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公开(公告)号：US20050161819A1
公开(公告)日：2005-07-28
申请号：US10762905
申请日：2004-01-22
申请人： James DeYoung , James McClain , Stephen Gross , Doug Taylor , Mark Wagner , David Brainard
发明人： James DeYoung , James McClain , Stephen Gross , Doug Taylor , Mark Wagner , David Brainard
IPC分类号： H01L21/288 , H01L21/3205 , H01L21/4763 , H01L21/768 , H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： H01L21/32051 , H01L21/283 , H01L21/288 , H01L21/76814 , H01L21/76843 , H01L21/76871
摘要： A method of treating a dielectric surface portion of a semiconductor substrate, comprising the steps of: (a) providing a semiconductor substrate having a dielectric surface portion; and then (b) treating said dielectric surface portion with a coating reagent, the coating reagent comprising a reactive group coupled to a coordinating group, with the coordinating group having a metal bound thereto, so that the metal is deposited on the dielectric surface portion to produce a surface portion treated with a metal.
摘要翻译： 一种处理半导体衬底的电介质表面部分的方法，包括以下步骤：（a）提供具有电介质表面部分的半导体衬底; 然后（b）用涂层试剂处理所述电介质表面部分，所述涂覆试剂包含与配位基团偶联的反应基团，所述配位基团与其结合金属，使得金属沉积在电介质表面部分上 产生用金属处理的表面部分。
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公开(公告)号：US20060035014A1
公开(公告)日：2006-02-16
申请号：US11261299
申请日：2005-10-28
申请人： James DeYoung , James McClain , Stephen Gross , Doug Taylor , Mark Wagner , David Brainard
发明人： James DeYoung , James McClain , Stephen Gross , Doug Taylor , Mark Wagner , David Brainard
IPC分类号： B05D5/12
CPC分类号： H01L21/283 , B05D1/18 , B05D2401/90 , H01L21/28556 , H01L21/288 , H01L21/67028 , H01L28/65
摘要： A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.
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3.发明申请公开(公告)号：US20060112738A1
公开(公告)日：2006-06-01
申请号：US11253330
申请日：2005-10-19
申请人： Steven Worm , James DeYoung , James McClain , David Brainard
发明人： Steven Worm , James DeYoung , James McClain , David Brainard
IPC分类号： D06F39/08
CPC分类号： D06L1/08 , A23L27/11 , D06F43/00 , D06F43/081 , F17C1/00 , F17C1/005 , F17C5/00 , F17C7/00 , F17C2201/0109 , F17C2201/0171 , F17C2201/032 , F17C2201/035 , F17C2201/056 , F17C2203/0643 , F17C2205/0347 , F17C2205/0397 , F17C2221/013 , F17C2221/014 , F17C2221/017 , F17C2221/033 , F17C2221/035 , F17C2227/0157 , F17C2227/0383 , F17C2250/0408 , F17C2265/012 , F17C2270/02 , F17C2270/0518
摘要： A method of utilizing a divided pressure vessel in a processing system employing a carbon dioxide based solvent includes transferring a first carbon dioxide based treating solution from a first liquid chamber in a divided pressure vessel having a plurality of liquid chambers to a processing vessel, returning the first treating solution from the processing vessel to the divided pressure vessel, transferring a second carbon dioxide based treating solution having a composition different from the first treating solution from a second liquid chamber in the divided pressure vessel to a processing vessel, and returning the second treating solution from the processing vessel to the divided pressure vessel. A divided pressure vessel may allow multiple solvent baths each having a different chemical composition to be stored and/or processed in a single pressure vessel while maintaining the different chemical compositions of the multiple solvent baths. Thus, such divided pressure vessels may provide the improved operational efficiency of a carbon dioxide based system having multiple solvent baths while decreasing the capital costs that may be associated with such systems.
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公开(公告)号：US20130006351A1
公开(公告)日：2013-01-03
申请号：US13605904
申请日：2012-09-06
申请人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
发明人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
IPC分类号： A61F2/06 , A61P3/10 , A61P29/00 , A61P9/12 , A61P1/04 , A61K38/02 , A61K38/43 , A61P25/16 , A61K31/551 , A61K31/436 , B32B5/00 , B32B27/30 , B32B27/32 , B32B27/40 , B32B27/36 , B32B27/00 , A61K9/00
CPC分类号： A61F2/82 , A61F2210/0076 , A61F2250/0067 , A61L31/10 , A61L31/16 , A61L2300/416 , A61L2300/426 , A61L2300/606 , A61L2300/63 , A61L2420/08 , Y10T428/264 , Y10T428/265 , Y10T428/31507 , Y10T428/31544 , Y10T428/31551 , Y10T428/31663 , Y10T428/31786 , Y10T428/31935 , Y10T428/31938
摘要： A method for depositing a coating comprising a polymer and pharmaceutical agent on a substrate, comprising the following steps: discharging at least one pharmaceutical agent in a therapeutically desirable morphology in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or pharmaceutical particles onto said substrate, wherein an electrical potential is maintained between the substrate and the pharmaceutical and/or polymer particles, thereby forming said coating; and sintering said coating under conditions that do not substantially modify the morphology of said pharmaceutical agent.
