公开(公告)号：US20080121344A1

公开(公告)日：2008-05-29

申请号：US12023874

申请日：2008-01-31

申请人： Tooru Aramaki ,  Tsunehiko Tsubone ,  Ryujiro Udo ,  Motohiko Yoshigai ,  Takashi Fujii

发明人： Tooru Aramaki ,  Tsunehiko Tsubone ,  Ryujiro Udo ,  Motohiko Yoshigai ,  Takashi Fujii

IPC分类号： C23F1/00 ,  C23C16/513

CPC分类号： C23C16/4581 ,  C23C16/4586 ,  C23C16/46 ,  H01J2237/2001 ,  H01L21/67109 ,  H01L21/6719

摘要： A plasma processing method for processing a sample by reducing a pressure within a processing chamber, including mounting the sample on a sample holder disposed in the processing chamber, and processing using a plasma generated in the processing chamber above the sample holder while supplying a gas for heat transfer to a space between a surface of the sample holder having the sample mounted thereon and a rear surface of the sample. The sample holder has a plurality of substantially ring-shaped depressed portions at the surface where the sample is mounted. A pressure in a space between the depressed portions arranged at a central portion of the sample holder with respect to outer circumferential portion and the sample is set to be lower than a pressure in a space between the depressed portions at the outer circumferential portion and the sample.

摘要翻译： 一种用于通过减小处理室内的压力来处理样品的等离子体处理方法，包括将样品安装在设置在处理室中的样本保持器上，以及使用在样品架上方的处理室中产生的等离子体进行处理，同时为 热传递到安装有样品的样品保持器的表面与样品的后表面之间的空间。 样品保持器在样品安装的表面具有多个基本环形的凹陷部分。 设置在样品保持架的中心部分相对于外周部分的凹陷部分和样品之间的空间中的压力被设定为低于外周部分的凹陷部分和样品之间的空间中的压力 。

公开(公告)号：US07357118B2

公开(公告)日：2008-04-15

申请号：US11395347

申请日：2006-03-31

申请人： Takashi Fujii ,  Takeshi Nagatsu

发明人： Takashi Fujii ,  Takeshi Nagatsu

IPC分类号： F02D11/04 ,  F02M51/00

CPC分类号： F02D11/06 ,  F02D9/107

摘要： A throttle valve comprises an intake passage. A throttle shaft extends in a generally vertical direction. The lower end of the throttle shaft passes through the throttle valve and projects downward. A throttle lever is connected to the downwardly projecting lower end. The throttle lever is joined to a throttle wire. A fuel injector attachment seat is positioned on one side of the throttle shaft and an intake pressure sensor attachment seat is provided on the other side of the throttle shaft when viewed in the direction along the intake passage.

摘要翻译： 节流阀包括进气通道。 节流轴在大致垂直的方向上延伸。 节气门轴的下端通过节流阀向下突出。 节流杆连接到向下突出的下端。 节流杆连接到节流丝。 燃料喷射器安装座位于节气门轴的一侧，并且当沿着进气通道的方向观察时，在节气门轴的另一侧设有进气压力传感器安装座。

公开(公告)号：US20070264063A1

公开(公告)日：2007-11-15

申请号：US11790887

申请日：2007-04-27

申请人： Motoya Sano ,  Hideki Tobinaga ,  Takashi Fujii ,  Yasuo Kosuga ,  Shinya Kitaoka ,  Tatsuaki Nagano ,  Norio Kimura

发明人： Motoya Sano ,  Hideki Tobinaga ,  Takashi Fujii ,  Yasuo Kosuga ,  Shinya Kitaoka ,  Tatsuaki Nagano ,  Norio Kimura

IPC分类号： G03G15/00

CPC分类号： G03G15/602

摘要： An automatic document feeder, for transferring a document through a scanning position three times, includes: a first transfer mechanism to reverse a given document via a reversing path, and transfer the same to a scanning position; a second transfer mechanism to transfer the given document from the scanning position to one of a switchback path and a document discharging part; a switchback mechanism to transfer the given document to a lay-by on the switchback path, and then transfer the given document towards the reversing path via a re-entry path; and a control unit to control the mechanisms so that a second original document passes through the scanning position a first time before a first original document passes through the scanning position a third time, and to pause travel of the second original document at the lay-by as the first original document is passed through the scanning position a third time.

