公开(公告)号：US20100194235A1

公开(公告)日：2010-08-05

申请号：US12761123

申请日：2010-04-15

申请人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

发明人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC分类号： H02N11/00

CPC分类号： B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

摘要翻译： 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

公开(公告)号：US07732991B2

公开(公告)日：2010-06-08

申请号：US11864266

申请日：2007-09-28

申请人： Lianjun Liu

发明人： Lianjun Liu

IPC分类号： H01L41/08

CPC分类号： B81B3/0086 ,  B81B2201/0235 ,  B81B2203/0118 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/257

摘要： A self-poling piezoelectric based MEMS device is configured for piezoelectric actuation in response to application of a device operating voltage. The MEMS device comprises a beam, a first electrode disposed on the beam, a layer of piezoelectric material having a self-poling thickness disposed overlying a portion of the first electrode, and a second electrode overlying the layer of piezoelectric material. The layer of piezoelectric material is self-poled in response to application of the device operating voltage across the first and second electrodes. In addition, the self-poled piezoelectric material has a poling direction established according to a polarity orientation of the device operating voltage as applied across the first and second electrodes.

摘要翻译： 响应于器件工作电压的应用，自极化基于压电的MEMS器件被配置为用于压电致动。 MEMS器件包括光束，设置在光束上的第一电极，具有设置在第一电极的一部分上的自极化厚度的压电材料层和覆盖在压电材料层上的第二电极。 响应于在第一和第二电极上施加器件工作电压，压电材料层是自极化的。 此外，自极化压电材料具有根据施加在第一和第二电极上的器件工作电压的极性取向而建立的极化方向。

公开(公告)号：US07728339B1

公开(公告)日：2010-06-01

申请号：US10139009

申请日：2002-05-03

申请人： Scott G. Adams ,  Tim Davis

发明人： Scott G. Adams ,  Tim Davis

IPC分类号： H01L29/207 ,  H01L21/00

CPC分类号： B81B3/0086 ,  B81B2201/045 ,  G02B26/0833

摘要： A micromechanical structure is described. A region of semiconductor material has a first surface, a second surface opposite to the first surface, and a lateral surface that surrounds the region of semiconductor material. Insulative material covers the first surface and the lateral surface of the region of semiconductor material to provide electrical isolation to the region of semiconductor material by forming a boundary. To form the micromechanical structure, a trench is etched in a semiconductor substrate to surround a region of the semiconductor substrate. A surface of the semiconductor substrate and the trench are oxidized to form a top oxide and a lateral oxide region. A backside of the semiconductor substrate is etched to expose a backside of the region of the semiconductor substrate and a portion of the lateral oxide.

摘要翻译： 描述微机械结构。 半导体材料的区域具有第一表面，与第一表面相对的第二表面和围绕半导体材料区域的侧表面。 绝缘材料覆盖半导体材料区域的第一表面和侧表面，以通过形成边界来提供对半导体材料区域的电隔离。 为了形成微机械结构，在半导体衬底中蚀刻沟槽以包围半导体衬底的区域。 半导体衬底和沟槽的表面被氧化以形成顶部氧化物和横向氧化物区域。 蚀刻半导体衬底的背面以暴露半导体衬底的区域的背面和一部分横向氧化物。

公开(公告)号：US07719111B2

公开(公告)日：2010-05-18

申请号：US11408054

申请日：2006-04-21

申请人： Jae-Eun Jang ,  Seung-Nam Cha ,  Yong-Wan Jin ,  Byong-Gwon Song

发明人： Jae-Eun Jang ,  Seung-Nam Cha ,  Yong-Wan Jin ,  Byong-Gwon Song

IPC分类号： H01L21/28

CPC分类号： B81C1/00111 ,  B81B3/0086 ,  B81B2201/018 ,  H01H1/0094 ,  Y10S977/762 ,  Y10T29/49105

摘要： A nanowire electronmechanical device with an improved structure and a method of fabricating the same prevent burning of two nanowires which are switched due to contact with each other while providing stable on-off switching characteristics. The nanowire electromechanical device comprises: an insulating substrate; first and third electrodes spaced apart from each other on the insulating substrate, wherein a negative voltage and a positive voltage, varying within a predetermined range, are applied to the first and third electrodes, respectively; a second electrode interposed between the first and third electrodes, a constant positive voltage, lower than the voltage applied to the third electrode, being applied to the second electrode; a first nanowire vertically grown on the first electrode and charged with a negative charge; a second nanowire vertically grown on the second electrode and charged with a positive charge; and a third nanowire vertically grown on the third electrode and charged with an amount of positive charge corresponding to the magnitude of the varying voltage applied to the third electrode.

