或RF等离子体照射第二金属层的预处理 稀有气体,并且通过供给氧化气体或氮化气体将第二金属层转化为绝缘层。

    MAGNETORESISTANCE EFFECT ELEMENT, MAGNETIC HEAD, MAGNETIC REPRODUCING APPARATUS, AND MAGNETIC MEMORY
    78.
    发明申请
    MAGNETORESISTANCE EFFECT ELEMENT, MAGNETIC HEAD, MAGNETIC REPRODUCING APPARATUS, AND MAGNETIC MEMORY 有权
    磁阻效应元件,磁头,磁力再生装置和磁记忆

    公开(公告)号:US20090141408A1

    公开(公告)日:2009-06-04

    申请号:US12366972

    申请日:2009-02-06

    IPC分类号: G11B5/127 G11B5/33

    摘要: A magnetoresistance effect element comprises a magnetoresistance effect film and a pair of electrode. The magnetoresistance effect film having a first magnetic layer whose direction of magnetization is substantially pinned in one direction; a second magnetic layer whose direction of magnetization changes in response to an external magnetic field; a nonmagnetic intermediate layer located between the first and second magnetic layers; and a film provided in the first magnetic layer, in the second magnetic layer, at a interface between the first magnetic layer and the nonmagnetic intermediate layer, and/or at a interface between the second magnetic layer and the nonmagnetic intermediate layer, the film having a thickness not larger than 3 nanometers, and the film has as least one selected from the group consisting of nitride, oxinitride, phosphide, and fluoride. The pair of electrodes are electrically connected to the magnetoresistance effect film to supply a sense current perpendicularly to a film plane of said magnetoresistance effect film.

    摘要翻译: 磁阻效应元件包括磁阻效应膜和一对电极。 具有第一磁性层的磁阻效应膜,其磁化方向基本上在一个方向上被固定; 其磁化方向响应于外部磁场而变化的第二磁性层; 位于第一和第二磁性层之间的非磁性中间层; 以及设置在所述第一磁性层中,在所述第二磁性层中,在所述第一磁性层和所述非磁性中间层之间的界面处和/或在所述第二磁性层和所述非磁性中间层之间的界面处设置的膜,所述膜具有 厚度不大于3纳米,该膜具有选自氮化物,氮氧化物,磷化物和氟化物中的至少一种。 一对电极电连接到磁阻效应膜,以提供垂直于所述磁阻效应膜的膜平面的感测电流。

    Magnetoresistive effect element, and magnetic head and magnetic reproducing apparatus including the same
    79.
    发明授权
    Magnetoresistive effect element, and magnetic head and magnetic reproducing apparatus including the same 有权
    磁阻效应元件和包括该磁阻效应元件的磁头和磁性重放装置

    公开(公告)号:US07522390B2

    公开(公告)日:2009-04-21

    申请号:US11248203

    申请日:2005-10-13

    IPC分类号: G11B5/39

    摘要: A spin-valve magnetoresistive effect film includes a magnetization fixed layer, a magnetization free layer, and an intermediate layer interposed therebetween. The intermediate layer has a conduction part disposed in an insulation layer and made of a magnetic metal material. The ferromagnetic film stacked on an upper side of the intermediate layer, out of ferromagnetic films constituting the magnetization fixed layer and the magnetization free layer has a perpendicular orientation part which is disposed above the conduction part and whose crystal growth direction is substantially perpendicular to a film plane, and a non-perpendicular orientation part which exists in a portion other than the perpendicular orientation part. A magnetoresistive effect element has a pair of electrodes passing a sense current in a direction perpendicular to the film plane of the magnetoresistive effect film.

    摘要翻译: 自旋阀磁阻效应膜包括磁化固定层,无磁化层和插入其间的中间层。 中间层具有设置在绝缘层中并由磁性金属材料制成的导电部分。 堆叠在中间层的上侧的铁磁性膜,构成磁化固定层的铁磁性膜和不含磁化层的铁磁性膜具有垂直取向部,该垂直取向部设置在导电部的上方,晶体生长方向大致垂直于膜 平面,以及存在于除垂直取向部以外的部分的非垂直取向部。 磁阻效应元件具有一对在垂直于磁阻效应膜的膜平面的方向上通过感测电流的电极。

    Method and apparatus for manufacturing magnetoresistive element
    80.
    发明授权
    Method and apparatus for manufacturing magnetoresistive element 有权
    用于制造磁阻元件的方法和装置

    公开(公告)号:US07514117B2

    公开(公告)日:2009-04-07

    申请号:US11199448

    申请日:2005-08-09

    IPC分类号: B05D5/12

    摘要: The present invention relates to a method for manufacturing a magnetoresistive element having a magnetization pinned layer, a magnetization free layer, and a spacer layer including an insulating layer provided between the magnetization pinned layer and the magnetization free layer and current paths penetrating into the insulating layer. A process of forming the spacer layer in the method includes depositing a first metal layer forming the metal paths, depositing a second metal layer on the first metal layer, performing a pretreatment of irradiating the second metal layer with an ion beam or a RF plasma of a rare gas, and converting the second metal layer into the insulating layer by means of supplying an oxidation gas or a nitriding gas.

    摘要翻译: 本发明涉及一种用于制造具有磁化钉扎层,磁化自由层和间隔层的磁阻元件的方法,所述隔离层包括设置在磁化被钉扎层和磁化自由层之间的绝缘层,以及穿透绝缘层的电流路径 。 在该方法中形成间隔层的工艺包括沉积形成金属路径的第一金属层,在第一金属层上沉积第二金属层,执行用离子束或RF等离子体照射第二金属层的预处理 稀有气体,并且通过供给氧化气体或氮化气体将第二金属层转化为绝缘层。