摘要翻译： 一种用于通过扫描位置传送文件三次的自动文件馈送器包括：第一传送机构，用于经由反转路径反转给定文档，并将其传送到扫描位置; 第二传送机构，用于将给定文档从扫描位置传送到转向路径和文档排放部分之一; 转发机构，用于将给定文档传送到转回路径上的停靠位，然后经由重新进入路径将给定文档转发到反转路径; 以及控制单元，用于控制机构，使得第二原稿在第一次原稿通过扫描位置之前第一次经过扫描位置，并且暂停第二原稿在平铺处的行进 因为第一个原始文档第三次通过扫描位置。

公开(公告)号：US20070044716A1

公开(公告)日：2007-03-01

申请号：US11508187

申请日：2006-08-23

申请人： Tsutomu Tetsuka ,  Toshio Masuda ,  Naoshi Itabashi ,  Masanori Kadotani ,  Takashi Fujii

发明人： Tsutomu Tetsuka ,  Toshio Masuda ,  Naoshi Itabashi ,  Masanori Kadotani ,  Takashi Fujii

IPC分类号： C23C16/00

CPC分类号： H01J37/32082 ,  C23C16/4401 ,  C23C16/45565 ,  C23C16/505 ,  H01J37/3244 ,  H01J37/32477 ,  H01J37/32495 ,  H01J37/32504 ,  H01J37/32559

摘要： The invention provides a plasma processing apparatus aimed at suppressing the corrosion caused by reactive gas and heavy-metal contamination caused by plasma damage of components constituting the high-frequency electrode and gas supply unit. The plasma processing apparatus comprises a processing chamber 1 for subjecting a processing substrate 4 to plasma processing, gas supply means 17, 16 and 11 for feeding gas to the processing chamber 1, and an antenna electrode 10 for supplying high-frequency radiation for discharging the gas to generate plasma, wherein the gas supply means includes a gas shower plate 11 having gas discharge holes on the surface exposed to plasma, and a portion of or a whole surface of the conductor 10 exposed to gas constituting the antenna-electrode side of the gas supply means is subjected to ceramic spraying containing no heavy metal to form a protecting film 12.

摘要翻译： 本发明提供一种等离子体处理装置，旨在抑制由构成高频电极和气体供应单元的部件的等离子体损伤引起的反应性气体和重金属污染引起的腐蚀。 等离子体处理装置包括用于对处理基板4进行等离子体处理的处理室1，用于将气体供给到处理室1的气体供给装置17,16和11以及用于提供高频辐射的天线电极10 气体产生等离子体，其中气体供给装置包括在暴露于等离子体的表面上具有气体排放孔的气体喷淋板11和暴露于构成天线电极侧的气体的导体10的一部分或整个表面 气体供给装置经受不含重金属的陶瓷喷涂以形成保护膜12。

公开(公告)号：US07118147B2

公开(公告)日：2006-10-10

申请号：US10965204

申请日：2004-10-15

申请人： Takashi Fujii

发明人： Takashi Fujii

IPC分类号： B25J15/04 ,  B25J9/10

CPC分类号： B25J15/0253

摘要： In a robot hand according to the present invention, a first-type grasping claw driven by a servo motor on a hand base and a second-type grasping claw having no actuator are used with the grasping claws mounted on each holding unit. The second-type grasping claw is movable in a direction perpendicular to a moving direction of the first-type grasping claw. The robot is operated so that an external force is applied to the grasping claw by bringing the grasping claw into contact with a contact surface of a stationary stand member, thereby to change a position of the grasping claw relative to the hand base and that grasping claw is locked at that position by a brake mechanism. Each grasping claw is adapted to be able to be mounted or dismounted on or from the holding unit using a pull bolt and a retaining mechanism, and can be automatically changed by the robot operation. By attaching the pull bolt to the workpiece in advance, the retaining mechanism also can be used for holding the workpiece.

