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公开(公告)号：US06414648B1
公开(公告)日：2002-07-02
申请号：US09611168
申请日：2000-07-06
IPC分类号： C23C1600
CPC分类号： H01J37/321
摘要： The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. A RF plasma source power supply is connected across each of the plural conductors. In another embodiment, the antenna is a solenoidal segmented parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric side-by-side helical solenoids, each helical solenoid being offset by a distance on the order of a conductor width of the plurality of conductors from the nearest other helical solenoids in a direction perpendicular to the axis of symmetry, whereby each helical solenoid has slightly different diameter.
摘要翻译： 在一个实施例中的本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室，腔室内的工件支撑基座，并且大致面对天花板，能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体，其具有来自对称轴线的至少几乎均匀的横向位移，每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。 在另一个实施例中，天线是覆盖天花板的螺线管分段并行导体线圈天线，并且包括缠绕在大致垂直于天花板的对称轴对称的第一多个导体，每个螺旋螺线管被偏置 在垂直于对称轴的方向上距离最近的其他螺旋螺线管的多根导体的导体宽度的数量级的距离，由此每个螺旋螺线管具有略微不同的直径。
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公开(公告)号：US06409933B1
公开(公告)日：2002-06-25
申请号：US09610800
申请日：2000-07-06
IPC分类号： H01L2100
CPC分类号： H01J37/321
摘要： The invention is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.
摘要翻译： 本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室，腔室内的工件支撑基座，并且大致面对天花板，能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体，其具有来自对称轴线的至少几乎均匀的横向位移，每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。
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公开(公告)号：US06348725B1
公开(公告)日：2002-02-19
申请号：US09247381
申请日：1999-02-10
申请人： David Cheung , Wai-Fan Yau , Robert P. Mandal , Shin-Puu Jeng , Kuo-Wei Liu , Yung-Cheng Lu , Michael Barnes , Ralf B. Willecke , Farhad Moghadam , Tetsuya Ishikawa , Tze Wing Poon
发明人： David Cheung , Wai-Fan Yau , Robert P. Mandal , Shin-Puu Jeng , Kuo-Wei Liu , Yung-Cheng Lu , Michael Barnes , Ralf B. Willecke , Farhad Moghadam , Tetsuya Ishikawa , Tze Wing Poon
IPC分类号： H01L2358
摘要： A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas at a constant RF power level from about 10 W to about 200 W or a pulsed RF power level from about 20 W to about 500 W. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organosilane film is produced by reaction of methylsilane, CH3SiH3, dimethylsilane, (CH3)2SiH2, or 1,1,3,3-tetramethyl-disiloxane, (CH3)2—SiH—O—SiH—(CH3)2, and nitrous oxide, N2O, at a constant RF power level from about 10 W to about 150 W, or a pulsed RF power level from about 20 W to about 250 W during 10% to 30% of the duty cycle.
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公开(公告)号：US06303523B1
公开(公告)日：2001-10-16
申请号：US09185555
申请日：1998-11-04
申请人： David Cheung , Wai-Fan Yau , Robert P. Mandal , Shin-Puu Jeng , Kuo-Wei Liu , Yung-Cheng Lu , Michael Barnes , Ralf B. Willecke , Farhad Moghadam , Tetsuya Ishikawa , Tze Wing Poon
发明人： David Cheung , Wai-Fan Yau , Robert P. Mandal , Shin-Puu Jeng , Kuo-Wei Liu , Yung-Cheng Lu , Michael Barnes , Ralf B. Willecke , Farhad Moghadam , Tetsuya Ishikawa , Tze Wing Poon
IPC分类号： C23C16505
摘要： A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas at a constant RF power level from about 10 W to about 200 W or a pulsed RF power level from about 20 W to about 500 W. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organosilane film is produced by reaction of methylsilane, CH3SiH3, or dimethylsilane, (CH3)2SiH2, and nitrous oxide, N2O, at a constant RF power level from about 10 W to about 150 W, or a pulsed RF power level from about 20 W to about 250 W during 10% to 30% of the duty cycle.
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公开(公告)号：US06170429B2
公开(公告)日：2001-01-09
申请号：US09163722
申请日：1998-09-30
IPC分类号： C23C1600
CPC分类号： H01J37/32495 , Y10S156/916
摘要： A chamber liner for use in a semiconductor process chamber and a semiconductor process chamber containing the chamber liner are disclosed. The process chamber includes a housing having an inner surface defining a chamber in which a vacuum is drawn during processing of a semiconductor wafer. The chamber liner has a plasma confinement shield with a plurality of apertures. An outer sidewall extends upwardly from the plasma confinement shield. An outer flange extends outwardly from the outer sidewall such that the outer flange extends beyond the chamber and into a space at atmospheric pressure. The chamber liner preferably further includes an inner sidewall that extends upwardly from the plasma confinement shield. The plasma confinement shield, the inner and outer sidewalls, and the outer flange are preferably integral with one another.
