Lighting assembly, exposure apparatus and exposure method employing the
lighting assembly
    72.
    发明授权
    Lighting assembly, exposure apparatus and exposure method employing the lighting assembly 失效
    照明组件,曝光装置和采用照明组件的曝光方法

    公开(公告)号:US5748288A

    公开(公告)日:1998-05-05

    申请号:US613027

    申请日:1996-03-08

    IPC分类号: G03F7/20

    摘要: The present invention provides spot-illumination of a specific size having sufficiently homogeneous light intensity distribution, with a small and inexpensive apparatus. A lighting assembly condenses the light from light source 1 with condensing-reflecting member 2. An optical integrator 3 receives at its one end the light via condensing-reflecting member 2 and emits from the other end after making the light intensity distribution homogeneous A projection lens system 4 projects the emitting surface of optical integrator 3 onto an emitted surface. By shifting the relative positioning between the lighting assembly and the substrate 11, and adjusting the distance between the substrate 11 and the mask 12, which stores a pattern to be formed, a specified area of the exposure surface 11a is scanned and exposed to have a mask pattern transcribed on the exposure surface 11a.

    摘要翻译: 本发明提供具有足够均匀的光强度分布的特定尺寸的点照射,并且具有小而便宜的装置。 照明组件将来自光源1的光与会聚反射构件2聚光。光学积分器3在其一端接收经由会聚反射构件2的光,并在使光强分布均匀后从另一端发射。投影透镜 系统4将光学积分器3的发射表面投影到发射表面上。 通过移动照明组件和基板11之间的相对定位,并且调整存储要形成的图案的基板11和掩模12之间的距离,曝光表面11a的指定区域被扫描并暴露以具有 掩模图案在曝光表面11a上转录。

    Cyclic silyl enol ethers and method of preparing the same
    74.
    发明授权
    Cyclic silyl enol ethers and method of preparing the same 失效
    环状甲硅烷基烯醇醚及其制备方法

    公开(公告)号:US5663397A

    公开(公告)日:1997-09-02

    申请号:US713759

    申请日:1996-09-13

    CPC分类号: C07F7/188 C07F7/1844

    摘要: There is disclosed a method of preparing cyclic silyl enol ethers (1-oxa-2-sila-5-cyclohexenes), comprising reacting a silacyclobutane with an acid halide in the presence of a palladium catalyst and an organic base. There is also disclosed novel cyclic silyl enol ethers obtained by the above method. The above cyclic silyl enol ethers belong to a new class of silyl enol ethers which are useful in the production of medicines and agricultural chemicals, and they can be used as intermediates of fine chemicals or as various reagents for fine synthesis.

    摘要翻译: 公开了一种制备环状甲硅烷基烯醇醚(1-氧杂-2-硅烷-5-环己烯)的方法,包括在钯催化剂和有机碱的存在下使硅烷基丁烷与酰卤反应。 还公开了通过上述方法获得的新型环状甲硅烷基烯醇醚。 上述环状甲硅烷基烯醇醚属于可用于药物和农药生产的新型甲硅烷基烯醇醚,可用作精细化学品的中间体或作为精细合成的各种试剂。