公开(公告)号：US20070019856A1

公开(公告)日：2007-01-25

申请号：US11476342

申请日：2006-06-28

申请人： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

发明人： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC分类号： G06K9/00

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

摘要： Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

公开(公告)号：US20060244958A1

公开(公告)日：2006-11-02

申请号：US11476358

申请日：2006-06-28

申请人： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

发明人： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

摘要： Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

摘要翻译： 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 连续地比像素停留时间短，从而在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US20060193507A1

公开(公告)日：2006-08-31

申请号：US11069712

申请日：2005-02-28

申请人： Erez Sali ,  Tomer Yanir ,  Mark Wagner ,  Noam Dotan ,  Yuval Dorfan ,  Ran Zaslavsky

发明人： Erez Sali ,  Tomer Yanir ,  Mark Wagner ,  Noam Dotan ,  Yuval Dorfan ,  Ran Zaslavsky

IPC分类号： G06K9/00

CPC分类号： G01N21/95607 ,  G01N21/9501 ,  G06T7/001

摘要： A method for inspecting a wafer including a multiplicity of dies, the method including dividing an image of at least a portion of the wafer into a plurality of sub-images each representing a sub-portion of the wafer and selecting at least one defect candidate within each sub-image by comparing each sub-image to a corresponding sub-image of a reference including a representation, which is assumed to be faultless, of the portion of the wafer.

摘要翻译： 一种用于检查包括多个管芯的晶片的方法，所述方法包括将晶片的至少一部分的图像划分成多个子图像，每个子图像表示晶片的子部分，并且选择至少一个缺陷候选物 每个子图像通过将每个子图像与包括晶片的该部分的被认为是无故障的表示的参考的对应子图像进行比较。

公开(公告)号：US20060190963A1

公开(公告)日：2006-08-24

申请号：US11404532

申请日：2006-04-14

申请人： Mark Wagner ,  Paul Roy ,  Aaron DeYonker

发明人： Mark Wagner ,  Paul Roy ,  Aaron DeYonker

IPC分类号： H04N7/173 ,  G06F3/00 ,  G06F13/00 ,  H04N5/445

CPC分类号： H04N21/4227 ,  H04N5/782 ,  H04N7/16 ,  H04N7/162 ,  H04N7/173 ,  H04N21/26283 ,  H04N21/4147 ,  H04N21/4263 ,  H04N21/4334 ,  H04N21/443 ,  H04N21/4532 ,  H04N21/454 ,  H04N21/4622 ,  H04N21/47214 ,  H04N21/4753 ,  H04N21/4782 ,  H04N21/482 ,  H04N21/4821 ,  H04N21/6332 ,  H04N21/654 ,  H04N21/6543 ,  H04N21/84

摘要： Systems and methods for remotely scheduling tasks that are transmitted to a set top box and implemented on the set top box. A task service includes a website that provides program guide data to users. From the program guide data, a user selects a task. The website generates a notification that includes the task and certain identifiers, including a set top box identifier and a sequence number. The notification is sent to a notification service, that repeatedly sends the notification to a broadcast service. The broadcast service ensures that the notification is transmitted to the set top box. The set top box detects the notification from the set top box identifier and implements the task on the set top box unless the task: has been previously handled.

摘要翻译： 用于远程调度发送到机顶盒并在机顶盒上实现的任务的系统和方法。 任务服务包括向用户提供节目指南数据的网站。 从节目指南数据中，用户选择任务。 网站生成包含任务和某些标识符的通知，包括机顶盒标识符和序列号。 该通知被发送到通知服务，该通知服务重复地将通知发送到广播服务。 广播服务确保通知被传送到机顶盒。 机顶盒检测机顶盒标识符的通知，并在机顶盒上实现任务，除非以前已经处理过任务：

公开(公告)号：US20060035014A1

公开(公告)日：2006-02-16

申请号：US11261299

申请日：2005-10-28

申请人： James DeYoung ,  James McClain ,  Stephen Gross ,  Doug Taylor ,  Mark Wagner ,  David Brainard

发明人： James DeYoung ,  James McClain ,  Stephen Gross ,  Doug Taylor ,  Mark Wagner ,  David Brainard

IPC分类号： B05D5/12

CPC分类号： H01L21/283 ,  B05D1/18 ,  B05D2401/90 ,  H01L21/28556 ,  H01L21/288 ,  H01L21/67028 ,  H01L28/65

摘要： A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.