摘要翻译： 公开了一种用于半导体处理室的腔室衬垫和包含室内衬的半导体处理室。 处理室包括具有内表面的壳体，该内表面限定了在半导体晶片的处理期间抽出真空的腔室。 室衬里具有具有多个孔的等离子体限制屏蔽。 外侧壁从等离子体限制屏蔽向上延伸。 外凸缘从外侧壁向外延伸，使得外凸缘延伸超出室并进入大气压力的空间。 室衬里优选还包括从等离子体限制屏蔽向上延伸的内侧壁。 等离子体限制屏蔽体，内侧壁和外侧壁以及外部凸缘优选彼此成为一体。
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86.发明授权
公开(公告)号：US5711574A
公开(公告)日：1998-01-27
申请号：US566566
申请日：1995-11-28
申请人： F. Michael Barnes
发明人： F. Michael Barnes
IPC分类号： B60N2/00 , B60N2/28 , B60R21/00 , B60R21/01 , B60R21/015 , B60R21/207 , B60R21/268 , B60R22/14 , B60R22/48 , B60N2/42
CPC分类号： B60R21/01556 , B60N2/002 , B60N2/2839 , B60N2/286 , B60R21/01526 , B60R21/0173 , B60R21/207 , B60R21/2072 , B60R21/268 , B60R22/14 , B60R22/48 , B60R2021/0006 , B60R2021/2074 , B60R2022/4816
摘要： A child's seat for use in motor vehicles, including an air bag and activation circuitry. Sensors on the seat emit a first signal confirming that the air bag is armed and that the seat belt is properly connected. A second warning signal is produced when the child's seat air bag is not properly functioning or if the child's seat is not properly held in place by the vehicle's seat belt system. Also disclosed is an air bag inflator including a pressure tank, a frangible membrane for sealing gas under pressure within the tank, and a pyrotechnic squib for rupturing the frangible membrane to deploy the air bag.
摘要翻译： 用于机动车辆的儿童座椅，包括气囊和启动电路。 座椅上的传感器发出第一个信号，确认安全气囊已布防，并且安全带正确连接。 当儿童座椅安全气囊不正常工作或儿童座椅未被车辆安全带系统正确固定时，产生第二个警告信号。 还公开了一种气囊充气机，其包括压力罐，用于密封罐内的压力下的气体的易碎膜，以及用于破裂易碎膜以展开气囊的烟火爆管。
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公开(公告)号：US09117133B2
公开(公告)日：2015-08-25
申请号：US12370557
申请日：2009-02-12
申请人： Michael Barnes , Zhihong Pan , Sizhong Zhang
发明人： Michael Barnes , Zhihong Pan , Sizhong Zhang
CPC分类号： H04N5/332 , A61B5/0059 , A61B5/0064 , A61B5/0075 , A61B5/0077 , A61B5/417 , A61B5/442 , A61B5/444 , A61B5/445 , A61B5/7246 , A61B5/726 , A61B5/7267 , A61B5/742 , G06K9/2018 , G06K2209/05 , G06T7/0012 , G06T2207/30088 , G06T2207/30096 , H04N5/2256 , H04N5/2351 , H04N5/238
摘要： An apparatus for analyzing a subject including a hyperspectral image module is provided. It is used to identify a suspect region of a subject by using a hyperspectral sensor (for obtaining a hyperspectral image of the subject), a control computer including a processor unit (PU) and a computer readable memory (CRM) (for controlling and is in electronic communication with the sensor), a control software module including instructions stored in the CRM and executed by the PU (for controlling said at least one operating parameter of the sensor), a spectral calibrator module including instructions stored in the CRM and executed by the PU (for applying a wavelength dependent spectral calibration standard constructed for the sensor to a hyperspectral image), and a light source for illuminating the subject. An optional contact probe module is used to collect a signal of the suspect region for medical diagnosis.
摘要翻译： 提供了一种用于分析包括高光谱图像模块的对象的装置。 它用于通过使用高光谱传感器（用于获得对象的高光谱图像）来识别受试者的可疑区域，包括处理器单元（PU）和计算机可读存储器（CRM）的控制计算机（用于控制并且是 与传感器电子通信），包括存储在CRM中并由PU执行的指令（用于控制传感器的所述至少一个操作参数）的控制软件模块，包括存储在CRM中的指令并由 PU（用于将针对传感器构建的波长相关光谱校准标准应用于高光谱图像）以及用于照亮被摄体的光源。 可选的接触探针模块用于收集可疑区域的信号用于医疗诊断。
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公开(公告)号：US08699382B2
公开(公告)日：2014-04-15
申请号：US13019157
申请日：2011-02-01
CPC分类号： H04L45/123 , H04L41/12 , H04L45/125 , H04W40/08 , H04W40/246 , Y02D70/122 , Y02D70/142 , Y02D70/144 , Y02D70/146 , Y02D70/22 , Y02D70/324
摘要： One embodiment identifies all one-hop neighbor nodes and two-hop neighbor nodes of a node; determines an active set of one-hop neighbor nodes for the node, comprising: includes in the active set each one-hop neighbor node that is either an edge node or connected with at least one two-hop neighbor node with which no other one-hop neighbor nodes are connected; and if the active set is not yet complete, then: determine all combinations of one-hop neighbor nodes that are not already in the active set; and tests each combination in order of each combination's total-energy value to determine whether a specific combination is able to complete the active set; if no combination is able to complete the active set, then including all one-hop neighbor nodes in the active set; and communicates a message to each one-hop neighbor node in the active set indicating that it is in the active set.
