Substrate treatment method and substrate treatment apparatus
    71.
    发明申请
    Substrate treatment method and substrate treatment apparatus 有权
    基板处理方法和基板处理装置

    公开(公告)号:US20050193943A1

    公开(公告)日:2005-09-08

    申请号:US11120242

    申请日:2005-05-02

    摘要: A substrate treatment method for treating a substrate by supplying a treatment liquid to the substrate while rotating the substrate. The method comprises the steps of: performing a first substrate rotation process for rotating the substrate while clamping the substrate by a first clamping member set; performing a second substrate rotation process after the first substrate rotation step for rotating the substrate while clamping the substrate by the first clamping member set and a second clamping member set provided separately from the first clamping member set; and performing a third substrate rotation process after the second substrate rotation step by unclamping the substrate from the first clamping member set for rotating the substrate while clamping the substrate by the second clamping member set.

    摘要翻译: 一种基板处理方法,用于通过在旋转基板的同时向基板供给处理液来处理基板。 该方法包括以下步骤:在通过第一夹持构件组夹持衬底的同时执行用于旋转衬底的第一衬底旋转过程; 在所述第一基板旋转步骤之后执行第二基板旋转过程,用于通过所述第一夹紧构件组夹住所述基板并且与所述第一夹紧构件组分开地设置的第二夹紧构件组来旋转所述基板; 以及在所述第二基板旋转步骤之后,通过由所述第二夹持部件夹持所述基板而使所述基板从所述第一夹紧部件组中松动以旋转所述基板而进行第三基板旋转处理。

    Rotation detecting device
    72.
    发明申请
    Rotation detecting device 审中-公开
    旋转检测装置

    公开(公告)号:US20050066749A1

    公开(公告)日:2005-03-31

    申请号:US10953792

    申请日:2004-09-30

    摘要: A rotation detecting device for detecting a rotation number and a rotation direction of a rotating member based on at least two detection signals having different phases from each other and output from at least two sensor elements provided on the rotating member so as to face each other includes a waveform processing means for performing a waveform processing on the detection signals based on one of a plurality of predetermined conversion rules, a setting signal receiving means for receiving a setting signal for determining the predetermined conversion rule to be used from the plurality of predetermined conversion rules, and a conversion rule setting means for determining the predetermined conversion rule to be used based on the setting signal received by the setting signal receiving means.

    摘要翻译: 一种旋转检测装置,用于基于至少两个彼此相位相差的检测信号来检测旋转件的旋转数和旋转方向,并从设置在旋转件上的至少两个传感器元件彼此面对地相互包围, 波形处理装置,用于根据多个预定转换规则之一执行对检测信号的波形处理;设置信号接收装置,用于从多个预定转换规则中接收用于确定要使用的预定转换规则的设置信号 以及转换规则设置装置,用于根据由设置信号接收装置接收的设置信号来确定要使用的预定转换规则。

    Starting shift control system and method for continuously variable transmission
    73.
    发明授权
    Starting shift control system and method for continuously variable transmission 有权
    用于无级变速器的起动换档控制系统和方法

    公开(公告)号:US06679808B2

    公开(公告)日:2004-01-20

    申请号:US09953893

    申请日:2001-09-18

    IPC分类号: B60K4104

    摘要: A starting shift control system for a continuously variable transmission is provided which includes a control unit having a high start judgment device for judging whether or not a high start in a high speed side gear ratio is caused on the basis of a comparison between the generated number of the input rotation pulses and the generated number of the output rotation pulses from the time a first vehicle starting operation is performed after start of a prime mover, and a high start control device for restricting downshifting from the high speed side gear ratio to a target gear ratio when a start of the vehicle is judged to be the high start. A starting shift control method is also provided.