摘要翻译： 具有改进结构的纳米线电子机械装置及其制造方法防止由于彼此接触而切换的两个纳米线的燃烧，同时提供稳定的开 - 关开关特性。 纳米线机电装置包括：绝缘基板; 在绝缘基板上彼此间隔开的第一和第三电极，其中在预定范围内变化的负电压和正电压分别施加到第一和第三电极; 插入在第一和第三电极之间的第二电极，施加到第二电极的恒定的正电压低于施加到第三电极的电压; 在第一电极上垂直生长并带有负电荷的第一纳米线; 在第二电极上垂直生长并带有正电荷的第二纳米线; 以及在第三电极上垂直生长的第三纳米线，并充有与施加到第三电极的变化电压的幅度相对应的一定量的正电荷。

公开(公告)号：US20100107758A1

公开(公告)日：2010-05-06

申请号：US12520878

申请日：2008-01-10

申请人： Atsushi Kandori ,  Chienliu Chang

发明人： Atsushi Kandori ,  Chienliu Chang

IPC分类号： G01P3/44 ,  H05K1/11 ,  G01P15/00 ,  G01R19/00 ,  H02N1/00 ,  B05D5/12

CPC分类号： B81B3/0086

摘要： A structural member having a plurality of conductive regions electrically insulated from each other, in which the plurality of conductive regions are electrically insulated from each other by continuous oxidized regions, and the oxidized regions are each formed of an oxide made of a material having a plurality of through holes or trenches formed therein.

摘要翻译： 一种结构构件，其具有多个导电区域，所述多个导电区域彼此电绝缘，其中所述多个导电区域通过连续氧化区域彼此电绝缘，并且所述氧化区域由氧化物形成，所述氧化物由具有多个 的通孔或沟槽。

公开(公告)号：US07615834B2

公开(公告)日：2009-11-10

申请号：US11707623

申请日：2007-02-16

申请人： Burtis Khuri-Yakub ,  Arif Sanli Ergun ,  G. Göksenin Yaralioglu ,  Yongli Huang ,  Sean Hansen

发明人： Burtis Khuri-Yakub ,  Arif Sanli Ergun ,  G. Göksenin Yaralioglu ,  Yongli Huang ,  Sean Hansen

IPC分类号： H01L41/113 ,  H01L29/84

CPC分类号： B81B3/0086 ,  B06B1/0292 ,  B81B3/007 ,  B81B2201/0257 ,  B81B2203/0127 ,  H01L28/40

摘要： Structure for capacitive micromachined ultrasonic transducer (CMUT) device or other vibrating membrane device having non-uniform membrane so that membrane mass and stiffness characteristics may be substantially independently adjusted. CMUT having trenched membrane and/or membrane with non-uniform thickness or density. Method for operating transducer or vibrating membrane device. Array of devices at least some of which have non-uniform membrane properties. CMUT comprising substrate, support for membrane, and membrane extending over support to create cavity, membrane having non-uniform membrane thickness resulting from at least one of: thickening on upper surface of the membrane outside of cavity, thickening on lower surface of membrane inside cavity, trench on upper surface of membrane, trench on lower surface of the membrane, and any combination of two or more of these. Method for fabricating CMUT or vibrating membrane device having non-uniform membrane. High mechanical sensitivity transducer for sensor, microphone, and/or transmitter.