摘要翻译： 在根据本发明的机器人手中，使用由手持基座上的伺服电动机驱动的第一类型抓取爪和不具有致动器的第二类型抓取爪，其中夹持爪安装在每个保持单元上。 第二种抓取爪可以在与第一类型抓取爪的移动方向垂直的方向上移动。 操作机器人，使得抓握爪与固定支架的接触表面接触而将外力施加到抓取爪，从而改变抓爪相对于手基座的位置，并且抓爪 通过制动机构锁定在该位置。 每个抓取爪适于能够使用拉螺栓和保持机构从保持单元安装或拆卸，并且可以通过机器人操作自动地改变。 通过将拉螺栓预先安装到工件上，保持机构也可以用于保持工件。

公开(公告)号：US20060132798A1

公开(公告)日：2006-06-22

申请号：US11340559

申请日：2006-01-27

申请人： Tatehito Usui ,  Takashi Fujii ,  Motohiko Yoshigai ,  Tetsunori Kaji ,  Hideyuki Yamamoto

发明人： Tatehito Usui ,  Takashi Fujii ,  Motohiko Yoshigai ,  Tetsunori Kaji ,  Hideyuki Yamamoto

IPC分类号： G01B11/02

CPC分类号： H01J37/32963 ,  G01B11/0675 ,  H01L22/26

摘要： Standard patterns of differential values of interference light that correspond to a predetermined step height of the first material being processed and standard patterns of differential values of interference light that correspond to a predetermined remaining mask layer thickness of the material are set. These standard patterns use wavelengths as parameters. Then, the intensities of interference light of multiple wavelengths are measured for a second material that has the same structure as the first material. Actual patterns with wavelength as parameter are determined from differential values of the measured interference light intensities. Based on the standard patterns and the actual patterns of the differential values, the step height and the remaining mask layer thickness of the second material are determined.

摘要翻译： 对应于正在处理的第一材料的预定台阶高度的干涉光的差分值的标准图案和对应于材料的预定剩余掩模层厚度的干涉光的差分值的标准图案被设置。 这些标准模式使用波长作为参数。 然后，测量具有与第一材料相同结构的第二材料的多个波长的干涉光的强度。 具有波长作为参数的实际图案由所测量的干涉光强度的差分值确定。 基于标准图案和差分值的实际图案，确定第二材料的台阶高度和剩余掩模层厚度。

公开(公告)号：US07009715B2

公开(公告)日：2006-03-07

申请号：US10978412

申请日：2004-11-02

申请人： Tatehito Usui ,  Takashi Fujii ,  Motohiko Yoshigai ,  Tetsunori Kaji ,  Hideyuki Yamamoto

发明人： Tatehito Usui ,  Takashi Fujii ,  Motohiko Yoshigai ,  Tetsunori Kaji ,  Hideyuki Yamamoto

IPC分类号： G01B9/02

CPC分类号： H01J37/32963 ,  G01B11/0675 ,  H01L22/26

摘要： Standard patterns of differential values of interference light that correspond to a predetermined step height of the first material being processed and standard patterns of differential values of interference light that correspond to a predetermined remaining mask layer thickness of the material are set. These standard patterns use wavelengths as parameters. Then, the intensities of interference light of multiple wavelengths are measured for a second material that has the same structure as the first material. Actual patterns with wavelength as parameter are determined from differential values of the measured interference light intensities. Based on the standard patterns and the actual patterns of the differential values, the step height and the remaining mask layer thickness of the second material are determined.

公开(公告)号：US06991513B2

公开(公告)日：2006-01-31

申请号：US10311207

申请日：2001-06-15

申请人： Kazushige Tohta ,  Hiroshi Shindo ,  Akio Ogawa ,  Osamu Fukuroi ,  Takashi Fujii

发明人： Kazushige Tohta ,  Hiroshi Shindo ,  Akio Ogawa ,  Osamu Fukuroi ,  Takashi Fujii

IPC分类号： B24B49/00

CPC分类号： B24B37/048 ,  B24B19/26 ,  B24B37/00 ,  B24B41/061 ,  G11B5/1871 ,  G11B5/3116 ,  G11B5/3163

摘要： The present invention relates to a lapping apparatus and a lapping method that may effect further machining in response to each element on a ceramic bar to the ceramic bar that is largely locally lapped and may reduce a cost needed for machining without any jig for holding the ceramic bar. The ceramic bar is held by a surface of an elastic member made of rubber or the like. A plurality of actuators are arranged on a back surface of this elastic member. When the ceramic bar is depressed against the lapping surface, a specific portion of the ceramic bar is deformed or strongly deformed through the elastic member by these actuators to thereby make it possible to perform the lapping in response to each element.