    摘要翻译: 提供了一种用于无级变速器的起动变速控制系统,其包括具有高起动判断装置的控制单元,所述起动判断装置用于根据所产生的数量之间的比较来判断是否产生高速侧变速比的高起动 以及从原动机启动之后执行第一车辆启动操作之后的输出旋转脉冲的产生数量以及用于将从高速侧齿轮比减速到高速转速的高速起动控制装置 当车辆的起动被判定为高起动时的齿轮比。 还提供了起动换挡控制方法。

    Cylinder head and induction system for engine
    75.
    发明授权
    Cylinder head and induction system for engine 失效
    发动机气缸盖和感应系统

    公开(公告)号:US5669348A

    公开(公告)日:1997-09-23

    申请号:US297372

    申请日:1994-08-29

    摘要: A cylinder head and induction passage arrangement for a three intake valve internal combustion engine wherein the center intake passage and its porting arrangement is directed so as to augment the tumble action caused by the side valve seats and their intake passages. The construction also provides that the center intake valve will be disposed so that there will be no shrouded area in the path of flame from the spark plug so as to ensure complete combustion. The cylinder head is made in such a way that the same cylinder head may be used for either bank of an engine having angularly inclined cylinder banks through the machining of only one face thereof.

    摘要翻译: 一种用于三进气门内燃机的气缸盖和进气通道装置,其中中心进气通道及其移动装置被引导以增加由侧阀座及其进气通道引起的翻滚作用。 该结构还规定,中心进气阀将被设置成使得火花塞的火焰路径中不会有遮蔽区域,以确保完全燃烧。 气缸盖制造成使得相同的气缸盖可以用于通过仅仅加工其一个面的具有角度倾斜的气缸组的发动机的任一组。

    Electric power steering system
    77.
    发明授权
    Electric power steering system 有权
    电动助力转向系统

    公开(公告)号:US08230963B2

    公开(公告)日:2012-07-31

    申请号:US12861446

    申请日:2010-08-23

    IPC分类号: B62D5/04

    CPC分类号: B62D5/0427 B62D5/0448

    摘要: In an electric power steering system, a ball screw nut (23) of a ball screw device that drives a rack shaft is screwed to an axial end portion (6a) of a motor shaft (6) when a threaded portion (31) of a hollow threaded shaft (30) formed at an axial end portion (23a) of the ball screw nut (23) is screwed to a threaded portion (32) formed in the inner periphery of a motor shaft (6). A flange member (33) that is larger in diameter than the ball screw nut (23) is fitted to the outer periphery of the axial end portion (6a) of the motor shaft (6). The flange member (33) is formed in such a manner that when the rotation of the flange member (33) is restricted, the rotation of the ball screw nut (23) and the motor shaft (6) in the same direction is restricted when the ball screw nut (23) is screwed to the motor shaft (6).

    摘要翻译: 在电动助力转向系统中,将驱动齿条轴的滚珠丝杠装置的滚珠丝杠螺母(23)与电动机轴(6)的螺纹部(31)螺纹连接在电动机轴(6)的轴向端部(6a) 形成在滚珠丝杠螺母(23)的轴向端部(23a)的中空螺纹轴(30)与形成在电机轴(6)的内周的螺纹部(32)旋拧。 与电动机轴(6)的轴向端部(6a)的外周嵌合有直径大于滚珠丝杠螺母(23)的凸缘部件(33)。 凸缘构件33以这样的方式形成,即当凸缘构件33的旋转被限制时,滚珠丝杠螺母(23)和马达轴(6)沿相同方向的旋转受到限制,当 滚珠丝杠螺母(23)被拧到马达轴(6)上。

    Rotation sensor
    78.
    发明授权
    Rotation sensor 有权
    旋转传感器

    公开(公告)号:US08164324B2

    公开(公告)日:2012-04-24

    申请号:US12505057

    申请日:2009-07-17

    IPC分类号: G01P3/48

    摘要: A rotation sensor includes a detecting portion, a rotational state determining portion and a pulse generating portion. The detecting portion detects a rotation of a rotational member and outputs a detection signal. The rotational state determining portion determines a rotational state of the rotational member on the basis of the detection signal in a predetermined period. The pulse generating portion generates and outputs a first pulse and a second pulse, of which waveforms differ from each other, in response to a rotational direction of the rotational member after the predetermined period. The pulse generating portion further generates and outputs a third pulse regardless of the rotational state of the rotational member in the predetermined period.

