公开(公告)号：US12151215B2

公开(公告)日：2024-11-26

申请号：US17770812

申请日：2020-10-23

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima

IPC: B01D71/02 ,  B01D67/00 ,  B23K26/38 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/168 ,  D01F9/127 ,  D04H1/4242 ,  D04H1/732 ,  G03F1/62

Abstract: An apparatus and method for transferring nanofiber structures (e.g., nanofiber films, nanofiber sheets, stacks of nanofiber grids, nanofiber films, nanofiber sheets, and combinations thereof) between various substrates are described. The techniques described use a soluble layer on a substrate that is subsequently dissolved, thus freeing the nanofiber structure from the substrate. This liquid phase techniques preserves the mechanical integrity and the purity of the nanofiber structures.

公开(公告)号：US12129175B2

公开(公告)日：2024-10-29

申请号：US18378531

申请日：2023-10-10

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima

IPC: C01B32/158 ,  B32B5/12 ,  B32B7/022 ,  C01B32/159 ,  B82Y30/00

CPC classification number: C01B32/158 ,  B32B5/12 ,  B32B7/022 ,  C01B32/159 ,  B32B2250/20 ,  B32B2262/106 ,  B32B2307/732 ,  B82Y30/00 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/06 ,  C01B2202/08 ,  C01B2202/34 ,  C01B2202/36 ,  C01P2004/03

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

公开(公告)号：US12085844B2

公开(公告)日：2024-09-10

申请号：US18231000

申请日：2023-08-07

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima ,  Takahiro Ueda

IPC: G03F1/22 ,  G03F1/64 ,  G03F7/00

CPC classification number: G03F1/22 ,  G03F1/64 ,  G03F7/70983

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US12070931B2

公开(公告)日：2024-08-27

申请号：US18299330

申请日：2023-04-12

Applicant: LINTEC CORPORATION ,  LINTEC OF AMERICA, INC.

Inventor： Masaharu Ito ,  Kanzan Inoue

IPC: B32B5/02 ,  B32B3/08 ,  B32B5/26 ,  B32B7/03 ,  B32B7/06 ,  B32B7/12 ,  B32B15/08 ,  B32B17/06 ,  B32B27/08 ,  B32B27/10 ,  B32B27/30 ,  B32B29/00 ,  H05B3/84

CPC classification number: B32B5/02 ,  B32B3/085 ,  B32B5/26 ,  B32B7/03 ,  B32B7/06 ,  B32B7/12 ,  B32B15/08 ,  B32B17/061 ,  B32B27/08 ,  B32B27/10 ,  B32B27/308 ,  B32B29/002 ,  H05B3/84 ,  B32B2255/10 ,  B32B2255/20 ,  B32B2262/106 ,  B32B2307/202 ,  B32B2307/412 ,  B32B2405/00 ,  B32B2419/00 ,  B32B2457/00 ,  B32B2605/006

Abstract: A sheet includes a pseudo-sheet structure including a plurality of linear-bodies with a volume resistivity R of from 1.0×10−7 Ωcm to 1.0×10−1 extending in one direction, aligned parallel to one another, and spaced apart from one another, satisfies the relation: L/D≥3, wherein D represents the diameter of the linear-bodies, and L represents the spacing between adjacent ones of the linear-bodies, and also satisfies the relation: (D2/R)×(1/L)≥0.003, wherein D represents the diameter of the linear-bodies, L represents the spacing between adjacent ones of the linear-bodies, R represents the volume resistivity of the linear-bodies, and D and L are in units of cm. A heating element and a heating device each include the sheet.

公开(公告)号：US20230341764A1

公开(公告)日：2023-10-26

申请号：US18026722

申请日：2021-09-16

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA ,  Takahiro UEDA

IPC: G03F1/64

CPC classification number: G03F1/64

Abstract: An apparatus and method are described herein for providing tension to carbon nanotube films. An apparatus and method are described herein for transferring carbon nanotube films from a first frame to a second frame. An example method includes deforming a frame by one of a thermal method or a physical method, allowing the frame to return to an original shape, and providing tension to the carbon nanotube film.

公开(公告)号：US11771546B2

公开(公告)日：2023-10-03

申请号：US16970572

申请日：2019-02-22

Applicant: Lintec of America, Inc.

