Magneto-resistance effect element, and method for manufacturing the same
    3.
    发明授权
    Magneto-resistance effect element, and method for manufacturing the same 有权
    磁阻效应元件及其制造方法

    公开(公告)号:US08379351B2

    公开(公告)日:2013-02-19

    申请号:US12073895

    申请日:2008-03-11

    IPC分类号: G11B5/39

    摘要: An example magneto-resistance effect element includes a fixed magnetization layer of which a magnetization is substantially fixed in one direction; a free magnetization layer of which a magnetization is rotated in accordance with an external magnetic field and which is formed opposite to the fixed magnetization layer; and a spacer layer including a current confining layer with an insulating layer and a conductor to pass a current through the insulating layer in a thickness direction thereof and which is located between the fixed magnetization layer and the free magnetization layer. A thin film layer is located on a side opposite to the spacer layer relative to the free magnetization layer and a functional layer containing at least one element selected from the group consisting of Si, Mg, B, Al is formed in or on at least one of the fixed magnetization layer, the free magnetization layer and the thin film layer.

    摘要翻译: 一个示例性磁阻效应元件包括一个固定的磁化层,其磁化强度基本上固定在一个方向上; 自由磁化层,其磁化根据外部磁场而旋转并与固定磁化层相对形成; 以及间隔层,其包括具有绝缘层的电流限制层和导体,以使电流在其厚度方向上穿过绝缘层,并且位于固定磁化层和自由磁化层之间。 薄膜层相对于自由磁化层位于与间隔层相反的一侧,并且包含至少一种选自Si,Mg,B,Al的元素的功能层形成在至少一个 的固定磁化层,自由磁化层和薄膜层。

    Method for manufacturing magnetoresistive element
    9.
    发明申请
    Method for manufacturing magnetoresistive element 有权
    制造磁阻元件的方法

    公开(公告)号:US20070092639A1

    公开(公告)日:2007-04-26

    申请号:US11583968

    申请日:2006-10-20

    IPC分类号: B05D5/12

    摘要: There is provided a method for manufacturing a magnetoresistive element having a magnetization pinned layer, a magnetization free layer, and a spacer layer including an insulating layer arranged between the magnetization pinned layer and the magnetization free layer and current paths passing through the insulating layer. The method includes, in producing the spacer layer, depositing a first non-magnetic metal layer forming the current paths, depositing a second metal layer to be converted into the insulating layer on the first non-magnetic metal layer, and performing two stages of oxidation treatments in which a partial pressure of an oxidizing gas in a first oxidation treatment is set to 1/10 or less of a partial pressure of an oxidizing gas in a second oxidation treatment, and the second metal layer being irradiated with an ion beam or a RF plasma of a rare gas in the first oxidation treatment.

    摘要翻译: 提供了一种用于制造具有磁化钉扎层,磁化自由层和包括布置在磁化钉扎层和磁化自由层之间的绝缘层和穿过绝缘层的电流路径的间隔层的磁阻元件的方法。 该方法包括在制造间隔层时,沉积形成电流路径的第一非磁性金属层,在第一非磁性金属层上沉积待转换成绝缘层的第二金属层,并进行两个阶段的氧化 将第一氧化处理中的氧化气体的分压设定为第二氧化处理中的氧化气体的分压的1/10以下的处理,将第二金属层照射离子束或 RF等离子体中的稀有气体进行第一次氧化处理。