摘要:
A four transistor layout can include an isolation region that defines an active region, the active region extending along first and second different directions. A common source region of the four transistors extends from a center of the active region along both the first and second directions to define four quadrants of the active region that are outside the common source region. Four drain regions are provided, a respective one of which is in a respective one of the four quadrants and spaced apart from the common source region. Finally, four gate electrodes are provided, a respective one of which is in a respective one of the four quadrants between the common source region and a respective one of the four drain regions. A respective gate electrode includes a vertex and first and second extending portions, the first extending portions extending from the vertex along the first direction and the second extending portions extending from the vertex along the second direction.
摘要:
An asymmetrically grounded susceptor used in a plasma processing chamber for chemical vapor deposition onto large rectangular panels supported on and grounded by the susceptor. A plurality of grounding straps are connected between the periphery of the susceptor to the grounded vacuum chamber to shorten the grounding paths for RF electrons. Flexible straps allow the susceptor to vertically move. The straps provide a conductance to ground which is asymmetric around the periphery. The straps may be evenly spaced but have different thicknesses or different shapes or be removed from available grounding point and hence provide different RF conductances. The asymmetry is selected to improve the deposition uniformity and other qualities of the PECVD deposited film.
摘要:
Disclosed herein is the resonant inverter of a radio frequency (RF) generator for radiofrequency ablation (RFA). The resonant inverter of RF generator for RFA amplifies to high power an oscillation frequency output from an oscillator and provides the amplified oscillation frequency to an electrode. The resonant inverter processes the oscillation frequency output from the oscillator as a high-power sine wave having a frequency of 480 kHz and a Root Mean Square (RMS) power of 30 to 200 watts, and transfers the high-power sine wave to the electrode.
摘要:
A fuse in a semiconductor device includes: first and second fuse patterns, each being in the shape of a bar, separated from each other in a blowing region; first and second contact plugs respectively coupled to the first and the second fuse patterns; and a third fuse pattern coupled to the first and the second fuse patterns through the first and the second contact plugs.
摘要:
The present invention generally includes a plasma enhanced chemical vapor deposition (PECVD) processing chamber having an RF power source coupled to the backing plate at a location separate from the gas source. By feeding the gas into the processing chamber at a location separate from the RF power, parasitic plasma formation in the gas tubes leading to the processing chamber may be reduced. The gas may be fed to the chamber at a plurality of locations. At each location, the gas may be fed to the processing chamber from the gas source by passing through a remote plasma source as well as an RF choke or RF resistor.
摘要:
Methods and apparatus for improving the substrate-to-substrate uniformity of silicon-containing films deposited by vapor deposition of precursors vaporized from a liquid source on substrates in a chamber are provided. The methods include exposing a chamber to a processing step at a predetermined time that is after one substrate is processed in the chamber and is before the next substrate is processed in the chamber. In one aspect, the processing step includes introducing a flow of a silicon-containing precursor into the chamber for a period of time. In another aspect, the processing step includes exposing the chamber to a gas in the presence or absence of a plasma for a period of time.
摘要:
A dielectric composition that can be fired at a temperature of below 900° C. The dielectric composition has a dielectric constant of 25–35 and a quality factor (Qxf) of 6,000–20,000 GHz. The composition comprises 3–16 wt % of K2O—Na2O—Li2O—B2O3—SiO2 system glass frit and 84–97 wt % of BaO—TiO2 system dielectric ceramics. The composition can be effectively applied to construct a part of a ceramic multi-layer packaging as a resonator form such as a filter or an antenna, etc.
摘要:
A system and method for performing forward channel scheduling for an HDR system includes collecting status information of connected terminals, calculating a predetermined weight (α(n)), calculating priority values of respective terminals based on the collected status information and the weight (α(n)), and selecting a terminal having the highest priority value and providing the selected terminal with the service. By considering the number of connected mobile terminals, disadvantages of other proposed scheduling algorithms are overcome. Also, the entire throughput of the HDR system is improved by maintaining Quality of Service (QoS) of the mobile terminals that require the real-time service.
摘要:
An apparatus to remove periodic disturbances in a recording medium having large eccentricity and deflection mass includes an actuator to change a position of a pickup in response to a combination of first and second compensation signals, an error detector to detect an error between positions actuator and the recording medium, a first compensator to receive the detected error and to output the first compensation signal that the actuator uses to actuate the pickup along the recording medium in upper and lower directions, and right and left directions; and a second compensator to output the second compensation signal from which the disturbance has been removed, to combine the compensated error and previous first and second compensation signals, and to filter the combined result at a predetermined bandwidth.