摘要翻译： 一个实施例标识节点的所有一跳邻居节点和两跳邻居节点; 确定所述节点的一跳邻居节点的活动集合，包括：在所述活动集合中包括作为边缘节点或与至少一个两跳相邻节点连接的每个一跳邻居节点， 跳邻居节点连接; 并且如果活动集尚未完成，则：确定尚未在活动集中的一跳邻居节点的所有组合; 并按照每个组合的总能量值的顺序测试每个组合，以确定特定组合是否能够完成活动集合; 如果没有组合能够完成活动集，则包括活动集中的所有一跳邻居节点; 并将消息传送到活动集中的每个一跳邻居节点，指示其在活动集中。
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89.发明授权Apparatus and method to maintain write operation atomicity where a data transfer operation crosses a data storage medium track boundary 有权在数据传输操作跨越数据存储介质磁道边界的情况下，维持写操作原子性的装置和方法公开(公告)号：US08438332B2
公开(公告)日：2013-05-07
申请号：US12489354
申请日：2009-06-22
申请人： Kevin John Ash , Jeffrey Michael Barnes , Michael Thomas Benhase , Shachar Fienblit , Matthew Joseph Kalos , Steven Edward Klein , Gail Andrea Spear
发明人： Kevin John Ash , Jeffrey Michael Barnes , Michael Thomas Benhase , Shachar Fienblit , Matthew Joseph Kalos , Steven Edward Klein , Gail Andrea Spear
IPC分类号： G06F12/00
CPC分类号： G06F11/1438 , G06F2201/82
摘要： A method to maintain write operation atomicity where a write operation crosses a data storage medium track boundary. The method supplies a storage controller comprising a host adapter, a processor, and a NVS. The host adapter receives from a host computer a write request and data. The method determines if the write request will cross a data storage medium track boundary. If the write request will cross a data storage medium track boundary, the method indicates to the host adapter that the write request comprises a two-track transfer, and writes the data to the NVS as the data is received. If the host computer fails prior to providing all the data to the storage controller, the method discards the data written to the NVS to ensure write operation atomicity.
摘要翻译： 一种在写操作与数据存储介质磁道边界交叉的情况下维持写操作原子性的方法。 该方法提供包括主机适配器，处理器和NVS的存储控制器。 主机适配器从主机接收写入请求和数据。 该方法确定写入请求是否将跨越数据存储介质轨道边界。 如果写请求将跨越数据存储介质磁道边界，则该方法向主机适配器指示写请求包括双磁道传输，并且在接收到数据时将数据写入NVS。 如果主计算机在将所有数据提供给存储控制器之前失败，该方法将丢弃写入NVS的数据，以确保写操作的原子性。
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公开(公告)号：US08419387B1
公开(公告)日：2013-04-16
申请号：US12491985
申请日：2009-06-25
申请人： Randy Karbs , Michael Barnes , Alan Howell , Arcady Royzen
发明人： Randy Karbs , Michael Barnes , Alan Howell , Arcady Royzen
摘要： A submersible pumping system includes a pump assembly, a motor and a seal section positioned between the pump assembly and the motor. The seal section includes a clean fluid circulation system, a contaminated fluid circulation system and at least one bag seal assembly. The bag seal assembly includes an upper mounting block, a lower mounting block and a bag seal extending over the upper mounting block and lower mounting block and providing a path for the clean fluid circulation system. The bag seal assembly further includes a mounting plate connected to the upper mounting block that limits the axial travel of the bag seal on the upper mounting block. The bag seal assembly optionally includes a breather tube connected to the mounting plate and extending along the exterior of the bag seal.
摘要翻译： 潜水泵系统包括泵组件，马达和位于泵组件和马达之间的密封段。 密封部分包括清洁的流体循环系统，污染的流体循环系统和至少一个袋密封组件。 袋密封组件包括上安装块，下安装块和在上安装块和下安装块上延伸的袋密封件，并提供用于清洁流体循环系统的路径。 袋密封组件还包括连接到上安装块的安装板，其限制袋密封件在上安装块上的轴向行程。 袋密封组件可选地包括连接到安装板并沿着袋密封件的外部延伸的通气管。
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