-
公开(公告)号：US5920142A
公开(公告)日：1999-07-06
申请号：US813279
申请日：1997-03-10
申请人： Keiji Onishi , Hideki Iwaki , Shun-ichi Seki , Yutaka Taguchi , Tsukasa Shiraishi , Yoshihiro Bessho , Osamu Kawasaki , Kazuo Eda
发明人： Keiji Onishi , Hideki Iwaki , Shun-ichi Seki , Yutaka Taguchi , Tsukasa Shiraishi , Yoshihiro Bessho , Osamu Kawasaki , Kazuo Eda
CPC分类号： H03H9/0509 , H03H3/08 , H03H9/0585 , H03H9/059 , H03H9/1042 , H03H9/1071 , H03H9/1085 , H03H9/1092 , H01L2224/1134 , H01L2224/131 , H01L2224/13124 , H01L2224/13144 , H01L2224/45144 , H01L2924/00013 , H01L2924/09701 , H01L2924/16152 , Y10T29/42 , Y10T29/4913 , Y10T29/49146
摘要： The present invention relates to an electronic part used for mobile communications apparatuses and the like, and more particularly to an electronic part, such as an acoustic surface-wave device, a piezoelectric ceramic device or the like, which requires an oscillation space near the surface of the functional device chip thereof, and a method of production thereof. With this method, a space retainer for forming a sealed space at the functional portion of the chip can be hermetically sealed and have high moisture resistance, and the process of forming the space retainer can be carried out easily.The electronic part of the present invention comprises a functional device chip, a space retainer for forming a sealed space at the functional portion of the chip, a circuit substrate to which the chip is secured, electrode interconnection portions for establishing electric connection between the chip and the circuit substrate, and a sealing resin for covering and sealing at least the space retainer, wherein the space retainer comprises a support layer made of a synthetic resin film, provided with an opening enclosing the functional portion and joined onto the main surface, and a cover formed and joined onto the support layer so as to cover the functional portion and form a sealed space between the cover and the functional portion.
-
公开(公告)号：US5892418A
公开(公告)日：1999-04-06
申请号：US898769
申请日：1997-07-23
申请人： Keiji Onishi , Kazuo Eda , Yutaka Taguchi , Shunichi Seki
发明人： Keiji Onishi , Kazuo Eda , Yutaka Taguchi , Shunichi Seki
CPC分类号： H03H9/6436 , H03H9/0038 , H03H9/0042 , H03H9/1071 , H03H9/6433
摘要： The present invention provides surface acoustic wave devices which do not require a balanced-to-unbalanced transformer circuit regardless of the type of the peripheral circuits of the balanced type surface acoustic wave filter, i.e. a balanced type device or an unbalanced type. A transmitting interdigital transducer and a receiving interdigital transducer are formed on a substrate comprising 41.degree. Y cut-X propagation lithium niobate. A balanced type surface acoustic wave filter is formed on a substrate comprising 36.degree. Y cut-X propagation lithium tantalate. The balanced type surface acoustic wave filter comprises two series-arm surface acoustic wave resonators and two crossed-arm surface acoustic wave resonators connected in a lattice. The substrate on which the transmitting interdigital transducer and the receiving interdigital transducer are formed and the substrate on which the balanced type surface acoustic wave filter is formed are located in a ceramic package. One of the input terminals of the transmitting interdigital transducer is grounded. The output terminals of the receiving interdigital transducer are connected to the input terminals of the balanced type surface acoustic wave filter.
