Film forming method
    73.
    发明授权
    Film forming method 有权
    成膜方法

    公开(公告)号:US08951816B2

    公开(公告)日:2015-02-10

    申请号:US13635201

    申请日:2011-02-28

    摘要: One embodiment of the present invention is a film forming method comprising: arranging a surface of a film formation substrate 10 including an absorption layer 12 on a first substrate 11 and a material layer 13 containing a film formation material and a surface of a film-formation target substrate 20 including a first layer 23 over a second substrate 22, so as to face each other; forming a second layer 13a containing the film formation material over the first layer 23 by performing first heat treatment on the material layer 13; and forming a third layer 13b containing the film formation material over the second layer 13a by performing second heat treatment on the material layer 13. In the second heat treatment, energy with a density higher than that in the first heat treatment is applied to the material layer.

    摘要翻译: 本发明的一个实施方案是一种成膜方法,其包括:将包含吸收层12的成膜基板10的表面布置在第一基板11和包含成膜材料的材料层13和膜形成表面 目标基板20包括第二基板22上的第一层23,以便彼此面对; 通过对材料层13进行第一次热处理,在第一层23上形成含有成膜材料的第二层13a; 并在第二层13a上形成含有成膜材料的第三层13b,在材料层13上进行第二热处理。在第二热处理中,将密度高于第一热处理的能量施加到材料 层。

    Deposition method and method for manufacturing deposition substrate
    74.
    发明授权
    Deposition method and method for manufacturing deposition substrate 有权
    用于制造沉积基板的沉积方法和方法

    公开(公告)号:US08900675B2

    公开(公告)日:2014-12-02

    申请号:US13635227

    申请日:2011-02-28

    摘要: One embodiment of the present invention is a deposition method for forming a layer 13a containing a deposition material on a deposition target surface of a second substrate, comprising the steps of forming an absorbing layer 12 over one surface of a first substrate 11; forming a material layer 13 containing the deposition material over the absorbing layer; performing first heat treatment on the material layer from the other surface of the first substrate to a temperature lower than the sublimation temperature of the deposition material so as to remove an impurity 14 in the material layer 13; disposing the one surface of the first substrate and the deposition target surface of the second substrate to face each other; and performing second heat treatment on the material layer from the other surface of the first substrate.

    摘要翻译: 本发明的一个实施方案是用于在第二基底的沉积靶表面上形成含有沉积材料的层13a的沉积方法,包括以下步骤:在第一基底11的一个表面上形成吸收层12; 在吸收层上形成含有沉积材料的材料层13; 在所述材料层上从所述第一基板的另一表面进行第一热处理至低于所述沉积材料的升华温度的温度,以除去所述材料层13中的杂质14; 将第一基板的一个表面和第二基板的沉积目标表面布置成彼此面对; 以及从所述第一基板的另一表面对所述材料层进行第二热处理。

    Vapor deposition device, vapor deposition method, and organic EL display device
    77.
    发明授权
    Vapor deposition device, vapor deposition method, and organic EL display device 有权
    气相沉积装置,气相沉积法和有机EL显示装置

    公开(公告)号:US08673077B2

    公开(公告)日:2014-03-18

    申请号:US13984283

    申请日:2012-03-02

    IPC分类号: C23C16/00 H01L21/31

    摘要: Vapor deposition particles (91) discharged from at least one vapor deposition source opening (61) pass through a plurality of limiting openings (82) of a limiting unit (80) and a plurality of mask openings (71) of a vapor deposition mask (70), and adhere to a substrate (10) that relatively moves along a second direction (10a) so as to form a coating film. The limiting unit includes a plurality of plate members stacked on one another. Accordingly, it is possible to efficiently form a vapor deposition coating film in which edge blurring is suppressed on a large-sized substrate at a low cost.

    摘要翻译: 从至少一个气相沉积源开口(61)排出的气相沉积颗粒(91)通过限制单元(80)的多个限制开口(82)和气相沉积掩模的多个掩模开口(71) 70),并且粘附到沿着第二方向(10a)相对移动以形成涂膜的基板(10)。 限制单元包括彼此堆叠的多个板构件。 因此,可以以低成本有效地形成在大尺寸基板上抑制边缘模糊的气相沉积涂膜。

    VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE
    79.
    发明申请
    VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE 有权
    蒸气沉积装置,蒸发沉积方法和用于生产有机EL显示装置的方法

    公开(公告)号:US20140004641A1

    公开(公告)日:2014-01-02

    申请号:US14004896

    申请日:2012-03-09

    IPC分类号: H01L51/56

    摘要: A vapor deposition device (1) performs a vapor deposition treatment to form a luminescent layer (47) having a predetermined pattern on a film formation substrate (40). The vapor deposition device includes: a nozzle (13) having a plurality of injection holes (16) from which vapor deposition particles (17), which constitute the luminescent layer, are injected toward the film formation substrate when the vapor deposition treatment is carried out; and a plurality of control plates (20) provided between the nozzle and the film formation substrate and restricting an incident angle, with respect to the film formation substrate, of the vapor deposition particles injected from the plurality of injection holes. The nozzle includes: a nozzle main body (14b) in a container shape having an opening (14c) on a surface thereof on a film formation substrate side and (ii) a plurality of blocks (15) covering the opening and separated from each other, each of the plurality of blocks having the plurality of injection holes. The above arrangement allows a vapor-deposited film pattern to be formed with high definition.

    摘要翻译: 蒸镀装置(1)进行蒸镀处理,在成膜基板(40)上形成具有规定图案的发光层(47)。 气相沉积装置包括:具有多个喷射孔(16)的喷嘴(13),当进行气相沉积处理时,构成发光层的气相沉积颗粒(17)从该注入孔喷射到成膜基底 ; 以及设置在喷嘴和成膜基板之间的多个控制板(20),并且限制从多个喷射孔喷射的气相沉积颗粒相对于成膜基板的入射角。 喷嘴包括:容器形状的喷嘴主体(14b),其在成膜基板侧的表面上具有开口(14c),和(ii)覆盖开口并分离的多个块体(15) 所述多个块中的每个具有所述多个喷射孔。 上述布置允许以高清晰度形成气相沉积膜图案。

    CRUCIBLE AND DEPOSITION APPARATUS
    80.
    发明申请
    CRUCIBLE AND DEPOSITION APPARATUS 有权
    可溶和沉积装置

    公开(公告)号:US20130291796A1

    公开(公告)日:2013-11-07

    申请号:US13980875

    申请日:2012-01-13

    IPC分类号: C23C16/448 C23C16/04

    摘要: A crucible (50) of the present invention includes: an opening (55a) from which vapor deposition particles are injected toward a film formation substrate on which a film is to be formed; a focal point member (54a), provided so as to face the opening (55a), which reflects vapor deposition particles injected from the opening (55a); and a revolution paraboloid (55b) which reflects, toward the film formation substrate, vapor deposition particles which have been reflected by the focal point member (54a).

    摘要翻译: 本发明的坩埚(50)包括:朝向要在其上形成膜的成膜基板上注入蒸镀颗粒的开口(55a) 设置成面对开口(55a)的焦点部件(54a),其反射从开口(55a)喷射的气相沉积粒子; 以及向所述成膜基板反射已被所述焦点部件(54a)反射的气相沉积粒子的旋转抛物面(55b)。