摘要翻译： 用于电容微加工超声波换能器（CMUT）装置或具有不均匀膜的其它振动膜装置的结构，使得膜质量和刚度特性可以基本上独立地调节。 CMUT具有沟槽的膜和/或具有不均匀厚度或密度的膜。 操作换能器或振动膜装置的方法。 至少其中一些具有不均匀膜性质的器件阵列。 CMUT包括衬底，用于膜的支撑件和在支撑件上延伸以产生空腔的膜，膜具有由以下至少一个产生的不均匀的膜厚度：在腔外部的膜的上表面上增厚，在腔内的膜的下表面上增厚 膜的上表面的沟槽，膜的下表面上的沟槽，以及这些中的两个或更多个的任意组合。 制造具有不均匀膜的CMUT或振动膜装置的方法。 用于传感器，麦克风和/或变送器的高机械灵敏度传感器。

公开(公告)号：US07507669B2

公开(公告)日：2009-03-24

申请号：US10917168

申请日：2004-08-12

申请人： Aaron Partridge ,  Markus Lutz

发明人： Aaron Partridge ,  Markus Lutz

IPC分类号： H01L21/302

CPC分类号： B81C1/00063 ,  B81B3/0086 ,  B81C2201/0112 ,  B81C2203/0136 ,  B81C2203/0145

摘要： A device includes a top layer having at least two opposing faces, and at least two epitaxially deposited layers, each of the at least two epitaxially deposited layers situated on a respective one of the at least two opposing faces, a combined thickness of the at least two epitaxially deposited layers tuning a gap between the at least two opposing faces.

摘要翻译： 一种器件包括具有至少两个相对面的顶层和至少两个外延沉积层，所述至少两个外延沉积层中的每一个位于所述至少两个相对面中的相应一个上，所述至少两个相对面的组合厚度至少为 两个外延沉积层调整所述至少两个相对面之间的间隙。

公开(公告)号：US07488614B2

公开(公告)日：2009-02-10

申请号：US11113782

申请日：2005-04-25

申请人： Susanne Arney ,  Arman Gasparyan ,  Sungho Jin ,  Omar D. López ,  Herbert R. Shea

发明人： Susanne Arney ,  Arman Gasparyan ,  Sungho Jin ,  Omar D. López ,  Herbert R. Shea

IPC分类号： H01L21/00

CPC分类号： H01G5/16 ,  B81B3/0086 ,  G02B26/0841 ,  H01G5/019

摘要： In one embodiment, an electrode is disposed on a surface of a first portion of the dielectric, with the first portion and the electrode forming an electrode region of the device. A charge-dissipation structure is then formed by implanting ions into the electrode region and a second portion of the dielectric located outside of the electrode region. In another embodiment, a charge-dissipation structure is formed by implanting ions into the dielectric of a movable part of an electro-mechanical system. Advantageously, ion implantation can be performed without masking, lithography, or elevated temperatures; the electrical properties of the resulting charge dissipation structure can be controlled relatively easily; and portions of the charge dissipation structure are protected from oxidation and/or corrosion by the dielectric material.

摘要翻译： 在一个实施例中，电极设置在电介质的第一部分的表面上，其中第一部分和电极形成器件的电极区域。 然后通过将离子注入电极区域和位于电极区域外部的电介质的第二部分来形成电荷耗散结构。 在另一个实施例中，通过将离子注入到机电系统的可移动部分的电介质中来形成电荷 - 耗散结构。 有利地，可以进行离子注入而不进行掩蔽，光刻或升高的温度; 可以相对容易地控制所得电荷耗散结构的电性能; 并且电荷耗散结构的部分被电介质材料保护免受氧化和/或腐蚀。

公开(公告)号：US20080314148A1

公开(公告)日：2008-12-25

申请号：US12214627

申请日：2008-06-20

申请人： Philippe Robert

发明人： Philippe Robert

IPC分类号： G01P15/12 ,  G01L1/22

CPC分类号： B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/0271 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5769 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  H03H9/02259

摘要： This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge.

摘要翻译： 本发明涉及一种谐振装置，其在使用体上的表面技术制成的压电平面中具有检测功能，该谐振装置包括通过至少一个嵌入部分连接到该体的谐振器，激励该谐振器的装置和包括至少一个 由压电材料制成的悬挂梁式应变计，其中每个应变计具有与谐振器的公共平面，并且在位于该至少一个嵌入部分外部的点处连接到该谐振器，以增加由该观测到的应力 应变计。

公开(公告)号：US20080239456A1

公开(公告)日：2008-10-02

申请号：US12059859

申请日：2008-03-31

申请人： Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO

发明人： Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

摘要： A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

摘要翻译： 微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。