Phase-shifting masks with sub-wavelength diffractive optical elements
    72.
    发明授权
    Phase-shifting masks with sub-wavelength diffractive optical elements 有权
    具有亚波长衍射光学元件的相移掩模

    公开(公告)号:US08112726B2

    公开(公告)日:2012-02-07

    申请号:US12316064

    申请日:2008-12-09

    CPC classification number: G03F7/70283 G03F1/32 G03F1/36 G03F7/70433 G03F7/705

    Abstract: The present invention discloses a method of designing a set of two tiled masks, as well as, a mask including: a first tile, the first tile being transparent to a light, the first tile having a first characteristic linear dimension that is 15% or less of a wavelength of the light; a second tile, the second tile being transparent to the light, the second tile having a second characteristic linear dimension that is 15% or less of the wavelength of the light; and a third tile, the third tile being opaque to the light, the third tile having a third characteristic linear dimension that is 15% or less of the wavelength of the light.

    Abstract translation: 本发明公开了一种设计一组两个平铺掩模的方法,以及掩模,包括:第一瓦片,第一瓦片对于光是透明的,第一瓦片具有15%的第一特征线性尺寸或 较少的波长的光; 第二瓦片,所述第二瓦片对于所述光是透明的,所述第二瓦片具有光的波长的15%或更小的第二特征线性尺寸; 以及第三瓦片,所述第三瓦片对于所述光不透明,所述第三瓦片具有光的波长的15%以下的第三特征线性尺寸。

    HIGHLY DILUTABLE POLISHING CONCENTRATES AND SLURRIES
    74.
    发明申请
    HIGHLY DILUTABLE POLISHING CONCENTRATES AND SLURRIES 有权
    高灵敏度的抛光浓度和流动性

    公开(公告)号:US20110089143A1

    公开(公告)日:2011-04-21

    申请号:US12580868

    申请日:2009-10-16

    CPC classification number: H01L21/30625 C09G1/02 H01L21/3212 H01L21/7684

    Abstract: The present disclosure provides a concentrate for use in chemical mechanical polishing slurries, and a method of diluting that concentrate to a point of use slurry. The concentrate comprises abrasive, complexing agent, and corrosion inhibitor, and the concentrate is diluted with water and oxidizer. These components are present in amounts such that the concentrate can be diluted at very high dilution ratios, without affecting the polishing performance.

    Abstract translation: 本公开提供了用于化学机械抛光浆料的浓缩物,以及将该浓缩物稀释到使用点浆料的方法。 浓缩物包括研磨剂,络合剂和缓蚀剂,浓缩物用水和氧化剂稀释。 这些组分的存在量使得浓缩物可以以非常高的稀释比稀释,而不影响抛光性能。

    Phase-shifting masks with sub-wavelength diffractive optical elements
    75.
    发明申请
    Phase-shifting masks with sub-wavelength diffractive optical elements 有权
    具有亚波长衍射光学元件的相移掩模

    公开(公告)号:US20090100400A1

    公开(公告)日:2009-04-16

    申请号:US12316085

    申请日:2008-12-09

    CPC classification number: G03F7/70283 G03F1/32 G03F1/36 G03F7/70433 G03F7/705

    Abstract: The present invention discloses a method of designing a set of two tiled masks, as well as, a mask including: a first tile, the first tile being transparent to a light, the first tile having a first characteristic linear dimension that is 15% or less of a wavelength of the light; a second tile, the second tile being transparent to the light, the second tile having a second characteristic linear dimension that is 15% or less of the wavelength of the light; and a third tile, the third tile being opaque to the light, the third tile having a third characteristic linear dimension that is 15% or less of the wavelength of the light.

    Abstract translation: 本发明公开了一种设计一组两个平铺掩模的方法,以及掩模,包括:第一瓦片,第一瓦片对于光是透明的,第一瓦片具有15%的第一特征线性尺寸或 较少的波长的光; 第二瓦片,所述第二瓦片对于所述光是透明的,所述第二瓦片具有光的波长的15%或更小的第二特征线性尺寸; 以及第三瓦片,所述第三瓦片对于所述光不透明,所述第三瓦片具有光的波长的15%以下的第三特征线性尺寸。

    RADIATION IMAGING SYSTEM
    76.
    发明申请
    RADIATION IMAGING SYSTEM 有权
    辐射成像系统