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公开(公告)号：US08298565B2
公开(公告)日：2012-10-30
申请号：US11995687
申请日：2006-07-14
申请人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
发明人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
IPC分类号： A61F2/00 , A61K31/436 , B05D7/02
CPC分类号： A61F2/82 , A61F2210/0076 , A61F2250/0067 , A61L31/10 , A61L31/16 , A61L2300/416 , A61L2300/426 , A61L2300/606 , A61L2300/63 , A61L2420/08 , Y10T428/264 , Y10T428/265 , Y10T428/31507 , Y10T428/31544 , Y10T428/31551 , Y10T428/31663 , Y10T428/31786 , Y10T428/31935 , Y10T428/31938
摘要： A method for depositing a coating comprising a polymer and pharmaceutical agent on a substrate, comprising the following steps: discharging at least one pharmaceutical agent in a therapeutically desirable morphology in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or pharmaceutical particles onto the substrate, wherein an electrical potential is maintained between the substrate and the pharmaceutical and/or polymer particles, thereby forming the coating; and sintering the coating under conditions that do not substantially modify the morphology of the pharmaceutical agent.
摘要翻译： 一种用于在基底上沉积包含聚合物和药剂的涂层的方法，包括以下步骤：通过第一孔排出至少一种治疗上需要的干粉形式的药剂; 通过第二孔排出至少一种干粉形式的聚合物; 将聚合物和/或药物颗粒沉积到基底上，其中在基底和药物和/或聚合物颗粒之间保持电位，从而形成涂层; 并在不显着改变药剂形态的条件下烧结涂层。
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公开(公告)号：US06596093B2
公开(公告)日：2003-07-22
申请号：US09951259
申请日：2001-09-13
IPC分类号： B08B300
CPC分类号： B08B7/0021 , C23G5/00 , H01L21/02063 , Y10S134/902 , Y10S438/906
摘要： A method of cleaning and removing water, entrained solutes and particulate matter during a manufacturing process from a microelectronic device such as a resist-coated semiconductor substrate, a MEM's device, or an optoelectronic device comprising the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified (e.g., liquid or supercritical) carbon dioxide cleaning composition, the cleaning composition comprising carbon dioxide and, optionally but preferably, a cleaning adjunct; (c) immersing the surface portion in the densified carbon dioxide drying composition, and subjecting the densified carbon dioxide drying composition to cyclical phase modulation during at least a portion of the immersing step to thereby facilitating cleaning; and then (d) removing the cleaning composition from the surface portion. Process parameters are preferably controlled so that the drying composition is maintained as a homogeneous composition during the immersing step, the removing step, or both the immersing and removing step, without substantial deposition of the drying/cleaning adjunct or entrained solutes on the substrate.
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公开(公告)号：US08852625B2
公开(公告)日：2014-10-07
申请号：US12298459
申请日：2007-04-26
申请人： James DeYoung , Doug Taylor , Jim McClain , Clint Smoke , Mike Cole
发明人： James DeYoung , Doug Taylor , Jim McClain , Clint Smoke , Mike Cole
CPC分类号： A61L31/16 , A61F2/90 , A61F2210/0004 , A61F2250/0067 , A61L31/06 , A61L31/10 , A61L31/148 , A61L2300/20 , A61L2300/216 , A61L2300/236 , A61L2300/416 , A61L2300/42 , A61L2300/426 , A61L2300/602 , A61L2300/608 , A61L2300/61 , A61L2420/02 , A61L2420/06 , A61L2420/08
摘要： A method for depositing a coating comprising a polymer and at least two pharmaceutical agents on a substrate, comprising the following steps: providing a stent framework; depositing on said stent framework a first layer comprising a first pharmaceutical agent; depositing a second layer comprising a second pharmaceutical agent; Wherein said first and second pharmaceutical agents are selected from two different classes of pharmaceutical agents.