摘要翻译： 本发明提供了不需要平衡型不平衡变压器电路的表面声波装置，而不管平衡型表面声波滤波器的外围电路的类型，即平衡型装置或不平衡型。 在包含41°Y切割X传播铌酸锂的基板上形成发射叉指式换能器和接收叉指式换能器。 在包含36°Y切割X传播的钽酸锂的基板上形成平衡型表面声波滤波器。 平衡型表面声波滤波器包括两个串联臂表面声波谐振器和两个以格子连接的交叉臂表面声波谐振器。 其上形成有发送叉指式换能器和接收叉指式换能器的基板和形成有平衡型表面声波滤波器的基板位于陶瓷封装中。 发射叉指式换能器的输入端之一接地。 接收叉指式换能器的输出端连接到平衡型声表面波滤波器的输入端。
-
公开(公告)号：US5459368A
公开(公告)日：1995-10-17
申请号：US278905
申请日：1994-07-22
申请人： Keiji Onishi , Shunichi Seki , Yutaka Taguchi , Kazuo Eda
发明人： Keiji Onishi , Shunichi Seki , Yutaka Taguchi , Kazuo Eda
CPC分类号： H03H9/1071 , H03H9/0542 , H03H9/0557 , H03H9/059 , H03H9/1085 , H01L2224/16225 , H01L2224/16235 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2224/73253 , H01L2924/01046 , H01L2924/01079 , H01L2924/09701 , H01L2924/15192 , H01L2924/16152 , H01L2924/16195 , H01L2924/19105 , H01L2924/3011 , H01L2924/3025
摘要： This invention provides a surface acoustic wave device mounted module which is miniature, light, and highly reliable. The surface acoustic wave device mounted module also has excellent frequency characteristics. The surface acoustic wave device mounted module includes a multilayer substrate which has at least one layer of a shield pattern, input-output electrodes, grounding electrodes, through holes used for connecting electrodes, and a surface acoustic wave element. The surface acoustic wave element has metallic bumps, which are transfer-coated with a conductive resin, on electrode pads and an insulating resin around the surface acoustic wave element. The electrode pads are input-output terminals and grounding terminals formed on the surface acoustic wave element. Continuities between the input-output terminals and the input-output electrodes, and between the grounding terminals and the grounding electrodes are established by the through holes. An electrode pattern is formed on the surface of the multilayer substrate facing and surrounding the surface acoustic wave element. A metallic lid is attached to the electrode pattern by a solder or a conductive resin so that the surface acoustic wave element is sealed in an airtight condition. The electrode pattern is connected to the grounding electrodes by the through holes.
摘要翻译： 本发明提供一种微型，轻型，高可靠性的表面声波装置安装模块。 表面声波装置安装模块也具有优异的频率特性。 表面声波装置安装模块包括具有至少一层屏蔽图案，输入输出电极，接地电极，用于连接电极的通孔和表面声波元件的多层基板。 表面声波元件具有金属凸块，其在电极焊盘上传导涂覆有导电树脂，并在表面声波元件周围具有绝缘树脂。 电极焊盘是形成在声表面波元件上的输入输出端子和接地端子。 输入输出端子与输入输出电极之间以及接地端子与接地电极之间的连续性由通孔构成。 在面对并围绕声表面波元件的多层基板的表面上形成电极图案。 通过焊料或导电树脂将金属盖附接到电极图案，使得表面声波元件在气密状态下被密封。 电极图案通过通孔与接地电极连接。
-
公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译： 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。
-
公开(公告)号：US08525605B2
公开(公告)日：2013-09-03
申请号：US13322263
申请日：2011-03-03
IPC分类号： H03B5/30
摘要： A MEMS oscillator including: an oscillator unit being capable of outputting an output from an amplifier as an original oscillator signal that includes a feedback type oscillator circuit including a MEMS resonator and an amplifier, and an automatic gain controller receiving the output from the amplifier and controlling a gain of the amplifier based on a level of the output to maintain a level of the output from the amplifier constant; and a corrector unit that receives the original oscillator signal, that generates from the original oscillator signal a signal of a predetermined set frequency, and that outputs the generated signal of the predetermined set frequency as an output signal. The corrector unit receives, separately from the original oscillator signal, an information signal that includes a signal having a correspondence relationship between a gain at a resonance frequency of the MEMS resonator from the oscillator unit, corrects a frequency of the original oscillator signal based on the information signal to generate the signal of the predetermined set frequency, and outputs the generated signal of the predetermined set frequency as the output signal.
