摘要:
A substrate treatment method for treating a substrate by supplying a treatment liquid to the substrate while rotating the substrate. The method comprises the steps of: performing a first substrate rotation process for rotating the substrate while clamping the substrate by a first clamping member set; performing a second substrate rotation process after the first substrate rotation step for rotating the substrate while clamping the substrate by the first clamping member set and a second clamping member set provided separately from the first clamping member set; and performing a third substrate rotation process after the second substrate rotation step by unclamping the substrate from the first clamping member set for rotating the substrate while clamping the substrate by the second clamping member set.
摘要:
A rotation detecting device for detecting a rotation number and a rotation direction of a rotating member based on at least two detection signals having different phases from each other and output from at least two sensor elements provided on the rotating member so as to face each other includes a waveform processing means for performing a waveform processing on the detection signals based on one of a plurality of predetermined conversion rules, a setting signal receiving means for receiving a setting signal for determining the predetermined conversion rule to be used from the plurality of predetermined conversion rules, and a conversion rule setting means for determining the predetermined conversion rule to be used based on the setting signal received by the setting signal receiving means.
摘要:
A starting shift control system for a continuously variable transmission is provided which includes a control unit having a high start judgment device for judging whether or not a high start in a high speed side gear ratio is caused on the basis of a comparison between the generated number of the input rotation pulses and the generated number of the output rotation pulses from the time a first vehicle starting operation is performed after start of a prime mover, and a high start control device for restricting downshifting from the high speed side gear ratio to a target gear ratio when a start of the vehicle is judged to be the high start. A starting shift control method is also provided.
摘要:
A method of manufacturing an ink cartridge for use in an ink jet recorder including positioning a container body having a bottom wall and an opening on a pallet such that the bottom wall faces upward, the container body including a porous member, a foam chamber for accommodating the porous member therein, and an ink supply port, having an inlet formed in the bottom surface of the foam chamber and an outlet; inserting packing into the ink supply port; sealing the ink supply port outlet; resetting the container body on the pallet by turning the container body upside down such that the opening faces upward; affixing a filter to the ink supply port inlet; inserting the porous member into the foam chamber; bonding a cover to the opening of the container body; injecting ink into the foam chamber; and sealing the cover.
摘要:
A cylinder head and induction passage arrangement for a three intake valve internal combustion engine wherein the center intake passage and its porting arrangement is directed so as to augment the tumble action caused by the side valve seats and their intake passages. The construction also provides that the center intake valve will be disposed so that there will be no shrouded area in the path of flame from the spark plug so as to ensure complete combustion. The cylinder head is made in such a way that the same cylinder head may be used for either bank of an engine having angularly inclined cylinder banks through the machining of only one face thereof.
摘要:
A method of processing fermented soybeans by freeze-drying the fermented soybeans in a vacuum and separating the dried soybeans into an outer layer portion and an inner layer portion, and a method of preparing instant fermented soybeans or instant rice containing fermented soybeans by contacting the inner layer portion with water with or without precooked rice for reconstitution and adding a powder of the outer layer portion to the reconstituted mass.
摘要:
In an electric power steering system, a ball screw nut (23) of a ball screw device that drives a rack shaft is screwed to an axial end portion (6a) of a motor shaft (6) when a threaded portion (31) of a hollow threaded shaft (30) formed at an axial end portion (23a) of the ball screw nut (23) is screwed to a threaded portion (32) formed in the inner periphery of a motor shaft (6). A flange member (33) that is larger in diameter than the ball screw nut (23) is fitted to the outer periphery of the axial end portion (6a) of the motor shaft (6). The flange member (33) is formed in such a manner that when the rotation of the flange member (33) is restricted, the rotation of the ball screw nut (23) and the motor shaft (6) in the same direction is restricted when the ball screw nut (23) is screwed to the motor shaft (6).
摘要:
A rotation sensor includes a detecting portion, a rotational state determining portion and a pulse generating portion. The detecting portion detects a rotation of a rotational member and outputs a detection signal. The rotational state determining portion determines a rotational state of the rotational member on the basis of the detection signal in a predetermined period. The pulse generating portion generates and outputs a first pulse and a second pulse, of which waveforms differ from each other, in response to a rotational direction of the rotational member after the predetermined period. The pulse generating portion further generates and outputs a third pulse regardless of the rotational state of the rotational member in the predetermined period.
摘要:
A substrate processing apparatus includes a cassette placing table; a first transfer mechanism having a first substrate holding hand capable of advancing/retreating and using this first substrate holding hand to transfer a substrate with respect to the cassette; a substrate processing unit for executing a predetermined process on a substrate; a second transfer mechanism having a second substrate holding hand capable of advancing/retreating and pivotable at a vertical axis, and using the second substrate holding hand to transfer a substrate with respect to the first transfer mechanism and the substrate processing unit; a moving mechanism for moving the first transfer mechanism in an arrangement direction of the cassettes; and a control unit for controlling transfer of a substrate between the first transfer mechanism and the second transfer mechanism in a position where the first transfer mechanism is opposed to a cassette.
摘要:
A flange member 20, which is formed as a separate body from a motor shaft 6, is screwed to an end 6a of the motor shaft 6. The flange member 20 functions as a flange 19 of the motor shaft 6. A flange 18, which is formed at an end 13a of a ball screw nut 13, is fastened to the flange 19 of the motor shaft 6. This couples the ball screw nut 13 to the motor shaft 6. A coupling member 27 is arranged in the joint portion between the ball screw nut 13 and the motor shaft 6. The coupling member 27 is formed by a tubular portion 28 and a plate flange 29, which extends radially outward from the outer circumferential surface of an end of the tubular portion 28. The tubular portion 28 of the coupling member 27 is fixed to the motor shaft 6, and the plate flange 29 is fixed to the flange member 20.