摘要翻译： 研磨装置和研磨方法本发明涉及一种研磨装置和研磨方法，其可以响应于陶瓷棒上的每个元件对陶瓷棒进行进一步加工，所述陶瓷棒在很大程度上局部重叠，并且可以降低加工所需的成本，而不需要用于保持陶瓷的任何夹具 酒吧。 陶瓷棒由橡胶等制成的弹性部件的表面保持。 多个致动器布置在该弹性构件的后表面上。 当陶瓷条被压靠在研磨表面上时，通过这些致动器，陶瓷棒的特定部分通过弹性构件变形或强烈变形，从而可以响应于每个元件进行研磨。

公开(公告)号：US06971469B2

公开(公告)日：2005-12-06

申请号：US10377589

申请日：2003-02-28

申请人： Hideya Umemoto ,  Takeshi Komorida ,  Shoso Ishimori ,  Takashi Fujii ,  Koji Fujiwara ,  Hiroyuki Tada

发明人： Hideya Umemoto ,  Takeshi Komorida ,  Shoso Ishimori ,  Takashi Fujii ,  Koji Fujiwara ,  Hiroyuki Tada

IPC分类号： A01D34/64 ,  A01D69/00 ,  B60K17/10 ,  B60T1/06 ,  B62D11/04 ,  B62D11/12 ,  F16D55/40 ,  B60K7/00

CPC分类号： B60K17/105 ,  A01D69/00 ,  B60T1/062 ,  B62D11/04 ,  B62D11/12

摘要： A self-propelled working vehicle comprises a front wheel unit, a rear wheel unit including a left rear wheel and a right rear wheel, and a drive transmission apparatus for transmitting drive from an engine to the rear wheel unit. The drive transmission apparatus includes a first drive transmission mechanism for transmitting the drive to the left rear wheel and a second drive transmission mechanism for transmitting the drive to the right rear wheel. The first transmission mechanism is arranged at the left side of the vehicle body, while the second transmission mechanism is arranged at the right side of the vehicle body. A brake assembly is arranged between the first drive transmission mechanism and the second drive transmission mechanism for acting on an output shaft of a first transmission unit and an output shaft of a second transmission unit. The first and second transmission units act as first and second change speed devices, respectively, which are operable independently of each other.

摘要翻译： 自行车作业车辆包括前轮单元，包括左后轮和右后轮的后轮单元，以及用于将发动机从发动机传递到后轮单元的驱动传动装置。 驱动传递装置包括用于将驱动传递到左后轮的第一驱动传递机构和用于将驱动传递到右后轮的第二驱动传递机构。 第一传动机构布置在车身的左侧，而第二传动机构布置在车体的右侧。 制动组件布置在第一驱动传动机构和第二驱动传动机构之间，用于作用在第一传动单元的输出轴和第二传动单元的输出轴上。 第一和第二传输单元分别用作可彼此独立操作的第一和第二变速装置。

公开(公告)号：US06967013B2

公开(公告)日：2005-11-22

申请号：US10061218

申请日：2002-02-04

申请人： Masao Someya ,  Takashi Fujii ,  Masukazu Hirata ,  Shigeo Horiuchi

发明人： Masao Someya ,  Takashi Fujii ,  Masukazu Hirata ,  Shigeo Horiuchi

IPC分类号： B01J23/75 ,  B01J23/755 ,  B01J35/02 ,  B01J37/02 ,  B01J37/03 ,  C01B31/02 ,  C30B29/66 ,  D01F9/127 ,  D01F9/12

CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/08 ,  D01F9/127 ,  Y10S977/842

摘要： A process for producing aligned carbon nanotube films, wherein a carbon compound is decomposed using a substrate that is coated with an element having no catalytic ability by itself and which loads a metallic element having catalytic ability or a compound thereof, thereby forming a film of fine carbon nanotubes on the surface of the substrate which are aligned in a direction perpendicular to the substrate.

摘要翻译： 一种制造排列碳纳米管膜的方法，其中使用涂覆有自身不具有催化能力的元素并负载具有催化能力的金属元素或其化合物的基底将碳化合物分解，由此形成精细的膜 在与衬底垂直的方向上排列的衬底表面上的碳纳米管。