摘要翻译： 一种MEMS振荡器，包括：振荡器单元，其能够输出来自放大器的输出作为原始振荡器信号，其包括包括MEMS谐振器和放大器的反馈型振荡器电路，以及接收来自放大器的输出的自动增益控制器 基于输出电平的放大器的增益来保持放大器的输出电平恒定; 以及校正单元，其接收原始振荡器信号，其从原始振荡器信号产生预定设定频率的信号，并将预定设定频率的所生成的信号作为输出信号输出。 校正单元与原始振荡器信号分离地接收包括具有来自振荡器单元的MEMS谐振器的谐振频率处的增益之间的对应关系的信号的信息信号，基于该振荡器信号校正原始振荡器信号的频率 信号信号以产生预定设定频率的信号，并输出预定设定频率的产生信号作为输出信号。
-
公开(公告)号：US08516905B2
公开(公告)日：2013-08-27
申请号：US13583379
申请日：2012-04-02
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译： 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力 基于由检测电路检测到的AC信号的传输特性。
-
公开(公告)号：US20120182077A1
公开(公告)日：2012-07-19
申请号：US13322263
申请日：2011-03-03
IPC分类号： H03L7/00
摘要： A MEMS oscillator including: an oscillator unit being capable of outputting an output from an amplifier as an original oscillator signal that includes a feedback type oscillator circuit including a MEMS resonator and an amplifier, and an automatic gain controller receiving the output from the amplifier and controlling a gain of the amplifier based on a level of the output to maintain a level of the output from the amplifier constant; and a corrector unit that receives the original oscillator signal, that generates from the original oscillator signal a signal of a predetermined set frequency, and that outputs the generated signal of the predetermined set frequency as an output signal. The corrector unit receives, separately from the original oscillator signal, an information signal that includes a signal having a correspondence relationship between a gain at a resonance frequency of the MEMS resonator from the oscillator unit, corrects a frequency of the original oscillator signal based on the information signal to generate the signal of the predetermined set frequency, and outputs the generated signal of the predetermined set frequency as the output signal.
摘要翻译： 一种MEMS振荡器，包括：振荡器单元，其能够输出来自放大器的输出作为原始振荡器信号，其包括包括MEMS谐振器和放大器的反馈型振荡器电路，以及接收来自放大器的输出的自动增益控制器 基于输出电平的放大器的增益来保持放大器的输出电平恒定; 以及校正单元，其接收原始振荡器信号，其从原始振荡器信号产生预定设定频率的信号，并将预定设定频率的所生成的信号作为输出信号输出。 校正单元与原始振荡器信号分离地接收包括具有来自振荡器单元的MEMS谐振器的谐振频率处的增益之间的对应关系的信号的信息信号，基于该振荡器信号校正原始振荡器信号的频率 信号信号以产生预定设定频率的信号，并输出预定设定频率的产生信号作为输出信号。
-
公开(公告)号：US20120091547A1
公开(公告)日：2012-04-19
申请号：US13377898
申请日：2010-06-30
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译： 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。
-
89.发明授权公开(公告)号：US07701311B2
公开(公告)日：2010-04-20
申请号：US12185342
申请日：2008-08-04
CPC分类号： H03H9/706 , H03H9/0038 , H03H9/0042 , H03H9/0576 , H03H9/14588 , H03H9/72 , H03H9/725
摘要： One of plurality of transmission terminals connected to a transmission filter and a receiving terminal connected to a receiving filter is a balanced type terminal, and another is an unbalanced type terminal. The transmission filter and the receiving filter includes surface acoustic wave resonators or film bulk acoustic resonators. The balanced type terminal is connected to a longitudinal mode coupled surface acoustic wave filter.
摘要翻译： 连接到发送滤波器的多个发送终端中的一个和连接到接收滤波器的接收终端是平衡型终端，另一个是不平衡型终端。 传输滤波器和接收滤波器包括表面声波谐振器或薄膜体声共振器。 平衡型端子连接到纵模耦合表面声波滤波器。
-
90.发明授权公开(公告)号：US07446629B2
公开(公告)日：2008-11-04
申请号：US11195820
申请日：2005-08-03
CPC分类号： H03H9/706 , H03H9/0038 , H03H9/0042 , H03H9/0576 , H03H9/14588 , H03H9/72 , H03H9/725
摘要： One of plurality of transmission terminals connected to a transmission filter and a receiving terminal connected to a receiving filter is a balanced type terminal, and another is an unbalanced type terminal. The transmission filter and the receiving filter includes surface acoustic wave resonators or film bulk acoustic resonators. The balanced type terminal is connected to a longitudinal mode coupled surface acoustic wave filter.
摘要翻译： 连接到发送滤波器的多个发送终端中的一个和连接到接收滤波器的接收终端是平衡型终端，另一个是不平衡型终端。 传输滤波器和接收滤波器包括表面声波谐振器或薄膜体声共振器。 平衡型端子连接到纵模耦合表面声波滤波器。
-
-
-
-
-
-
-
-
-
搜索结果
136 条记录 (耗时 0.026 秒)