摘要翻译： 一种用于在基底上沉积包含聚合物和至少两种药剂的涂层的方法，包括以下步骤：提供支架框架; 在所述支架框架上沉积包含第一药剂的第一层; 沉积包含第二药剂的第二层; 其中所述第一和第二药剂选自两种不同类型的药剂。
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公开(公告)号：US08758429B2
公开(公告)日：2014-06-24
申请号：US13605904
申请日：2012-09-06
申请人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
发明人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
IPC分类号： A61F2/06
CPC分类号： A61F2/82 , A61F2210/0076 , A61F2250/0067 , A61L31/10 , A61L31/16 , A61L2300/416 , A61L2300/426 , A61L2300/606 , A61L2300/63 , A61L2420/08 , Y10T428/264 , Y10T428/265 , Y10T428/31507 , Y10T428/31544 , Y10T428/31551 , Y10T428/31663 , Y10T428/31786 , Y10T428/31935 , Y10T428/31938
摘要： A method for depositing a coating comprising a polymer and pharmaceutical agent on a substrate, comprising the following steps: discharging at least one pharmaceutical agent in a therapeutically desirable morphology in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or pharmaceutical particles onto said substrate, wherein an electrical potential is maintained between the substrate and the pharmaceutical and/or polymer particles, thereby forming said coating; and sintering said coating under conditions that do not substantially modify the morphology of said pharmaceutical agent.
摘要翻译： 一种用于在基底上沉积包含聚合物和药剂的涂层的方法，包括以下步骤：通过第一孔排出至少一种治疗上需要的干粉形式的药剂; 通过第二孔排出至少一种干粉形式的聚合物; 将所述聚合物和/或药物颗粒沉积到所述基底上，其中在所述基底和所述药物和/或聚合物颗粒之间保持电位，从而形成所述涂层; 并且在不显着改变所述药剂的形态的条件下烧结所述涂层。
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公开(公告)号：US20090123515A1
公开(公告)日：2009-05-14
申请号：US11995687
申请日：2006-07-14
申请人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
发明人： Doug Taylor , Jim McClain , Clint Smoke , Mike Cole , James DeYoung
IPC分类号： A61F2/00 , A61K31/436 , B05D7/02
CPC分类号： A61F2/82 , A61F2210/0076 , A61F2250/0067 , A61L31/10 , A61L31/16 , A61L2300/416 , A61L2300/426 , A61L2300/606 , A61L2300/63 , A61L2420/08 , Y10T428/264 , Y10T428/265 , Y10T428/31507 , Y10T428/31544 , Y10T428/31551 , Y10T428/31663 , Y10T428/31786 , Y10T428/31935 , Y10T428/31938
摘要： A method for depositing a coating comprising a polymer and pharmaceutical agent on a substrate, comprising the following steps: discharging at least one pharmaceutical agent in a therapeutically desirable morphology in dry powder form through a first orifice; discharging at least one polymer in dry powder form through a second orifice; depositing the polymer and/or pharmaceutical particles onto said substrate, wherein an electrical potential is maintained between the substrate and the pharmaceutical and/or polymer particles, thereby forming said coating; and sintering said coating under conditions that do not substantially modify the morphology of said pharmaceutical agent.
摘要翻译： 一种用于在基底上沉积包含聚合物和药剂的涂层的方法，包括以下步骤：通过第一孔排出至少一种治疗上需要的干粉形式的药剂; 通过第二孔排出至少一种干粉形式的聚合物; 将所述聚合物和/或药物颗粒沉积到所述基底上，其中在所述基底和所述药物和/或聚合物颗粒之间保持电位，从而形成所述涂层; 并且在基本上不改变所述药剂的形态的条件下烧结所述涂层。
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10.发明授权公开(公告)号：US06782900B2
公开(公告)日：2004-08-31
申请号：US09951353
申请日：2001-09-13
IPC分类号： B08B300
CPC分类号： C23G5/00 , B08B7/0021 , B81C1/00841 , B81C2201/117 , H01L21/02063 , H01L21/67051 , Y10S134/902
摘要： An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO2 fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO2 from the process fluid. The distilling system is operative to re-introduce the separated CO2 into the chamber or a further chamber.
摘要翻译： 用于清洁微电子衬底的装置包括压力室，包括流体连接到室的致密相CO 2的处理液的供应和蒸馏系统。 蒸馏系统包括仍然流体连接到室并且用于将CO 2与工艺流体分离。 蒸馏系统可操作以将分离的CO 2重新引入室或另外的室中。
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