Inventor： Marcio Dias Lima

IPC: A61F2/08 ,  C01B32/162 ,  B01J23/50 ,  D02G3/44 ,  B82Y5/00

CPC classification number: A61F2/08 ,  B01J23/50 ,  C01B32/162 ,  D02G3/448 ,  A61F2002/0894 ,  A61F2210/0057 ,  A61F2210/0066 ,  B82Y5/00

Abstract: A hydraulic muscle comprises a hollow carbon nanotube (CNT) yarn tube comprising: a plurality of CNT sheets twisted and wrapped in form of a hollow tube; and a binding agent infiltrated in the plurality of CNT sheets that binds the plurality of the CNT sheets together. A method of manufacturing a hydraulic muscle comprises: twisting and wrapping a plurality of carbon nanotube (CNT) sheets around a core fiber; infiltrating a binding agent in between the plurality of CNT sheets, wherein the binding agent binds the plurality of the CNT sheets together; and removing the core fiber from the plurality of CNT sheets.

公开(公告)号：US11703037B2

公开(公告)日：2023-07-18

申请号：US17902211

申请日：2022-09-02

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio Dias Lima ,  Yang Yang ,  Luis Plata ,  Marilu Guerrero ,  Franklin Le ,  Randy Allen

IPC: F03G7/06 ,  F16K31/44 ,  H02N11/00 ,  H01H85/04 ,  H10N30/857 ,  H01B1/18 ,  A61F2/50

CPC classification number: F03G7/06 ,  F16K31/44 ,  H01H85/04 ,  H02N11/006 ,  H10N30/857 ,  A61F2002/5066 ,  F03G7/065 ,  F03G7/0614 ,  H01B1/18

Abstract: A linear displacement device includes at least one artificial muscle actuator, an arm attached to the at least one artificial muscle, a body that is restricted to move along a line, and a stationary channel that restricts the motion of the body to linear motion. The at least one artificial muscle actuator causes the body to move along the line. The body is further restricted to move along a surface of the arm and the at least one artificial muscle actuator is a rotational muscle actuator. Additionally, the arm rotates in concert with the at least one artificial muscle actuator.

公开(公告)号：US11613468B2

公开(公告)日：2023-03-28

申请号：US17376844

申请日：2021-07-15

Applicant: Lintec of America, Inc.

Inventor： Chi Huynh

IPC: C01B32/00 ,  C01B32/168 ,  B82Y30/00 ,  B82Y40/00 ,  B32B5/12 ,  B32B37/26 ,  B32B37/00

Abstract: Techniques are described for transferring nanofiber forests using transfer films that either lack a conventional adhesive at the substrate-nanofiber forest interface or that include a diffusion barrier that prevents diffusion of adhesive molecules (or other polymer molecules mobile at ambient temperatures) into the nanofiber forest. These techniques can be applied to single layer nanofiber forests or stacks of multiple nanofiber forest. By selecting the bond strength between the nanofiber forest and the transfer films, the nanofibers can be aligned in a common direction that includes, but is not limited to, perpendicular to a substrate or transfer film.

公开(公告)号：US11486063B2

公开(公告)日：2022-11-01

申请号：US16103102

申请日：2018-08-14

Applicant: Lintec of America, Inc.

Inventor： Julia Bykova ,  Marcio D. Lima

IPC: D02G3/04 ,  D02G3/44 ,  C01B32/158 ,  D02G3/36 ,  D02G3/40

Abstract: An insulated nanofiber having a continuous nanofiber collection extending along a longitudinal axis with an outside surface and an inside portion is described. A first material infiltrates the inside portion, where the outside surface of the nanofiber collection is substantially free of the first material. An electrically-insulating second material coats the outside surface of the nanofiber collection. A method of making an insulated nanofiber collection is also disclosed.

公开(公告)号：US20220250009A1

公开(公告)日：2022-08-11

申请号：US17726819

申请日：2022-04-22

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. LIMA

IPC: B01D67/00 ,  B01D69/12 ,  B01D71/02

Abstract: An array of discrete nanofiber films that are physically separated from one another are described. Techniques for forming the nanofiber film array are also described. Techniques for forming these structures include placing a suspension of nanofibers and/or nanoparticles on a patterned substrate. A pressure differential is applied, drawing the solvent of the suspension through holes in a mask. The nanofibers collect on an impermeable layer on the mask in a pattern corresponding to the negative features (grooves, holes, trenches) of the mask as the solvent is flowed through the holes.