公开(公告)号：US06987873B1

公开(公告)日：2006-01-17

申请号：US09111454

申请日：1998-07-08

申请人： Ariel Ben-Porath ,  Mark Wagner

发明人： Ariel Ben-Porath ,  Mark Wagner

IPC分类号： G06K9/00

CPC分类号： H01L22/20 ,  G01N21/88 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and apparatus is provided for automatically classifying a defect on the surface of a semiconductor wafer into one of, e.g., seven core classes: a missing pattern on the surface, an extra pattern on the surface, a deformed pattern on the surface, a particle on the surface, a particle embedded in the surface, a particle and a deformed pattern on the surface, or craters and microscratches on the surface. The defect may also be further classified into a subclass of arbitrarily defined defects defined by the user or preprogrammed in the apparatus. Embodiments include using a scanning electron microscope (SEM) capable of collecting electrons emitted from a plurality of angular sectors to obtain an image of the defect and a reference image containing topographical and location information, then analyzing this information to classify the defect. As the defects are classified, counts are maintained of the number of occurrences of each type of defect, and an alarm is raised if the defect count in a particular class exceeds a predetermined level. Thus, defects are accurately and reliably classified and monitored to enable early detection and cure of processing problems.

摘要翻译： 提供了一种方法和装置，用于将半导体晶片表面上的缺陷自动分类为例如七个核心类别：表面上的缺失图案，表面上的额外图案，表面上的变形图案， 表面上的颗粒，表面上的颗粒，表面上的颗粒和变形图案，或表面上的凹坑和微细纹。 缺陷还可以进一步分类为由用户定义的或在设备中预编程的任意定义的缺陷的子类。 实施例包括使用能够收集从多个角扇区发射的电子的扫描电子显微镜（SEM）以获得缺陷的图像和包含地形和位置信息的参考图像，然后分析该信息以分类缺陷。 当缺陷被分类时，维持每种类型的缺陷的发生次数，并且如果特定类别的缺陷计数超过预定水平，则报警提高。 因此，准确可靠地对缺陷进行分类和监视，以便能够及早发现和解决加工问题。

公开(公告)号：US06614804B1

公开(公告)日：2003-09-02

申请号：US09273697

申请日：1999-03-22

申请人： Andrew T. McFadden ,  Mark Wagner ,  Wei Huang ,  Dean J. Blackketter ,  Michael A. Killianey ,  Alan G. Bishop

发明人： Andrew T. McFadden ,  Mark Wagner ,  Wei Huang ,  Dean J. Blackketter ,  Michael A. Killianey ,  Alan G. Bishop

IPC分类号： H04J316

CPC分类号： H04L67/06 ,  G06F8/65 ,  H04B7/18523 ,  H04H20/40 ,  H04H20/42 ,  H04H20/91 ,  H04H60/06 ,  H04H60/25 ,  H04L29/06027 ,  H04L65/4076 ,  H04L67/34 ,  H04L67/42 ,  H04N21/2385 ,  H04N21/26291 ,  H04N21/42661 ,  H04N21/433 ,  H04N21/8166 ,  H04N21/818

摘要： The invention involves transmission download of data to plural, mass storage medium-based remote users of content or software upgrades or multiple versions. Optionally provided are pre-download scheduling of one or more future download sessions and post-download remote scripted software execution by the remote clients. For purposes of more efficient use of the transmission link, low-volume scheduling information or content are transmitted within designated narrow-bandwidth sub-channels or trickle streams allocated within the broad bandwidth of the transmission channel and such allocation may be dynamic to vary the allocation based upon relative high-volume, high-speed and low-volume, low-speed demands. The invention is implemented in software residing primarily in the server computer connected with the transmission provider. The software schedules allotted bandwidth within the broadcast band of the transmission link and formats high-volume data for transmission within sub-allocation channels logically devised therein. Client software at the plural distributed home entertainment device sites reserves capacity on disk and receives such transmission data for storage thereon, optionally executing a downloaded execution script that may reconfigure the client software so that new options and features are available at the client site for operational enhancements as well as video program or content enhancements. Client software at the plural distributed home entertainment device sites reserves capacity on disk and receives such broadcast data for storage thereon, optionally executing a downloaded execution script that may reconfigure the client software.

摘要翻译： 本发明涉及将数据传输到多个，大容量存储介质的内容或软件升级或多个版本的远程用户。 可选地，提供一个或多个未来下载会话的预下载调度和由远程客户端执行后续下载远程脚本化软件。 为了更有效地使用传输链路，在指定的窄带宽子信道或在传输信道的宽带宽内分配的小流中传输低容量调度信息或内容，并且这样的分配可以是动态的，以改变分配 基于相对高容量，高速和低容量的低速需求。 本发明以主要在与传输提供者连接的服务器计算机中的软件中实现。 该软件在传输链路的广播频带内安排分配的带宽，并格式化用于在其中逻辑设计的子分配信道内传输的高容量数据。 多个分布式家庭娱乐设备站点的客户端软件可以预留磁盘上的容量并接收这样的传输数据以便存储在其上，可选地执行可重新配置客户端软件的下载的执行脚本，以便在客户端站点提供新的选项和功能以进行操作增强 以及视频节目或内容增强功能。 在多个分布式家庭娱乐设备站点的客户端软件预留磁盘上的容量并且接收这样的广播数据用于存储在其上，可选地执行可重新配置客户端软件的下载的执行脚本。