    公开(公告)号:US20090010387A1

    公开(公告)日:2009-01-08

    申请号:US12165846

    申请日:2008-07-01

    CPC classification number: G01N23/04

    Abstract: The present invention discloses an radiation imaging system, comprising: an accelerator for generating rays which penetrate through the objects to be inspected and an synchronous signal; a detector with a plurality of detecting modules, adapted for detecting rays; a signal processor for generating a selection signal according to the synchronous signal, so as to select a detecting module for detecting the rays; a data converter for converting the signal detected by said detecting module into digital data, and then buffering the digital data in said signal processor; and a communication controller connected to an image processor, adapted for transmitting the digital data buffered in said signal processor to said image processor. The system according to the present invention allows high-speed and stable data acquisition and data conversion and accurate and reliable data transmission, when the data amount is significant.

    Abstract translation: 本发明公开了一种辐射成像系统,包括:用于产生穿过待检查物体的射线的加速器和同步信号; 具有多个检测模块的检测器,适于检测射线; 信号处理器,用于根据同步信号产生选择信号,以便选择用于检测光线的检测模块; 数据转换器,用于将由所述检测模块检测的信号转换为数字数据,然后在所述信号处理器中缓冲数字数据; 以及连接到图像处理器的通信控制器,适于将缓冲在所述信号处理器中的数字数据发送到所述图像处理器。 当数据量显着时,根据本发明的系统允许高速稳定的数据采集和数据转换以及准确可靠的数据传输。

    TRAILER SYSTEM AND METHOD FOR INSPECTING VEHICLE BY RADIATION IMAGING OF VEHICLE THROUGH TRAILER SYSTEM
    77.
    发明申请
    TRAILER SYSTEM AND METHOD FOR INSPECTING VEHICLE BY RADIATION IMAGING OF VEHICLE THROUGH TRAILER SYSTEM 有权
    通过拖拉机系统对车辆进行辐射成像检测车辆的拖车系统和方法

    公开(公告)号:US20080159840A1

    公开(公告)日:2008-07-03

    申请号:US11966053

    申请日:2007-12-28

    CPC classification number: G01V5/0008

    Abstract: The present invention relates to a trailer system, and particularly to a self-driving trailer system for a radiation imaging inspection system and a method for inspecting a vehicle by radiation imaging of a vehicle through the trailer system. The self-driving trailer system comprises two trailers symmetrical in structure. Each of the trailers comprises a driving device, running wheels, a trailer body, a carrying device, a lift cylinder, a balance wheel, and two pairs of guide wheels. The driving device, the running wheels, and the balance wheel are coupled with the trailer body. The carrying device is coupled with the trailer body through the lift cylinder. A front carrying arm and a rear carrying arm can clamp front wheels of a vehicle under inspection, and move upwards and downwards by the lift cylinder. The trailer system according to the present invention is smooth and reliable in operation and simple in structure, and is applicable to different diameters of wheels of container lorries under inspection and is convenient in operation.

    Abstract translation: 拖车系统技术领域本发明涉及一种拖车系统,特别涉及用于放射线成像检查系统的自行车拖车系统和通过拖车系统通过车辆的辐射成像检查车辆的方法。 自行车拖车系统包括两个结构对称的拖车。 每个拖车包括驱动装置,行驶轮,拖车车身,运送装置,提升缸,摆轮和两对导向轮。 驱动装置,行驶轮和摆轮与拖车主体联接。 承载装置通过提升缸与拖车主体联接。 前承载臂和后承载臂可以夹紧检查车辆的前轮,并通过提升缸上下移动。 根据本发明的拖车系统操作平稳可靠,结构简单,适用于检查中集装箱货车的不同直径,操作方便。

    Modification of pixelated photolithography masks based on electric fields
    78.
    发明授权
    Modification of pixelated photolithography masks based on electric fields 有权
    基于电场的像素化光刻掩模的修改

    公开(公告)号:US07325223B2

    公开(公告)日:2008-01-29

    申请号:US11096613

    申请日:2005-03-31

    CPC classification number: G03F1/36

    Abstract: Faster synthesis of photolithography mask modifications is described. In one embodiment, the invention includes synthesizing a first binary photolithography mask, developing perturbations to an estimated electric field generated by the first mask in use, and synthesizing a second binary photolithography mask by applying the perturbations to the first mask.

    Abstract translation: 描述了更快的光刻掩模修改的合成。 在一个实施例中,本发明包括合成第一二进制光刻掩模,对使用中由第一掩模产生的估计电场产生扰动,以及通过将扰动应用于第一掩模来合成第二二进制光刻掩模。

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