    摘要翻译: 旋转传感器包括检测部分,旋转状态确定部分和脉冲产生部分。 检测部分检测旋转构件的旋转并输出检测信号。 旋转状态判定部根据检测信号,在规定期间内确定旋转部件的旋转状态。 脉冲发生部分响应于旋转部件的旋转方向在预定时间段之后产生并输出其波形彼此不同的第一脉冲和第二脉冲。 脉冲发生部分在预定周期内进一步产生并输出第三脉冲,而不管旋转构件的旋转状态如何。

    Substrate processing apparatus and substrate transfer method
    79.
    发明授权
    Substrate processing apparatus and substrate transfer method 有权
    基板加工装置及基板转印方法

    公开(公告)号:US08157496B2

    公开(公告)日:2012-04-17

    申请号:US11469700

    申请日:2006-09-01

    IPC分类号: B65G1/00

    摘要: A substrate processing apparatus includes a cassette placing table; a first transfer mechanism having a first substrate holding hand capable of advancing/retreating and using this first substrate holding hand to transfer a substrate with respect to the cassette; a substrate processing unit for executing a predetermined process on a substrate; a second transfer mechanism having a second substrate holding hand capable of advancing/retreating and pivotable at a vertical axis, and using the second substrate holding hand to transfer a substrate with respect to the first transfer mechanism and the substrate processing unit; a moving mechanism for moving the first transfer mechanism in an arrangement direction of the cassettes; and a control unit for controlling transfer of a substrate between the first transfer mechanism and the second transfer mechanism in a position where the first transfer mechanism is opposed to a cassette.

    摘要翻译: 基板处理装置包括:盒放置台; 第一传送机构具有能够前进/后退的第一基板保持手,并且使用该第一基板握持器相对于盒传送基板; 用于在衬底上执行预定处理的衬底处理单元; 第二传送机构,具有能够在垂直轴上前进/后退并且可枢转的第二基板保持手,并且使用第二基板握持手相对于第一传送机构和基板处理单元传送基板; 移动机构,用于沿着所述盒的排列方向移动所述第一传送机构; 以及控制单元,用于控制第一传送机构和第二传送机构之间的基板在第一传送机构与盒相对的位置的传送。

    Electric power steering apparatus
    80.
    发明授权
    Electric power steering apparatus 有权
    电动助力转向装置

    公开(公告)号:US08127884B2

    公开(公告)日:2012-03-06

    申请号:US12695731

    申请日:2010-01-28

    IPC分类号: B62D5/04

    CPC分类号: B62D5/0448 B62D5/0427

    摘要: A flange member 20, which is formed as a separate body from a motor shaft 6, is screwed to an end 6a of the motor shaft 6. The flange member 20 functions as a flange 19 of the motor shaft 6. A flange 18, which is formed at an end 13a of a ball screw nut 13, is fastened to the flange 19 of the motor shaft 6. This couples the ball screw nut 13 to the motor shaft 6. A coupling member 27 is arranged in the joint portion between the ball screw nut 13 and the motor shaft 6. The coupling member 27 is formed by a tubular portion 28 and a plate flange 29, which extends radially outward from the outer circumferential surface of an end of the tubular portion 28. The tubular portion 28 of the coupling member 27 is fixed to the motor shaft 6, and the plate flange 29 is fixed to the flange member 20.

    摘要翻译: 形成为与电动机轴6分离的主体的凸缘构件20被旋拧到电动机轴6的端部6a。凸缘构件20用作电动机轴6的凸缘19.凸缘18 形成在滚珠丝杠螺母13的端部13a处,被紧固到电动机轴6的凸缘19上。这将滚珠丝杠螺母13联接到电动机轴6.联接部件27设置在 滚珠丝杠螺母13和马达轴6.联接构件27由管状部分28和板凸缘29形成,板状凸缘29从管状部分28的端部的外周表面径向向外延伸。管状部分28 联接构件27固定到电动机轴6,并且板凸缘29固定到凸缘构件20。