公开(公告)号：US5997103A

公开(公告)日：1999-12-07

申请号：US034107

申请日：1998-03-03

申请人： Mark Wagner

发明人： Mark Wagner

IPC分类号： B60B27/00 ,  F16C19/54 ,  F16C35/06 ,  F16C41/04 ,  B60B37/10

CPC分类号： F16C19/56 ,  B60B27/001 ,  B60B27/0073 ,  B60B27/02 ,  F16C19/548 ,  F16C35/061 ,  F16C41/045 ,  F16C2326/02 ,  Y10T29/49535 ,  Y10T29/49696

摘要： A wheel hub has inboard and outboard bearings separated by a spacer. A temporary alignment member is located against an inner surface of the spacer and an inner surface of the outboard bearing thus aligning the inner surfaces of the spacer and the bearing. A cap is located on an outboard surface of the hub to hold the outboard bearing in place. The cap includes a hole large enough for the alignment member to pass through. The hub may be easily mounted onto an axle merely by locating an inboard opening of the hub over the axle and sliding the hub onto the axle. As the axle enters the hub it eventually contacts the alignment member and begins moving the alignment member outward through the hole in the cap. As the alignment member moves outward the axle refills the space immediately vacated by the alignment member. The hub is then further pushed onto the axle so that the alignment member falls away and the axle protrudes through the hole in the cap. The cap is then removed and a nut is installed on the axle and tightened.

摘要翻译： 轮毂具有由间隔件隔开的内侧和外侧轴承。 临时对准构件抵靠间隔件的内表面和外侧轴承的内表面定位，从而对准间隔件和轴承的内表面。 盖子位于轮毂的外侧表面上，以将外侧轴承保持在适当位置。 盖子包括足够大的孔，以使对准构件通过。 只有通过将轮毂的内侧开口定位在轴上并将轮毂滑动到轴上，轮毂可以容易地安装到轴上。 当轴进入轮毂时，其最终接触对准构件，并开始通过盖中的孔向外移动对准构件。 当对准构件向外移动时，轴重新填充由对准构件立即空出的空间。 然后将轮毂进一步推到轴上，使得对准构件脱落并且轴突通过盖中的孔突出。 然后取下盖子，并将一个螺母安装在轴上并拧紧。

公开(公告)号：US4504857A

公开(公告)日：1985-03-12

申请号：US415176

申请日：1982-09-07

申请人： Clyde Miller ,  Joe Hunt ,  Mark Wagner

发明人： Clyde Miller ,  Joe Hunt ,  Mark Wagner

IPC分类号： G01C19/32 ,  G01C19/38 ,  H04N7/18

CPC分类号： G01C19/32 ,  G01C19/38

摘要： A gyro compass positioning apparatus is disclosed for use in lowering and accurately orienting a first object such as an underwater pipeline junction manifold to the floor of a body of water. The gyro compass positioning apparatus comprises a north seeking gyro compass in combination with a closed circuit television camera, all enclosed in a pressure housing. The closed circuit television camera is mounted above the north seeking gyro compass such that it is continuously viewing the orientation of the needle of the compass and displaying this orientation on a television monitor which is located on the surface ship. The first object or underwater pipeline junction manifold is attached to the bottom of the pressure housing by a mounting bracket and in predetermined orientation thereto. Means may be provided for supplying power to the north seeking gyro compass and to the closed circuit television camera and monitor through an umbilical cable as the apparatus and first object are lowered to a predetermined position on the floor of the body of water, where a second object, such as a pipeline is located.

摘要翻译： 公开了一种陀螺仪罗盘定位装置，用于将诸如水下管道接合歧管的第一物体降低并精确地定向到水体的地板。 陀螺仪罗盘定位装置包括与闭路电视摄像机组合的北寻道陀螺罗盘，全部包围在压力壳体中。 闭路电视摄像机安装在寻北陀螺罗盘上方，使得它连续地观察指南针的方向并将其显示在位于表面船上的电视监视器上。 第一物体或水下管道接合歧管通过安装支架并且以预定方向附接到压力壳体的底部。 可以提供用于向北寻道陀螺仪罗盘和闭路电视摄像机供电以及通过脐带缆监视器的装置，因为该装置和第一物体下降到水体地板上的预定位置，其中第二 对象，如管道位于。